Laser generation adjusting device

Abstract

The utility model relates to the technical field of wafer processing, and relates to a laser generation adjusting device. According to the utility model, the optical lens is arranged on the rotary adjusting seat, the rotary adjusting seat is rotatably arranged on the main body bracket through the synchronous ring, the optical lens on the optical lens is driven to rotate by rotating the rotary adjusting seat, and the shape of a light spot is corrected by central rotation, so that the shape of the laser light spot is ensured; the fixing bolt penetrates through the adjusting groove and is connected with the threaded hole in the main body support, the position of the rotated rotary adjusting base is fixed through the fixing bolt, it can be guaranteed that the adjusted rotary adjusting base does not slide, and the adjusting precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a laser generating and regulating device. Background Art

[0002] With the development of the semiconductor industry and integrated circuits in China, a large amount of technology is needed to support national development. At present, the wafer laser grooving process generally includes three steps: wafer coating, wafer laser grooving and wafer cleaning. After the wafer enters the laser grooving machine, it will be coated with glue, grooved and cleaned in sequence.

[0003] In traditional wafer laser cutting equipment, the spot and energy size of a fixed-power laser beam are fixed. During debugging and long-term use, the incident spot is often not absolutely circular. During calibration, the laser needs to be disassembled and adjusted as a whole. The actual operation is cumbersome and the structure is complex. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a laser generating and adjusting device which can correct the shape of a light spot by rotating at the center, ensure the shape of the laser light spot and improve the adjustment accuracy.

[0005] In order to solve the above technical problems, the technical solutions adopted by the present invention are as follows:

[0006] A laser generating and adjusting device, comprising:

[0007] A main body bracket, on which a rotation hole is provided;

[0008] A rotation adjustment seat is rotatably mounted on the rotation hole. A synchronization ring is provided on the rotation hole. The rotation adjustment seat is connected to the synchronization ring.

[0009] An optical lens is arranged on the rotating adjustment seat, an optical lens is arranged on the optical lens, and the rotating adjustment seat is used to drive the optical lens on the optical lens to rotate;

[0010] Wherein, the rotation adjustment seat is provided with an adjustment slot, the adjustment slot is provided with a fixing bolt, the main body bracket is provided with a threaded hole, and the fixing bolt passes through the adjustment slot and is connected with the threaded hole.

[0011] In one embodiment of the present utility model, a rotating retaining ring is provided on the rotating hole, a rotating cylinder is provided on the rotating adjustment seat, a limiting retaining edge is provided on one side of the rotating cylinder, the synchronous ring and the limiting retaining edge are respectively provided on both sides of the rotating retaining ring, the outer wall of the rotating cylinder abuts against the inner wall of the rotating retaining ring, and the synchronous ring is connected to the rotating cylinder.

[0012] In one embodiment of the present invention, mounting positions are provided on both sides of the rotating retaining ring, and protective rings are clamped on the mounting positions. The protective rings on both sides of the rotating retaining ring are respectively in contact with the rotating cylinder and the synchronous ring. Screws are provided on the synchronous ring, and the synchronous ring is connected to the rotating cylinder through screws.

[0013] In one embodiment of the present utility model, the adjustment groove is an arc-shaped structure, a through groove is provided on the bottom surface of the adjustment groove, the through groove is concentrically arranged with the adjustment groove, the fixing bolt passes through the through groove and is connected to the threaded hole, and anti-slip grooves are provided on the bottom surface of the adjustment groove.

[0014] In one embodiment of the present invention, anti-slip protrusions are evenly arranged on the edge of the rotation adjustment seat, the anti-slip protrusions are connected to the rotation adjustment seat through an arc surface, anti-slip grooves are arranged between adjacent anti-slip protrusions, and anti-slip corrugations are arranged on the arc surface.

[0015] In one embodiment of the present invention, a plurality of threaded holes are evenly arranged on the main body bracket, a mounting hole matching the threaded hole is arranged on the rotation adjustment seat, and the fixing bolt passes through the mounting hole and is connected to the threaded hole to adjust the fixed angle of the optical lens rotation.

