Measuring device

Abstract

The utility model relates to a measuring device, which is used for measuring the distance between target materials, and comprises a base plate which comprises a central part and a plurality of leg parts extending outwards from the central part along the horizontal direction; and a distance measuring unit which is disposed on the leg part and measures the distance between the lower surface of the chassis and a measurement object in a contactless manner. The measuring device provided by the utility model can be used for conveniently, quickly and accurately measuring.

Description

Technical Field

[0001] The utility model relates to a measuring device, in particular to a measuring device used for measuring the spacing of target materials used for physical vapor deposition. Background Art

[0002] With the development of semiconductor technology, various semiconductor processing technologies and equipment have emerged one after another. At the same time, as the requirements for the fineness and yield rate of semiconductor products are getting higher and higher, the requirements for the processing accuracy and processing uniformity of semiconductor processing technologies and equipment are also increasing.

[0003] Taking physical vapor deposition (PVD) as an example, magnetron sputtering is a common technique used to deposit thin films on substrates. To achieve uniform film formation, precise adjustment of the distance between the magnetron cathode and the target, as well as the distance between the target and the substrate support, is essential. To achieve this, precise measurement of these two distances is essential.

[0004] In the past, measurements in this field were commonly performed using aluminum rods and vernier calipers or tape measures. Specifically, the aluminum rod is first placed, for example, at the opening of a magnetron cathode, and then the distance between the aluminum rod and the magnet inside the magnetron cathode is measured using a vernier caliper or tape measure. However, while the aluminum rod is easy to place, its stability is poor. Sliding or rolling can scratch the magnetron cathode. Vernier calipers and tape measures are traditional measuring tools that require the user to visually inspect the scale lines, resulting in low measurement accuracy. During measurement, the vernier caliper or tape measure must contact the object being measured, potentially scratching it. Furthermore, the vernier caliper or tape measure itself can be affected by the magnet, preventing it from being stably placed and accurately measuring.

[0005] In order to solve the above problems, some technicians in this field have improved the existing measuring devices and methods. For example, the one-dimensional extended aluminum rod was improved to a more stable two-dimensional extended chassis; the vernier caliper used a digital caliper to avoid visual errors, etc.

[0006] However, the improved solution still requires manual operation of the vernier caliper, which is inconvenient and still requires contact with the object to be measured. In addition, there are still problems such as the magnetic field from the magnet interfering with the vernier caliper or tape measure.

[0007] Therefore, there is a need for a measuring device that can perform measurements conveniently, quickly and accurately. Utility Model Content

[0008] Technical issues

[0009] The purpose of the utility model is to provide a measuring device that can perform measurements conveniently, quickly and accurately.

[0010] Technical Solution

[0011] One embodiment of the present invention provides a measuring device for measuring target spacing, which includes: a chassis including a center portion and a plurality of legs extending outward from the center portion in a horizontal direction; and a distance measuring portion, which is arranged on the legs and measures the distance between the lower surface of the chassis and the measurement object in a contactless manner.

[0012] According to one embodiment, the chassis may be formed from Teflon.

[0013] According to one embodiment, the distance measuring unit may be a laser rangefinder.

[0014] According to one embodiment, the distance measuring portion may be arranged to be spaced apart from the central portion.

[0015] According to one embodiment, the number of the legs may be three or more.

[0016] According to one embodiment, the angles between every two adjacent legs in the plurality of legs may be the same.

[0017] According to one embodiment, the central portion may be an annular disc.

[0018] According to one embodiment, the distance measuring portion may be disposed on a side surface of the leg.

[0019] According to one embodiment, a through hole penetrating in the vertical direction may be formed in the leg, and the distance measuring unit may be arranged on the upper surface of the leg and measure the distance between the lower surface of the chassis and the measurement object through the through hole.

[0020] According to one embodiment, the distance measuring unit may be configured on each of the plurality of legs.

[0021] Beneficial effects

[0022] The measuring device of the utility model can perform measurement conveniently, quickly and accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a top view of the measuring device according to the first embodiment of the present invention.

[0024] Figure 2 It is a top view of a measuring device according to a second embodiment of the present invention.

[0025] Figure 3 is based on Figure 2 The cross-sectional view is shown along the cutting line AA.

[0026] Figure 4 It is a top view of a measuring device according to a third embodiment of the present invention.

[0027] Reference numerals

[0028] 100: Measuring device

[0029] 110: Chassis

[0030] 111: Central

[0031] 112: Legs

[0032] 113: Through hole

[0033] 120: Distance measurement unit DETAILED DESCRIPTION

[0034] Below, one or more embodiments of the present invention are described in detail in conjunction with the accompanying drawings of one or more embodiments of the present invention. Obviously, this or these embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work and modification also fall within the scope of protection of the present invention.

