Detachable planetary mechanism type evaporation plating pot

Abstract

The utility model discloses a detachable planetary mechanism type evaporation plating pot. The detachable planetary mechanism type evaporation plating pot comprises a positioning gear ring which is fixedly arranged on the top surface in an evaporation plating cavity, the top end of the driving rotating shaft is fixedly connected to the end part of an output shaft of a driving motor outside the evaporation cavity; a positioning vertical ring is fixedly arranged on the top face of the positioning gear ring, the top end of the positioning vertical ring is fixedly connected to the inner end of a positioning support in an equal-angle mode, and the outer end of the positioning support arranged in the equal-angle mode is fixedly connected to the top end of an inclined retainer. Wherein guide gears are arranged between the positioning gear ring and the inclined retainer at equal angles. According to the detachable planetary mechanism type evaporation plating pot, the guide gear and the positioning gear ring are driven by the driving rotating shaft to be meshed in a repulsive non-contact mode, meanwhile, the stability of the guide gear in the rotating process is guaranteed through the oblique retainer, meanwhile, the detachable plating pot body connected with the positioning base revolves and rotates, and the heating uniformity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field, in particular to a detachable planetary mechanism type evaporation plating pot. Background Art

[0002] The evaporation coating pot is a key component in a vacuum evaporation coating system. It is mainly used to heat the evaporation material under vacuum conditions, causing it to evaporate and deposit on the substrate to form a thin film. The evaporation coating pot usually consists of a crucible and a cooling system. The material inside the evaporation coating pot is coated by a heated evaporation source. Since chemical reactions are avoided during the evaporation process, high-purity thin films can be produced.

[0003] The utility model, with publication number CN209522911U, discloses a planetary rotor device with an evaporation incident angle of less than 12 degrees. After the substrate is mounted on the plating pot, a top motor transmits power to a rocker arm, which drives the plating pot to rotate at a constant speed within a vacuum chamber. By controlling the arm's bending angle and the roller's diameter, the evaporation incident angle is controlled within 12 degrees, ensuring maximum production capacity and uniformity within 3%, significantly improving product uniformity.

[0004] However, the above-mentioned evaporation coating pot still has the following problems during actual use: although the coating pot is rotated by setting it at equal angles to achieve a uniform heating effect, the roller above the coating pot is in direct contact with the driving disk. The wear caused by long-term operation causes metal chips to fall off, which in turn affects the heating work inside the evaporation coating pot. At the same time, the coating pot driven by the roller is in an inclined state for a long time to rotate, and is subjected to the vertical force, which causes the wear of the roller contact surface to increase, making it difficult to ensure the stability of the coating pot during the rotation and heating process.

[0005] Therefore, we propose a detachable planetary mechanism evaporation plating pot to solve the above problems. Utility Model Content

[0006] The purpose of the present utility model is to provide a detachable planetary mechanism evaporation plating pot, in order to solve the problem that the existing plating pot is rotated by setting the plating pot at equal angles to achieve the effect of uniform heating, but the roller above the plating pot is in direct contact with the driving disk, and the wear caused after long-term operation causes metal chips to fall off, which in turn affects the heating work inside the evaporation plating pot. At the same time, the plating pot driven by the roller is in an inclined state for a long time to rotate, and is subjected to the vertical force, which causes the wear of the roller contact surface to increase, making it difficult to ensure the stability of the plating pot during the rotation and heating process.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solution: a detachable planetary mechanism evaporation coating pot, comprising a positioning gear ring fixedly mounted on the top surface of the interior of the evaporation coating chamber, and a driving shaft rotatably provided at the inner center position of the positioning gear ring;

[0008] The top end of the driving shaft is fixedly connected to the output shaft end of the driving motor outside the evaporation chamber, and the bottom end of the driving shaft is fixedly connected to the middle of the top surface of the transmission chassis;

[0009] The device further comprises: a positioning vertical ring is fixedly provided on the top surface of the positioning gear ring, and the top end of the positioning vertical ring is fixedly connected to the inner end of the positioning bracket at an equal angle, and the outer end of the positioning bracket arranged at an equal angle is fixedly connected to the top end of the oblique retaining frame;

[0010] Among them, a guide gear is arranged at an equal angle between the positioning gear ring and the oblique retaining frame, and the guide gear and the positioning gear ring are in contactless meshing connection.

