Furnace pressure stabilizing device of crystal growing furnace

Abstract

The utility model discloses a furnace pressure stabilizing device for a crystal growing furnace, and relates to the technical field of crystal growing furnaces. Comprising a furnace body, an air inlet is formed in one side of the upper end of an inner cavity of the furnace body, and a first sealing cover is attached to the outer side of an opening of the air inlet; the pressure relief assembly is arranged on one side of the furnace body; the pressure gauge is fixed at the top of the pressure relief assembly; the pressurizing assembly is arranged on the other side of the furnace body; the controller is fixed to the top of the pressurizing assembly. According to the furnace pressure stabilizing device for the crystal growing furnace, a pressure relief barrel is arranged on a pressure relief assembly, an air outlet in the pressure relief barrel is matched with a second sealing cover and a second spring so that pressure can be automatically relieved when the pressure in the furnace body is too high, and a telescopic air cylinder at the bottom of the pressure relief barrel is matched with a first piston so that the pressure in the pressure relief barrel can be controlled; therefore, the pressure relief threshold value of the furnace body is controlled, and the working efficiency of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth furnaces, in particular to a furnace pressure stabilizing device for a crystal growth furnace. Background Art

[0002] Crystal growth methods and equipment have a crucial impact on the quality of the resulting crystals. Common crystal growth methods include the Bridgman process, zone melting, Czochralski, heat exchange, and casting. Currently, the crystals produced on a large scale industrially are primarily monocrystalline silicon and polycrystalline silicon. Optimization of polycrystalline silicon ingot furnaces primarily focuses on increasing furnace size and optimizing the thermal field design. Currently, thermal field optimization primarily focuses on optimizing heater shape and placement, as well as the thermal insulation cage design.

[0003] The utility model patent with publication number CN219430188U discloses a furnace pressure stabilization device for a crystal growth furnace, including a main furnace body, a pressure tube fixedly connected to the interior of the main furnace body, a pressure gauge fixedly connected to the side of the pressure tube, a pressure control valve fixedly connected to the side of the pressure tube, a purification tube fixedly connected to the end of the pressure tube away from the main furnace body, a mist liquid guide ring fixedly connected to the interior of the top of the purification tube, and a liquid guide tube fixedly connected to the top of the purification tube.

[0004] As shown in the above-mentioned utility model, the existing furnace pressure stabilization device generally uses a pressure gauge to check the internal pressure, controls the furnace pressure through a pressure control valve, and performs air suction and injection through a purification pipe. This method can only automatically release pressure when the furnace pressure is higher than the threshold value, and cannot automatically increase pressure when the furnace pressure is too low. In this case, the conditions for furnace pressure stability cannot be met. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides a furnace pressure stabilizing device for a crystal growth furnace, which solves the existing problems.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: A crystal growth furnace pressure stabilizing device, comprising:

[0007] A furnace body, wherein an air inlet is provided on one side of the upper end of the inner cavity of the furnace body, a first sealing cover is attached to the outer side of the opening of the air inlet, and one side of the first sealing cover is connected to the inner wall of the furnace body via a first spring;

[0008] A pressure relief component is provided on one side of the furnace body and is used to relieve the high pressure in the furnace body;

[0009] A pressure gauge is fixed on the top of the pressure relief assembly and is connected to the furnace body for measuring the pressure inside the furnace body;

[0010] A pressurizing assembly, which is arranged on the other side of the furnace body and is used to pressurize the low pressure in the furnace body;

[0011] The controller is fixed on the top of the pressurizing component and is electrically connected to the pressure relief component, the pressure gauge and the electronic components on the pressurizing component.

[0012] Preferably, the pressure relief assembly includes a pressure relief cylinder fixed to one side of the furnace body, a telescopic cylinder is fixed to the bottom end of the pressure relief cylinder, a first piston is fixed to the output shaft of the telescopic cylinder, and the first piston is located in the inner cavity of the pressure relief cylinder.

[0013] Preferably, one side of the upper end of the inner cavity of the pressure relief cylinder is connected to the furnace body through an air outlet channel, and an air outlet is provided on the outer side of an opening at one end of the air outlet channel, and the air outlet is fixed on the inner wall of the pressure relief cylinder, and a second sealing cover is fitted and connected to the outer side of the opening of the air outlet, and the outer side of the second sealing cover is connected to the inner wall of the pressure relief cylinder through a telescopic rod, and a second spring is sleeved on the outer side of the telescopic rod, and an electromagnetic valve is fixed on the outer edge of one side of the upper end of the pressure relief cylinder, and the output end of the electromagnetic valve is connected to the pressure relief pipe.

