Etching cavity heat dissipation mechanism and etching machine

Abstract

The utility model relates to etching equipment, in particular to an etching cavity heat dissipation mechanism and an etching machine comprising the etching cavity heat dissipation mechanism. The etching cavity heat dissipation mechanism comprises an air inlet pipeline, a jet head and an exhaust port. One end of the air inlet pipeline is connected to a compressed air source for providing compressed air, and the jet head is connected to the other end of the air inlet pipeline and is arranged in a functional space between a shell and an etching cavity of the etching machine. The jet head comprises a plurality of annularly arranged air outlet channels, and the air outlet directions of the multiple air outlet channels all face the center position of the cover plate of the etching cavity. The exhaust port is formed in the shell of the etching machine and is communicated with the outside of the etching machine and the functional space of the etching machine, so that the compressed air can carry heat to escape after passing through the outer wall of the cover plate, and the heat dissipation efficiency is relatively high. A medium source and a recycling mechanism do not need to be additionally arranged, the equipment cost and the raw material cost are low, and high practicability is achieved.

Description

Technical Field

[0001] The utility model relates to etching equipment, in particular to an etching cavity heat dissipation mechanism and an etcher. Background Art

[0002] Plasma etching is an essential process in the fabrication of very large-scale integrated circuits (VLSIs). Because high wafer etching precision is required and is affected by multiple factors, precise monitoring and real-time adjustment of relevant parameters are required during wafer processing.

[0003] Since heat is generated during the etching process and the etching chamber is in a nearly closed state, energy is easily accumulated in the etching chamber, which in turn affects the quality of the wafer. Therefore, it is necessary to set a heat dissipation mechanism in the functional space between the etcher housing and the etching chamber to cool the top cover of the etching chamber. At present, a heat dissipation pipe is often set above the top cover of the etching chamber. The heat dissipation pipe is connected to a medium source at both ends. The heat dissipation medium flows through the part above the top cover of the heat dissipation pipe and performs heat exchange to achieve cooling. This method requires a separate medium source, and the overall cost is relatively high. Utility Model Content

[0004] The purpose of the utility model is to provide an etching chamber heat dissipation mechanism and an etching machine with low cost.

[0005] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0006] An etching chamber heat dissipation mechanism, comprising:

[0007] an air inlet pipe connected to a compressed air source for providing compressed air;

[0008] An air jet head is connected to an end of the air inlet pipe away from the compressed air source and is disposed in a functional space between the housing of the etcher and the etching chamber. The air jet head includes a plurality of annularly arranged air outlet channels, and the directions of the plurality of air outlet channels are all toward the center position of the cover plate of the etching chamber;

[0009] An exhaust port is provided on the housing of the etcher and is used to connect the outside of the etcher and the functional space of the etcher.

[0010] Optionally, the nozzle head includes a nozzle portion, the nozzle portion is configured in a circular ring shape, and the plurality of air outlet channels are embedded in the nozzle portion and arranged along the circumference of the nozzle portion.

[0011] Optionally, the diameter of the outer circle of the injection portion is 0.9 to 1.3 times the circumscribed diameter of the cover plate, and the circumscribed diameter of the cover plate is the diameter of the circumscribed circle of the projection of the cover plate on the horizontal plane.

[0012] Optionally, the nozzle further includes a connecting portion, the connecting portion including a supporting surface connected between the outer circle of the injection portion and the air intake duct, and a closing surface connected to the inner circle of the injection portion and closing the inner circle of the injection portion.

[0013] Optionally, the angle between the extension direction of the air outlet channel and the vertical direction is any value between 30° and 60°.

[0014] Optionally, the nozzle is arranged between the exhaust port and the cover plate, and the exhaust port is located directly above the cover plate.

[0015] Optionally, a pressure regulating valve and a flow meter are provided on the air intake pipe.

[0016] Optionally, the air inlet pipe is an independent pipeline having only two ends, and the two ends are respectively connected to the compressed air source and the injection head.

[0017] In a second aspect, the present invention further provides an etching machine, comprising the above-mentioned etching chamber heat dissipation mechanism.

