Helium compression metering valve

Abstract

The utility model relates to the field of metering valves, and discloses a helium compression metering valve which comprises a helium metering valve body, a gas inlet pipeline is fixedly connected to the side outer wall of the helium metering valve body, a clamping groove is formed in the side outer wall of the gas inlet pipeline, a first sealing ring is fixedly connected to the outer wall of the gas inlet pipeline, and a supply pipeline is arranged on one side of the gas inlet pipeline; clamping rings corresponding to the clamping grooves are fixedly connected to the side outer wall of the supply pipeline, a second sealing ring is fixedly connected to the outer wall of the supply pipeline, and two sealing sleeves are arranged on the outer wall of the air inlet pipeline and the outer wall of the supply pipeline; a first sealing groove and a second sealing groove which correspond to the first sealing ring and the second sealing ring are formed in the inner walls of the two sealing sleeves respectively, and outer rings are fixedly connected to the outer walls of the two sides of each sealing sleeve respectively. Therefore, the metering accuracy and the safety and reliability of the whole system are improved.

Description

Technical Field

[0001] The present application relates to the technical field of metering valves, and in particular to a helium compression metering valve. Background Art

[0002] Helium is widely used in many important fields such as semiconductor manufacturing, aerospace, cryogenic superconductors, and medical equipment. In these application scenarios, accurate measurement of the helium flow is crucial to ensure the normal operation of related processes or equipment. As a key device for controlling the helium flow, the sealing performance of the metering valve directly affects the accuracy of the metering and the safety and reliability of the entire system. Existing helium metering valves have some shortcomings in terms of sealing. The sealing structure design of traditional metering valves is often relatively simple, and ordinary rubber seals are usually used to seal the valve stem and valve body, valve core and valve cavity, etc. However, helium, as a small molecule gas, has strong permeability and can easily penetrate through the tiny pores of these conventional seals, resulting in leakage, thereby affecting the accuracy of metering and causing waste of helium. Therefore, a helium compression metering valve is proposed to solve the above problems.

[0003] The above information disclosed in this background technology is only used to increase the understanding of the background technology of this application. Therefore, it may contain information that does not constitute the prior art known to ordinary technicians in this field. Utility Model Content

[0004] In order to solve the above problems, the present application provides a helium compression metering valve.

[0005] The helium compression metering valve provided in this application adopts the following technical solution:

[0006] A helium compression metering valve comprises a helium metering valve body, wherein a side outer wall of the helium metering valve body is fixedly connected to an intake pipe, a side outer wall of the intake pipe is provided with a clamping groove, a first sealing ring is fixedly connected to the outer wall of the intake pipe, a supply pipe is provided on one side of the intake pipe, a clamping ring corresponding to the clamping groove is fixedly connected to the side outer wall of the supply pipe, a second sealing ring is fixedly connected to the outer wall of the supply pipe, two sealing sleeves are provided on the outer walls of the intake pipe and the supply pipe, and the inner walls of the two sealing sleeves are both provided with a first sealing groove and a second sealing groove corresponding to the first sealing ring and the second sealing ring, and the outer walls of both sides of the sealing sleeves are fixedly connected to the outer ring.

[0007] Preferably, both side outer walls of the sealing sleeve are provided with fixing components, and the two sealing sleeves are fixedly installed via the two fixing components.

[0008] Preferably, the side outer walls of the air intake pipe and the supply pipe are both provided with inner grooves, and the outer walls of the inner grooves are provided with sealing rings for sealing.

[0009] Preferably, a ring sleeve is fixedly connected to the inner wall of the helium metering valve body, and the ring sleeve is located between the first sealing groove and the second sealing groove.

