Vacuum sealing interface device

Abstract

The utility model relates to a vacuum sealing interface device which comprises a vacuum cavity, a metal sealing ring, a sealing plate, a mounting ring and a tool, the metal sealing ring is arranged on a step interface of the vacuum cavity, the mounting ring is arranged around the sealing plate, the vacuum cavity and the tool are communicated in an air exhaust state so as to vacuumize the vacuum cavity through the tool, and the tool is arranged on the sealing plate. The sealing plate is placed on the metal sealing ring through a tool in the maintaining state and fixedly installed on the vacuum cavity through the installation ring so as to maintain the vacuum sealing state. The vacuum sealing connector device is convenient, fast, attractive, small in sealing space and more attractive; a vacuum valve is prevented from being additionally arranged, and the tool can be repeatedly used; and the sealing ring is in static sealing, so that the damage of ultrahigh vacuum is avoided.

Description

Technical Field

[0001] The utility model relates to vacuum sealing, and more particularly to a vacuum sealing interface device. Background Art

[0002] Conventional vacuum valves are used to control the flow of gas into and out of a vacuum chamber to achieve and maintain a vacuum. These valves can include gate valves, inline valves, and angle valves. After evacuation, they maintain the vacuum state within the chamber. Because conventional vacuum valves typically protrude from the chamber's interface, they occupy a significant amount of space. Furthermore, conventional vacuum valves are relatively expensive. Utility Model Content

[0003] In order to solve the problems of the known vacuum valves in the prior art occupying a large space and having high costs, the utility model provides a vacuum sealing interface device.

[0004] According to the vacuum sealing interface device of the present invention, it includes a vacuum cavity, a metal sealing ring, a sealing plate, a mounting ring and a tooling, wherein the metal sealing ring is placed on the step interface of the vacuum cavity, the mounting ring is arranged around the sealing plate, the vacuum cavity and the tooling are connected in the exhaust state so as to evacuate the vacuum cavity through the tooling, and the sealing plate is placed on the metal sealing ring through the tooling in the maintenance state and fixedly installed on the vacuum cavity through the mounting ring to maintain the vacuum sealing state. It should be understood that the vacuum sealing interface device of the present invention is particularly suitable for ultra-high vacuum working environment. The pressure range of ultra-high vacuum here is between 10 -6 ~10 -10 Between Pa.

[0005] In a preferred embodiment, the vacuum sealing interface device also includes a first sealing ring structure and a second sealing ring structure, wherein the first sealing ring structure is arranged between the vacuum chamber and the sealing plate to provide sealing in a maintaining state, and the second sealing ring structure is arranged between the vacuum chamber and the tooling to provide sealing in an evacuation state.

[0006] In a preferred embodiment, the step interface of the vacuum chamber includes a first surface, a second surface and a third surface, wherein the first surface and the third surface are located at different heights and radial positions, the second surface vertically connects the first surface and the third surface between the first surface and the third surface, the first sealing ring structure is arranged between the outer surface of the sealing plate and the second surface, and the mounting ring is installed on the third surface by fasteners in a maintaining state to fasten the sealing plate to the vacuum chamber.

[0007] In a preferred embodiment, the tooling includes a shell, a bellows and a handle, wherein the shell is detachably mounted on the vacuum chamber, one end of the bellows is fixedly connected to the interior of the shell, the sealing plate is fixed to the other end of the bellows, the mounting ring is clamped between the sealing plate and the bellows, and the handle is movably mounted on the shell and connected to the bellows so that the length of the bellows can be changed by the handle.

[0008] In a preferred embodiment, the housing is connected to a vacuum pump via a vacuum port.

[0009] In a preferred embodiment, the second sealing ring structure is disposed between the inner surface of the housing and the outer surface of the vacuum chamber.

[0010] In a preferred embodiment, the bellows has an end plate, and the end plate and the sealing plate are detachably connected.

[0011] In a preferred embodiment, the housing has a guide tube through which the handle extends into the bellows and abuts against the end plate to change the length of the bellows.

[0012] In a preferred embodiment, the catheter has internal threads and the handle has external threads that mate with the catheter.

[0013] In a preferred embodiment, the metal sealing ring is a copper ring.

[0014] According to the vacuum sealing interface device of the present invention, the sealing between the sealing plate and the vacuum chamber is achieved by all-metal sealing, that is, a metal sealing ring, which is convenient, beautiful, and takes up little space for sealing; it is cheap, avoids the need to install a vacuum valve, and the tooling can be reused; the sealing ring is a static seal, which avoids the destruction of ultra-high vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the use status of a vacuum sealing interface device according to a preferred embodiment of the present utility model.