[0018] The beneficial effects of the present invention are as follows: compressed air is guided to the nozzle through the air inlet duct, and the compressed air is sprayed to the center of the cover plate of the etching chamber through multiple air outlet channels. After being sprayed directly to the center of the cover plate, the compressed air spreads to the surrounding area and is discharged out of the etcher through the exhaust port, so that the compressed air carries the heat of the cover plate and dissipates into the air, thereby achieving heat dissipation of the cover plate. Since the compressed air continuously takes away the heat of the cover plate and quickly carries the heat to dissipate into the atmosphere, the heat dissipation efficiency of the heat dissipation mechanism is relatively high. Compressed air is required in many places in the etcher, so the etcher and its supporting equipment include a compressed air source for compressed air. The original compressed air source is directly used for heat dissipation without the need for recycling, and the equipment and raw material costs are relatively low, which has high practicality.

[0019] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic structural diagram of the air intake pipe and the air injection head shown in the first embodiment of the present invention;

[0021] Figure 2 This is a bottom view of the nozzle shown in the first embodiment of the present invention;

[0022] Figure 3 for Figure 2 Cross-sectional view at AA'.

[0023] Legend: 1-intake pipe, 11-pressure regulating valve, 12-flow meter, 2-injection head, 21-injection part, 211-air outlet channel, 22-connecting part, 221-support surface, 222-closing surface. DETAILED DESCRIPTION

[0024] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0027] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0028] See Figure 1 、 Figure 2 and Figure 3The heat dissipation mechanism of the etching chamber protected by the utility model application includes an air inlet pipe 1, a nozzle 2 and an exhaust port. One end of the air inlet pipe 1 is connected to a compressed air source that provides compressed air, and the nozzle 2 is connected to the other end of the air inlet pipe 1, and is arranged in the functional space between the shell of the etcher and the etching chamber. The nozzle 2 includes a plurality of annularly arranged air outlet channels 211, and the air outlet directions of the plurality of air outlet channels 211 are all toward the center position of the cover plate of the etching chamber. The exhaust port is arranged in the shell of the etcher, connecting the outside of the etcher and the functional space of the etcher, so that the compressed air can carry heat and dissipate after passing through the outer wall of the cover plate.

[0029] The compressed air is guided to the nozzle 2 through the air inlet pipe 1, and the compressed air is sprayed to the center of the cover plate of the etching chamber through multiple air outlet channels 211. After being sprayed directly to the center of the cover plate, the compressed air spreads to the surrounding area and is discharged outside the etcher through the exhaust port, so that the compressed air carries the heat of the cover plate and dissipates into the air, thereby achieving heat dissipation of the cover plate. Since the compressed air continuously takes away the heat of the cover plate and quickly carries the heat to dissipate into the atmosphere, the heat dissipation efficiency of the heat dissipation mechanism is relatively high. Compressed air is required in many places in the etcher, so the etcher and its supporting equipment include a compressed air source for compressed air. Directly using the original compressed air source for heat dissipation does not require recycling, and the equipment and raw material costs are relatively low, which has high practicality.

[0030] In some embodiments, the nozzle head 2 includes a nozzle portion 21, which is configured in a circular ring shape. A plurality of air outlet channels 211 are embedded in the nozzle portion 21 and arranged along the circumference of the nozzle portion 21. This facilitates the uniform injection of compressed air from the plurality of air outlet channels 211 onto the center of the cover plate and spreads evenly, thereby improving the uniformity of heat dissipation from the cover plate.

[0031] In some embodiments, the outer diameter of the injection portion 21 is 0.9 to 1.3 times the outer diameter of the cover plate, for example, 0.9, 1, 1.1, 1.2, or 1.3 times. The outer diameter of the cover plate is the diameter of the outer circle of the cover plate on a horizontal plane. By limiting the ratio of the outer diameter of the injection portion 21 to the diameter of the cover plate to within the above ratio range, it is possible to prevent compressed gas from escaping through the exhaust port before reaching the edge of the cover plate, resulting in a decrease in heat dissipation. This also helps control the distance between the injection head 2 and the cover plate, saving space and helping to improve heat dissipation efficiency.