[0016] In one embodiment of the present invention, a mounting seat is provided on the optical lens, a mounting groove matching the optical lens is provided on the mounting seat, a fixing groove is provided on the mounting groove, a plastic ring is provided on the fixing groove, the optical lens is provided on the mounting groove, and the mounting seat is provided on the rotating adjustment seat.

[0017] In one embodiment of the present invention, a screw hole is provided on the rotation adjustment seat, an annular groove is provided on the inner wall of the screw hole, a sealing ring is provided on the annular groove, a threaded surface is provided on the outer wall of the mounting seat, the mounting seat is screwed and connected to the screw hole, and the mounting seat is pressed on the sealing ring so that the sealing ring is clamped on the optical lens.

[0018] In one embodiment of the present invention, a mounting tube is provided on the optical lens, a plurality of anti-slip grooves are evenly provided on the outer side wall of the mounting tube, and a plurality of slots are provided on the mounting tube, and the slots are arranged opposite to the anti-slip grooves.

[0019] In one embodiment of the present invention, a mounting opening is provided on the main frame, connecting through holes are provided on the side walls of the mounting opening, and guiding through holes are provided at the four corners of the mounting opening.

[0020] Beneficial effects of the utility model:

[0021] The optical lens of the utility model is arranged on a rotation adjustment seat, and the rotation adjustment seat is rotatably arranged on the main bracket through a synchronization ring. The optical lens on the optical lens is driven to rotate by rotating the rotation adjustment seat, and the central rotation is used to correct the shape of the light spot to ensure the shape of the laser light spot; the fixing bolt is passed through the adjustment groove and connected with the threaded hole on the main bracket, and the rotation adjustment seat after rotation is fixed in position by the fixing bolt, which can ensure that the rotation adjustment seat does not slide after adjustment, thereby improving the adjustment accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of a laser generating and adjusting device of the present utility model.

[0023] Figure 2 It is an explosion diagram of the utility model.

[0024] Figure 3 It is a cross-sectional view of the present utility model.

[0025] Explanation of the numbers in the figure: 1. Main bracket; 11. Mounting opening; 12. Connecting through hole; 13. Guide through hole; 2. Rotation adjustment seat; 21. Adjustment slot; 211. Rotation hole; 212. Rotation retaining ring; 213. Rotation cylinder; 22. Through slot; 23. Fixing bolt; 24. Mounting hole; 241. Threaded hole; 3. Optical lens; 31. Mounting seat; 311. Screw hole; 32. Mounting cylinder; 33. Anti-skid groove; 34. Slot; 35. Plastic ring; 36. Sealing ring; 4. Optical lens; 5. Protective ring; 51. Synchronous ring; 6. Anti-skid protrusion; 61. Arc surface; 62. Anti-skid slot. DETAILED DESCRIPTION

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0027] Reference Figure 1-3 As shown, a laser generating and adjusting device comprises:

[0028] The main frame 1 is provided with a rotation hole 211;

[0029] The rotation adjustment seat 2 is rotated on the rotation hole 211. The rotation hole 211 is provided with a synchronization ring 51. The rotation adjustment seat 2 is connected to the synchronization ring 51.

[0030] An optical lens 3 is provided on the rotating adjustment seat 2. An optical lens 4 is provided on the optical lens 3. The rotating adjustment seat 2 is used to drive the optical lens 4 on the optical lens 3 to rotate.

[0031] The rotation adjustment seat 2 is provided with an adjustment slot 21 , the adjustment slot 21 is provided with a fixing bolt 23 , the main bracket 1 is provided with a threaded hole 241 , and the fixing bolt 23 passes through the adjustment slot 21 and is connected to the threaded hole 241 .

[0032] The optical lens 3 of the present invention is arranged on the rotating adjustment seat 2, and the rotating adjustment seat 2 is rotated on the main bracket 1 through the synchronous ring 51. The optical lens 4 on the optical lens 3 is driven to rotate by rotating the rotating adjustment seat 2, and the central rotation is used to correct the shape of the light spot to ensure the shape of the laser spot; the fixing bolt 23 passes through the adjustment groove 21 and is connected to the threaded hole 241 on the main bracket 1. The rotating adjustment seat 2 after rotation is fixed in position by the fixing bolt 23, which can ensure that there is no sliding on the rotating adjustment seat 2 after adjustment, thereby improving the adjustment accuracy.

