Mask plate sealing mechanism

Abstract

The utility model relates to the technical field of mask plate processing, in particular to a mask plate sealing mechanism which comprises a box body with a mounting cavity, a sealing plate and a driving mechanism used for driving the sealing plate to seal an opening of the mounting cavity, and the mounting cavity is used for placing a mask plate body; when the mask plate body needs to be stored, the mask plate body is placed in the mounting cavity, and the driving mechanism drives the sealing plate to seal the opening of the mounting cavity; when the mask plate body needs to be taken out, the driving mechanism drives the sealing plate to be away from the opening of the mounting cavity, and the mask plate body is taken out of the mounting cavity; the mask plate body can be smoothly taken and placed, the opening of the installation cavity is sealed through the sealing plate, the sealing performance of the installation cavity is guaranteed, and the machining quality of the mask plate is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plate processing, in particular to a mask plate sealing mechanism. Background Art

[0002] Photolithography is one of the most critical steps in semiconductor integrated circuit manufacturing. The photolithography process involves the exposure system accurately transferring the device or circuit pattern, pre-fabricated on a mask, to a photoresist layer pre-coated on the wafer surface or dielectric layer, at the desired location. The development process removes or retains the photoresist in the exposed patterned areas, allowing the device or circuit pattern, pre-fabricated on the mask, to be precisely formed on the wafer surface or dielectric layer. The quality of the photolithography process directly impacts the feature size and product quality of semiconductor devices. The mask serves as the benchmark and blueprint for the pattern being reproduced in the photolithography process, and any defects on the mask can severely impact the accuracy of the final pattern.

[0003] At present, the mask plate is usually stored in a corresponding storage device, and the outer cover is driven by a driving mechanism to close the open end of the storage device to realize the storage of the mask plate. However, since it is difficult to eliminate the gap between the outer cover and the storage device, gas leakage still occurs when the outer cover is closed on the storage device, resulting in poor storage sealing and affecting the processing quality of the mask plate. Utility Model Content

[0004] The utility model aims to solve the deficiencies of the existing technology and provides a mask plate sealing mechanism, which can realize smooth placement and removal of the mask plate body, seal the opening of the installation cavity through the sealing plate, ensure the sealing of the installation cavity, and guarantee the processing quality of the mask plate.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] The utility model provides a mask plate sealing mechanism, comprising a box body with an installation cavity, a sealing plate, and a driving mechanism for driving the sealing plate to close the opening of the installation cavity, wherein the installation cavity is used to place the mask plate body;

[0007] When the mask plate body needs to be stored, the mask plate body is placed in the installation cavity, and the driving mechanism drives the sealing plate to close the opening of the installation cavity;

[0008] When the mask plate body needs to be taken out, the driving mechanism drives the sealing plate away from the opening of the installation cavity to take the mask plate body out of the installation cavity.

[0009] The sealing plate is provided with a first channel corresponding to the opening of the installation cavity, and a first inlet and a first outlet are respectively provided at both ends of the first channel;

[0010] When the mask plate body needs to be processed, the mask plate body is placed in the installation cavity, and the driving mechanism drives the sealing plate to close the installation cavity opening so that the first channel covers the installation cavity opening; the fluid is introduced into the first channel along the first inlet and flows out along the first outlet to achieve cooling treatment at the installation cavity opening.

[0011] The driving mechanism includes a lifting module and an opening and closing module. The lifting module is connected to the opening and closing module in a driving manner. The opening and closing module is connected to the sealing plate in a driving manner. A sealing ring is provided on the side of the sealing plate close to the mounting cavity.

[0012] When the opening end of the installation cavity needs to be sealed, the lifting module drives the opening and closing module to move upward, and the opening and closing module drives the sealing plate to move toward the installation cavity, so that the sealing plate covers the opening end of the installation cavity and the sealing ring abuts the outer peripheral edge of the opening end of the installation cavity.

