Tubular target material coaxiality inspection tool

Abstract

The utility model relates to the technical field of tubular target material inspection, and discloses a tubular target material coaxiality inspection tool which comprises a tool head, a supporting rod and a supporting base, the tool head is used for making contact with the inner hole wall of a tubular target, the tool head is of a cylindrical structure, one end of the supporting rod is detachably connected with the tool head, and the other end of the supporting rod is detachably connected with the supporting base. The other end of the supporting rod is movably installed on the supporting base in the radial direction of the supporting rod. The pipe target coaxiality detection device can adapt to coaxiality detection of pipe targets with different lengths, and is convenient to operate.

Description

Technical Field

[0001] The present application relates to the technical field of tubular target material inspection, and in particular to a tubular target material coaxiality inspection tool. Background Art

[0002] During the magnetron sputtering coating process, a stationary magnetic rod is installed inside the inner hole of the tubular target. The rod rotates slowly, ensuring that the inner hole and the magnetic rod do not collide during the rotation. Therefore, tubular targets generally have high requirements for coaxiality and target layer wall thickness uniformity.

[0003] Currently, the coaxiality of target tubes is tested using a solid aluminum rod with an outer diameter comparable to the target's inner diameter. This requires operators to simultaneously lift the rod to inspect it. If the rod passes, it passes; if it fails, the coaxiality fails to meet the standard. When the target's inner diameter is large, the solid aluminum rod becomes heavy, making it difficult to operate. Utility Model Content

[0004] In order to solve the above problems, the present application provides a tubular target coaxiality inspection tool.

[0005] The present application provides a tubular target coaxiality inspection tool, which adopts the following technical solution:

[0006] A tubular target coaxiality inspection tool comprises a tool head, a support rod and a support base. The tool head is used to contact the inner hole wall of the tubular target. The tool head is a cylindrical structure. One end of the support rod is detachably connected to the tool head, and the other end of the support rod is movably mounted on the support base along its own radial direction.

[0007] By adopting this technical solution, the tooling head is used to contact the inner wall of the target tube. The cylindrical structure of the tooling head ensures a close fit with the inner hole of the target tube, thereby accurately testing the coaxiality of the tubular target. If the tooling head passes through the target tube, the target is qualified; if the tooling head does not pass, the coaxiality fails to meet the standard. One end of the support rod is detachably connected to the tooling head, and the other end is movably mounted on the support base along its own radial direction. This design allows the tooling head to be replaced and flexibly adjusted, facilitating the coaxiality testing of target tubes of different lengths and facilitating operation.

[0008] Optionally, the support rod and the tool head are threadedly connected.

[0009] By adopting the above technical solution, the support rod and the tooling head are connected by threads. This connection method is simple and reliable, easy to disassemble and install, convenient for maintenance and replacement of the tooling head, and also ensures a firm connection between the tooling head and the support rod, thereby improving the accuracy of inspection.

[0010] Optionally, the tool head is detachably mounted with a threaded sleeve, and the threaded sleeve and the tool head are coaxial.

[0011] By adopting the above technical solution, the tool head can be replaced frequently. If the thread of the threaded sleeve is worn, only the threaded sleeve can be replaced without replacing the tool head, thereby reducing costs.

[0012] Optionally, the threaded sleeve is fixedly connected to a fixing rod, and the fixing rod passes through the tool head and is threadedly connected to a fixing block.

[0013] By adopting the above technical solution, the threaded sleeve is fixedly connected to the fixing rod, and the fixing rod passes through the tool head and is threadedly connected to the fixing block. This structure ensures a firm connection between the threaded sleeve and the tool head.

[0014] Optionally, the tool head is provided with a first through hole and a second through hole, the first through hole and the second through hole are coaxial, the inner diameter of the first through hole is larger than that of the second through hole, the support rod is coaxially fixed with a ring, the ring is installed in the first through hole, and the support rod passes through the second through hole and is threadedly connected to a connecting block.

[0015] By adopting the above technical solution, the support rod and the tool head are formed into a plug-in relationship and are fixed by the connecting block. The connection method between the support rod and the tool head is simple and firm.

[0016] Optionally, the cross section of the ring is a polygonal structure.

[0017] By adopting the above technical solution, the collar and the tooling head cannot rotate relative to each other after being connected.

[0018] Optionally, the support rod is a two-section spliced ​​structure, the support rod includes a first support part and a second support part, the first support part and the second support part are plugged in, the ring is installed on the first support part, and the second support part is connected to the support seat.

[0019] By adopting the above technical solution, if the first supporting part and the second supporting part are damaged, only the first supporting part or the second supporting part can be replaced, which saves costs.

[0020] Optionally, the support rod and the support base are threadedly connected.