[0011] Preferably, a magnetic structure is provided between the tooth surface of the outer end of the positioning gear ring and the tooth surface of the outer end of the guide gear set at equal angles, and the magnetism of the tooth surface of the outer end of the positioning gear ring is the same as that of the tooth surface of the outer end of the guide gear.

[0012] Preferably, the magnetism of the inner wall of the oblique retaining frame is the same as the magnetism of the tooth surface at the outer end of the guide gear, and the guide gear and the positioning gear ring do not contact each other during the meshing process by means of like repulsion. At the same time, the outer side of the guide gear and the inner wall of the oblique retaining frame are in a like repulsive manner to improve the stability during rotation.

[0013] Preferably, the outer wall of the transmission chassis is fixedly connected to the inner end of the transmission branch at an equal angle, and a positioning sleeve is fixedly provided inside the outer end of the transmission branch set at an equal angle, and the interior of the positioning sleeve set at an equal angle is rotatably connected to the middle part of the transmission shaft through a bearing, and the top end of the transmission shaft is fixedly connected to the internal shaft of the guide gear.

[0014] Preferably, the bottom ends of the transmission branches arranged at equal angles are fixedly connected to the top of the positioning base, and a positioning cavity is opened inside the positioning base, and positioning cone blocks are elastically arranged on the left and right sides of the interior of the positioning base, and the outer ends of the positioning cone blocks on the left and right sides are fixedly connected to unlocking flip rods.

[0015] Preferably, the outer end of the positioning cone block and the unlocking flip rod are symmetrically arranged and slide through the outside of the positioning base. By pulling the unlocking flip rod outward and flipping it, the positioning cone block is driven to slide outward to be in an unlocked state.

[0016] Preferably, the positioning cavity inside the positioning base is slidably connected to the top end of the locking link, and the locking link is locked and positioned by the positioning cone block inside the positioning base, and the bottom end of the locking link is fixedly connected to the middle of the top surface of the plating pot body, so as to achieve efficient disassembly of the plating pot body.

[0017] Preferably, the plating pot bodies arranged at equal angles are distributed in an inclined structure, and an evaporation source seat is provided at the bottom coincident point of the central axis of the plating pot bodies arranged at equal angles, so as to improve the uniformity of heating when the plating pot bodies rotate.

[0018] Compared with the prior art, the present invention has the following beneficial effects: the detachable planetary mechanism evaporation coating pot has a drive shaft that drives the guide gear and the positioning gear ring to engage in a repulsive, contactless manner, while the oblique retainer ensures the stability of the guide gear during rotation. At the same time, the detachable coating pot body connected to the positioning base revolves and rotates, thereby improving the uniformity of heating. The specific contents are as follows:

[0019] 1. By pulling out the unlocking flip rod and the positioning cone block, the top end of the locking link in the middle of the plating pot body can be installed in the positioning cavity opened inside the positioning base. Then, by rotating the locking flip rod to make it vertical, and sliding the elastically connected positioning cone block inward so as to contact the top end of the locking link, the positioning base and the locking link are locked and positioned, achieving efficient disassembly while improving stability during subsequent work.

[0020] 2. The driving shaft drives the transmission chassis and the transmission branch to rotate. The guide gear at the top of the internal transmission shaft follows and rotates around the positioning gear ring. At the same time, the tooth surfaces of the two are connected in a same-sex and repulsive manner, ensuring a contactless meshing connection between the guide gear and the positioning gear ring. As a result, the guide gear drives the transmission shaft and the positioning base to rotate during its revolution, so that the plating pot body rotates synchronously, thereby improving the uniformity of heating.