[0013] Among them, the lifting module includes a sealed warehouse, a drag chain with one end installed in the sealed warehouse, a movable opening arranged in the sealed warehouse, a moving part slidably connected to the open end of the movable opening, a dust-proof part connected to the moving part, and a linear module. The moving part is connected to the other end of the drag chain, and the two ends of the moving part are penetrated. The linear module and the moving part are both driven and connected to the opening and closing module. The linear module drives the moving part to move so that the dust-proof part blocks the movable opening.

[0014] Among them, a accommodating chamber connected to the movable port is provided inside the sealed chamber, the drag chain is located in the accommodating chamber, one end of the accommodating chamber is connected to a dust guide pipe, and a dust removal fan is also installed in the accommodating chamber. The dust removal fan negatively absorbs the air in the accommodating chamber so that the dust in the sealed chamber is discharged through the dust guide pipe.

[0015] Among them, multiple rotating shafts are installed in the sealed chamber, and the dustproof part is sleeved on the rotating shaft. One side of the dustproof part fits the opening side of the inner end of the movable mouth. A gap is left between the dustproof part and the inner wall of the sealed chamber, and the inner side of the dustproof part is surrounded by a space for accommodating the drag chain.

[0016] The opening and closing module includes an opening and closing frame and a driving unit connected to the opening and closing frame. One end of the opening and closing frame is connected to the linear module for driving, and the other end of the opening and closing frame is connected to the moving part. The sealing plate is slidably connected to the opening and closing frame. The driving unit is connected to the sealing plate for driving, and the driving unit drives the sealing plate to move closer to or away from the installation cavity.

[0017] The opening and closing module also includes a protective cover connected to the opening and closing frame, the opening and closing frame, the drive unit and the sealing plate are located in the protective cover, at least two sealing fans are installed on the side of the opening and closing frame facing away from the sealing plate, and the bottom pipeline of the protective cover is connected to a sealed dust exhaust pipe;

[0018] The sealing fan is used for negative pressure adsorption of dust between the protective cover, the opening and closing frame and the sealing plate and discharges the dust along the sealing dust exhaust pipe.

[0019] In which, the mask plate sealing mechanism also includes a multi-way joint, the ends of the dust guide pipe and the sealed dust exhaust pipe are both connected to the multi-way joint, the other end of the multi-way joint is connected to a collecting pipe, and the collecting pipe is equipped with a turbine blower, which is used to extract dust from the dust guide pipe and the sealed dust exhaust pipe and discharge it along the end of the collecting pipe.

[0020] Beneficial effects of the utility model:

[0021] In actual application, when the mask plate body needs to be stored, the mask plate body is placed in the installation cavity, and the driving mechanism drives the sealing plate to close the opening of the installation cavity; when the mask plate body needs to be removed, the driving mechanism drives the sealing plate away from the opening of the installation cavity, and the mask plate body is removed from the installation cavity. The mask plate body is smoothly taken in and placed, and the opening of the installation cavity is sealed by the sealing plate to ensure the sealing of the installation cavity and the processing quality of the mask plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of the mask plate sealing mechanism.

[0023] Figure 2 It is a structural cross-sectional view of the sealing plate.

[0024] Figure 3 Schematic diagram of the explosion structure of the driving mechanism.

[0025] Figure 4 It is a schematic diagram of the connection structure between the lifting module and the opening and closing module.

[0026] Figure 5 Schematic diagram of the explosion structure of the sealed chamber.

[0027] Figure 6 It is a schematic diagram of the fracture structure of the rotating shaft, dustproof parts and sealing chamber structure.

[0028] Figure 7 Schematic diagram of the explosion structure of the opening and closing module.

[0029] Figure 8 This is a schematic diagram of the connection structure between the multi-way connector, the dust guide pipe and the sealed dust exhaust pipe.