[0016] Figure 2 yes Figure 1 Schematic diagram of the partial structure of the vacuum sealing interface device. DETAILED DESCRIPTION

[0017] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0018] like Figure 1As shown, a vacuum sealing interface device according to a preferred embodiment of the present invention includes a vacuum chamber 1, a metal sealing ring 2, a sealing plate 3, a mounting ring 4, and a tool 5. The metal sealing ring 2 is placed on the stepped interface of the vacuum chamber 1, and the mounting ring 4 is arranged around the sealing plate 3. The vacuum chamber 1 and the tool 5 are connected in the exhaust state so that the vacuum chamber 1 can be evacuated through the tool 5. In the maintenance state, the sealing plate 3 is placed on the metal sealing ring 2 through the tool 5 and fixedly mounted on the vacuum chamber 1 through the mounting ring 4 to maintain the vacuum sealing state. Thereafter, the tool 5 can be removed, leaving only the sealing plate 3, which takes up little space and abandons the traditional bulky vacuum valve, making it convenient and beautiful. Moreover, the tool 5 can be reused, greatly reducing costs.

[0019] In addition, the vacuum sealing interface device according to this embodiment also includes a first sealing ring structure 6 and a second sealing ring structure 7, wherein the first sealing ring structure 6 is arranged between the vacuum chamber 1 and the sealing plate 3 to provide sealing in the maintenance state, and the second sealing ring structure 7 is arranged between the vacuum chamber 1 and the tooling 5 to provide sealing in the exhaust state.

[0020] like Figure 1 As shown, the step interface of the vacuum chamber 1 includes a first surface 11, a second surface 12 and a third surface 13, wherein the first surface 11 and the third surface 13 are located at different heights and radial positions, and the second surface 12 vertically connects the first surface 11 and the third surface 13 between the first surface 11 and the third surface 13.

[0021] In this embodiment, first surface 11 has a first cutting edge, and metal sealing ring 2 is placed on the first cutting edge of first surface 11. Sealing plate 3 has a second cutting edge, and sealing plate 3 is placed on metal sealing ring 2 via the second cutting edge. Thus, metal sealing ring 2 provides a full metal seal between vacuum chamber 1 and sealing plate 3, meeting high-radiation, high-temperature, and ultra-high vacuum sealing requirements. In this embodiment, metal sealing ring 2 is a copper ring.

[0022] In this embodiment, the first sealing ring structure 6 is disposed between the outer surface of the sealing plate 3 and the second surface 12 .

[0023] In this embodiment, the first sealing ring structure 6 is a rubber O-ring.

[0024] In this embodiment, the mounting ring 4 is mounted on the third surface 13 by fasteners (such as screws) to fasten the sealing plate 3 to the vacuum chamber 1 .

[0025] like Figure 1 and Figure 2As shown, the tooling 5 includes a shell 51, a bellows 52 and a handle 53, wherein the shell 51 is detachably mounted on the vacuum chamber 1, one end of the bellows 52 is fixedly connected to the inside of the shell 51, the sealing plate 3 is fixed to the other end of the bellows 52, the mounting ring 4 is clamped between the sealing plate 3 and the bellows 52, and the handle 53 is movably mounted on the shell 51 and connected to the bellows 52 so as to change the length of the bellows 52 through the handle 53.

[0026] In this embodiment, the housing 51 has an exhaust port 51a that can be connected to a vacuum pump. In the exhaust state, the housing 51 communicates with the vacuum chamber 1. The bellows 52 is relatively short, and vacuum is applied to the vacuum chamber 1 through the exhaust port 51a. After evacuation, the handle 3 is used to extend the bellows 52, allowing the sealing plate 3 to be inserted into the stepped interface of the vacuum chamber 1 to maintain the vacuum state.

[0027] In this embodiment, the second sealing ring structure 7 is disposed between the inner surface of the housing 51 and the outer surface of the vacuum chamber 1 .

[0028] In this embodiment, the second sealing ring structure 7 is a rubber O-ring to meet aesthetic requirements. It should be understood that the second sealing ring structure 7 can also be a quick-connect sealing structure such as KF.

[0029] In this embodiment, the length of the bellows 52 in the evacuation state is half of its length in the maintenance state. It should be understood that this length is only an example and not a limitation.

[0030] In this embodiment, the housing 51 further has an inspection port 51 b.

[0031] In this embodiment, the top end of the bellows 52 is fixed to the bottom surface of the top wall of the housing 51 by welding.

[0032] In this embodiment, the bottom end of the bellows 52 has an end plate 52a. A threaded post extends downward from the bottom of the end plate 52a. The top of the sealing plate 3 has a threaded hole. The threaded post and the threaded hole cooperate to achieve a detachable connection between the sealing plate 3 and the bellows 52. After the sealing plate 3 is inserted into the stepped interface of the vacuum chamber 1, the sealing plate 3 can be removed by rotating the fixture 5.

