Reverse discharging device of CVD (Chemical Vapor Deposition) furnace

Abstract

The utility model belongs to the technical field of CVD (chemical vapor deposition) furnaces, and discloses a reverse discharging device of a CVD furnace, which comprises a furnace tube, two feeding and discharging assemblies, two material heads and a driving source, the two material heads are respectively mounted at two ends of the furnace tube, the material heads on two sides enable the furnace tube to form a sealed space, the two feeding and discharging assemblies are respectively mounted on opposite sides of the material heads on two sides, and the driving source drives the furnace tube to rotate. The furnace tube is rotationally installed between the material heads on the two sides, the feeding and discharging assembly is used for pushing workpieces into the furnace tube, and the driving source is located at the material heads and drives the furnace tube to rotate. According to the utility model, the driving source enables the furnace tube and the workpiece in the furnace tube to synchronously rotate, so that the material is uniformly heated in the furnace, the tensile adhesive force between the material and the inner wall of the furnace tube is reduced, the material enters the furnace tube through the feeding and discharging assembly on the other side, and the workpiece frame is pulled out from the interior of the furnace tube; and the workpieces can enter and exit from the interior of the furnace tube more conveniently by pushing and pulling, and use is convenient and fast.

Description

Technical Field

[0001] The utility model relates to the technical field of CVD furnaces, in particular to a reverse discharger for a CVD furnace. Background Art

[0002] Chemical vapor deposition (CVD) is a chemical process that primarily utilizes one or more vapor-phase compounds or elements containing the thin film element to chemically react on a substrate surface to form a thin film. CVD is a new technology for preparing inorganic materials that has been developed in recent decades. CVD has been widely used to purify substances, develop new crystals, and deposit a variety of single-crystal, polycrystalline, or glassy inorganic thin film materials.

[0003] When materials and workpieces undergo chemical vapor deposition in a furnace tube, the deposition process causes the material to deposit on the outer wall of the workpiece on the one hand, and on the other hand, it will adhere to the inside of the furnace tube, increasing the friction between the workpiece and the furnace tube, and also forming a blockage inside the tube, making it difficult for the workpiece to be discharged from the furnace tube. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the inventors have conducted in-depth research and completed the present utility model after paying a lot of creative work.

[0005] Specifically, the technical problem to be solved by the present invention is to provide a reverse discharger for a CVD furnace to solve the technical problem that the material currently adheres to the furnace tube, increases the friction between the workpiece and the furnace tube, and also forms a blockage in the tube, making it difficult for the workpiece to be discharged from the furnace tube.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0007] A CVD furnace reversing discharger comprises a furnace tube, two feeder and discharge assemblies, two feed heads, and a driving source. The two feed heads are respectively mounted at both ends of the furnace tube, and the feed heads on both sides form a sealed space for the furnace tube. The two feeder and discharge assemblies are respectively mounted on opposite sides of the feed heads, and the furnace tube is rotatably mounted between the two feed heads. The feeder and discharge assemblies are used to push a workpiece into the interior of the furnace tube. The driving source is located at the feed heads and drives the furnace tube to rotate.

[0008] The driving source includes a pad and a gear sleeved on the furnace tube. A linear motor B is fixedly installed on the top of the pad. The movable end of the linear motor B is fixedly connected to a translation bar. The top of the translation bar is fixedly installed with a rack meshing with the gear.

[0009] As an improved technical solution, the material head includes a connecting frame and a orifice plate. The connecting frame is rotatably connected to the furnace tube through a bearing embedded and installed thereon. The side end of the furnace tube enters the hole of the orifice plate. A sealed bearing is embedded and installed on the side of the orifice plate close to the connecting frame, and the orifice plate is rotatably connected to the furnace tube through the sealed bearing.

[0010] As an improved technical solution, fixing holes are formed through the four corners of one side of the connection frame, and sealing strips are bonded to the four sides of the connection frame away from the orifice plate.

[0011] As an improved technical solution, a cross-connecting pipe connected to the interior of the furnace tube is fixedly installed on the side of the orifice plate away from the furnace tube, and the furnace tube and the cross-connecting pipe are coaxially arranged. A plug-in valve is fixedly connected to the end of the cross-connecting pipe away from the orifice plate.

[0012] As an improved technical solution, one of the two feed-in and feed-out assemblies is used to push the workpiece into the interior of the furnace tube, and the other feed-in and feed-out assembly is used to pull the workpiece out from the interior of the furnace tube. The movable end of the feed-in and feed-out assembly for pulling out the workpiece is detachably installed with an L-shaped hanging rod.

