Wafer automatic labeling machine

Abstract

The utility model discloses an automatic labeling machine for wafers. The automatic labeling machine comprises a cabinet body, the feeding table is arranged on the cabinet body, and the feeding table is used for placing a wafer; the first conveying mechanism is arranged on the cabinet body, and the first conveying mechanism is used for driving a feeding table to move horizontally; the second conveying mechanism is arranged on the cabinet body; the suction recognition mechanism is arranged on the second conveying mechanism, and the second conveying mechanism is used for driving the suction recognition mechanism to move horizontally; the label pasting device can efficiently and automatically paste labels, and it is convenient to guarantee that the pasting positions of the labels are accurate.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an automatic wafer labeling machine. Background Art

[0002] Wafer labeling is a crucial step in the semiconductor manufacturing process, involving the application of labels to wafers to enable accurate identification and management during subsequent processing, inspection, and tracking. However, manual labeling is currently the most common method used to apply labels to wafer trays. This method is prone to errors, and the positioning accuracy of the labels is difficult to control, resulting in problems such as low yield. Utility Model Content

[0003] The purpose of the present invention is to provide an automatic wafer labeling machine to solve the problems raised in the above background technology.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions: a wafer automatic labeling machine, comprising: a cabinet; a loading table, the loading table is arranged on the cabinet, and the loading table is used to place wafers; a conveying mechanism one, the conveying mechanism one is arranged on the cabinet, and the conveying mechanism one is used to drive the loading table to move horizontally; a conveying mechanism two, the conveying mechanism two is arranged on the cabinet; a suction and identification mechanism, the suction and identification mechanism is arranged on the conveying mechanism two, and the conveying mechanism two is used to drive the suction and identification mechanism to move horizontally; a printing device, the printing device is arranged on the cabinet, and the printing device is used to print labels; a label transferring device, the label transferring device is arranged on the cabinet, and the label transferring device is used to peel and transfer labels; wherein, the suction and identification mechanism includes a suction device and a visual device arranged on the suction device, the visual device is used to identify the QR code on the wafer, and the suction device is used to suction the label transferred by the label transferring device and attach the label to the wafer.

[0005] Furthermore, the suction device includes: a support seat, which is arranged on the conveying mechanism 2; a movable plate, which is movably arranged on the support seat; a suction nozzle, which is arranged on the movable plate; and a movable component, which is arranged on the support seat, and is used to drive the movable plate to move up and down.

[0006] Furthermore, the moving component includes: a drive motor, which is arranged on the support base; a connecting rod 1, which is fixedly arranged on the output shaft of the drive motor; and a connecting rod 2, the top end of the connecting rod 2 is hinged to the connecting rod 1, and the bottom end of the connecting rod 2 is hinged to the moving plate.

[0007] Furthermore, the visual device includes: an industrial camera, which is arranged on the support base; a coaxial light source, which is arranged on the support base and is located directly below the industrial camera.

[0008] Furthermore, the conveying mechanism 1 adopts a linear module.

[0009] Furthermore, the second conveying mechanism adopts a linear module.

[0010] Compared with the existing technology, the beneficial effects achieved by the present invention are: the present invention can efficiently and automatically attach labels; by cooperating with the conveying mechanism one and the conveying mechanism two, it is convenient to ensure that the label is accurately attached; in addition, by setting up a loading platform, it is also convenient to cooperate with an external manipulator device to realize loading and retrieving operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention.

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 It is a structural diagram of the suction identification mechanism of the utility model.

[0014] Figure 3 This is a schematic diagram of the installation of the mobile component of the present utility model.

[0015] Figure 4 This is a schematic diagram of the position of the drive motor of the present utility model.

[0016] In the figure: 1. Cabinet; 2. Conveying mechanism 1; 3. Loading platform; 4. Conveying mechanism 2; 5. Suction and identification mechanism; 51. Suction device; 511. Support seat; 512. Moving plate; 513. Suction nozzle; 514. Moving component; 5141. Connecting rod 1; 5142. Connecting rod 2; 5143. Driving motor; 52. Visual device; 521. Industrial camera; 522. Coaxial light source; 6. Label transferring device; 7. Printing device. DETAILED DESCRIPTION

[0017] In order to make the above-mentioned purposes, features and advantages of the present application more clearly understood, the following detailed description of the specific embodiments of the present application is given in conjunction with the accompanying drawings, that is, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0018] Example 1

[0019] See also Figure 1 、 Figure 2 The utility model provides a technical solution: a wafer automatic labeling machine, comprising a cabinet 1, a conveying mechanism 2 is provided on the table of the cabinet 1, a loading platform 3 is provided on the conveying mechanism 2, the loading platform 3 is used to place wafers, and the conveying mechanism 2 is used to drive the loading platform 3 to move horizontally and linearly; specifically, an external manipulator device grabs the wafer and places the wafer on the loading platform 3, and the conveying mechanism 2 can drive the wafer to move horizontally and linearly; a printing device 7 and a label transferring device 6 are provided on the table of the cabinet 1, the printing device 7 is used to print labels, and the label transferring device 6 is used to transfer the wafer to the loading platform 3. The transfer device 6 is used to transfer the labels printed by the printing device 7; the cabinet 1 is also provided with a conveying mechanism 24, and the conveying mechanism 24 is provided with a suction and identification mechanism 5, and the conveying mechanism 24 is used to drive the suction and identification mechanism 5 to move horizontally and linearly, and the moving direction of the suction and identification mechanism 5 is perpendicular to the moving direction of the loading table 3; the suction and identification mechanism 5 includes a suction device 51 and a visual device 52 arranged on the suction device 51, the visual device 52 is used to identify the QR code on the wafer, and the suction device 51 is used to absorb the label transferred by the label transfer device 6 and attach the label to the wafer.