[0035] The terms used in the following embodiments are merely for the purpose of illustrating or explaining specific embodiments, and are not intended to limit the scope of protection of the present invention. In addition, singular expressions used in the present invention, such as "a", "an", "said", "above", "the", and "this", are intended to include plural forms such as "one or more", unless the context clearly indicates otherwise. It should also be understood that in the embodiments of the present invention, when terms such as "one or more", "at least one", and "more than one" are used, they are intended to include one, two, and at least three situations.

[0036] In addition, when the terms "in one embodiment," "in some embodiments," or "in one or more embodiments" are used in the description of the present invention, it is intended that the specific technical features described in conjunction with the embodiment may be included in one or more embodiments of the present invention. Therefore, the phrases "in one embodiment," "in some embodiments," or "in one or more embodiments" that appear in different places in the description do not necessarily refer to the same embodiment, but may refer to the same embodiment or different embodiments, unless the specific technical features described in these embodiments cannot be used alone or in combination.

[0037] In addition, in the present invention, when an element is described as "including", "comprising", or "having" another element, it is intended to be an open limitation, that is, the element may include other elements in addition to the other element. When an element is described as "only including", "only containing", "only having" another element or "consisting of another element", it is intended to be a closed limitation, that is, the element does not include other elements except the other element. However, it should be noted that when the term "formed by another element" is used to describe the formation relationship between multiple elements, the term is not intended to be a closed limitation. It should be considered that the other element forms a part of the one element, and the one element may include other elements besides the other element.

[0038] It should be understood that when sequential terms such as "first" and "second" are used herein to describe various elements, these sequential terms are only used to distinguish one element from another, and should not be used to imply a primary-secondary relationship or a sequential relationship. Without departing from the scope of the present invention, the first element may be labeled as the second element, and the second element may be labeled as the first element.

[0039] In the present invention, when describing the positional relationship of two or more elements, if terms such as "on...", "below...", "between...", etc. are used, it means that one or more other elements may be arranged between the two or more elements, unless terms such as "just", "closely", etc. are used.

[0040] Hereinafter, one or more embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can clearly and completely understand the present invention. When the description of known structures or features would unnecessarily obscure the main purpose of the present invention, the description of these known structures or features will be omitted.

[0041] The utility model provides a measuring device for measuring target spacing, and can conveniently, quickly and accurately measure the target spacing (for example, the spacing between the target and a magnet, the spacing between the target and a substrate mounting table).

[0042] Figure 1 It is a top view of the measuring device according to the first embodiment of the present invention.

[0043] like Figure 1 As shown, the measuring device 100 may include a chassis 110 and a distance measuring unit 120 configured on the chassis 110 .

[0044] The chassis 110 may be made of Teflon to ensure the strength of the chassis 110 , reduce the weight of the chassis 110 , and avoid interference from magnetic fields.

[0045] In addition, the chassis 110 may include a central portion 111 and a plurality of legs 112 extending horizontally outward from the central portion 111. Therefore, the chassis 110 can be supported by the legs 112 while being positioned by the central portion 111, so that the measuring device 100 can be placed in an appropriate position for measurement.

[0046] The central portion 111 may be disc-shaped to improve the stability of the chassis 110. More preferably, a circular hole may be provided at the center of the central portion 111, that is, the central portion 111 may be formed into an annular disc shape, so as to ensure the stability of the chassis 110 while achieving lightweighting of the central portion 111.

[0047] The legs 112 preferably have a flat and wide lower surface, for example, the legs 112 are preferably flat as a whole for stable placement. The ends of the legs 112 preferably have rounded corners, more preferably formed into a semicircle, to prevent collision with a user or other components and causing damage.

[0048] The number of the legs 112 can be three or more, for example, three, four, or five or more, preferably three. When the number of the legs 112 is three, the measuring device 100 can be stably mounted, the volume and weight of the chassis 110 can be reduced, and the manufacturing cost of the chassis 110 can be reduced.

[0049] Furthermore, the angle between each two adjacent legs 112 in the plurality of legs 112 may be the same. For example, when there are three legs 112, the angle may be 120°. The evenly arranged legs 112 can further improve the stability of the chassis 110.

[0050] The distance measuring unit 120 can be disposed on the leg 112 and can measure the distance between the lower surface of the chassis 110 and the measurement object (e.g., the magnet in the magnetron cathode or the substrate stage in the processing chamber) in a contactless manner to avoid scratching the measurement object. As a specific embodiment, the distance measuring unit 120 can be a laser rangefinder. In this case, the measuring device 100 of the present invention is not only safe to operate, but also enables convenient, rapid, and accurate measurement.

[0051] The distance measuring unit 120 is preferably spaced apart from the center portion 111. Specifically, the distance measuring unit 120 can be positioned appropriately between the ends of the legs 112. In this case, the distance measuring unit 120 can perform measurements at a position offset outward from the center portion 111. Therefore, when multiple locations on the object need to be measured, the measuring device 100 can be lifted, rotated about the center portion 111, and then relocated. This ensures that the measuring device 100 is positioned at the same height, level, and position as before, while allowing the distance measuring unit 120 to be moved to a different position, thereby improving the reliability of measurement results for multiple locations on the same object.