[0013] As an improved technical solution, the feed and discharge assembly includes a horizontal seat, a linear motor A is fixedly installed in the groove on the top of the horizontal seat, the movable end of the linear motor A is fixedly connected to a supporting plate, a servo motor is fixedly installed on one side of the top of the supporting plate, the driving end of the servo motor is fixedly connected to a horizontal axis, and a push plate is fixedly installed on the end of the horizontal axis away from the servo motor.

[0014] As an improved technical solution, universal balls are fixedly installed at the four corners of the bottom of the bearing plate, and the movable ends of the universal balls roll on the top of the horizontal seat.

[0015] As an improved technical solution, a threaded groove is provided at the center of the push plate away from the horizontal axis, and a threaded connecting rod threadably connected to the threaded groove is welded to one end of the threaded groove close to the push plate.

[0016] After adopting the above technical solution, the beneficial effects of the utility model are:

[0017] The utility model has the advantages that during the reaction process, the driving source can make the furnace tube and the workpiece inside it rotate synchronously, so that the material is heated evenly in the furnace, and the tensile adhesion between the material and the inner wall of the furnace tube is reduced. Moreover, the interior of the furnace tube is entered through the inlet and outlet components on the other side, and the workpiece rack is pulled out from the interior of the furnace tube, thereby ensuring the smooth discharge of the workpiece from the interior of the furnace tube. Pushing and pulling are more conducive to the workpiece entering and exiting the interior of the furnace tube, and it is convenient to use. The servo motor drives the horizontal axis to rotate, and the hanging rod is screwed into the card cavity on the workpiece rack, so that the hanging rod and the workpiece rack are card-connected, thereby ensuring the firmness of the workpiece rack being dragged. The hanging rod is screwed into the interior of the threaded groove through the threaded connecting rod, thereby realizing the detachable connection of the hanging rod. Firstly, the damaged hanging rod can be replaced, and secondly, whether the hanging rod is installed and used can be selected according to the actual status. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work. Among them:

[0019] Figure 1 This is a structural schematic diagram of a CVD furnace reverse discharger of the utility model.

[0020] Figure 2 This is a structural schematic diagram of a furnace tube and two inlet and outlet components of a CVD furnace reverse discharger of the utility model.

[0021] Figure 3 This is an enlarged structural diagram of point A of a reverse discharger of a CVD furnace according to the present invention.

[0022] Figure 4 This is a structural schematic diagram of a sealed bearing for a reverse discharger of a CVD furnace according to the present invention.

[0023] Figure 5 This is a structural schematic diagram of a feed and discharge assembly of a CVD furnace reverse discharger of the utility model.

[0024] Figure 6 This is a structural schematic diagram of another feed and discharge component of a CVD furnace reverse discharger of the utility model.

[0025] Figure 7 This is a schematic diagram of the exploded structure of a push plate and a hanging rod of a reverse discharger of a CVD furnace according to the present invention.

[0026] Description of reference numerals:

[0027] 1. Furnace tube; 2. Inlet and outlet assembly; 21. Cross seat; 22. Linear motor A; 23. Servo motor; 24. Loading plate; 25. Cross shaft; 26. Push plate; 27. Hanging rod; 28. Threaded connecting rod; 29. ​​Threaded groove; 3. Material head; 31. Connecting frame; 32. Orifice plate; 33. Cross connecting pipe; 34. Gate valve; 35. Sealing strip; 36. Sealing bearing; 4. Driving source; 41. Pad; 42. Linear motor B; 43. Translation bar; 44. Rack; 45. Gear. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0030] At the same time, the meaning of "and / or" or "and / or" appearing in the full text includes three options. Taking "A and / or B" as an example, it includes option A, or option B, or an option in which both A and B are satisfied.

[0031] In addition, in this utility model, the descriptions of "first" and "second" are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features specified as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this utility model.

[0032] like Figures 1 to 7As shown together, the utility model provides a CVD furnace reverse discharger, including a furnace tube 1, two feeder and discharge components 2, two material heads 3 and a driving source 4, the two material heads 3 are respectively installed at both ends of the furnace tube 1, and the material heads 3 on both sides make the furnace tube 1 a sealed space, the two feeder and discharge components 2 are respectively installed on the opposite sides of the material heads 3 on both sides, and the furnace tube 1 is rotatably installed between the material heads 3 on both sides, the feeder and discharge components 2 are used to push the workpiece into the interior of the furnace tube 1, and the driving source 4 is located at the material heads 3 and drives the furnace tube 1 to rotate;

[0033] The driving source 4 includes a pad 41 and a gear 45 sleeved on the furnace tube 1. The gear 45 is located between the connecting frame 31 and the orifice plate 32. A linear motor B42 is fixedly installed on the top of the pad 41. The movable end of the linear motor B42 is fixedly connected to a translation bar 43, and the translation bar 43 is slidably installed on the top of the pad 41. The pad 41 is connected to the translation bar 43 through a slide rail installed on its top. A rack 44 meshing with the gear 45 is fixedly installed on the top of the translation bar 43.