[0021] By adopting the above technical solution, the support rod and the support base are connected by threads. This connection method is not only simple and reliable, but also easy to disassemble and install, and convenient for maintenance and replacement of the support rod.

[0022] In summary, this application has at least one of the following beneficial effects:

[0023] 1. The cylindrical structure design of the tool head, the detachable connection with the support rod, and the use of multiple connection methods (such as threaded connection, plug-in connection, etc.) ensure that the tool can maintain a high degree of stability and coaxiality during use, thereby improving the accuracy of inspection;

[0024] 2. The detachable design of the tool head and support rod, and the splicing structure design of the support rod, enable the tool to be flexibly adjusted to meet the inspection needs of tubular targets of different lengths and specifications, thereby improving the versatility and practicality of the tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic structural diagram of the tool head detecting the tube target in Example 1 of the present application;

[0026] Figure 2 This is a cross-sectional view of the tool head of Example 1 of the present application when detecting a tube target;

[0027] Figure 3 is a cross-sectional view of the threaded sleeve of Example 2 of the present application installed in the tool head;

[0028] Figure 4 This is a schematic diagram of the overall structure of Example 2 of the present application;

[0029] Figure 5 is a cross-sectional view of the tool head of Example 3 of the present application;

[0030] Figure 6 This is an exploded schematic diagram of the overall structure of Example 3 of the present application;

[0031] Figure 7 This is a cross-sectional view of the overall structure of Example 3 of the present application.

[0032] Explanation of the accompanying drawings: 10. Tool head; 11. First mounting hole; 12. Second mounting hole; 13. First through hole; 14. Second through hole; 20. Support rod; 21. First supporting portion; 22. Second supporting portion; 23. Insert rod; 24. Insert hole; 30. Support base; 40. Threaded sleeve; 41. Fixing rod; 42. Fixing block; 50. Ring; 60. Connecting block; 100. Tube target. DETAILED DESCRIPTION

[0033] The following is combined with Figure 1-7 This application is described in further detail.

[0034] Example 1

[0035] Example 1 of the present application discloses a coaxiality inspection tool for a tubular target. Figure 1 and Figure 2A tubular target coaxiality inspection tool includes a tool head 10, a support rod 20, and a support base 30. The tool head 10 is a cylindrical structure used to contact the inner wall of the hole of the tubular target 100. The support rod 20 is used to connect the tool head 10 and the support base 30. One end of the support rod 20 is detachably connected to the tool head 10, facilitating the replacement of tool heads 10 with different outer diameters. The other end of the support rod 20 is movably mounted on the support base 30 along the radial direction of the support base itself. The cooperation between the support rod 20 and the support base 30 enables the support rod 20 to move with the tool head 10 to accommodate testing of tubular targets 100 of different lengths.

[0036] Reference Figure 2 Specifically, one end of the support rod 20 is coaxial with the support base 30 and is threadedly connected, and the other end of the support rod 20 is coaxial with the working head and is threadedly connected.

[0037] The tool head 10 is made of nylon. When the outer diameter of the tool head 10 is larger, the weight of the entire tool head 10 can be reduced, and collision between the tool head 10 and the end surface of the tube target 100 can be effectively avoided.

[0038] The support rod 20 is made of aluminum or hollow stainless steel to further reduce the weight of the entire inspection tool. The support base 30 is made of aluminum or stainless steel.

[0039] The implementation principle of a tubular target coaxiality inspection tool in Example 1 of the present application is as follows:

[0040] The entire inspection tooling has a simple structure and its overall weight is greatly reduced. The support base 30 can be fixedly installed in a specific position or held by hand. The cooperation between the support rod 20 and the support seat can continuously drive the tooling head 10 to rotate slowly and send it into the tube target 100. The tooling head 10 is used to detect the inner wall of the tube target 100. If the tooling head 10 passes, it is qualified. If the tooling head 10 collides with the inner wall of the tube target 100 during rotation, resulting in the tooling head 10 not passing through the inner wall of the tube target 100, the coaxiality of the inner wall of the tube target 100 does not meet the standard; the threaded connection between the tooling head 10 and the support rod 20 is also convenient for replacement, so that the support rod 20 can cooperate with tooling heads 10 with different outer diameters.

[0041] Example 2

[0042] The difference between Example 2 and Example 1 is that the tool head 10 is detachably mounted with a threaded sleeve 40. The rest of the principles are basically the same. If the tool head 10 is frequently replaced and the threads on the tool head 10 become loose, only the threaded sleeve 40 can be replaced to save costs.

