Large load-bearing hinge for vacuum chamber door and vacuum chamber door

Abstract

The utility model relates to the technical field of vacuum coating structures, in particular to a large load-bearing hinge for a vacuum chamber door, which comprises a first door shaft support, a second door shaft support, a third door shaft support and a fourth door shaft support. A spacer bush is arranged on the outer ring of the pin shaft between the two groups of snap springs, and the exteriors of the two groups of spacer bushes are rotationally connected with a door shaft bracket II; and a bearing is arranged between at least one group of snap springs and the spacer bush. The large load-bearing hinge is composed of the first door shaft support, the second door shaft support and the shaft pin, the brass spacer bush and the bearing are additionally arranged in the middle of the shaft pin, the rotating smoothness of the two supports can be improved through the bearing, the two ends of the shaft pin are fixed through the snap springs to prevent the shaft pin from falling off, one end of the first door shaft support is fixed to a vacuum cavity, and the other end of the second door shaft support is fixed to the vacuum cavity. One end of the second door shaft support is fixed to the cavity door, the bearing can bear more axial loads, and the heavy door can be perfectly opened through rotation of the bearing.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of vacuum coating structures, and in particular to a large load-bearing hinge for a vacuum chamber door and the vacuum chamber door. Background Art

[0002] Vacuum coating equipment mainly refers to a type of substrate that is coated under relatively high vacuum conditions, including vacuum ion evaporation, magnetron sputtering and laser sputtering deposition coating, etc., which are mainly divided into chemical vapor deposition and physical vapor deposition. Vacuum coating equipment requires a vacuum chamber, and various parts are installed inside the vacuum chamber to work in a high vacuum environment.

[0003] Applied in high vacuum coating equipment, due to the high vacuum pressure door panel material is thicker, there are more internal components of the door panel, the overall weight of the door panel is large, and the ordinary hinges can only bear a limited load, making it inconvenient to open the door panel. On this basis, and in order to meet the diversified development of the market, a large load-bearing hinge and vacuum chamber door for vacuum chamber doors are proposed. Utility Model Content

[0004] 1. Technical problems to be solved by the utility model:

[0005] The utility model provides a large load-bearing hinge for a vacuum chamber door and the vacuum chamber door, so as to solve the technical problems existing in the above-mentioned background technology.

[0006] 2. Technical solution:

[0007] In order to achieve the above purpose, the technical solution of the utility model is:

[0008] A large load-bearing hinge for a vacuum chamber door, comprising

[0009] Door shaft bracket 1, one end of which is provided with two sets of retaining springs for limiting and engaging the pin shaft;

[0010] The outer ring of the pin shaft between the two sets of clip springs is provided with a spacer sleeve, and the outer sides of the two sets of spacers are rotatably connected to the second door shaft bracket;

[0011] Wherein, a bearing is provided between at least one group of the retaining springs and the spacer sleeve.

[0012] The utility model also provides a large load-bearing hinge for a vacuum chamber door, the load-bearing hinge comprising a door shaft bracket, one end of which is provided with two sets of retaining springs for limiting and engaging the pin shaft;

[0013] The outer ring of the pin shaft between the two sets of clip springs is rotatably connected with a spacer sleeve, and the outer sleeves of the two sets of spacers are provided with a second door shaft bracket;

[0014] Wherein, a bearing is provided between at least one group of the retaining springs and the spacer sleeve.

[0015] A further improvement is that it also includes a plurality of fastening pins passing through the clamping spring and abutting against the pin shaft.

[0016] A further improvement is that a plurality of mounting holes are provided at one end of the door shaft bracket corresponding to the retaining spring.

[0017] A further improvement is that the spacer is made of brass.

[0018] A further improvement is that the cross section of the spacer is T-shaped.

[0019] A further improvement is that the door shaft bracket 2 includes a connecting portion connected to two sets of spacers, and a cavity is formed between the two sets of retaining springs for the connecting portion to rotate around the spacers.

[0020] A further improvement is that a plurality of mounting holes 2 are provided at one end of the door shaft bracket 2 corresponding to the connecting portion.

[0021] The utility model also provides a vacuum chamber door, comprising a plurality of the above-mentioned large-scale load-bearing hinges for the vacuum chamber door.