[0030] 01. Mask plate body;

[0031] 1. Box body; 101. Installation cavity;

[0032] 2. Sealing plate; 200. First channel; 210. First inlet; 220. First outlet;

[0033] 21. Sealing ring;

[0034] 3. Driving mechanism;

[0035] 31. Lifting module;

[0036] 311. Sealed chamber; 3111. Accommodation chamber; 3112. Dust guide pipe; 3113. Dust removal fan;

[0037] 3114, shaft;

[0038] 312, drag chain; 313, movable opening;

[0039] 314, moving parts; 315, dustproof parts; 316, linear module;

[0040] 32. Opening and closing module;

[0041] 321, opening and closing frame; 3211, sealing fan; 322, driving unit;

[0042] 323, protective cover; 3231, sealed dust exhaust pipe;

[0043] 4. Multi-way connector; 41. Collecting pipe; 42. Turbine fan. DETAILED DESCRIPTION

[0044] To facilitate understanding by those skilled in the art, the present invention is further described below with reference to examples and drawings. Specific implementation methods of the present invention will be described below. It should be noted that in the specific description of these implementation methods, for the sake of clarity and clarity, it is impossible for this specification to provide a detailed description of all features of the actual implementation methods.

[0045] refer to Figures 1 to 8 As shown, the utility model provides a mask plate sealing mechanism, comprising a box body 1 with an installation cavity 101, a sealing plate 2, and a driving mechanism 3 for driving the sealing plate 2 to close the opening of the installation cavity 101, wherein the installation cavity 101 is used to place the mask plate body 01; in actual application, when the mask plate body 01 needs to be stored, the mask plate body 01 is placed in the installation cavity 101, and the driving mechanism 3 drives the sealing plate 2 to close the opening of the installation cavity 101; when the mask plate body 01 needs to be taken out, the driving mechanism 3 drives the sealing plate 2 away from the opening of the installation cavity 101, and the mask plate body 01 is taken out of the installation cavity 101, and the mask plate body 01 is smoothly taken in and placed, and the opening of the installation cavity 101 is sealed by the sealing plate 2, thereby ensuring the sealing of the installation cavity 101 and the processing quality of the mask plate.

[0046] refer to Figure 2As shown, in this embodiment, the sealing plate 2 is provided with a first channel 200 corresponding to the opening of the installation cavity 101, and a first inlet 210 and a first outlet 220 are respectively provided at both ends of the first channel 200; in actual application, when it is necessary to process the mask plate body 01, the mask plate body 01 is placed in the installation cavity 101, and the driving mechanism 3 drives the sealing plate 2 to close the opening of the installation cavity 101, so that the first channel 200 covers the opening of the installation cavity 101; specifically, the fluid is water, and the fluid is introduced into the first channel 200 along the first inlet 210 and flows out along the first outlet 220, so as to make full use of the fluid, save resources, and avoid waste of fluid; the fluid absorbs heat from the sealing plate 2 and the installation cavity 101 during the flow process, thereby realizing cooling treatment of the opening of the installation cavity 101.

[0047] refer to Figure 3 As shown, in this embodiment, the driving mechanism 3 includes a lifting module 31 and an opening and closing module 32, the lifting module 31 is driven and connected to the opening and closing module 32, the opening and closing module 32 is driven and connected to the sealing plate 2, and the sealing plate 2 is provided with a sealing ring 21 on the side close to the installation cavity 101; in actual application, the lifting module 31 is installed on the box body 1, and when the opening end of the installation cavity 101 needs to be sealed, the lifting module 31 drives the opening and closing module 32 to move upward, and the opening and closing module 32 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing plate 2 covers the opening end of the installation cavity 101, and the sealing ring 21 abuts against the outer peripheral edge of the opening end of the installation cavity 101, and the gap between the installation cavity 101 and the sealing plate 2 is smoothly closed by the sealing ring 21, thereby enhancing the sealing performance.