[0010] In summary, this application has the following beneficial technical effects:

[0011] By engaging and docking the provided card groove with the card ring, the sealing between the intake pipe and the supply pipe is completed. At the same time, the sealing ring is installed in the inner groove between the intake pipe and the supply pipe to further improve the sealing performance. Then, by docking the first sealing groove on the sealing sleeve with the second sealing ring, and docking the second sealing groove with the first sealing ring, and sealing the two sides with the outer ring, the sealing performance is further improved to ensure the connection sealing performance between the intake pipe and the supply pipe. Compared with the existing technology, by adopting multiple sealing designs such as multi-layer composite seals, adjustable sealing pressure devices and sealing protection sleeves, the penetration and leakage of helium can be effectively prevented, ensuring that the metering valve can maintain a good sealing state under various working conditions, thereby improving the accuracy of measurement and the safety and reliability of the entire system. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is an overall schematic diagram of an embodiment of the application;

[0013] Figure 2 This is a schematic diagram of the air intake duct structure of an embodiment of the application;

[0014] Figure 3 This is a schematic diagram of the supply pipeline structure of the embodiment of the application;

[0015] Figure 4 It is a schematic diagram of the sealing sleeve structure of the embodiment of the application.

[0016] Explanation of the accompanying drawings: 1. Helium metering valve body; 2. Inlet pipe; 3. Supply pipe; 4. Sealing sleeve; 5. Fixing assembly; 6. First sealing ring; 7. Sealing ring; 8. Retaining groove; 9. Retaining ring; 10. Second sealing ring; 11. First sealing groove; 12. Second sealing groove; 13. Outer ring; 14. Inner groove; 15. Ring sleeve. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-4 This application is described in further detail.

[0018] The embodiment of the present application discloses a helium compression metering valve. Figure 1-4A helium compression metering valve includes a helium metering valve body 1. When the flow value needs to be reset when using it for the first time or replacing the gas-consuming equipment, the helium metering valve body 1 needs to be initialized and set. A preset helium flow value is input through an external controller. The flow value is determined according to the specific needs of the gas-consuming equipment and the process requirements. At this time, the flow monitoring device starts to monitor the flow of helium in real time and transmits the data to the controller. The controller compares the received flow data with the preset flow value. If there is a difference, the controller will drive the driving mechanism to adjust the position of the valve core rod until the helium flow reaches the preset value, thereby completing the helium metering. The side outer wall of the helium metering valve body 1 is fixedly connected with the air intake pipe 2, which facilitates the entry of helium into the helium metering valve body 1 for measurement. A card groove 8 is provided on the side outer wall of the air intake pipe 2, and a first sealing ring 6 is fixedly connected to the outer wall of the air intake pipe 2. A supply pipe 3 is provided on one side of the air intake pipe 2, and a card ring 9 corresponding to the card groove 8 is fixedly connected to the side outer wall of the supply pipe 3. By docking the air intake pipe 2 with the supply pipe 3, and docking and engaging the card groove 8 with the card ring 9, it is convenient to improve the sealing performance of the connection between the air intake pipe 2 and the supply pipe 3. A second sealing ring 10 is fixedly connected to the outer wall of the pipeline 3, and two sealing sleeves 4 are provided on the outer walls of the intake pipeline 2 and the supply pipeline 3, and the inner walls of the two sealing sleeves 4 are provided with a first sealing groove 11 and a second sealing groove 12 corresponding to the first sealing ring 6 and the second sealing ring 10. By sleeved the two sealing sleeves 4 on the connection between the intake pipeline 2 and the supply pipeline 3, the first sealing groove 11 corresponds to the second sealing ring 10, and the second sealing groove 12 corresponds to the first sealing ring 6, so as to facilitate further sealing of the connection between the intake pipeline 2 and the supply pipeline 3. The outer walls of both sides of the sealing sleeve 4 are fixedly connected with an outer ring 13, and the inner grooves 14 on both sides of the sealing sleeve 4 are used to improve the connection sealing, and the connection between the intake pipeline 2 and the supply pipeline 3 is multi-sealed to avoid helium leakage and improve the practicality of the device.

[0019] The outer walls of both sides of the sealing sleeve 4 are provided with fixing components 5, and the two sealing sleeves 4 are fixedly installed by the two fixing components 5. The fixing components 5 include bolts and nuts. The bolts are passed through the sealing sleeve 4 to the other sealing sleeve 4, and then the nuts are fixed and connected with the bolts, thereby completing the fixed installation between the two sealing sleeves 4.