[0014] Preferably, the pressurizing assembly includes a pressurizing cylinder fixed on the other side of the furnace body, fixed plates are fixed on both sides of the bottom end of the pressurizing cylinder, a motor is arranged between the two fixed plates, guide blocks are fixed in the middle of both sides of the motor, a guide groove is opened in the middle of the inner side of the fixed plate, and the guide block is located in the guide groove.

[0015] Preferably, a screw rod is fixed to the output end of the motor, and the inner sides of the two fixing plates are connected by a connecting plate. A screw groove is opened in the middle of the connecting plate, and one end of the screw rod is connected to the screw groove.

[0016] Preferably, one end of the screw rod is movably connected to a second piston through a bearing, and the second piston is located in the lower inner cavity of the pressurizing cylinder. One side of the upper end of the pressurizing cylinder is connected to the furnace body through an air intake channel, and one end opening of the air intake channel is connected to the air inlet.

[0017] Beneficial effects

[0018] The utility model provides a device for stabilizing furnace pressure in a crystal growth furnace. Compared with the prior art, it has the following beneficial effects:

[0019] 1. The crystal growth furnace pressure stabilization device is provided with a pressure relief cylinder on the pressure relief assembly. The air outlet in the pressure relief cylinder cooperates with the second sealing cover and the second spring to automatically relieve pressure when the pressure in the furnace body is too high. The telescopic cylinder at the bottom of the pressure relief cylinder cooperates with the first piston to control the pressure in the pressure relief cylinder, thereby controlling the pressure relief valve value of the furnace body, thereby improving the working efficiency of the device.

[0020] 2. The crystal growth furnace pressure stabilization device is equipped with a pressure cylinder on the pressure assembly. The pressure cylinder cooperates with the air inlet, the first sealing cover and the first spring in the furnace body to automatically pressurize the furnace body when the internal pressure of the furnace body is relatively low. The second piston can be driven to move by the screw rod on the motor and the screw groove on the connecting plate to control the pressure in the pressure cylinder, so that the device can automatically control the pressure threshold and improve the pressure stabilization effect of the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0022] Figure 2 It is a schematic diagram of the back of the overall structure of the utility model;

[0023] Figure 3 This is a schematic top view of the furnace structure of the present invention;

[0024] Figure 4 This is a half-section schematic diagram of the pressure relief assembly structure of the present utility model;

[0025] Figure 5 It is a half-section schematic diagram of the pressurizing component structure of the present invention.

[0026] In the figure: furnace body 1, air inlet 11, first sealing cover 12, first spring 13, pressure relief assembly 2, pressure relief cylinder 21, telescopic cylinder 22, first piston 23, air outlet 24, second sealing cover 25, telescopic rod 26, second spring 27, solenoid valve 28, pressure gauge 3, pressurizing assembly 4, pressurizing cylinder 41, fixing plate 42, motor 43, guide block 44, guide groove 45, screw rod 46, connecting plate 47, screw groove 48, second piston 49, controller 5. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] like Figure 1-5 As shown, the utility model provides two technical solutions:

[0029] The first embodiment: a crystal growth furnace pressure stabilization device, comprising:

[0030] The furnace body 1 is provided with an air inlet 11 on one side of the upper end of the inner cavity of the furnace body 1, and a first sealing cover 12 is fitted and connected to the outer side of the opening of the air inlet 11. One side of the first sealing cover 12 is connected to the inner wall of the furnace body 1 through a first spring 13. The first sealing cover 12 cooperates with the first spring 13 to automatically reset the seal after pressurization is completed.

