Test structure for reliability analysis in integrated circuit

Abstract

The utility model relates to a test structure for reliability analysis in an integrated circuit, which comprises a base, the end side of the top of the base is connected with a cover plate through a limiting piece, the end part of the cover plate is fixedly connected with two limiting blocks, the tops of the limiting blocks are connected with limiting columns in a sliding manner, and the limiting columns are fixedly connected with the base. The bottom end of the limiting column penetrates through the limiting block and makes contact with the top side of the base. The utility model relates to the technical field of integrated circuit testing. When the test structure for reliability analysis in the integrated circuit is used, a limiting column can be limited through a locking piece, the cover plate is prevented from being pulled back by a limiting spring, an arranged limiting plate limits a limiting block, the cover plate is prevented from being overturned to the original position again, and the reliability of the integrated circuit is improved. And finally, the structure can be prevented from being influenced by the temperature when limiting the cover plate, and the stability of the integrated circuit during multi-environment testing is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit testing, in particular to a test structure for reliability analysis in an integrated circuit. Background Art

[0002] An integrated circuit is a miniature electronic device or component that uses a specific process to interconnect the transistors, resistors, capacitors, inductors and other components and wiring required in a circuit. It is manufactured on a small piece or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a tube shell to become a miniature structure with the required circuit function. Most applications in today's semiconductor industry are silicon-based integrated circuits. After the integrated circuit is completed, it needs to be tested for performance and needs to be tested through a dedicated test structure.

[0003] In the prior art, a test structure for integrated circuit reliability analysis proposed in publication number CN219758432U includes a fixed plate and a mounting base, wherein the mounting base is fixedly mounted on the fixed plate. The test structure for integrated circuit reliability analysis utilizes a closed cover and a spray tube, as well as an electric heating plate and a spray hole. During operation, the closed cover can seal the outside of the mounting base, creating a simulated working environment outside the integrated circuit. The electric heating plate can heat the inside of the closed cover when in operation, raising the temperature inside the mounting base to simulate a high-temperature environment. The spray tube can be connected to a cooling air unit via a connecting pipe, and cold air can be ejected through the spray hole outside the spray tube, lowering the temperature inside the closed cover to simulate a low-temperature environment. This allows the test structure for integrated circuit reliability analysis to simulate the working environment of the integrated circuit and improve the accuracy of test data.

[0004] This application mainly uses a closing cover in conjunction with a mounting base for sealing, and then simulates a high-temperature environment through an electric heating plate, and cold air is ejected from the injection hole on the injection tube to simulate a low-temperature environment, thereby simulating the working environment of the integrated circuit and improving the accuracy of the test data. However, the closing cover of this application is positioned by an electromagnet in conjunction with a positioning patch, and when simulating the working environment, the ambient temperature of the closing cover will also change, which can easily affect the magnetism of the electromagnet, and then easily cause the magnetism to decrease due to high temperature, which in turn causes the closing cover to fall off, affecting the test progress. Utility Model Content

[0005] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a test structure for reliability analysis in an integrated circuit, so as to solve the technical problems mentioned in the above background technology.

[0006] The above technical objectives of the present invention are achieved through the following technical solutions:

[0007] A test structure for reliability analysis in an integrated circuit includes a base, the top end side of the base is connected to a cover plate through a limiting piece, the end of the cover plate is fixedly connected to two limit blocks, the top of the limit block is slidably connected to the limit column, the bottom end of the limit column passes through the limit block and contacts the top side of the base, the top of the base is located at the side of the limit block and is fixedly connected to the limit plate, the limit plate is U-shaped, and an avoidance groove for avoiding the limit column is opened on the bottom side of the limit plate, and a locking piece is provided on the top side of the base below the limit plate.

[0008] In a preferred example, the present invention can be further configured as follows: the locking member includes a locking groove, and the locking groove is opened on the top side of the base and is located below the limiting plate.

[0009] In a preferred example, the present invention can be further configured as follows: a sliding groove is provided in the base below the locking groove, the sliding groove is communicated with the locking groove, a sliding rod is slidably connected in the sliding groove, an inclined block is fixedly connected to the top side of the sliding rod, and the inclined block is slidably connected to the locking groove.

[0010] In a preferred example, the present invention can be further configured as follows: a return spring is fixedly connected to the end of the slide rod, and the end of the return spring is fixedly connected to the end side wall of the slide groove.