[0033] In one embodiment of the present utility model, a rotating block ring 212 is provided on the rotating hole 211, a rotating cylinder 213 is provided on the rotating adjustment seat 2, a limiting rib is provided on one side of the rotating cylinder 213, the synchronous ring 51 and the limiting rib are respectively provided on both sides of the rotating block ring 212, the outer wall of the rotating cylinder 213 abuts against the inner wall of the rotating block ring 212, and the synchronous ring 51 is connected to the rotating cylinder 213.

[0034] Specifically, a rotating retaining ring 212 is provided on the rotating hole 211. The rotating retaining ring 212 can guide the rotating cylinder 213 in rotation to ensure the rotation accuracy of the rotating adjustment seat 2, and then ensure the adjustment accuracy of the optical lens 4. The central rotation is used to correct the shape of the light spot to ensure the shape of the laser spot.

[0035] In one embodiment of the present invention, mounting positions are provided on both sides of the rotating retaining ring 212, and a protective ring 5 is clamped on the mounting position. The protective rings 5 ​​on both sides of the rotating retaining ring 212 are respectively in contact with the rotating cylinder 213 and the synchronous ring 51. Screws are provided on the synchronous ring 51, and the synchronous ring 51 is connected to the rotating cylinder 213 through screws.

[0036] Specifically, the protective rings 5 ​​on both sides of the rotating retaining ring 212 are respectively in contact with the rotating cylinder 213 and the synchronous ring 51. The protective rings 5 ​​are made of plastic material. The protective rings 5 ​​can provide support for the rotation of the rotating adjustment seat 2. The protective rings 5 ​​made of plastic material can ensure the smooth rotation of the rotating adjustment seat 2 and ensure the convenience of adjustment.

[0037] In one embodiment of the present utility model, the adjustment groove 21 is an arc-shaped structure, and a through groove 22 is provided on the bottom surface of the adjustment groove 21. The through groove 22 is concentrically arranged with the adjustment groove 21. The fixing bolt 23 passes through the through groove 22 and is connected to the threaded hole 241. The bottom surface of the adjustment groove 21 is provided with anti-slip grooves.

[0038] Specifically, the through slot 22 is concentrically arranged with the adjustment slot 21. When fine-tuning the rotation adjustment seat 2, it is only necessary to loosen and adjust the fixing bolt 23. At the same time, the fixing bolt 23 can also provide a certain guiding effect on the rotation of the rotation adjustment seat 2, ensuring the stability when rotating the rotation adjustment seat 2. The anti-slip texture provided on the bottom surface of the adjustment slot 21 can lock the fixing bolt 23 on the rotation adjustment seat 2 without sliding, thereby improving the adjustment accuracy.

[0039] In one embodiment of the present utility model, anti-slip protrusions 6 are evenly provided on the edge of the rotation adjustment seat 2, the anti-slip protrusions 6 are connected to the rotation adjustment seat 2 through an arc surface 61, anti-slip grooves 62 are provided between adjacent anti-slip protrusions 6, and anti-slip corrugations are provided on the arc surface 61.

[0040] Specifically, anti-slip grooves 62 are provided between adjacent anti-slip protrusions 6 to facilitate rotation of the rotary adjustment seat 2. The anti-slip corrugations provided on the arc surface 61 can avoid hand slippage during adjustment and ensure adjustment accuracy.

[0041] In one embodiment of the present invention, a plurality of threaded holes 241 are evenly arranged on the main body bracket 1, and a mounting hole 24 matching the threaded hole 241 is arranged on the rotation adjustment seat 2. The fixing bolt 23 passes through the mounting hole 24 and is connected to the threaded hole 241 to rotate and adjust the fixed angle of the optical lens 4.