[0031] The pressure relief component 2 is arranged on one side of the furnace body 1 and is used to relieve the high pressure in the furnace body 1. The pressure relief component 2 includes a pressure relief cylinder 21 fixed on one side of the furnace body 1. Pressure relief gas is stored in the pressure relief cylinder 21. A telescopic cylinder 22 is fixed to the bottom end of the pressure relief cylinder 21. The telescopic cylinder 22 is electrically connected to the controller 5. A first piston 23 is fixed to the output shaft of the telescopic cylinder 22. An air pressure sensor is embedded on the first piston 23. The air pressure sensor and the controller 5 transmit signals. The first piston 23 is located in the inner cavity of the pressure relief cylinder 21. The telescopic cylinder 22 drives the first piston 23 to move to control the gas pressure in the pressure relief cylinder 21. One side of the inner cavity upper end of the pressure relief cylinder 21 is connected through an air outlet passage. The channel is connected to the furnace body 1, and an air outlet 24 is provided on the outer side of the opening of one end of the air outlet channel. The air outlet 24 is fixed on the inner wall of the pressure relief cylinder 21, and a second sealing cover 25 is fitted on the outer side of the opening of the air outlet 24. The outer side of the second sealing cover 25 is connected to the inner wall of the pressure relief cylinder through a telescopic rod 26. A second spring 27 is sleeved on the outer side of the telescopic rod 26. The second sealing cover 25 cooperates with the second spring 27 to automatically reset the seal after the pressure relief is completed. A solenoid valve 28 is fixed on the outer edge of one side of the upper end of the pressure relief cylinder 21, and the solenoid valve 28 is electrically connected to the controller 5. The output end of the solenoid valve 28 is connected to the pressure relief pipe. When the pressure in the pressure relief cylinder 21 is too high, the pressure is relieved through the solenoid valve 28 and the pressure relief pipe.

[0032] The pressure gauge 3 is fixed on the top of the pressure relief assembly 2 and is connected to the furnace body 1 for measuring the pressure inside the furnace body 1 .

[0033] The pressurizing component 4 is arranged on the other side of the furnace body 1 and is used to pressurize the low pressure in the furnace body 1 .

[0034] The controller 5 is a PLC controller, which is fixed on the top of the pressurizing component 4 and is electrically connected to the pressure relief component 2 , the pressure gauge 3 and the electronic components on the pressurizing component 4 .

[0035] The second embodiment is mainly different from the first embodiment in that: the pressurizing component 4 includes a pressurizing cylinder 41 fixed on the other side of the furnace body 1, and fixed plates 42 are fixed on both sides of the bottom end of the pressurizing cylinder 41. A motor 43 is arranged between the two fixed plates 42, and the motor 43 is electrically connected to the controller 5. Guide blocks 44 are fixed to the middle of both sides of the motor 43, and a guide groove 45 is provided in the middle of the inner side of the fixed plate 42. The guide block 44 is located in the guide groove 45, which plays a guiding role, so that the motor 43 keeps moving vertically up and down. A screw rod 46 is fixed to the output end of the motor 43, and the inner sides of the two fixed plates 42 are connected by a connecting plate 47. A screw groove 48 is provided in the middle of the connecting plate 47. One end of the screw rod 46 is connected to the screw groove 48 through, and one end of the screw rod 46 is movably connected to the second piston through a bearing. 49. An air pressure sensor is embedded on the second piston 49. The air pressure sensor and the controller 5 transmit signals. The second piston 49 is located in the lower inner cavity of the pressurizing cylinder 41. The screw rod 46 cooperates with the screw groove 48 so that the motor 43 can drive the second piston 49 to move up and down when driving, thereby controlling the gas pressure in the pressurizing cylinder 41. One side of the upper end of the pressurizing cylinder 41 is connected to the furnace body 1 through the air inlet channel, and one end opening of the air inlet channel is connected to the air inlet 11. A solenoid valve 28 is installed on the outer edge of one side of the upper end of the pressurizing cylinder 41. The solenoid valve 28 is electrically connected to the controller 5. The output end of the solenoid valve 28 is connected to the external pressurizing equipment through the pressurizing pipe. When the pressure in the pressurizing cylinder 41 is too small, the pressurizing cylinder 41 is pressurized by the pressurizing equipment so that it keeps the same pressure as the furnace body 1 under normal circumstances.

[0036] At the same time, the contents not described in detail in this specification belong to the existing technology known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.

[0037] First, the pressure threshold in the furnace body 1 is determined. At this time, the controller 5 controls the telescopic cylinder 22 to drive the first piston 23 to move until the pressure in the pressure relief cylinder 21 is equivalent to the pressure in the furnace body 1. At the same time, the external pressurizing equipment is used to pressurize the pressure cylinder 41 to make it equivalent to the pressure in the furnace body 1. When the pressure in the furnace body 1 is too high, the telescopic cylinder 22 drives the first piston 23 to move downward to reduce the pressure in the pressure relief cylinder 21, so that the pressure difference between the furnace body 1 and the pressure relief cylinder 21 increases. At this time, the second sealing cover 25 moves under pressure, so that the second sealing cover 25 moves downward. The second spring 27 is compressed and stressed. At this time, the high pressure in the furnace body 1 enters the pressure relief cylinder 21 to balance the pressure in the furnace body 1. When the pressure in the furnace body 1 drops to a threshold value, the telescopic cylinder 22 drives the first piston 23 to move upward until the pressure in the pressure relief cylinder 21 is equal to the pressure in the furnace body 1. At this time, the second sealing cover 25 is reset under the action of the second spring 27, sealing the air outlet 24. At this time, the pressure relief is completed. When the pressure in the furnace body 1 is too high, the solenoid valve 28 on the pressure relief cylinder 21 and the pressure relief pipe are used to appropriately relieve the pressure to prevent the pressure relief cylinder 21 from being damaged.

