Device for measuring aperture of spray header in semiconductor manufacturing process

Abstract

The utility model discloses a semiconductor process spray header aperture measuring device, which relates to the technical field of spray header detection equipment and comprises a bottom plate clamped with a crystal, a measuring hole matched with a spray header hole is arranged on the bottom plate, and a positioning hole matched with the crystal is arranged on the bottom plate. The positioning holes in the bottom plate are clamped with the positioning columns on the crystal, so that the bottom plate is stably connected with the crystal, the spraying head on the crystal coincides with the measuring hole, the hole diameter measuring instrument is moved to the side face of the measuring hole at the moment, the hole of the spraying head in the measuring hole is detected, spraying head detection is convenient and fast, and the detection efficiency is improved. And the detection data is more accurate.

Description

Technical Field

[0001] The utility model relates to the technical field of shower head detection equipment, in particular to an aperture measuring device for a semiconductor process shower head. Background Art

[0002] In semiconductor manufacturing, the showerhead is a core component. It is typically installed above the wafer as an electrode and is used in thin-film deposition and etching processes. By injecting process gases, thin films are formed and etched onto the wafer, forming the semiconductor. The showerhead's aperture structure is crucial for gas deposition uniformity during wafer production. Because showerheads undergo chemical cleaning after use, aperture size can change. This fixture is used to measure apertures in order to monitor the change in aperture size of the same component after repeated use and cleaning, and to estimate component lifespan.

[0003] For example, publication number CN118156170A, published on June 7, 2024, discloses a showerhead temperature monitoring device and method, comprising a non-contact temperature sensor for monitoring the temperature of a showerhead unit of a semiconductor processing device and a mounting base for mounting the non-contact temperature sensor; the semiconductor processing device comprises a cover unit and a showerhead unit; the cover unit comprises a cover and a cover plate, the showerhead unit is disposed on the cover plate and disposed on the inner side of the cover; the non-contact temperature sensor is disposed on the cover and disposed on the outer side of the cover, with the sensitive end of the non-contact temperature sensor facing the showerhead unit on the inner side of the cover. After long-term use, the showerhead disclosed above is difficult to detect changes in the showerhead hole, resulting in poor practicality. Summary of the Invention

[0004] The purpose of this utility model is to provide a semiconductor process shower head aperture measurement device that is more convenient for shower head detection data. The utility model conveniently detects the shower head aperture through the measuring hole on the bottom plate connected to the wafer, making the shower head aperture detection convenient and fast, and more practical.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present invention to solve its technical problems is: a semiconductor process shower head aperture measuring device, including a base plate to which a crystal is clamped, the base plate is provided with a measuring hole that matches the shower head hole, and the base plate is provided with a positioning hole that matches the crystal.

[0006] The aperture of the measuring hole is larger than the aperture of the shower head.

[0007] A handle is provided on the bottom plate.

[0008] The measuring holes are symmetrically arranged at the center of the bottom plate.

[0009] The positioning hole is rectangular.

[0010] The handles are symmetrically arranged on both sides of the base plate.

[0011] The beneficial effects of the utility model are:

[0012] The base plate and the crystal are precisely connected through the positioning holes, so that the sprinkler head on the crystal coincides with the measuring hole. At this time, the measuring hole is used to detect the sprinkler head hole. The sprinkler head detection is convenient and fast, and the detection data is more accurate.

[0013] A handle is provided on the bottom plate to facilitate the movement of the entire measuring device;

[0014] The positioning holes on the base plate are clamped with the positioning columns on the crystal to achieve a stable connection between the base plate and the crystal, so that the sprinkler head on the crystal coincides with the measuring hole. At this time, the aperture measuring instrument is moved to the side of the measuring hole to detect the hole of the sprinkler head in the measuring hole. The sprinkler head detection is convenient and fast, and the detection data is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The figure is a schematic structural diagram of the semiconductor process shower head aperture measurement device of the present invention.

[0016] Figure 2 for Figure 1 side view.

[0017] Figure 3 for Figure 1 Axonometric drawing of .

[0018] In the attached figure: 1-base plate, 2-measuring hole, 3-positioning hole, 4-handle. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0020] The specific implementation of the present invention is described in detail below with reference to specific embodiments.

[0021] like Figure 1-3 As shown, the semiconductor process shower head aperture measuring device includes a base plate 1 to which a crystal is clamped, and the base plate 1 is provided with measuring holes 2 that match the shower head holes. The measuring holes 2 are adapted to the number of shower heads, and the base plate 1 is provided with positioning holes 3 that match the crystal. The crystal is provided with positioning columns that match the positioning holes 3. The base plate 1 is a circular plate. Specifically, the measurement of the shower head hole is detected by an aperture measuring instrument.

[0022] When in use, the positioning hole 3 on the base plate 1 is clamped with the positioning column on the crystal to achieve a stable connection between the base plate 1 and the crystal, so that the spray head on the crystal coincides with the measuring hole 2. At this time, the aperture measuring instrument is moved to the side of the measuring hole 2 to detect the hole of the spray head in the measuring hole 2. The spray head detection is convenient and fast, and the detection data is more accurate.

[0023] The diameter of the measuring hole 2 is larger than the diameter of the hole of the shower head, thereby facilitating detection and measurement of the hole of the shower head.

[0024] A handle 4 is provided on the base plate 1 to facilitate the movement of the entire measuring device. Specifically, the handle 4 is cylindrical and is welded to the base plate 1 .

[0025] The measuring holes 2 are symmetrically arranged in the center of the bottom plate 1, so as to match the distribution of the shower heads on the crystal, thereby ensuring that the measuring holes 2 stably detect the aperture of the shower heads, thereby making the detection data of the shower head holes more accurate.

[0026] The positioning hole 3 is rectangular, so as to match the positioning post on the crystal 1 with a rectangular cross section.

[0027] The handles 4 are symmetrically arranged on both sides of the base plate 1 , so that the user can move the entire measuring device by holding the two symmetrical handles 4 .

[0028] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A semiconductor process showerhead aperture measurement device, characterized in that: The invention comprises a base plate (1) to which a crystal is clamped, wherein the base plate (1) is provided with a measuring hole (2) matched with a shower head hole, and the base plate (1) is provided with a positioning hole (3) matched with the crystal.

2. The semiconductor process showerhead aperture measurement device according to claim 1, wherein: The aperture of the measuring hole (2) is larger than the aperture of the shower head.

3. The semiconductor process shower head aperture measurement device according to claim 2, wherein: A handle (4) is provided on the bottom plate (1).

4. The semiconductor process showerhead aperture measurement device according to claim 2, wherein: The measuring holes (2) are symmetrically arranged at the center of the base plate (1).

5. The semiconductor process shower head aperture measurement device according to any one of claims 1 to 4, characterized in that: The positioning hole (3) is rectangular.

6. The semiconductor process shower head aperture measurement device according to claim 3, wherein: The handles (4) are symmetrically arranged on both sides of the base plate (1).

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