[0043] Reference Figure 3Specifically, the tool head 10 defines a first mounting hole 11, into which a threaded sleeve 40 is sleeved. The threaded sleeve 40 is shorter than the tool head 10. One end of the threaded sleeve 40 is fixedly connected to a fixing rod 41. The threaded sleeve 40 is sleeved within the tool head 10. The tool head 10 defines a second mounting hole 12. The fixing rod 41 passes through the second mounting hole 12 and is threadedly connected to a fixing block 42. The fixing block 42 abuts against the end surface of the tool head 10.

[0044] Reference Figure 4 The cross-section of the threaded sleeve 40 is polygonal, and the first mounting hole 11 is adapted to fit the threaded sleeve 40. The cross-section of the threaded sleeve 40 in Example 2 of the present application is preferably rectangular, and the threaded sleeve 40 and the tool head 10 cannot rotate relative to each other. The threaded sleeve 40 is fixedly mounted on the tool head 10 through the cooperation of the fixing rod 41 and the fixing block 42. The support rod 20 and the threaded sleeve 40 are threadedly connected, ensuring a stable connection between the tool head 10 and the support rod 20.

[0045] Example 3

[0046] The difference between Example 3 and Example 1 lies in the different detachable connection methods between the support rod 20 and the tool head 10 , and the rest of the principles are basically the same.

[0047] specific Figure 5 and Figure 6 , refer to Figure 4 The work head is provided with a first through hole 13 and a second through hole 14, which are coaxial. The inner diameter of the first through hole 13 is larger than that of the first through hole 13. A collar 50 is coaxially fixed to the support rod 20. When the support rod 20 is mounted on the tool head 10, the collar 50 is located in the first through hole 13, the support rod 20 passes through the second through hole 14, and the support rod 20 is threadedly connected to the connecting block 60.

[0048] Specifically, the cross section of the collar 50 is a polygonal structure, and the cross section of the collar 50 in Example 3 is preferably a triangular structure.

[0049] Reference Figure 6 and Figure 7Furthermore, the support rod 20 is a two-section splicing structure, and the support rod 20 includes a first support part 21 and a second support part 22. The first support part 21 and the second support part 22 have the same external structure and are basically the same length. The first support part 21 and the second support part 22 form a plug-in relationship, and the first support part 21 is fixedly connected with an insert rod 23, and the second support part 22 is provided with a socket 24 for inserting the insert rod 23. The cross-section of the insert rod 23 is a rectangular structure, so that the first support part 21 and the second support part 22 cannot rotate relative to each other after being plugged in. The collar 50 is fixedly mounted on the first support part 21, and the second support part 22 is threadedly connected to the support seat. If any one of the second support part 22 and the support base 30 has a slipped tooth, the second support part 22 or the support base 30 can be replaced separately, thereby saving costs.

[0050] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A tubular target coaxiality inspection tool, characterized by: The tooling head (10) comprises a tooling head (10), a support rod (20) and a support base (30), wherein the tooling head (10) is used to contact the inner hole wall of the tube target (100), the tooling head (10) is a cylindrical structure, one end of the support rod (20) is detachably connected to the tooling head (10), and the other end of the support rod (20) is movably mounted on the support base (30) along its own radial direction.

2. The tubular target coaxiality inspection tool according to claim 1, characterized in that: The support rod (20) and the tool head (10) are threadedly connected.

3. The tubular target coaxiality inspection tool according to claim 2, characterized in that: The tool head (10) is detachably mounted with a threaded sleeve (40), and the threaded sleeve (40) and the tool head (10) are coaxial.

4. The tubular target coaxiality inspection tool according to claim 3, characterized in that: The threaded sleeve (40) is fixedly connected to a fixing rod (41), and the fixing rod (41) passes through the tool head (10) and is threadedly connected to a fixing block (42).

5. The tubular target coaxiality inspection tool according to claim 1, characterized in that: The tool head (10) is provided with a first through hole (13) and a second through hole (14), the first through hole (13) and the second through hole (14) are coaxial, the inner diameter of the first through hole (13) is larger than that of the second through hole (14), the support rod (20) is coaxially fixed with a collar (50), the collar (50) is installed in the first through hole (13), and the support rod (20) passes through the second through hole (14) and is threadedly connected to a connecting block (60).

6. The tubular target coaxiality inspection tool according to claim 5, characterized in that: The cross section of the collar (50) is a polygonal structure.

7. The tubular target coaxiality inspection tool according to claim 6, characterized in that: The support rod (20) is a two-section spliced ​​structure, comprising a first support portion (21) and a second support portion (22), wherein the first support portion (21) and the second support portion (22) are plugged together, the collar (50) is mounted on the first support portion (21), and the second support portion (22) is connected to the support base (30).

8. The tubular target coaxiality inspection tool according to claim 1, characterized in that: The support rod (20) and the support base (30) are threadedly connected.

Images