[0011] In a preferred example, the present invention can be further configured as follows: the limiting component includes two bottom grooves, the two bottom grooves are opened on the top sides of the base, and sliders are slidably connected in the two bottom grooves. The ends of the sliders are fixedly connected to limiting springs, and the ends of the limiting springs are fixedly connected to the end side walls of the bottom grooves, and the top of the slider is fixedly connected to a mounting block.

[0012] In a preferred example, the present invention can be further configured as follows: an empty slot is provided in the end side wall of the bottom slot away from the slider, a limiting plate is slidably connected in the empty slot, and an end portion of the limiting plate is fixedly connected to the slider.

[0013] In a preferred example, the present invention can be further configured as follows: a support shaft is rotatably connected between the two mounting blocks, a connecting plate is fixedly connected to the middle of the support shaft, the sides of the connecting plate are fixedly connected to the cover plate, and torsion springs are respectively connected between the two ends of the connecting plate and the two mounting blocks.

[0014] In summary, the present invention has at least one of the following beneficial technical effects:

[0015] 1. This test structure for reliability analysis of integrated circuits can, during use, use a locking member to limit the position of the limit post, preventing the cover from being pulled back by the limit spring. The provided limit plate limits the limit block, preventing the cover from flipping back to its original position. Ultimately, this structure can prevent the cover from being affected by temperature when limiting the position, thereby improving the stability of the integrated circuit during multi-environment testing.

[0016] 2. In a test structure for reliability analysis of an integrated circuit, when the integrated circuit needs to be taken out after the work is completed, the slide rod is pushed toward the inside of the slide slot. The inclined block on the slide rod will push the limit post from the bottom side of the limit post, and then push the limit post to the outside of the slide slot. At this time, the limit post loses its limit, and the cover plate loses the limit of the limit post. Then, the cover plate is pulled back through the limit member, and the limit block will be separated from the limit plate, thereby releasing the limit on the entire cover plate, and finally the cover plate can be moved through the limit member, so that the rotation of the cover plate reveals the integrated circuit after testing, and the tested integrated circuit can be taken out;

[0017] 3. In this test structure for reliability analysis of an integrated circuit, when it is necessary to release the limit on the cover, the slide rod is pushed until the limit column loses its limit. At this time, the limit spring will quickly push the slider to restore the slider to its original position. At the same time, the limit block loses the limit of the limit plate, so that the torsion spring drives the connecting plate and the cover to rotate through the support shaft, thereby achieving the effect of opening the cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 The figure is a schematic diagram of the overall structure of a test structure for reliability analysis in an integrated circuit according to the present invention.

[0020] Figure 2 The present invention is a schematic structural diagram of a locking member of a test structure for reliability analysis in an integrated circuit.

[0021] Figure 3 The present invention is a schematic structural diagram of a limiting component of a test structure for reliability analysis in an integrated circuit.

[0022] Figure 4 The utility model is a schematic diagram of the internal structure of the bottom tank of a test structure for reliability analysis in an integrated circuit.

[0023] In the figure, 1. base; 2. limiting member; 3. cover plate; 4. limiting block; 5. limiting column; 6. limiting plate; 7. avoidance groove; 8. locking member; 9. lock groove; 10. slide groove; 11. slide rod; 12. inclined block; 13. return spring; 14. bottom groove; 15. slider; 16. limiting spring; 17. mounting block; 18. empty groove; 19. limiting plate; 20. support shaft; 21. connecting plate; 22. torsion spring. DETAILED DESCRIPTION

[0024] The present invention will be described in further detail below with reference to the accompanying drawings.

[0025] Example: Refer to Figures 1-4 The utility model discloses a test structure for reliability analysis in an integrated circuit, including a base 1, the top end side of the base 1 is connected to a cover plate 3 through a limiting member 2, the end of the cover plate 3 is fixedly connected to two limit blocks 4, the top of the limit block 4 is slidably connected to a limit column 5, the bottom end of the limit column 5 passes through the limit block 4 and contacts the top side of the base 1, the top of the base 1 is located at the side of the limit block 4 and is fixedly connected to a limit plate 6, the limit plate 6 is U-shaped, and an avoidance groove 7 for avoiding the limit column 5 is opened on the inner bottom side of the limit plate 6, and a locking member 8 is provided on the top side of the base 1 below the limit plate 6.