[0042] Specifically, a plurality of threaded holes 241 are evenly arranged on the main bracket 1. By cooperating with the mounting holes 24 on the rotating adjustment seat 2, the optical lens 4 can be rotated to adjust the fixed angle, and the angle of the optical lens 4 can be quickly adjusted to a fixed angle. At the same time, the adjustment slot 21 on the rotating adjustment seat 2 is rotated so that it is arranged relative to the threaded hole 241 on the main bracket 1 to achieve fine-tuning of the rotating adjustment seat 2. After the fine-tuning is completed, the rotating adjustment seat 2 is locked by the fixing bolt 23 to ensure the adjustment accuracy of the optical lens 4.

[0043] In one embodiment of the present utility model, a mounting seat 31 is provided on the optical lens 3, a mounting groove matching the optical lens 4 is provided on the mounting seat 31, a fixing groove is provided on the mounting groove, a plastic ring 35 is provided on the fixing groove, the optical lens 4 is provided on the mounting groove, and the mounting seat 31 is provided on the rotating adjustment seat 2.

[0044] Specifically, a plastic ring 35 is provided on the fixing groove, and the optical lens 4 is provided on the installation groove. The optical lens 4 can be positioned by the plastic ring 35, effectively ensuring the installation accuracy of the optical lens 4 and the laser emission accuracy.

[0045] In one embodiment of the present utility model, a screw hole 311 is provided on the rotation adjustment seat 2, an annular groove is provided on the inner wall of the screw hole 311, a sealing ring 36 is provided on the annular groove, a threaded surface is provided on the outer wall of the mounting seat 31, the mounting seat 31 is screwed and connected to the screw hole 311, and the mounting seat 31 is pressed on the sealing ring 36 so that the sealing ring 36 is clamped on the optical lens 4.

[0046] Specifically, the inner diameter of the sealing ring 36 is slightly larger than the outer diameter of the optical lens 4. The mounting seat 31 is pressed on the sealing ring 36 to cause a slight deformation of the sealing ring 36, thereby clamping the sealing ring 36 on the optical lens 4, effectively avoiding vibration caused by the rotation adjustment seat 2 and ensuring the accuracy of the rotation adjustment.

[0047] In one embodiment of the present utility model, a mounting tube 32 is provided on the optical lens 3, and a plurality of anti-slip grooves 33 are evenly provided on the outer wall of the mounting tube 32. A plurality of slots 34 are provided on the mounting tube 32, and the slots 34 are arranged opposite to the anti-slip grooves 33.

[0048] Specifically, anti-slip grooves 33 are evenly arranged on the outer wall of the mounting tube 32, which can facilitate the hand-tightening of the optical lens 3 on the rotating adjustment seat 2, reducing the difficulty of assembly. The anti-slip grooves 33 on it can prevent slipping during the installation process. A plurality of slots 34 are provided on the mounting tube 32. The optical lens 3 is tightened on the rotating adjustment seat 2 through the slots 34 and special tools to ensure the stability of the installation.

[0049] In one embodiment of the present invention, a mounting opening 11 is provided on the main frame 1 , a connecting through hole 12 is provided on a side wall of the mounting opening 11 , and guide through holes 13 are provided at the four corners of the mounting opening 11 .

[0050] Specifically, a connecting through hole 12 is provided on the side wall of the installation opening 11, and the connecting through hole 12 is used to connect and fix the device with fasteners (bolts, etc.), effectively avoiding shaking. The installation opening 11 can also be installed in matching with the positioning block on the device to reduce the difficulty of assembly. The guide through holes 13 are provided at the four corners of the installation opening 11, and the guide through holes 13 are connected and fixed with fasteners (bolts, etc.) to enable it to adjust its position on the device, and cooperate with the connecting through holes 12 to ensure the reliability of the installation.

[0051] Usage process

[0052] The laser generating adjustment device is installed at the laser outlet. The incident light spot is not absolutely circular. By rotating the rotary adjustment seat 2, the optical lens 3 on the rotary adjustment seat 2 rotates, and then drives the optical lens 4 on it to rotate. The center rotation is used to correct the shape of the light spot, ensure the shape of the laser spot, and improve the laser processing efficiency.