[0034] According to a CVD furnace reverse discharger of an embodiment of the present invention, during the reaction process, the driving source 4 will drive the furnace tube 1 to switch between forward and reverse rotations, so that the furnace tube 1 and the workpiece inside it rotate synchronously, so that the material is evenly heated in the furnace, thereby ensuring the uniformity of the chemical reaction and the consistency of the workpiece. During the rotation process, the tensile adhesion between the material and the inner wall of the furnace tube 1 will also be reduced, and the inlet and outlet assembly 2 on the other side enters the interior of the furnace tube 1, hooks the workpiece rack, and pulls the workpiece rack out from the interior of the furnace tube 1, ensuring the smooth discharge of the workpiece from the interior of the furnace tube 1. Pushing and pulling are more conducive to the workpiece entering and exiting the interior of the furnace tube 1, and are convenient to use.

[0035] like Figures 2 to 4 As shown together, in this embodiment, the material head 3 includes a connecting frame 31 and a orifice plate 32. The connecting frame 31 is installed on the furnace frame. The connecting frame 31 is rotatably connected to the furnace tube 1 through a bearing embedded and installed thereon. The side end of the furnace tube 1 enters the hole of the orifice plate 32. A sealed bearing 36 is embedded and installed on the side of the orifice plate 32 close to the connecting frame 31, and the orifice plate 32 is rotatably connected to the furnace tube 1 through the sealed bearing 36.

[0036] like Figures 3 and 4 As shown, in this embodiment, fixing holes are formed through the four corners of one side of the connection frame 31 , and sealing strips 35 are bonded to the four sides of the connection frame 31 away from the orifice plate 32 , which improve the sealing performance.

[0037] like Figures 2 to 4As shown together, in this embodiment, a cross-connecting pipe 33 connected to the interior of the furnace tube 1 is fixedly installed on the side of the orifice plate 32 away from the furnace tube 1, and the furnace tube 1 and the cross-connecting pipe 33 are coaxially arranged, and an interface pipe is welded on the outer wall of the cross-connecting pipe 33, and a plug valve 34 is fixedly connected to the end of the cross-connecting pipe 33 away from the orifice plate 32, and the workpiece is fixed on the workpiece rack, and the workpiece rack is placed in the interior of the cross-connecting pipe 33 for feeding, and the feed and discharge assembly 2 for pushing and pulling is controlled to work, and the push plate 26 on the feed and discharge assembly 2 is controlled to move in the direction of the material, and the workpiece is pushed from the inner cavity of the feed and discharge assembly 2 to the interior of the furnace tube 1, and then, the feed and discharge assembly 2 is retracted and reset from the interior of the furnace tube 1, and the plug valve 34 is closed, so that the interior of the furnace tube 1 is in a sealed state, and then the subsequent deposition process is carried out, and U-shaped frames are welded on both sides of the workpiece rack, and the inner cavity of the U-shaped frame is a card cavity.

[0038] like Figure 1 、 Figures 5 and 6 As shown together, in this embodiment, one of the two feed and discharge assemblies 2 is used to push the workpiece into the interior of the furnace tube 1, and the other feed and discharge assembly 2 is used to pull the workpiece out from the interior of the furnace tube 1. The movable end of the discharge assembly 2 for pulling out the workpiece is detachably installed with an L-shaped hanging rod 27.

[0039] like Figures 5 and 6 As shown together, in this embodiment, the material inlet and outlet assembly 2 includes a horizontal seat 21, and a linear motor A22 is fixedly installed in the groove at the top of the horizontal seat 21. The movable end of the linear motor A22 is fixedly connected to the supporting plate 24. The linear motor A22 drives the supporting plate 24 to move horizontally on the horizontal seat 21, thereby driving the horizontal axis 25 thereon to move accordingly, and enters and exits the interior of the furnace tube 1 through the horizontal axis 25 to push and pull the workpiece inside the furnace tube 1. A servo motor 23 is fixedly installed on one side of the top of the supporting plate 24, and the driving end of the servo motor 23 is installed on the supporting plate 24 through a bearing. The driving end of the servo motor 23 is fixedly connected to the horizontal axis 25, and the end of the horizontal axis 25 away from the servo motor 23 is fixedly installed with a push plate 26. When the workpiece rack needs to be pulled out, the servo motor 23 drives the horizontal axis 25 to rotate, and the hanging rod 27 is screwed into the card cavity on the workpiece rack, so that the hanging rod 27 is connected to the workpiece rack by card connection, ensuring the firmness of the workpiece rack dragging.