[0021] An oblique retaining frame is distributed on the outside of the guide gear, and the inner wall of the oblique retaining frame is connected to the guide gear in a repulsive manner so that the rotating guide gear can be supported by the oblique retaining frame to prevent the guide gear from being dislocated and lacking stability due to vertical gravity when working at an oblique position for a long time. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the utility model;

[0023] Figure 2 This is a schematic diagram of the installation structure of the positioning vertical ring and the oblique retainer of the utility model;

[0024] Figure 3 For this utility model Figure 2 A in the middle is an enlarged structural diagram;

[0025] Figure 4 This is a schematic diagram of the transmission chassis and transmission branch installation structure of the utility model;

[0026] Figure 5 This is a schematic diagram of the three-dimensional structure of the plating pot body of the utility model;

[0027] Figure 6 This is a schematic diagram of the connection structure between the guide gear and the transmission branch of the utility model;

[0028] Figure 7 This is a schematic diagram of the three-dimensional structure of the positioning sleeve of the utility model;

[0029] Figure 8 This is a schematic diagram of the installation structure of the positioning base and the locking connecting rod of the utility model;

[0030] Figure 9 This is a schematic diagram of the structure of the positioning cone block of the utility model after being unlocked.

[0031] In the figure: 1. Positioning gear ring; 2. Driving shaft; 3. Transmission chassis; 4. Positioning vertical ring; 5. Positioning bracket; 6. Oblique retaining frame; 7. Guide gear; 8. Transmission branch; 9. Positioning sleeve; 10. Transmission shaft; 11. Positioning base; 12. Positioning cavity; 13. Positioning cone block; 14. Unlocking flip rod; 15. Locking connecting rod; 16. Plating pot body; 17. Evaporation source base. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] See also Figures 1-9 , the utility model provides the following technical solutions:

[0034] Example 1: In order to solve the problems existing in the actual use of the existing evaporation coating pot, this embodiment discloses the following technical solutions: a detachable planetary mechanism evaporation coating pot, comprising a positioning gear ring 1 fixedly mounted on the top surface of the interior of the evaporation chamber, and a driving shaft 2 is rotatably arranged at the inner center position of the positioning gear ring 1; the top end of the driving shaft 2 is fixedly connected to the output shaft end of the driving motor outside the evaporation chamber, and the bottom end of the driving shaft 2 is fixedly connected to the middle of the top surface of the transmission chassis 3; the bottom end of the transmission branch 8 arranged at equal angles is fixedly connected to the top of the positioning base 11, and a positioning cavity 12 is opened inside the positioning base 11, and positioning cone blocks 13 are elastically arranged on the left and right sides of the interior of the positioning base 11, and the outer ends of the positioning cone blocks 13 on the left and right sides are fixedly connected to unlocking flip rods 14.

[0035] The outer end of the symmetrically arranged positioning cone block 13 and the unlocking flip rod 14 both slide through the outside of the positioning base 11. By pulling out and flipping the unlocking flip rod 14, it drives the positioning cone block 13 to slide outward and be in an unlocked state; the positioning cavity 12 inside the positioning base 11 is slidingly connected to the top end of the locking link 15, and the locking link 15 is locked and positioned by the positioning cone block 13 inside the positioning base 11, and the bottom end of the locking link 15 is fixedly connected to the middle of the top surface of the plating pot body 16, so as to achieve efficient disassembly of the plating pot body 16.

[0036] like Figure 7-Figure 9 As shown, when the plating pot body 16 needs to be installed with the positioning base 11, the unlocking flip rod 14 installed on the left and right sides of the positioning base 11 is first pulled outward manually, so that it drives the positioning cone block 13 at the inner end to move outward, and then the unlocking flip rod 14 is rotated again so that it is horizontally attached to the outside of the positioning base 11, and then the locking link 15 at the top of the plating pot body 16 is slid and inserted into the positioning cavity 12 inside the positioning base 11. Finally, after the unlocking flip rod 14 is rotated in the opposite direction, the elastically connected positioning cone block 13 slides inward so as to contact the top of the locking link 15, thereby ensuring the stability of the installation of the locking link 15 inside the positioning base 11 and the plating pot body 16, thereby improving the efficiency of disassembly.