[0026] In this embodiment, when in use, the integrated circuit is placed on top of the base 1, and then the cover 3 is rotated through the limiting member 2 so that the cover 3 covers the top side of the base 1, and the integrated circuit is covered in the cover 3, wherein a heating plate and a cold air duct are arranged on the cover 3, and the internal heating circuit and the air duct pipeline arrangement are the same as the prior art, and then the entire cover 3 is pulled toward the direction of the limiting plate 6, and the limiting block 4 is inserted into the limiting plate 6, and then the limiting column 5 is inserted into the locking member 8 by its own gravity and locked, so that the locking member 8 cooperates with the limiting plate 6 to lock the limiting block 4 and the limiting column 5 set at the end of the cover 3, thereby achieving a sealing effect, so that when the cover 3 is locked, it can avoid the closed cover 3 falling off due to the influence of temperature, thereby affecting the test of the integrated circuit.

[0027] In a further preferred embodiment of the present invention, Figure 1-2 As shown, the locking member 8 includes a locking slot 9 , which is opened on the top side of the base 1 and below the limiting plate 6 .

[0028] In this embodiment, after the limit block 4 is inserted into the limit plate 6, the lock slot 9 will be directly below the limit column 5. Then the limit column 5 loses the limit of the top side wall of the base 1, and enters the lock slot 9 by its own gravity, thereby preventing the cover 3 from being pulled back by the limit member 2. It should be noted that after the bottom end of the limit column 5 is inserted into the lock slot 9, there will be a gap between the bottom end of the limit column 5 and the bottom side wall of the lock slot 9. At the same time, the limit plate 6 will also limit the limit block 4, thereby improving the stability of the cover 3 during operation.

[0029] In a further preferred embodiment of the present invention, Figure 1-2 As shown, a slide groove 10 is provided in the base 1 below the lock groove 9, and the slide groove 10 is communicated with the lock groove 9. A slide rod 11 is slidably connected in the slide groove 10, and an inclined block 12 is fixedly connected to the top side of the slide rod 11, and the inclined block 12 is slidably connected to the lock groove 9.

[0030] In this embodiment, after the work is completed, the slide rod 11 is pushed toward the inside of the slide groove 10, and the inclined block 12 on the slide rod 11 will push the limit column 5 from the bottom side of the limit column 5, and then push the limit column 5 to the outside of the slide groove 10. At this time, the limit column 5 loses its limit, and the cover plate 3 loses the limit of the limit column 5, and then the cover plate 3 is pulled back through the limit member 2. At the same time, the limit block 4 will be separated from the limit plate 6, thereby releasing the limit on the entire cover plate 3, and finally the cover plate 3 can be moved through the limit member 2, so that the rotation of the cover plate 3 allows the integrated circuit after detection to be revealed, and the integrated circuit after detection can be taken out.

[0031] In a further preferred embodiment of the present invention, Figure 1-2 As shown, a return spring 13 is fixedly connected to the end of the slide rod 11 , and the end of the return spring 13 is fixedly connected to the end side wall of the slide groove 10 .

[0032] In this embodiment, a return spring 13 is provided, which will squeeze the return spring 13 when pushing the slide rod 11. After the limit column 5 is pushed out of the lock slot 9 through the inclined block 12, the slide rod 11 is released at this time. The slide rod 11 will be pushed back by the reaction force generated by the return spring 13 being squeezed, thereby pushing the slide rod 11 to its original position for easy use next time.

[0033] In a further preferred embodiment of the present invention, Figure 4 As shown, the limiting member 2 includes two bottom grooves 14, and the two bottom grooves 14 are opened on the top side of the base 1. Sliders 15 are slidably connected in the two bottom grooves 14, and the ends of the slides 15 are fixedly connected to limiting springs 16. The ends of the limiting springs 16 are fixedly connected to the end side walls of the bottom grooves 14, and the top of the slide 15 is fixedly connected to a mounting block 17.

[0034] In this embodiment, the bottom groove 14 is used to slide the slider 15 and the mounting block 17. The limiting spring 16 is squeezed when the slider 15 moves. After the force applied to the slider 15 is released, the limiting spring 16 will push the slider 15 back through the reaction force after being squeezed.

[0035] In a further preferred embodiment of the present invention, Figure 3-4 As shown, a hollow groove 18 is formed in the side wall of the bottom groove 14 away from the slider 15 , and a limiting plate 19 is slidably connected in the hollow groove 18 , and an end portion of the limiting plate 19 is fixedly connected to the slider 15 .