[0032] In some embodiments, the nozzle head 2 further includes a connecting portion 22, which includes a supporting surface 221 connected between the outer circle of the injection portion 21 and the air intake pipe 1, and also includes a closing surface 222 connected to the inner circle of the injection portion 21 to close the inner circle of the injection portion 21.

[0033] In some embodiments, the angle between the extension direction of the air outlet channel 211 and the vertical direction is any value between 30° and 60°, for example, it can be any value between 30°, 40°, 45°, 50° and 60°, so as to facilitate the compressed air to spread toward the edge of the cover.

[0034] In some embodiments, the nozzle head 2 is arranged between the exhaust port and the cover plate, and the exhaust port is located directly above the cover plate, so that the compressed air sprayed at the center of the cover plate is evenly diffused to the surroundings and then enters the atmosphere from the exhaust port, which helps to improve the uniformity of heat dissipation of the cover plate.

[0035] In some embodiments, a pressure regulating valve 11 and a flow meter 12 are provided on the air inlet pipe 1 to help monitor and adjust the flow of compressed air in real time to prevent excessive or insufficient heat dissipation, which is not conducive to the etching operation in the etching chamber.

[0036] In some embodiments, the air inlet pipe 1 is an independent pipeline having only two ends, which are respectively connected to the compressed gas source and the nozzle, to prevent gas leakage in the branch after a period of use, thereby causing the pressure and flow in the air inlet pipe 1 and the exhaust port to fail to meet the heat dissipation requirements, which helps to improve the service life of the etching chamber heat dissipation mechanism.

[0037] Please refer to the following examples for details.

[0038] Example 1:

[0039] The etcher shown in a preferred embodiment of the present application includes a shell, an etching chamber and an etching chamber heat dissipation mechanism. The etching chamber is a space for performing etching operations, and its overall structure is box-shaped. The top of the etching chamber is a horizontally arranged cover plate. The cover plate is made of ceramic material and is constructed into a spherical surface with a bulge in the middle, and its projection on the horizontal plane is a circle. The shell of the etcher is used to protect the etching chamber and other mechanisms. The etching chamber is entirely built into the interior of the shell. A functional space is formed between the outer wall of the etching chamber and the inner wall of the shell for accommodating functional mechanisms such as an electrode system, a radio frequency unit and an air supply system. Among them, the air supply system includes a compressed air source for providing compressed air, and the etching chamber heat dissipation mechanism connected to the compressed air source is also arranged in the functional space for reducing the temperature of the cover plate of the etching chamber, thereby realizing heat dissipation of the etching chamber and maintaining the etching environment in the etching chamber.

[0040] See Figure 1 、 Figure 2 and Figure 3The etching chamber heat dissipation mechanism includes an air intake pipe 1, a nozzle 2 and an exhaust port. A circular mesh exhaust port is provided in the shell and is located directly above the cover plate. The nozzle 2 is located in the functional space and is provided between the exhaust port and the cover plate. Its projection on the horizontal plane is circular and is coaxial with the projection of the cover plate on the horizontal plane. The air intake pipe 1 is connected between the nozzle 2 and the compressed air source, and is used to introduce compressed air into the nozzle 2 and spray it on the upper surface of the cover plate through the nozzle 2 to achieve cooling of the cover plate.

[0041] The nozzle head 2 includes a spray portion 21 and a connecting portion 22. The spray portion 21 is constructed in a circular ring shape and is arranged horizontally. A plurality of air outlet channels 211 that penetrate the spray portion 21 longitudinally are evenly arranged along the circumference, and the arrangement path of the plurality of air outlet channels 211 is coaxial with the spray portion 21. The angle between the air outlet direction of the air outlet channel 211 and the vertical direction is 30°, and the extension lines of each air outlet channel 211 intersect at the center of the cover plate. The diameter of the outer circle of the spray portion 21 is 1.05 times the diameter of the projection of the cover plate on the horizontal plane. The connecting portion 22 includes a supporting surface 221 and a closing surface 222. The supporting surface 221 is an annular arc surface constructed to be connected end to end, forming a truncated cone-shaped structure with two open ends. One end is connected to the outer circle edge of the spray portion 21, and the other end is connected to the end of the air intake duct 1. It is used to connect the air intake duct 1 and each air outlet channel 211 and support the spray portion 21. The closing surface 222 is configured to be circular, and its edge is connected to the edge of the inner circle of the injection portion 21, so that the inner circle of the injection portion 21 is closed, so that the compressed gas entering the connecting portion 22 from the air intake duct 1 only leaves the injection head 2 through each air outlet channel 211.