[0040] like Figures 5 and 6 As shown in the figure, in this embodiment, universal ball joints are fixedly installed at the four corners of the bottom of the supporting plate 24, and the movable ends of the universal ball joints roll on the top of the cross seat 21. The universal ball joints roll on the top of the cross seat 21 to support the supporting plate 24 and avoid force concentration on the linear motor A22.

[0041] like Figure 7As shown, in this embodiment, a threaded groove 29 is provided at the center of the push plate 26 on the side away from the horizontal axis 25, and a threaded connecting rod 28 threadedly connected to the threaded groove 29 is welded to the end of the threaded groove 29 close to the push plate 26. The hanging rod 27 is screwed into the interior of the threaded groove 29 through the threaded connecting rod 28 to realize the detachable connection of the hanging rod 27. First, the damaged hanging rod 27 can be replaced, and second, whether the hanging rod 27 is installed and used can be selected according to the actual status.

[0042] It should be understood that these embodiments are intended only to illustrate the present invention and are not intended to limit the scope of protection of the present invention. In addition, it should be understood that after reading the technical content of the present invention, those skilled in the art may make various changes, modifications and / or variations to the present invention, and all such equivalent forms also fall within the scope of protection defined by the appended claims of this application.

Claims

1. A CVD furnace reverse discharger, characterized by: It comprises a furnace tube (1), two material inlet and outlet components (2), two material heads (3) and a driving source (4), wherein the two material heads (3) are respectively installed at both ends of the furnace tube (1), and the material heads (3) on both sides make the furnace tube (1) a sealed space, the two material inlet and outlet components (2) are respectively installed on opposite sides of the material heads (3), and the furnace tube (1) is rotatably installed between the material heads (3) on both sides, the material inlet and outlet components (2) are used to push the workpiece into the interior of the furnace tube (1), and the driving source (4) is located at the material heads (3) and drives the furnace tube (1) to rotate; The driving source (4) comprises a backing plate (41) and a gear (45) sleeved and mounted on the furnace tube (1); a linear motor B (42) is fixedly mounted on the top of the backing plate (41); a translation bar (43) is fixedly connected to the movable end of the linear motor B (42); and a rack (44) meshing with the gear (45) is fixedly mounted on the top of the translation bar (43).

2. The CVD furnace reverse discharger according to claim 1, characterized in that: The material head (3) includes a connecting frame (31) and a perforated plate (32). The connecting frame (31) is rotatably connected to the furnace tube (1) via a bearing mounted thereon. The side end of the furnace tube (1) enters the hole of the perforated plate (32). A sealing bearing (36) is mounted on a side of the perforated plate (32) close to the connecting frame (31), and the perforated plate (32) is rotatably connected to the furnace tube (1) via the sealing bearing (36).

3. The CVD furnace reverse discharger according to claim 2, characterized in that: Fixing holes are provided through the four corners of one side of the connection frame (31), and sealing strips (35) are bonded to the four sides of the connection frame (31) away from the orifice plate (32).

4. The CVD furnace reverse discharger according to claim 3, characterized in that: A cross-connecting pipe (33) communicating with the interior of the furnace tube (1) is fixedly mounted on the side of the orifice plate (32) away from the furnace tube (1), and the furnace tube (1) and the cross-connecting pipe (33) are coaxially arranged. A gate valve (34) is fixedly connected to one end of the cross-connecting pipe (33) away from the orifice plate (32).

5. The CVD furnace reverse discharger according to claim 4, characterized in that: One of the two inlet and outlet components (2) is used to push the workpiece into the interior of the furnace tube (1), and the other inlet and outlet component (2) is used to pull the workpiece out of the interior of the furnace tube (1). The movable end of the inlet and outlet component (2) used to pull out the workpiece is detachably mounted with an L-shaped hanging rod (27).

6. The CVD furnace reverse discharger according to claim 5, characterized in that: The feeding and discharging assembly (2) includes a transverse seat (21), a linear motor A (22) is fixedly installed in a groove on the top of the transverse seat (21), a movable end of the linear motor A (22) is fixedly connected to a supporting plate (24), a servo motor (23) is fixedly installed on one side of the top of the supporting plate (24), a driving end of the servo motor (23) is fixedly connected to a transverse shaft (25), and a push plate (26) is fixedly installed on the end of the transverse shaft (25) away from the servo motor (23).

7. The CVD furnace reverse discharger according to claim 6, characterized in that: Universal balls are fixedly mounted at the four corners of the bottom of the bearing plate (24), and the movable ends of the universal balls roll on the top of the horizontal seat (21).

8. The CVD furnace reverse discharger according to claim 7, characterized in that: A threaded groove (29) is formed at the center of a circle on a side of the push plate (26) away from the horizontal axis (25), and a threaded connecting rod (28) is welded to one end of the threaded groove (29) close to the push plate (26) and threadedly connected to the threaded groove (29).

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