[0022] 3.Beneficial effects:

[0023] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0024] The large load-bearing hinge provided by the utility model consists of a door shaft bracket one, a door shaft bracket two and a shaft pin. A brass spacer and a bearing are added in the middle of the pin. The bearing can increase the rotation smoothness of the two brackets. The two ends of the pin are fixed with a retaining spring to prevent the pin from falling. One end of the door shaft bracket one is fixed to the vacuum chamber, and one end of the door shaft bracket two is fixed to the chamber door. The bearing can withstand more axial loads, and a heavy door can be perfectly opened by rotating the bearing. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the overall structure of the large load-bearing hinge provided by the utility model;

[0026] Figure 2 For this utility model Figure 1 Schematic diagram of the split state;

[0027] Figure 3 For this utility model Figure 2 Schematic diagram of the center pin connection relationship;

[0028] Figure 4 This is a physical picture of a vacuum chamber door provided by the utility model.

[0029] Reference numerals:

[0030] 1-Door shaft bracket 1; 101-Mounting hole 1; 2-Pin shaft; 3-Circlip; 4-Spacer; 5-Door shaft bracket 2; 501-Connecting part; 502-Mounting hole 2; 6-Bearing; 7-Fastening pin. DETAILED DESCRIPTION

[0031] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0032] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connected," "fixed," "provided with," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0033] It should be noted that the structures not introduced in the present invention do not involve the design points and improvement directions of the present invention, and all adopt the existing technology. At the same time, the content of the above background technology belongs to the technical cognition scope of the utility model author. Since the technical content in this field is vast and too complicated, the above content of this application does not necessarily constitute the existing technology.

[0034] Example 1

[0035] Reference Figure 1-3 This embodiment provides a large load-bearing hinge for a vacuum chamber door, comprising a door shaft bracket 1, one end of which is provided with two sets of retaining springs 3 for limiting and engaging a pin shaft 2;

[0036] The outer ring of the pin shaft 2 between the two sets of retaining springs 3 is provided with a spacer 4, and the outer sides of the two sets of spacers 4 are rotatably connected to the door shaft bracket 2 5;

[0037] A bearing 6 is provided between at least one set of the retaining springs 3 and the spacer sleeve 4 .

[0038] In this embodiment, the door shaft bracket 2 1 and the spacer sleeve 4 are rotationally connected, and there is no limitation on the connection relationship between the spacer sleeve 4 and the pin shaft 2, which can satisfy the requirement that the door shaft bracket 2 1 rotates around the pin shaft 2.

[0039] The large load-bearing hinge provided in this embodiment consists of a door shaft bracket 1, a door shaft bracket 2 5 and a pin 2. A brass spacer 4 and a bearing 6 are added in the middle of the pin 2. The addition of the bearing 6 can increase the rotation smoothness of the two brackets. The two ends of the pin 2 are fixed with a retaining spring 3 to prevent the pin 2 from falling. One end of the door shaft bracket 1 is fixed to the vacuum chamber, and one end of the door shaft bracket 2 5 is fixed to the chamber door. The bearing 6 can withstand a large axial load, and the heavy door can be perfectly opened by rotating the bearing 6.

[0040] This embodiment further includes a plurality of fastening pins 7 passing through the retaining spring 3 and abutting against the pin shaft 2 to further clamp the pin shaft 2 and prevent the pin shaft 2 from falling.

[0041] In a preferred embodiment, one end of the door shaft bracket 1 corresponding to the retaining spring 3 is provided with a plurality of mounting holes 101, and the plurality of mounting holes 101 are fixed to the vacuum chamber by fasteners.

[0042] In a preferred embodiment, the spacer 4 is made of brass, and the cross section of the spacer 4 is T-shaped, which improves the overall structural connection stability of the load-bearing hinge.

[0043] In a preferred embodiment, the door axis bracket 2 5 includes a connecting portion 501 connected to two groups of spacers 4, and a cavity is formed between the two groups of retaining springs 4 for the connecting portion 501 to rotate around the spacers 4. The door axis bracket 2 5 of this embodiment has a rotation range of 180 degrees with the pin shaft 2 as the center, meeting traditional door opening requirements.

[0044] In a preferred embodiment, one end of the door shaft bracket 2 5 corresponding to the connecting portion 501 is provided with a plurality of mounting holes 2 502 , and the plurality of mounting holes 2 502 are fixed to the chamber door via fasteners.