[0048] refer to Figure 4 As shown, in this embodiment, the lifting module 31 includes a sealed chamber 311, a drag chain 312 installed at one end in the sealed chamber 311, a movable opening 313 provided in the sealed chamber 311, a moving part 314 slidably connected to the open end of the movable opening 313, a dustproof part 315 connected to the moving part 314, and a linear module 316, the moving part 314 is connected to the other end of the drag chain 312, the two ends of the moving part 314 pass through, the linear module 316 and the moving part 314 are both driven and connected to the opening and closing module 32, the linear module 316 drives the moving part 314 to move, so that the dustproof part 315 blocks the movable opening 313; refer to Figure 4 、 5As shown, in actual application, the linear module 316 adopts a motor screw module, and the linear module 316 drives the moving part 314 and the opening and closing module 32 to move synchronously, and drives the drag chain 312 to move synchronously with the moving part 314, so that the dustproof part 315 blocks the movable opening 313 to prevent dust from entering the sealed chamber 311, avoid dust splashing, improve the dustproof effect, and improve the cleanliness; specifically, the cable pipelines in the linear module 316 and the opening and closing module 32 are all smoothly passed through the inside of the drag chain 312 along the moving part 314, and the cable pipelines are effectively protected by the drag chain 312, which is convenient for centralized collection and protection of the cable pipelines.

[0049] refer to Figure 5 As shown, in this embodiment, a accommodating chamber 3111 connected to a movable opening 313 is provided inside the sealed bin 311, the drag chain 312 is located in the accommodating chamber 3111, one end of the accommodating chamber 3111 is connected to a dust guide tube 3112, and a dust removal fan 3113 is also installed in the accommodating chamber 3111; in actual application, the drag chain 312 is smoothly hidden in the accommodating chamber 3111, and the structure is compact, which is convenient for storing the drag chain 312, and the dust removal fan 3113 negatively absorbs the air in the accommodating chamber 3111 so that the dust in the sealed bin 311 is discharged by the dust guide tube 3112, and the dust in the sealed bin 311 is uniformly discharged, which is convenient for cleaning the sealed bin 311.

[0050] refer to Figure 5 、 6 As shown, in this embodiment, a plurality of rotating shafts 3114 are installed in the sealing chamber 311, and the dustproof member 315 is sleeved on the rotating shaft 3114. One side of the dustproof member 315 is in contact with the inner end opening side of the movable opening 313. A gap is left between the dustproof member 315 and the inner wall of the sealing chamber 311. The inner side of the dustproof member 315 is surrounded by a space for accommodating the drag chain 312. In actual application, refer to Figure 4 、 6 As shown, the dustproof part 315 is a dustproof belt, and the linear module 316 drives the movable part 314 to move, driving the dustproof part 315 to move back and forth between the rotating shaft 3114. The dustproof part 315 stably supports the movable part 314, and the dust in the sealed chamber 311 flows along the gap between the dustproof part 315 and the sealed chamber 311 to the dust guide tube 3112, which is convenient for discharging dust; because one side of the dustproof part 315 fits the inner end opening side of the movable port 313, the dustproof part 315 effectively blocks the movable port 313 to prevent dust from entering the sealed chamber 311.

[0051] refer to Figure 7As shown, in this embodiment, the opening and closing module 32 includes an opening and closing frame 321 and a driving unit 322 connected to the opening and closing frame 321. One end of the opening and closing frame 321 is driven and connected to the linear module 316, and the other end of the opening and closing frame 321 is connected to the moving part 314. The sealing plate 2 is slidably connected to the opening and closing frame 321, and the driving unit 322 is driven and connected to the sealing plate 2. The driving unit 322 drives the sealing plate 2 to move closer to or away from the installation cavity 101. In actual application, the driving unit 322 adopts a cylinder, an electric cylinder or an oil cylinder, and the lifting module 31 drives the constant The warm opening and closing module 32 moves downward, and the opening and closing module 32 drives the sealing plate 2 to be at the end away from the installation cavity 101, and then the mask plate body 01 is placed in the installation cavity 101. After the mask plate body 01 is placed, the lifting module 31 drives the opening and closing module 32 to move upward to the required position, and the opening and closing module 32 drives the sealing plate 2 to move toward the installation cavity 101, so that the sealing ring 21 abuts the outer peripheral edge of the open end of the installation cavity 101, so that the sealing ring 21 can smoothly close the gap between the installation cavity 101 and the sealing plate 2, thereby ensuring the sealing performance between the sealing plate 2 and the box body 1.

