Sealing element for base of light guide pipe

Abstract

A light guide pipe base sealing piece comprises a sealing base, a connecting column is vertically and fixedly connected to the surface of the sealing base, threads are arranged on the outer side surface of the connecting column, a containing block is fixedly connected to the upper surface of the connecting column, a limiting column is vertically arranged on the surface of the containing block, and a sealing ring penetrates through the limiting column to be arranged on the surface of the containing block. The sealing ring is inserted into the mounting pipe arranged on the light guide pipe base, the threads arranged on the connecting column are connected with the threads on the inner side of the mounting pipe by rotating the sealing base, pressure is generated on the sealing ring due to the extrusion influence of threaded connection, and therefore the sealing effect on the mounting pipe is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing components, in particular to a light guide base sealing component. Background Art

[0002] MOCVD uses organic compounds of group III and group II elements and hydrides of group V and VI elements as crystal growth source materials, and performs vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow thin-layer single crystal materials of various group III-V, group II-VI compound semiconductors and their multi-component solid solutions.

[0003] Typically, crystal growth in an MOCVD system is performed in a cold-walled quartz (stainless steel) reaction chamber under atmospheric or low pressure (10-100 Torr) and with H2 flowing through it. The substrate temperature is 500-1200°C, and a graphite susceptor (the substrate is mounted above the susceptor) is heated using direct current. H2 is bubbled through a temperature-controlled liquid source to carry metal organic compounds into the growth zone. Because the organic compounds used in growth are highly hazardous, such as trimethylgallium and trimethylaluminum, which are pyrophoric liquids that spontaneously ignite in contact with air, they are contained in a special stainless steel bubbler and transported to the reaction chamber by the flow of high-purity H2, avoiding direct contact with the outside air. Therefore, system leak detection is a key procedure during machine installation. The lightpipe is a slender quartz tube installed at the bottom of the reaction chamber and extending into the interior to detect the internal temperature. Due to the installation process (it must be installed after leak testing and after the internal components of the reaction chamber are installed) and its relatively low strength, an alternative is needed to isolate the reaction chamber from the external environment.

[0004] In the prior art, the light guide base is usually removed and sealed with a blind plate to connect to the installation port below the reaction chamber for leak detection. After the leak detection is completed, the light guide blind plate needs to be removed and the light guide needs to be connected. Since the removal and installation work after the leak detection operation has the risk of leakage and the operation is tedious and complicated, it will cause technical problems such as reduced work efficiency and increased safety hazards. Utility Model Content

[0005] The utility model provides a light pipe base sealing member, which solves the technical problem in the prior art that the light pipe blind plate and the light pipe need to be disassembled and installed after the leak detection operation is completed, thereby reducing the operation efficiency and increasing the potential safety hazards.

[0006] In order to solve the above problems, the utility model provides a light guide base seal, including a sealing base, characterized in that: a connecting column is vertically fixedly connected to the surface of the sealing base, the outer surface of the connecting column is provided with a thread, and a placement block is fixedly connected to the upper surface, a limiting column is vertically provided on the surface of the placement block, and a sealing ring passes through the limiting column and is arranged on the surface of the placement block.

[0007] Furthermore, the surface of the sealing base is a polygonal structure.

[0008] Furthermore, the diameter of the placement block is smaller than the diameter of the connecting column.

[0009] Furthermore, a sealing ring is arranged on the surface of the placement block.

[0010] Furthermore, the diameter of the sealing base is larger than the diameter of the connecting column.

[0011] Furthermore, the height of the limiting column is greater than the height of the sealing ring.

[0012] The beneficial effect of the present invention is that the sealing ring is inserted into the installation tube provided on the light guide base, and the thread provided on the connecting column is connected to the inner thread of the installation tube by rotating the sealing base. The extrusion of the threaded connection generates pressure on the sealing ring, thereby having a sealing effect on the installation tube, preventing frequent disassembly and installation work after the leak detection operation is completed, thereby achieving the technical effect of improving work efficiency and reducing safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure according to an embodiment of the utility model;

[0014] Figure 2 This is a schematic diagram of the main structure according to an embodiment of the present utility model;

[0015] Figure 3 It is a schematic diagram of a three-dimensional structure according to an embodiment of the present utility model in practical application.

[0016] Reference numerals: sealing base 1 , connecting column 2 , placement block 3 , limiting column 4 , sealing ring 5 , thread 21 . DETAILED DESCRIPTION

[0017] In order to make the technical solution of the present invention more clear, the present invention will be further described below with reference to specific embodiments of the drawings.

[0018] like Figure 1-3 As shown, a light guide base seal according to an embodiment of the present utility model includes a sealing base 1, a connecting column 2 is vertically fixedly connected to the surface of the sealing base 1, a thread 21 is provided on the outer surface of the connecting column 2, and a placement block 3 is fixedly connected to the upper surface, a limiting column 4 is vertically provided on the surface of the placement block 3, and a sealing ring 5 passes through the limiting column 4 and is arranged on the surface of the placement block 3.

[0019] Wherein, the surface of the sealing base 1 is a polygonal structure.

[0020] The diameter of the placement block 3 is smaller than the diameter of the connecting column 2 .

[0021] Among them, a sealing ring 5 is arranged on the surface of the placement block 3.

[0022] The diameter of the sealing base 1 is larger than the diameter of the connecting column 2 .

[0023] The height of the limiting column 4 is greater than the height of the sealing ring 5 .

[0024] Working principle: First, insert this application into the installation tube provided on the light guide base, and generate pressure on the sealing ring 5 by rotating the sealing base 1, thereby sealing the installation tube. Then perform the leak detection operation. After the leak detection operation is completed, the application is disassembled and the light guide is replaced to complete all process operations.

[0025] The above embodiments can be combined with each other and further implemented if they are not mutually exclusive.

[0026] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A light guide base seal, comprising a sealing base (1), characterized in that: The surface of the sealing base (1) is vertically fixedly connected with a connecting column (2), the outer surface of the connecting column (2) is provided with a thread (21), the upper surface is fixedly connected with a placement block (3), the surface of the placement block (3) is vertically provided with a limiting column (4), and the sealing ring (5) passes through the limiting column (4) and is provided on the surface of the placement block (3).

2. The light guide base seal according to claim 1, characterized in that: The surface of the sealing base (1) is a polygonal structure.

3. The light guide base seal according to claim 1, characterized in that: The diameter of the placement block (3) is smaller than the diameter of the connecting column (2).

4. The light guide base seal according to claim 1, characterized in that: A sealing ring (5) is arranged on the surface of the placement block (3).

5. The light guide base seal according to claim 1, characterized in that: The diameter of the sealing base (1) is greater than the diameter of the connecting column (2).

6. The light guide base seal according to claim 1, characterized in that: The height of the limiting column (4) is greater than the height of the sealing ring (5).

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