[0045] Large load-bearing hinges are mainly used in heavy-weight vacuum chamber coating equipment. They are used to connect the vacuum chamber door to the chamber. Since the vacuum degree inside the chamber is relatively high, the door panel must be thick and heavy. Therefore, large load-bearing hinges are needed to connect them. The vacuum chamber door is connected to the large load-bearing hinge. When needed, the door is opened to place the substrate. At the same time, since the vacuum chamber door is particularly heavy and there are various parts on the door, the chamber door can be opened smoothly through the large load-bearing hinge with bearings.

[0046] The large load-bearing hinge provided by the utility model has good economy, simple and stable structure, common parts, relatively little wear and tear under normal use, and can bear a large weight load of 1.2t.

[0047] Example 2

[0048] This embodiment provides a large load-bearing hinge for a vacuum chamber door. The load-bearing hinge includes a door shaft bracket 1, one end of which is provided with two sets of retaining springs 3 for limiting and engaging a pin shaft 2.

[0049] The outer ring of the pin shaft 2 between the two sets of clip springs 3 is rotatably connected with a spacer 4, and the outer parts of the two sets of spacers 4 are provided with a door shaft bracket 2 5;

[0050] A bearing 6 is provided between at least one set of the retaining springs 3 and the spacer sleeve 4 .

[0051] In this embodiment, the spacer 4 and the pin 2 are rotationally connected, and there is no limitation on the connection relationship between the door shaft bracket 2 5 and the spacer 4 , which can satisfy that the door shaft bracket 2 1 rotates around the pin 2 as the center.

[0052] Example 3

[0053] Reference Figure 4 This embodiment provides a vacuum chamber door, including several large load-bearing hinges for vacuum chamber doors as described in Example 1.

[0054] The above-mentioned embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, which all fall within the scope of protection of the utility model. Therefore, the scope of protection of the utility model patent shall be based on the attached claims.

Claims

1. A large load-bearing hinge for a vacuum chamber door, characterized in that: The load-bearing hinge includes A door shaft bracket (1), one end of which is provided with two sets of retaining springs (3) for limiting and engaging the pin shaft (2); The outer ring of the pin shaft (2) between the two sets of retaining springs (3) is provided with a spacer (4), and the outer sides of the two sets of spacers (4) are rotatably connected to the second door shaft bracket (5); A bearing (6) is provided between at least one set of the retaining springs (3) and the spacer sleeve (4).

2. A large load-bearing hinge for a vacuum chamber door, characterized in that: The load-bearing hinge includes A door shaft bracket (1), one end of which is provided with two sets of retaining springs (3) for limiting and engaging the pin shaft (2); The outer ring of the pin shaft (2) between the two sets of retaining springs (3) is rotatably connected with a spacer sleeve (4), and the outer sleeves of the two sets of spacer sleeves (4) are provided with a second door shaft bracket (5); A bearing (6) is provided between at least one set of the retaining springs (3) and the spacer sleeve (4).

3. A large load-bearing hinge for a vacuum chamber door according to claim 1 or 2, characterized in that: It also includes a plurality of fastening pins (7) that pass through the retaining spring (3) and abut against the pin shaft (2).

4. A large load-bearing hinge for a vacuum chamber door according to claim 1 or 2, characterized in that: One end of the door shaft bracket (1) corresponding to the retaining spring (3) is provided with a plurality of mounting holes (101).

5. A large load-bearing hinge for a vacuum chamber door according to claim 1 or 2, characterized in that: The spacer (4) is made of brass.

6. A large load-bearing hinge for a vacuum chamber door according to claim 1 or 2, characterized in that: The cross section of the spacer (4) is T-shaped.

7. A large load-bearing hinge for a vacuum chamber door according to claim 1 or 2, characterized in that: The second door shaft bracket (5) comprises a connecting portion (501) connected to two sets of spacer sleeves (4), and a cavity for the connecting portion (501) to rotate around the spacer sleeves (4) is formed between the two sets of retaining springs (3).

8. The large load-bearing hinge for a vacuum chamber door according to claim 7, characterized in that: One end of the door shaft bracket 2 (5) corresponding to the connecting portion (501) is provided with a plurality of second mounting holes (502).

9. A vacuum chamber door, characterized in that: The invention comprises several large load-bearing hinges for vacuum chamber doors according to any one of claims 1 to 8.

Images