[0052] refer to Figure 7 As shown, the opening and closing module 32 also includes a protective cover 323 connected to the opening and closing frame 321, the opening and closing frame 321, the driving unit 322 and the sealing plate 2 are located in the protective cover 323, and at least two sealing fans 3211 are installed on the side of the opening and closing frame 321 away from the sealing plate 2. The bottom pipeline of the protective cover 323 is connected to a sealed dust exhaust pipe 3231; the sealed fan 3211 is used to negatively absorb dust between the protective cover 323, the opening and closing frame 321 and the sealing plate 2 and to move dust along the sealing plate 2. The dust is discharged through the sealing dust exhaust pipe 3231; in actual application, when the sealing plate 2 is separated from the installation cavity 101, the sealing fan 3211 is started. The sealing fan 3211 absorbs the dust between the protective cover 323, the opening and closing frame 321 and the sealing plate 2 through negative pressure and discharges it along the sealing dust exhaust pipe 3231, which is convenient for cleaning the dust between the protective cover 323, the opening and closing frame 321 and the sealing plate 2, and is convenient for the sealing plate 2 and the installation cavity 101 to be in a clean and tidy use environment, thereby improving the processing quality of the mask plate body 01.

[0053] refer to Figure 8 As shown, in this embodiment, the mask plate sealing mechanism also includes a multi-way joint 4, the ends of the dust guide tube 3112 and the sealed dust exhaust tube 3231 are both connected to the multi-way joint 4, and the other end of the multi-way joint 4 is connected to a collecting pipe 41, and the collecting pipe 41 is equipped with a turbine fan 42, and the turbine fan 42 is used to extract dust from the dust guide tube 3112 and the sealed dust exhaust tube 3231 and discharge it along the end of the collecting pipe 41, so as to facilitate the centralized collection and treatment of dust discharged from the sealing chamber 311 and the protective cover 323, thereby improving the dust treatment efficiency.

[0054] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention is disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of the above-disclosed technical contents without departing from the scope of the technical solution of the present invention. However, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technology of the present invention, which do not depart from the content of the technical solution of the present invention, are within the scope of the technical solution of the present invention.

Claims

1. A mask plate sealing mechanism, characterized in that: It comprises a box body (1) having an installation cavity (101), a sealing plate (2), and a driving mechanism (3) for driving the sealing plate (2) to close the opening of the installation cavity (101); the installation cavity (101) is used to place a mask plate body (01); When the mask plate body (01) needs to be stored, the mask plate body (01) is placed in the installation cavity (101), and the driving mechanism (3) drives the sealing plate (2) to close the opening of the installation cavity (101); When the mask plate body (01) needs to be taken out, the driving mechanism (3) drives the sealing plate (2) away from the opening of the installation cavity (101), and the mask plate body (01) is taken out of the installation cavity (101).

2. The mask sealing mechanism according to claim 1, wherein: The sealing plate (2) is provided with a first channel (200) corresponding to the opening of the installation cavity (101), and a first inlet (210) and a first outlet (220) are respectively provided at both ends of the first channel (200); When the mask plate body (01) needs to be processed, the mask plate body (01) is placed in the installation cavity (101), and the driving mechanism (3) drives the sealing plate (2) to close the opening of the installation cavity (101), so that the first channel (200) covers the opening of the installation cavity (101); the fluid is introduced into the first channel (200) along the first inlet (210) and flows out along the first outlet (220) to achieve temperature reduction treatment of the opening of the installation cavity (101).