[0020] The suction device 51 includes a support base 511 arranged on the conveying mechanism 24, and the conveying mechanism 24 drives the support base 511 to move horizontally and linearly; a movable plate 512 and a movable component 514 are arranged on the support base 511, and the movable plate 512 can be movably arranged on the support base 511, and the movable component 514 is used to drive the movable plate 512 to move up and down; specifically, a linear guide rail is connected between the movable plate 512 and the support base 511, and the linear guide rail is vertically arranged, and the slide rail of the linear guide rail is fixedly connected to the support base 511, and the slider of the linear guide rail is fixedly connected to the movable plate 512. By setting the linear guide rail, the movable plate 512 can be stably moved up and down; a suction nozzle 513 is arranged on the movable plate 512, and the suction nozzle 513 is used to adsorb the label transferred by the label transfer device 6. The suction nozzle 513 is connected to the external air pressure adjustment device to control the suction nozzle 513 to adsorb or release the label.

[0021] The visual device 52 includes an industrial camera 521 arranged on the support base 511. The industrial camera 521 is used to identify the QR code on the wafer, and a coaxial light source 522 is arranged directly below the industrial camera 521. The coaxial light source 522 is arranged on the support base 511; the loading table 3 is driven to move by the conveying mechanism 1 2, and the support base 511 is driven to move by the conveying mechanism 2 4, so that the wafer on the loading table 3 is located directly below the coaxial light source 522, and the industrial camera 521 can identify the QR code on the wafer.

[0022] The printing device 7 adopts a label printer, which is fixedly arranged on the table of the cabinet 1; the label printer has a built-in unwinding mechanism and a rewinding mechanism, the unwinding mechanism is used to place the unprinted base paper roll (the label is adhered to the base paper), and the rewinding mechanism is used to rewind the base paper; and the label transferring device 6 is used to adsorb the labels printed by the label printer. Specifically, the labels can be adsorbed by structures such as adsorption plates or suction cups, and the unwinding mechanism and rewinding mechanism are cooperated to peel the labels from the base paper. This is the existing technology and will not be repeated here; and the label transferring device 6 also includes a feeder arranged on the table of the cabinet 1. The feeder can adopt a belt conveyor device or a linear module, etc., to transfer the adsorbed labels.

[0023] In this embodiment, the loading platform 3 is moved to a suitable position in advance by the conveying mechanism 1-2, and this position can facilitate the external manipulator to place the grasped wafer on the loading platform 3, and this position can be used as the initial position of the loading platform 3; thereafter, the grasped wafer is placed on the loading platform 3 by the external manipulator, and the loading platform 3 can be driven to move by the conveying mechanism 1-2, and the support seat 511 can be driven to move by the conveying mechanism 2-4, so that the wafer on the loading platform 3 is located directly below the coaxial light source 522, and the industrial camera 521 can recognize the QR code on the wafer, and after recognizing the QR code, synchronously control the printing device 7 to print the corresponding label; the printing device 7 prints the label, and the label transfer device 6 peels the label off the base paper; then, the label is transferred by the label transfer device 6, and the support seat 511 is driven to move by the conveying mechanism 2-4, so that the label is located below the coaxial light source 522 and the suction nozzle 513, at this time the industrial camera 521 recognizes the label, and compares the recognized label with the label corresponding to the QR code (QR code). The label corresponding to the code can be entered into the relevant system in advance. This is the existing technology and will not be described in detail); if the comparison is successful, the moving plate 512 and the suction nozzle 513 are driven downward by the moving component 514, and the suction nozzle 513 adsorbs the label (the label transfer device 6 releases the adsorption of the label); after the suction nozzle 513 adsorbs the label, the label transfer device 6 is reset, and the moving plate 512 and the suction nozzle 513 are driven upward by the moving component 514 to reset, and at the same time, the support base 511 is driven by the conveying mechanism 24. Move so that the suction nozzle 513 corresponds to the position of the wafer to be labeled. At this time, the moving component 514 drives the suction nozzle 513 downward again, and the label can be attached to the wafer; after the attachment is completed, the suction nozzle 513 releases the adsorption of the label, and the moving component 514 drives the moving plate 512, the suction nozzle 513, etc. to reset; finally, the conveying mechanism drives the loading table 3 to move to the initial position, and cooperates with the external robot to take away the wafer after the attachment is completed; by repeating the above operations, the next wafer can be attached.