[0042] The air inlet pipe 1 is directly connected between the connection portion 22 of the air jet head 2 and the compressed air source, and no branches are provided on the air inlet pipe 1. This prevents insufficient air pressure caused by gas diversion, which in turn affects the heat dissipation effect of the cover plate. A flow meter 12 is installed in the air inlet pipe 1 near the air jet head 2. A pressure regulating valve 11 is installed on the side of the flow meter 12 away from the air jet head 2. The flow meter 12 and the pressure regulating valve 11 are electrically connected to facilitate adjusting the heat dissipation effect of the etching chamber by adjusting the compressed air pressure.

[0043] The beneficial effects of the utility model are: the heat of the cover plate is taken away by compressed air and quickly dissipated into the atmosphere, which has high heat dissipation efficiency and does not require additional medium source and recovery mechanism, greatly reducing the equipment cost and raw material cost of heat dissipation, and has high practicality.

[0044] Example 2:

[0045] The only difference between this embodiment and the first embodiment is that the closed surface 222 in this embodiment is configured in a conical shape to assist in the diversion of the compressed gas.

[0046] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. An etching chamber heat dissipation mechanism, characterized in that: include: An air inlet pipe (1) connected to a compressed air source for providing compressed air; An air jet head (2) is connected to an end of the air inlet pipe (1) away from the compressed air source and is disposed in a functional space between the housing of the etcher and the etching chamber. The air jet head (2) includes a plurality of annularly arranged air outlet channels (211), and the directions of the plurality of air outlet channels (211) are all directed toward the center position of the cover plate of the etching chamber. An exhaust port is provided on the housing of the etcher and is used to connect the outside of the etcher and the functional space of the etcher.

2. The etching chamber heat dissipation mechanism according to claim 1, characterized in that: The jet head (2) comprises a jet portion (21), the jet portion (21) is configured in a circular ring shape, and a plurality of air outlet channels (211) are embedded in the jet portion (21) and arranged along the circumference of the jet portion (21).

3. The etching chamber heat dissipation mechanism according to claim 2, wherein: The diameter of the outer circle of the injection portion (21) is 0.9 to 1.3 times the circumscribed diameter of the cover plate, and the circumscribed diameter of the cover plate is the diameter of the circumscribed circle of the projection of the cover plate on the horizontal plane.

4. The etching chamber heat dissipation mechanism according to claim 2, wherein: The jet head (2) further comprises a connecting portion (22), wherein the connecting portion (22) comprises a supporting surface (221) connected between the outer circle of the jet portion (21) and the air intake pipe (1), and a closing surface (222) connected to the inner circle of the jet portion (21) and closing the inner circle of the jet portion (21).

5. The etching chamber heat dissipation mechanism according to claim 1, wherein: The included angle between the extension direction of the air outlet channel (211) and the vertical direction is any value between 30° and 60°.

6. The etching chamber heat dissipation mechanism according to claim 1, wherein: The nozzle head (2) is arranged between the exhaust port and the cover plate, and the exhaust port is located directly above the cover plate.

7. The etching chamber heat dissipation mechanism according to claim 1, wherein: The air inlet pipe (1) is provided with a pressure regulating valve (11) and a flow meter (12).

8. The etching chamber heat dissipation mechanism according to claim 1, wherein: The air intake pipe (1) is an independent pipeline having only two ends, and the two ends are respectively connected to the compressed air source and the injection head.

9. An etching machine, characterized in that: It comprises the etching chamber heat dissipation mechanism as described in any one of claims 1 to 8.

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