3. The mask sealing mechanism according to claim 1, wherein: The driving mechanism (3) comprises a lifting module (31) and an opening and closing module (32), wherein the lifting module (31) is drivingly connected to the opening and closing module (32), and the opening and closing module (32) is drivingly connected to the sealing plate (2), and a sealing ring (21) is provided on a side of the sealing plate (2) close to the installation cavity (101); When the opening end of the installation cavity (101) needs to be sealed, the lifting module (31) drives the opening and closing module (32) to move upward, and the opening and closing module (32) drives the sealing plate (2) to move toward the installation cavity (101), so that the sealing plate (2) covers the opening end of the installation cavity (101) and the sealing ring (21) abuts against the outer peripheral edge of the opening end of the installation cavity (101).

4. The mask sealing mechanism according to claim 3, characterized in that: The lifting module (31) comprises a sealed chamber (311), a drag chain (312) with one end installed in the sealed chamber (311), a movable opening (313) arranged in the sealed chamber (311), a moving part (314) slidably connected to the open end of the movable opening (313), a dustproof part (315) connected to the moving part (314), and a linear module (316). The moving part (314) is connected to the other end of the drag chain (312), and both ends of the moving part (314) pass through. The linear module (316) and the moving part (314) are both driven and connected to the opening and closing module (32). The linear module (316) drives the moving part (314) to move so that the dustproof part (315) blocks the movable opening (313).

5. The mask sealing mechanism according to claim 4, characterized in that: The sealed chamber (311) is provided with a receiving chamber (3111) in communication with the movable opening (313), the drag chain (312) is located in the receiving chamber (3111), one end of the receiving chamber (3111) is in communication with a dust guide pipe (3112), and a dust removal fan (3113) is also installed in the receiving chamber (3111), and the dust removal fan (3113) negatively absorbs the air in the receiving chamber (3111) so that the dust in the sealed chamber (3111) is discharged through the dust guide pipe (3112).

6. The mask sealing mechanism according to claim 5, characterized in that: A plurality of rotating shafts (3114) are installed in the sealing chamber (311), and the dustproof member (315) is sleeved on the rotating shaft (3114). One side of the dustproof member (315) is in contact with the inner opening side of the movable opening (313). A gap is left between the dustproof member (315) and the inner wall of the sealing chamber (311), and the inner side of the dustproof member (315) is surrounded by a space for accommodating the drag chain (312).

7. The mask sealing mechanism according to claim 5, wherein: The opening and closing module (32) includes an opening and closing frame (321) and a driving unit (322) connected to the opening and closing frame (321); one end of the opening and closing frame (321) is drivingly connected to the linear module (316); the other end of the opening and closing frame (321) is connected to the moving member (314); the sealing plate (2) is slidably connected to the opening and closing frame (321); the driving unit (322) is drivingly connected to the sealing plate (2); and the driving unit (322) drives the sealing plate (2) to approach or move away from the installation cavity (101); The opening and closing module (32) further comprises a protective cover (323) connected to the opening and closing frame (321); the opening and closing frame (321), the drive unit (322) and the sealing plate (2) are located within the protective cover (323); at least two sealing fans (3211) are installed on a side of the opening and closing frame (321) facing away from the sealing plate (2); and a sealed dust exhaust pipe (3231) is connected to the bottom pipeline of the protective cover (323); The sealing fan (3211) is used for negative pressure absorption of dust between the protective cover (323), the opening and closing frame (321) and the sealing plate (2) and discharges the dust along the sealing dust exhaust pipe (3231).

8. The mask sealing mechanism according to claim 7, wherein: The mask plate sealing mechanism further comprises a multi-way joint (4), the ends of the dust guide pipe (3112) and the sealed dust exhaust pipe (3231) are both connected to the multi-way joint (4), the other end of the multi-way joint (4) is connected to a collecting pipe (41), and the collecting pipe (41) is equipped with a turbine blower (42), and the turbine blower (42) is used to extract dust from the dust guide pipe (3112) and the sealed dust exhaust pipe (3231) and discharge it along the end of the collecting pipe (41).

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