[0020] The side outer walls of the air intake pipe 2 and the supply pipe 3 are both provided with an inner groove 14, and the outer wall of the inner groove 14 is provided with a sealing ring 7 for sealing. The sealing ring 7 is installed inside the inner groove 14 on the air intake pipe 2 and the supply pipe 3 to improve the sealing of the connection.

[0021] A ring sleeve 15 is fixedly connected to the inner wall of the helium metering valve body 1, and the ring sleeve 15 is located between the first sealing groove 11 and the second sealing groove 12. When the two sealing sleeves 4 are sleeved on the connection between the intake pipe 2 and the supply pipe 3, the ring sleeve 15 is located between the first sealing groove 11 and the second sealing groove 12, thereby providing a certain seal on the connection.

[0022] The implementation principle of a helium compression metering valve in an embodiment of the present application is as follows: first, by installing the sealing ring 7 on the inner groove 14, the clamping ring 9 on the supply pipe 3 is docked and engaged with the clamping groove 8 on the intake pipe 2, so that the side outer wall of the intake pipe 2 is fitted with the side outer wall of the supply pipe 3, and then the two sealing sleeves 4 are sleeved on the connection between the intake pipe 2 and the supply pipe 3, the first sealing groove 11 on the two sealing sleeves 4 corresponds to the second sealing ring 10, and the second sealing groove 12 corresponds to the first sealing ring 6, so that the ring sleeve 15 is between the second sealing ring 10 and the first sealing ring 6, and multiple sealings are performed on the connection between the intake pipe 2 and the supply pipe 3, and then the two sealing sleeves 4 are fixed and installed by the fixing components 5 on both sides to complete the connection between the intake pipe 2 and the supply pipe 3, while improving the sealing performance of the connection.

[0023] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense, and may refer to mechanical or electrical connections, internal communication between two components, or direct connection. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute positions of the objects being described change, the relative positional relationships may also change.

[0024] Secondly: The drawings of the embodiments disclosed in this utility model only involve structures related to the embodiments disclosed in this utility model. Other structures can refer to common designs. In the absence of conflicts, the same embodiment and different embodiments of the utility model can be combined with each other.

[0025] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

[0026] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A helium compression metering valve, comprising a helium metering valve body (1), characterized in that: The side outer wall of the helium metering valve body (1) is fixedly connected to an intake pipe (2), a groove (8) is provided on the side outer wall of the intake pipe (2), a first sealing ring (6) is fixedly connected to the outer wall of the intake pipe (2), a supply pipe (3) is provided on one side of the intake pipe (2), a clamping ring (9) corresponding to the groove (8) is fixedly connected to the side outer wall of the supply pipe (3), a second sealing ring (10) is fixedly connected to the outer wall of the supply pipe (3), two sealing sleeves (4) are provided on the outer walls of the intake pipe (2) and the supply pipe (3), and the inner walls of the two sealing sleeves (4) are both provided with a first sealing groove (11) and a second sealing groove (12) corresponding to the first sealing ring (6) and the second sealing ring (10), and the outer walls of both sides of the sealing sleeve (4) are fixedly connected to an outer ring (13).

2. A helium compression metering valve according to claim 1, characterized in that: Both side outer walls of the sealing sleeve (4) are provided with fixing components (5), and the two sealing sleeves (4) are fixedly installed via the two fixing components (5).

3. The helium compression metering valve according to claim 1, characterized in that: The side outer walls of the air intake pipe (2) and the supply pipe (3) are both provided with inner grooves (14), and the outer walls of the inner grooves (14) are provided with sealing rings (7) for sealing.

4. The helium compression metering valve according to claim 1, characterized in that: A ring sleeve (15) is fixedly connected to the inner wall of the helium metering valve body (1), and the ring sleeve (15) is located between the first sealing groove (11) and the second sealing groove (12).

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