Wavelength-adjustable light receiving assembly based on MEMS

Abstract

The utility model discloses an MEMS-based wavelength-adjustable light receiving assembly, which comprises a packaging shell, the top of the packaging shell is provided with an incident port, the incident port is provided with a lens, the packaging shell is internally provided with a packaging cavity, the packaging cavity is internally provided with a substrate, the substrate is provided with a total reflection sheet, an optical wedge and an MEMS micromirror, the total reflection sheet is located right below the lens, and the optical wedge is located right below the lens. The total reflection sheet is obliquely arranged, the optical wedge is located obliquely above the total reflection sheet, the inclination angle of the optical wedge is larger than that of the total reflection sheet, the MEMS micromirror is located obliquely above the optical wedge, the MEMS micromirror is used for reflecting light dispersed by the optical wedge downwards, and a photoelectric detector is arranged on the bottom surface of the packaging cavity. Through the relation between the piezoelectric voltage and the rotation angle, the required wavelength can be reflected to the photoelectric detector, and optical signals with different wavelengths can be received.

Description

Technical Field

[0001] The utility model relates to the field of optical receivers, in particular to a wavelength-adjustable optical receiving component based on MEMS. Background Art

[0002] An optical receiver is a device used to receive optical signals from optical cables and convert them into electrical signals for transmission into the cable network. Currently, few wavelength-tunable optical receiver components are available on the market. Some rely on external MEMS-based wavelength-tunable filters, which are bulky and, due to their external nature, can also be unreliable. Currently, there are no cost-effective solutions for wavelength-tunable optical receiver components on the market. To address these issues, the following proposes a solution. Utility Model Content

[0003] The purpose of the utility model is to provide a wavelength-adjustable optical receiving component based on MEMS, which has the advantages of small size, low power consumption, and compatibility with current mainstream module packaging.

[0004] The above technical objectives of the present invention are achieved through the following technical solutions:

[0005] A wavelength-adjustable light receiving component based on MEMS includes a packaging shell, an incident port is formed on the top of the packaging shell, a lens is provided at the incident port, a packaging cavity is provided inside the packaging shell, a substrate is provided in the packaging cavity, a total reflection plate, an optical wedge and a MEMS micromirror are provided on the substrate, the total reflection plate is located directly below the lens, the total reflection plate is arranged at an angle, the optical wedge is located obliquely above the total reflection plate, light reflected by the total reflection plate enters the optical wedge from obliquely below, the inclination angle of the optical wedge is greater than the inclination angle of the total reflection plate, the MEMS micromirror is located obliquely above the optical wedge, the MEMS micromirror is used to reflect light dispersed by the optical wedge downward, and a photodetector is provided on the bottom surface of the packaging cavity, the photodetector is used to receive the optical signal reflected by the MEMS micromirror.

[0006] Preferably, the packaging shell includes a packaging base and a packaging cap, the packaging cap is fixed to the upper end of the packaging base, and a packaging cavity is formed between the lower end surface of the packaging cap and the upper end surface of the packaging base.

[0007] Preferably, the substrate is located directly below one edge of the incident port, the substrate is placed vertically, and the bottom of the substrate is fixedly connected to the packaging base.

[0008] Preferably, the lens is a convex lens, and the lens is used to converge the divergent incident light so that the incident light enters the packaging cavity in parallel.

[0009] Preferably, the MEMS micromirror is fixedly connected to the substrate, and the MEMS micromirror rotates after voltage is applied.

[0010] Preferably, the tilt angle of the total reflection sheet is 25° to 65°.

[0011] Preferably, the inclination angle of the optical wedge is 2°~20°.

[0012] The beneficial effects of the utility model are:

[0013] 1. Effectively solve the lack of small wavelength-tunable optical receiving devices in the market.

[0014] 2. Reduce the cost of wavelength-tunable optical receiving devices on the market.

[0015] 3. The process is simple and can be the same as traditional receiving optical devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is the overall structural diagram of the embodiment;

[0017] Figure 2 is a path diagram after the incident light of the embodiment;

[0018] Figure 3 is a path diagram of another reflection angle after the incident light of the embodiment;

[0019] Figure 4 This is a schematic diagram of the MEMS micromirror rotation principle.

[0020] Figure numerals: 1. lens; 2. package shell; 3. MEMS micromirror; 4. optical wedge; 5. photodetector; 6. substrate; 7. total reflection plate; 8. package base; 9. reflective mirror; 10. rotation axis; 11. electrode; 12. silicon substrate. DETAILED DESCRIPTION

[0021] The following is only a preferred embodiment of the present invention, and the scope of protection is not limited to this embodiment. All technical solutions under the concept of the present invention should fall within the scope of protection of the present invention. The same parts are represented by the same figure marks. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the accompanying drawings, and the words "bottom" and "top", "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively.