[0037] Example 2: In order to solve the problems existing in the actual use of the existing evaporation coating pot, this embodiment discloses the following technical solutions: a positioning vertical ring 4 is fixedly provided on the top surface of the positioning gear ring 1, and the top end of the positioning vertical ring 4 is fixedly connected to the inner end of the positioning bracket 5 at an equal angle, and the outer end of the positioning bracket 5 set at an equal angle is fixedly connected to the top end of the inclined retaining frame 6; wherein, a guide gear 7 is set at an equal angle between the positioning gear ring 1 and the inclined retaining frame 6, and the guide gear 7 and the positioning gear ring 1 are in contactless meshing connection.

[0038] A magnetic structure is set between the tooth surface of the outer end of the positioning gear ring 1 and the tooth surface of the outer end of the guide gear 7 set at an equal angle, and the magnetism of the tooth surface of the outer end of the positioning gear ring 1 is the same as the magnetism of the tooth surface of the outer end of the guide gear 7; the magnetism of the inner wall of the oblique retaining frame 6 is the same as the magnetism of the tooth surface of the outer end of the guide gear 7, and the guide gear 7 and the positioning gear ring 1 are prevented from contacting each other during the meshing process by means of like repulsion. At the same time, the outer side of the guide gear 7 and the inner wall of the oblique retaining frame 6 are in a like repulsion manner to improve the stability during rotation.

[0039] like Figure 1-Figure 3 As shown, the driving motor outside the evaporation chamber drives the driving shaft 2 and the transmission chassis 3 at the bottom end to rotate, and at the same time the transmission chassis 3 drives the outer transmission branch 8 and the positioning sleeve 9 and the transmission shaft 10 to rotate in a circle. During the process of the guide gear 7 fixedly connected to the top end of the transmission shaft 10 rotating in a circle around the positioning gear ring 1, the tooth surface of the outer wall of the guide gear 7 and the tooth surface of the outer wall of the positioning gear ring 1 are connected in a same-sex repulsive manner. The tooth block of the guide gear 7 and the tooth block of the positioning gear ring 1 do not contact each other during the meshing process, and can drive the guide gear 7 to revolve through the rotating transmission branch 8, so that the guide gear 7 drives the transmission shaft 10 at the bottom end and the installed plating pot body 16 to rotate, so that the plating pot body 16 can be heated evenly.

[0040] The outer wall of the transmission chassis 3 is fixedly connected to the inner end of the transmission branch 8 at an equal angle, and a positioning sleeve 9 is fixedly set inside the outer end of the transmission branch 8 set at an equal angle, and the interior of the positioning sleeve 9 set at an equal angle is rotatably connected to the middle part of the transmission shaft 10 through a bearing, and the top of the transmission shaft 10 is fixedly connected to the internal shaft of the guide gear 7; the plating pot body 16 set at an equal angle is distributed in an inclined structure, and the evaporation source seat 17 is set at the bottom overlapping point of the central axis of the plating pot body 16 set at an equal angle, so as to improve the uniformity of heating when the plating pot body 16 rotates.

[0041] Furthermore, the guide gear 7 that revolves and rotates around the positioning gear ring 1 has an oblique retaining frame 6 installed on its outer side through the positioning vertical ring 4 and the positioning bracket 5, and the inner wall of the oblique retaining frame 6 is connected to the guide gear 7 in a manner of repulsion of the same sex, so that the rotating guide gear 7 can be supported by the oblique retaining frame 6 to prevent the guide gear 7 from being dislocated and lacking stability due to vertical gravity when working in an oblique position for a long time.