[0024] If the comparison is unsuccessful, the moving plate 512 and the suction nozzle 513 are driven downward by the moving component 514, and the suction nozzle 513 absorbs the label and throws it. For throwing, the label that has not been successfully compared can be thrown into an external collection box, or a throwing area can be set on the cabinet 1, and the label that has not been successfully compared can be thrown into the throwing area; after throwing, the printing device 7 reprints the corresponding label and re-peels and transfers the label through the label transfer device 6, so that the industrial camera 521 recognizes the comparison label again. If the comparison is unsuccessful again, repeat the above operation until the comparison is successful; after the comparison is successful, repeat the above operation to complete the label installation.

[0025] In this embodiment, by identifying the QR code on the wafer, the printing device 7 prints out the corresponding label. The label transfer device 6 cooperates with the suction identification mechanism 5 to identify and compare the label, and the successfully matched label can be attached to the wafer, thereby realizing efficient and automatic label attachment. The conveying mechanism 1 2 and the conveying mechanism 2 4 cooperate to ensure the accuracy of the label pasting position. In addition, by setting up the loading table 3, it is convenient to cooperate with the external manipulator device to realize loading and retrieving operations.

[0026] Example 2

[0027] See also Figure 3 、 Figure 4 The present embodiment is based on the first embodiment, and the moving component 514 specifically includes a driving motor 5143 installed on the support seat 511, and the output end of the driving motor 5143 penetrates the support seat 511 and is fixedly connected to the connecting rod 1 5141, and the connecting rod 2 5142 is hinged on the connecting rod 1 5141; the top end of the connecting rod 2 5142 is hinged on the connecting rod 1 5141, and the bottom end of the connecting rod 2 5142 is hinged on the moving plate 512; the driving motor 5143 drives the connecting rod 1 5141 to rotate, and the connecting rod 1 5141 drives the connecting rod 2 5142 to move. Since a linear guide rail is connected between the moving plate 512 and the support seat 511, the moving plate 512 can be driven to move up and down, thereby driving the suction nozzle 513 to move up and down, and then the suction nozzle 513 can adsorb or attach labels.

[0028] Example 3

[0029] This embodiment is based on the first embodiment. The conveying mechanism 1 2 and the conveying mechanism 2 4 can adopt existing linear modules. The two linear modules can drive the loading platform 3 and the suction and identification mechanism 5 to move linearly.

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A wafer automatic labeling machine, comprising a cabinet (1), characterized in that: Also includes: A loading platform (3), the loading platform (3) is arranged on the cabinet (1), and the loading platform (3) is used to place wafers; A conveying mechanism (2), wherein the conveying mechanism (2) is arranged on the cabinet (1), and the conveying mechanism (2) is used to drive the loading platform (3) to move horizontally; A second conveying mechanism (4), wherein the second conveying mechanism (4) is arranged on the cabinet (1); A suction identification mechanism (5), wherein the suction identification mechanism (5) is arranged on the second conveying mechanism (4), and the second conveying mechanism (4) is used to drive the suction identification mechanism (5) to move horizontally; A printing device (7), the printing device (7) being arranged on the cabinet (1) and being used for printing labels; A label transfer device (6), the label transfer device (6) being arranged on the cabinet (1), and the label transfer device (6) being used for peeling and transferring labels; The suction and identification mechanism (5) includes a suction device (51) and a visual device (52) arranged on the suction device (51), wherein the visual device (52) is used to identify the QR code on the wafer, and the suction device (51) is used to suck the label transferred by the label transfer device (6) and attach the label to the wafer.

2. The automatic wafer labeling machine according to claim 1, characterized in that: The suction device (51) comprises: A support seat (511), wherein the support seat (511) is arranged on the second conveying mechanism (4); a movable plate (512), the movable plate (512) being movably disposed on the supporting seat (511); a suction nozzle (513), wherein the suction nozzle (513) is arranged on the movable plate (512); A moving component (514) is provided on the supporting seat (511), and the moving component (514) is used to drive the moving plate (512) to move up and down.

3. The automatic wafer labeling machine according to claim 2, characterized in that: The moving assembly (514) comprises: a driving motor (5143), wherein the driving motor (5143) is arranged on the supporting base (511); Connecting rod 1 (5141), the connecting rod 1 (5141) is fixedly arranged on the output shaft of the driving motor (5143); Connecting rod 2 (5142), the top end of connecting rod 2 (5142) is hinged on connecting rod 1 (5141), and the bottom end of connecting rod 2 (5142) is hinged on the movable plate (512).

4. The automatic wafer labeling machine according to claim 2, characterized in that: The visual device (52) comprises: an industrial camera (521), the industrial camera (521) being arranged on the support base (511); A coaxial light source (522), wherein the coaxial light source (522) is arranged on the support base (511), and the coaxial light source (522) is located directly below the industrial camera (521).

5. The automatic wafer labeling machine according to claim 1, characterized in that: The conveying mechanism 1 (2) adopts a linear module.

6. The automatic wafer labeling machine according to claim 1, characterized in that: The second conveying mechanism (4) adopts a linear module.

Images