[0053] The above-described embodiments are merely preferred embodiments for the purpose of fully illustrating the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are within the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

Claims

1. A laser generating and adjusting device, characterized in that: include: A main body bracket, on which a rotation hole is provided; A rotation adjustment seat is rotatably mounted on the rotation hole. A synchronization ring is provided on the rotation hole. The rotation adjustment seat is connected to the synchronization ring. An optical lens is arranged on the rotating adjustment seat, an optical lens is arranged on the optical lens, and the rotating adjustment seat is used to drive the optical lens on the optical lens to rotate; Wherein, the rotation adjustment seat is provided with an adjustment slot, the adjustment slot is provided with a fixing bolt, the main body bracket is provided with a threaded hole, and the fixing bolt passes through the adjustment slot and is connected with the threaded hole.

2. The laser generating and adjusting device according to claim 1, wherein: A rotating retaining ring is provided on the rotating hole, a rotating cylinder is provided on the rotating adjustment seat, a limiting retaining edge is provided on one side of the rotating cylinder, the synchronous ring and the limiting retaining edge are respectively provided on both sides of the rotating retaining ring, the outer wall of the rotating cylinder abuts against the inner wall of the rotating retaining ring, and the synchronous ring is connected to the rotating cylinder.

3. The laser generating and adjusting device according to claim 2, wherein: Mounting positions are provided on both sides of the rotating retaining ring, and protective rings are clamped on the mounting positions. The protective rings on both sides of the rotating retaining ring are respectively in contact with the rotating cylinder and the synchronous ring. Screws are provided on the synchronous ring, and the synchronous ring and the rotating cylinder are connected by screws.

4. The laser generating and adjusting device according to claim 1, wherein: The adjustment groove is an arc-shaped structure, and a through groove is provided on the bottom surface of the adjustment groove. The through groove is concentrically arranged with the adjustment groove, and the fixing bolt passes through the through groove and is connected to the threaded hole. Anti-slip grooves are provided on the bottom surface of the adjustment groove.

5. The laser generating and adjusting device according to claim 1, wherein: Anti-slip protrusions are evenly arranged on the edge of the rotation adjustment seat. The anti-slip protrusions are connected to the rotation adjustment seat through an arc surface. Anti-slip grooves are arranged between adjacent anti-slip protrusions, and anti-slip corrugations are arranged on the arc surface.

6. The laser generating and adjusting device according to claim 1, wherein: A plurality of threaded holes are evenly arranged on the main bracket, and mounting holes matching the threaded holes are arranged on the rotation adjustment seat. The fixing bolts pass through the mounting holes and are connected to the threaded holes to adjust the fixed angle of the optical lens rotation.

7. The laser generating and adjusting device according to claim 1, wherein: The optical lens is provided with a mounting seat, the mounting seat is provided with a mounting groove matching the optical lens, the mounting groove is provided with a fixing groove, the fixing groove is provided with a plastic ring, the optical lens is provided on the mounting groove, and the mounting seat is provided on the rotation adjustment seat.

8. The laser generating and adjusting device according to claim 7, wherein: A screw hole is provided on the rotation adjustment seat, a ring groove is provided on the inner wall of the screw hole, a sealing ring is provided on the ring groove, a threaded surface is provided on the outer wall of the mounting seat, the mounting seat is screwed and connected to the screw hole, and the mounting seat is pressed on the sealing ring so that the sealing ring is clamped on the optical lens.

9. The laser generating and adjusting device according to claim 1, wherein: The optical lens is provided with a mounting tube, a plurality of anti-skid grooves are evenly arranged on the outer side wall of the mounting tube, and a plurality of slots are provided on the mounting tube, and the slots are arranged opposite to the anti-skid grooves.

10. The laser generating and adjusting device according to claim 1, wherein: The main body bracket is provided with a mounting opening, a side wall of the mounting opening is provided with connecting through holes, and four corners of the mounting opening are provided with guide through holes.

Images