[0036] In this embodiment, the empty slot 18 is used to limit the sliding of the limiting plate 19, and the limiting plate 19 is used to block the upper position of the limiting spring 16, thereby preventing the limiting spring 16 from bending upward after being squeezed, thereby causing damage to the limiting spring 16 and affecting its service life.

[0037] In a further preferred embodiment of the present invention, Figure 1-4 As shown, a support shaft 20 is rotatably connected between the two mounting blocks 17, a connecting plate 21 is fixedly connected to the middle of the support shaft 20, the sides of the connecting plate 21 are fixedly connected to the cover plate 3, and torsion springs 22 are respectively connected between the two ends of the connecting plate 21 and the two mounting blocks 17.

[0038] When the cover 3 is completely covered on the top side of the base 1, the cover 3 is pushed, so that the cover 3 drives the limit block 4 to move in the direction of the limit plate 6, and finally the limit column 5 is limited by the locking member 8 to achieve the effect of locking the cover 3, wherein a certain gap is left between the inner side of the cover 3 and the integrated circuit, so that the cover 3 does not drive the movement of the integrated circuit when moving, thereby affecting the connected circuit. When it is necessary to release the limit of the cover 3, the slide bar 11 is pushed until the limit column 5 loses the limit. At this time, the limit spring 16 will quickly push the slider 15, so that the slider 15 returns to its original position. At the same time, the limit block 4 loses the limit of the limit plate 6, so that the torsion spring 22 drives the connecting plate 21 and the cover 3 to rotate through the support shaft 20, thereby achieving the effect of opening the cover 3.

[0039] The embodiments of this specific implementation method are all preferred embodiments of the present utility model, and are not intended to limit the scope of protection of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the scope of protection of the present utility model.

Claims

1. A test structure for reliability analysis in an integrated circuit, comprising a base (1), characterized in that: The top end side of the base (1) is connected to a cover plate (3) through a limiting member (2), and the end of the cover plate (3) is fixedly connected to two limiting blocks (4). The top of the limiting block (4) is slidably connected to a limiting column (5), and the bottom end of the limiting column (5) passes through the limiting block (4) and contacts the top side of the base (1). The top of the base (1) is located on the side of the limiting block (4) and is fixedly connected to a limiting plate (6). The limiting plate (6) is U-shaped, and an avoidance groove (7) for avoiding the limiting column (5) is provided on the bottom side of the limiting plate (6). A locking member (8) is provided on the top side of the base (1) below the limiting plate (6).

2. The test structure for reliability analysis in an integrated circuit according to claim 1, characterized in that: The locking member (8) comprises a locking slot (9), and the locking slot (9) is provided on the top side of the base (1) and is located below the limiting plate (6).

3. The test structure for reliability analysis in an integrated circuit according to claim 2, characterized in that: A sliding groove (10) is provided in the base (1) below the locking groove (9), the sliding groove (10) is communicated with the locking groove (9), a sliding rod (11) is slidably connected in the sliding groove (10), an inclined block (12) is fixedly connected to the top side of the sliding rod (11), and the inclined block (12) is slidably connected to the locking groove (9).

4. The test structure for reliability analysis in an integrated circuit according to claim 3, characterized in that: The end of the slide rod (11) is fixedly connected to a return spring (13), and the end of the return spring (13) is fixedly connected to the end side wall of the slide groove (10).

5. The test structure for reliability analysis in an integrated circuit according to claim 4, characterized in that: The limiting member (2) includes two bottom grooves (14), the two bottom grooves (14) are opened on the top side of the base (1), and a slider (15) is slidably connected in the two bottom grooves (14). The end of the slider (15) is fixedly connected to a limiting spring (16), and the end of the limiting spring (16) is fixedly connected to the end side wall of the bottom groove (14). The top of the slider (15) is fixedly connected to a mounting block (17).

6. The test structure for reliability analysis in an integrated circuit according to claim 5, characterized in that: An empty slot (18) is provided in the end side wall of the bottom slot (14) away from the slider (15), a limiting plate (19) is slidably connected in the empty slot (18), and an end portion of the limiting plate (19) is fixedly connected to the slider (15).

7. The test structure for reliability analysis in an integrated circuit according to claim 6, characterized in that: A support shaft (20) is rotatably connected between the two mounting blocks (17), a connecting plate (21) is fixedly connected to the middle of the support shaft (20), the side of the connecting plate (21) is fixedly connected to the cover plate (3), and torsion springs (22) are respectively connected between the two ends of the connecting plate (21) and the two mounting blocks (17).

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