[0042] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A detachable planetary mechanism type evaporation coating pot, comprising a positioning gear ring (1) fixedly mounted on the top surface of an evaporation chamber, and a driving shaft (2) rotatably arranged at the inner center position of the positioning gear ring (1); The top end of the driving shaft (2) is fixedly connected to the output shaft end of the driving motor outside the evaporation chamber, and the bottom end of the driving shaft (2) is fixedly connected to the middle of the top surface of the transmission chassis (3); It is characterized by: Also includes: A positioning vertical ring (4) is fixedly provided on the top surface of the positioning gear ring (1), and the top end of the positioning vertical ring (4) is fixedly connected to the inner end of the positioning bracket (5) at an equal angle, and the outer end of the positioning bracket (5) is fixedly connected to the top end of the oblique retaining frame (6) at an equal angle; A guide gear (7) is provided at an equal angle between the positioning gear ring (1) and the oblique retaining frame (6), and the guide gear (7) and the positioning gear ring (1) are in contactless meshing connection.

2. The detachable planetary evaporation coating pot according to claim 1, characterized in that: A magnetic structure is provided between the tooth surface at the outer end of the positioning gear ring (1) and the tooth surface at the outer end of the guide gear (7) arranged at equal angles, and the magnetism of the tooth surface at the outer end of the positioning gear ring (1) is the same as the magnetism of the tooth surface at the outer end of the guide gear (7).

3. The detachable planetary evaporation coating pot according to claim 1, characterized in that: The magnetism of the inner wall of the oblique retainer (6) is the same as the magnetism of the outer end tooth surface of the guide gear (7), and the guide gear (7) and the positioning gear ring (1) do not come into contact during the meshing process by means of like-charge repulsion. At the same time, the outer side of the guide gear (7) and the inner wall of the oblique retainer (6) are in a like-charge repulsion manner, thereby improving stability during the rotation process.

4. The detachable planetary evaporation coating pot according to claim 1, characterized in that: The outer wall of the transmission chassis (3) is fixedly connected to the inner end of the transmission branch (8) at an equal angle, and a positioning sleeve (9) is fixedly provided inside the outer end of the transmission branch (8) arranged at an equal angle, and the interior of the positioning sleeve (9) arranged at an equal angle is rotatably connected to the middle of the transmission shaft (10) through a bearing, and the top end of the transmission shaft (10) is fixedly connected to the inner shaft of the guide gear (7).

5. The detachable planetary evaporation coating pot according to claim 4, characterized in that: The bottom ends of the transmission branches (8) arranged at equal angles are fixedly connected to the top end of the positioning base (11), and a positioning cavity (12) is provided inside the positioning base (11), and positioning cone blocks (13) are elastically provided on both left and right sides of the positioning base (11), and the outer ends of the positioning cone blocks (13) on the left and right sides are fixedly connected to unlocking flip rods (14).

6. The detachable planetary evaporation coating pot according to claim 5, characterized in that: The outer end of the positioning cone block (13) and the unlocking flip rod (14) are symmetrically arranged and slide through the outside of the positioning base (11). By pulling the unlocking flip rod (14) outward and flipping it, the positioning cone block (13) is driven to slide outward to be in an unlocked state.

7. The detachable planetary evaporation coating pot according to claim 5, characterized in that: The positioning cavity (12) inside the positioning base (11) is slidably connected to the top end of the locking link (15), and the locking link (15) is locked and positioned by the positioning cone block (13) inside the positioning base (11), and the bottom end of the locking link (15) is fixedly connected to the middle of the top surface of the plating pot body (16), so as to achieve high efficiency in disassembly of the plating pot body (16).

8. The detachable planetary evaporation coating pot according to claim 7, characterized in that: The plating pot bodies (16) arranged at equal angles are distributed in an inclined structure, and an evaporation source seat (17) is provided at the bottom coincident point of the central axis of the plating pot bodies (16) arranged at equal angles, so as to improve the uniformity of heating when the plating pot bodies (16) rotate.

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