[0033] In this embodiment, the top of the shell 51 has a guide tube 51c, and the handle 53 passes through the guide tube 51c to extend into the interior of the bellows 52 under the guidance of the guide tube 51c and abut against the top surface of the end plate 52a to change the length of the bellows 52 as needed.

[0034] In an embodiment, the catheter 51 c has an internal thread, and the handle 53 has an external thread, and the lifting and lowering are achieved by rotating the handle 53 .

[0035] According to the vacuum sealing interface device of the present invention, the metal sealing ring 2 is pressed by the sealing plate 3 to achieve full metal sealing, which meets the ultra-high vacuum requirements. The axial movement sealing method of the bellows 52 can avoid the risk of air leakage caused by the O-ring of the traditional vacuum valve during axial movement.

[0036] The working process of the vacuum sealing interface device according to the present invention includes: placing the metal sealing ring 2 on the blade of the first surface 11 of the step interface of the vacuum chamber 1 and locking it in position; locking the tooling 5 to the step interface of the vacuum chamber 1 through the second sealing ring structure 7, turning on the vacuum pump, and vacuum extraction of the vacuum chamber 1 through the exhaust port 51a; after the vacuum degree reaches the standard, rotating the handle 53 to move the sealing plate 3 downward, and when the first sealing ring structure 6 and the second surface 12 of the step interface of the vacuum chamber 1 seal the vacuum chamber, the second sealing ring structure 7 is loosened, and the handle 53 is continued to be rotated to move the entire shell 51 out, the bellows 52 leaks out, the rotating end plate 52a unfastens the sealing plate 3, the tooling 5 is removed, and the fasteners pass through the mounting ring 4 to fix the sealing plate 3, completing the full metal vacuum seal.

[0037] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Various modifications are possible to the above embodiments of the present invention. In other words, any simple, equivalent changes and modifications made in accordance with the claims and description of the present invention fall within the scope of protection of the present invention. Anything not fully described in this invention represents conventional technology.

Claims

1. A vacuum sealing interface device, characterized in that: The vacuum sealing interface device includes a vacuum chamber, a metal sealing ring, a sealing plate, a mounting ring and a tooling, wherein the metal sealing ring is placed on the step interface of the vacuum chamber, the mounting ring is arranged around the sealing plate, the vacuum chamber and the tooling are connected in the exhaust state so that the vacuum chamber can be evacuated through the tooling, and the sealing plate is placed on the metal sealing ring through the tooling in the maintaining state and fixedly installed on the vacuum chamber through the mounting ring to maintain the vacuum sealing state.

2. The vacuum sealing interface device according to claim 1, characterized in that: The vacuum sealing interface device also includes a first sealing ring structure and a second sealing ring structure, wherein the first sealing ring structure is arranged between the vacuum chamber and the sealing plate to provide sealing in a maintaining state, and the second sealing ring structure is arranged between the vacuum chamber and the tooling to provide sealing in an evacuation state.

3. The vacuum sealing interface device according to claim 2, characterized in that: The step interface of the vacuum chamber includes a first surface, a second surface and a third surface, wherein the first surface and the third surface are located at different heights and radial positions, the second surface vertically connects the first surface and the third surface between the first surface and the third surface, the first sealing ring structure is arranged between the outer surface of the sealing plate and the second surface, and the mounting ring is installed on the third surface by fasteners in a maintaining state to fasten the sealing plate to the vacuum chamber.

4. The vacuum sealing interface device according to claim 2, characterized in that: The tooling includes a shell, a bellows and a handle, wherein the shell is detachably mounted on the vacuum chamber, one end of the bellows is fixedly connected to the inside of the shell, the sealing plate is fixed to the other end of the bellows, the mounting ring is clamped between the sealing plate and the bellows, and the handle is movably mounted on the shell and connected to the bellows so that the length of the bellows can be changed by the handle.

5. The vacuum sealing interface device according to claim 4, characterized in that: The shell is connected to the vacuum pump through the air extraction port.

6. The vacuum sealing interface device according to claim 4, characterized in that: The second sealing ring structure is arranged between the inner surface of the shell and the outer surface of the vacuum chamber.

7. The vacuum sealing interface device according to claim 4, characterized in that: The bellows is provided with an end plate, and the end plate and the sealing plate are detachably connected.

8. The vacuum sealing interface device according to claim 7, characterized in that: The housing is provided with a guide tube, and the handle passes through the guide tube and extends into the bellows and abuts against the end plate to change the length of the bellows.

9. The vacuum sealing interface device according to claim 8, characterized in that: The catheter has an internal thread, and the handle has an external thread that matches the catheter.

10. The vacuum sealing interface device according to claim 1, characterized in that: The metal sealing ring is a copper ring.

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