[0022] like Figures 1 to 4As shown, a wavelength-adjustable optical receiving component based on MEMS includes a packaging shell 2. The packaging shell 2 includes a packaging base 8 and a packaging cap. The packaging cap is fixed to the upper end of the packaging base 8, and a packaging cavity is formed between the lower end face of the packaging cap and the upper end face of the packaging base 8. An incident port is provided at the top of the packaging cap, and external light can be irradiated into the packaging cavity through the incident port. The incident port in this design is set to be rectangular, square or circular, and a lens 1 is fixed on the incident port. Lens 1 is a convex lens 1 that can gather light. The initial light emitted by the external signal source is divergent, and the convex lens 1 can gather the divergent initial light so that it is incident in parallel into the packaging cavity.

[0023] If the incident port is square, then substrate 6 is located directly below one edge of the incident port and is placed vertically, meaning that all light entering the package cavity from the incident port is located on one side of substrate 6. A total reflection sheet 7, optical wedge 4, and MEMS micromirror 3 are provided on the light-receiving side of substrate 6.

[0024] Total reflection sheet 7 is tilted and located directly below lens 1. Vertically downward incident light strikes the upper surface of total reflection sheet 7. Because total reflection sheet 7 is tilted, there is an angle of incidence between the incident light and the sheet, allowing the sheet to reflect the incident light diagonally upward. Optical wedge 4 is located diagonally above total reflection sheet 7. Light reflected by total reflection sheet 7 enters optical wedge 4 from below, where it is dispersed and propagates diagonally upward.

[0025] In this application, the tilt angle of the total reflection sheet 7 is 25° to 65°, and the tilt angle of the optical wedge 4 is 2° to 20°. The angles of the total reflection sheet 7 and the optical wedge 4 are coordinated so that light can pass through the optical wedge 4 and be dispersed by the optical wedge 4.

[0026] MEMS micromirror 3 is positioned obliquely above optical wedge 4. Dispersed light of several different wavelengths impinges on the underside of MEMS micromirror 3 and is reflected by the mirror. Because the different wavelengths of light impinge on MEMS micromirror 3 at different locations, the reflected light impinges on different locations on the upper surface of package base 8. A photodetector 5 is mounted on the upper surface of package base 8. By adjusting the angle of MEMS micromirror 3, light of one wavelength can be directed to the photodetector 5, thereby receiving the optical signal at that wavelength.

[0027] The MEMS micromirror 3 in this application is based on existing technology and includes a reflective mirror surface 9, a rotating shaft 10, electrodes 11, and a silicon substrate 12. Its operation relies primarily on its internal micro-drive mechanism and reflective mirror surface 9. When an external voltage is applied, the micromirror is twisted by electrostatic forces, causing the reflective mirror surface 9 to rotate rapidly and precisely. This deflection changes the reflection angle of dispersed light, thereby achieving precise control of the optical path.

[0028] The specific embodiments described above further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A wavelength-adjustable light receiving component based on MEMS, comprising a packaging shell (2), characterized in that: An incident port is provided on the top of the packaging shell (2), a lens (1) is provided at the incident port, a packaging cavity is provided inside the packaging shell (2), a substrate (6) is provided in the packaging cavity, a total reflection plate (7), an optical wedge (4) and a MEMS micromirror (3) are provided on the substrate (6), the total reflection plate (7) is located directly below the lens (1), the total reflection plate (7) is tilted, the optical wedge (4) is located obliquely above the total reflection plate (7), light reflected by the total reflection plate (7) enters the optical wedge (4) from obliquely below, the tilt angle of the optical wedge (4) is greater than the tilt angle of the total reflection plate (7), the MEMS micromirror (3) is located obliquely above the optical wedge (4), the MEMS micromirror (3) is used to reflect light dispersed by the optical wedge (4) downward, and a photodetector (5) is provided on the bottom surface of the packaging cavity, the photodetector (5) is used to receive the light signal reflected by the MEMS micromirror (3).

2. A wavelength-adjustable light receiving component based on MEMS according to claim 1, characterized in that: The packaging shell (2) comprises a packaging base (8) and a packaging cap, wherein the packaging cap is fixed to the upper end of the packaging base (8), and a packaging cavity is formed between the lower end surface of the packaging cap and the upper end surface of the packaging base (8).

3. A wavelength-adjustable light receiving component based on MEMS according to claim 2, characterized in that: The substrate (6) is located directly below one edge of the incident port, the substrate (6) is placed vertically, and the bottom of the substrate (6) is fixedly connected to the packaging base (8).

4. The wavelength-adjustable light receiving component based on MEMS according to claim 1, characterized in that: The lens (1) is a convex lens (1), and the lens (1) is used to gather divergent incident light so that the incident light is incident into the packaging cavity in parallel.

5. The wavelength-adjustable light receiving component based on MEMS according to claim 1, characterized in that: The MEMS micromirror (3) is fixedly connected to a substrate (6), and the MEMS micromirror (3) rotates after voltage is applied.

6. The wavelength-adjustable light receiving component based on MEMS according to claim 1, characterized in that: The tilt angle of the total reflection sheet (7) is 25° to 65°.

7. The wavelength-adjustable light receiving component based on MEMS according to claim 1, characterized in that: The tilt angle of the optical wedge (4) is 2° to 20°.

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