[0052] Specifically, when measuring the distance between the target and the magnet in a magnetron cathode, measurements are typically required at three different locations. In this case, a measuring device 100 can be used, which includes three legs 112 spaced 120° apart, one of which is equipped with the distance measuring unit 120. After completing the measurement of the first location, the user can lift the chassis 110 and rotate it counterclockwise or clockwise around the center 111. When the three legs 112 are visually observed to have moved to the positions of adjacent legs 112, the user can stop the rotation and reposition the measuring device 100. The distance measuring unit 120 can then perform measurements at a second location, separated from the first location by a central angle of 120° relative to the center of the measurement object. Repeating this operation allows for measurement at a third location, separated from the second location by a central angle of further 120° relative to the center of the measurement object. This allows for measurements at three different and evenly distributed locations.

[0053] In addition, when it is necessary to measure four different positions, a measuring device 100 can be used, which has four legs 112 arranged at 90° intervals and one of which has the distance measuring unit 120, and four different and evenly distributed positions can be measured using a method similar to the above method.

[0054] On the other hand, the distance measuring portion 120 can be specifically configured on the side surface or the upper surface of the leg portion 112 .

[0055] Continue to refer to Figure 1 When the distance measuring unit 120 is disposed on the side surface of the leg 112 , the bottom of the distance measuring unit 120 is not blocked, and the distance measuring unit 120 can directly face the measurement object, so that the laser can be directly used for measurement.

[0056] Figure 2 It is a top view of a measuring device according to a second embodiment of the present invention. Figure 3 is based on Figure 2The cross-sectional view is shown along the cutting line AA.

[0057] like Figure 2 and Figure 3 As shown, when the distance measuring part 120 is configured on the upper surface of the leg 112, a through hole 113 penetrating in the up and down directions may be formed in the leg 112, and the distance measuring part 120 can emit laser downward through the through hole 113 and measure the distance between the lower surface of the chassis 110 and the measurement object.

[0058] The distance measuring unit 120 can be fastened to the side surface or top surface of the leg 112 by fasteners such as bolts (not shown), or a bracket (not shown) can be provided on the side surface or top surface of the leg 112 to fix the distance measuring unit 120. Those skilled in the art can select an appropriate fixing method according to actual needs, and the present invention is not limited thereto. Furthermore, a mounting groove (not shown) can be formed on the side surface or top surface of the leg 112 to more easily configure the distance measuring unit 120 at an appropriate position on the leg 112.

[0059] Figure 4 It is a top view of a measuring device according to a third embodiment of the present invention.

[0060] like Figure 4 As shown, as a preferred embodiment, the distance measuring unit 120 can be configured on each of the multiple legs 112. For example, when there are three legs 112, the number of distance measuring units 120 can also be three, with one distance measuring unit 120 configured on each leg 112. This allows for simultaneous measurement of multiple positions of the measurement object, eliminating the need to rotate the chassis 110 to change the position of the distance measuring unit 120 and perform multiple measurements.

[0061] On the other hand, the distance between the distance measuring portion 120 on each leg 112 and the central portion 111 may be the same or different. Those skilled in the art may make appropriate selections based on actual needs, and the present invention is not limited thereto.

[0062] The above description of the embodiments of the present invention is intended only to facilitate a comprehensive understanding of the present invention. The present invention is not limited thereto, and those skilled in the art will be able to make various modifications and variations based on these descriptions. Therefore, the technical concept of the present invention is not limited to the above-described embodiments, and the attached claims and their equivalents or equivalent variations all fall within the scope of the present invention.

Claims

1. A measuring device for measuring target spacing, characterized in that: include: a chassis comprising a central portion and a plurality of legs extending outwardly from the central portion in a horizontal direction; as well as The distance measuring unit is arranged on the leg and measures the distance between the lower surface of the chassis and the measurement object in a contactless manner.

2. The measuring device according to claim 1, characterized in that The chassis is formed from Teflon.

3. The measuring device according to claim 1, characterized in that The number of the legs is three or more.

4. The measuring device according to claim 1, characterized in that The included angles between every two adjacent legs in the plurality of legs are the same.

5. The measuring device according to claim 1, characterized in that The central portion is in the shape of an annular disk.

6. The measuring device according to claim 1, characterized in that The distance measuring unit is a laser rangefinder.

7. The measuring device according to claim 1, characterized in that The distance measuring portion is arranged apart from the central portion.

8. The measuring device according to claim 1, characterized in that The distance measuring portion is disposed on a side surface of the leg.

9. The measuring device according to claim 1, characterized in that The leg portion is formed with a through hole extending vertically therethrough. The distance measuring unit is arranged on the upper surface of the leg and measures the distance between the lower surface of the chassis and the measurement object through the through hole.

10. The measuring device according to claim 1, characterized in that The distance measuring unit is disposed on each of the plurality of legs.

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