[0038] When the pressure in the furnace body 1 is too low, the motor 43 is started by the controller 5, and the motor 43 drives the screw rod 46 to rotate. The screw rod 46 cooperates with the screw groove 48 on the connecting plate 47 to drive the second piston 49 to move, thereby increasing the pressure in the pressurizing cylinder 41. At this time, the first sealing cover 12 opens under pressure, and the high-pressure gas in the pressurizing cylinder 41 enters the furnace body 1 to balance the pressure in the furnace body 1 until the pressure in the furnace body 1 reaches the set value. At this time, the first sealing cover 12 resets the seal under the action of the first spring 13, and the pressurization is completed. When the pressure in the pressurizing cylinder 41 is too low, the pressurizing cylinder 41 is pressurized by external pressurizing equipment.

[0039] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0040] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A crystal growth furnace pressure stabilizing device, characterized in that: include: A furnace body, wherein an air inlet is provided on one side of the upper end of the inner cavity of the furnace body, a first sealing cover is attached to the outer side of the opening of the air inlet, and one side of the first sealing cover is connected to the inner wall of the furnace body via a first spring; A pressure relief component is provided on one side of the furnace body and is used to relieve the high pressure in the furnace body; A pressure gauge is fixed on the top of the pressure relief assembly and is connected to the furnace body for measuring the pressure inside the furnace body; A pressurizing assembly, which is arranged on the other side of the furnace body and is used to pressurize the low pressure in the furnace body; The controller is fixed on the top of the pressurizing component and is electrically connected to the pressure relief component, the pressure gauge and the electronic components on the pressurizing component.

2. The crystal growth furnace pressure stabilizing device according to claim 1, characterized in that: The pressure relief assembly includes a pressure relief cylinder fixed on one side of the furnace body, a telescopic cylinder fixed to the bottom end of the pressure relief cylinder, a first piston fixed to the output shaft of the telescopic cylinder, and the first piston is located in the inner cavity of the pressure relief cylinder.

3. The crystal growth furnace pressure stabilizing device according to claim 2, characterized in that: One side of the upper end of the inner cavity of the pressure relief cylinder is connected to the furnace body through an air outlet channel, and an air outlet is provided on the outer side of an opening of one end of the air outlet channel, and the air outlet is fixed on the inner wall of the pressure relief cylinder, and a second sealing cover is fitted and connected to the outer side of the opening of the air outlet, and the outer side of the second sealing cover is connected to the inner wall of the pressure relief cylinder through a telescopic rod, and a second spring is sleeved on the outer side of the telescopic rod, and an electromagnetic valve is fixed on the outer edge of one side of the upper end of the pressure relief cylinder, and the output end of the electromagnetic valve is connected to the pressure relief pipe.

4. The crystal growth furnace pressure stabilizing device according to claim 1, characterized in that: The pressurizing assembly includes a pressurizing cylinder fixed on the other side of the furnace body, fixed plates are fixed on both sides of the bottom end of the pressurizing cylinder, a motor is arranged between the two fixed plates, guide blocks are fixed in the middle of both sides of the motor, a guide groove is opened in the middle of the inner side of the fixed plate, and the guide block is located in the guide groove.

5. The crystal growth furnace pressure stabilizing device according to claim 4, characterized in that: A screw rod is fixed to the output end of the motor, and the inner sides of the two fixing plates are connected via a connecting plate. A screw groove is opened in the middle of the connecting plate, and one end of the screw rod is connected to the screw groove through.

6. The crystal growth furnace pressure stabilizing device according to claim 5, characterized in that: One end of the screw rod is movably connected to a second piston through a bearing. The second piston is located in the lower inner cavity of the pressurizing cylinder. One side of the upper end of the pressurizing cylinder is connected to the furnace body through an air intake channel. One end opening of the air intake channel is connected to the air inlet.

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