Jig

Abstract

The utility model discloses a jig, which is used for assembling and disassembling an electrostatic chuck, and comprises a main body frame piece which can be fixedly arranged at the top of a reaction cavity; the supporting piece is fixedly connected with the main body frame piece and can be positioned at the top of the reaction cavity; each limiting piece penetrates through the supporting piece and can move up and down; the balance part is fixedly connected with the lower end of each limiting part and has an extending shape in the horizontal plane; the assembly rod is fixedly connected with the balance part in the transverse direction and is at least located between the lower ends of the two limiting parts, and the two ends of the assembly rod are provided with fixing parts capable of being fixedly connected with electrostatic chucks; one end of the lifting device is arranged on the supporting piece, and the other end of the lifting device penetrates through the supporting piece to be connected with the assembling rod so as to drive the assembling rod to ascend and descend, horizontal assembling and disassembling of the electrostatic chuck are achieved, and collision damage to the electrostatic chuck is reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a fixture for loading and unloading an electrostatic chuck. Background Art

[0002] The electrostatic chuck (ESC) is a key component in semiconductor processing equipment. It is mounted on a pedestal at the bottom of the reaction chamber and primarily serves to hold wafers during wafer processing. However, installing and removing the ESC requires manual lifting and lowering of the chuck using existing portable jigs, or installing the chuck by manually pulling it downward and placing it on the pedestal.

[0003] However, uneven force applied during use can cause the electrostatic chuck to tilt, leading to damage. Furthermore, due to the limited space inside the reaction chamber, installation and removal of the electrostatic chuck can only be performed outside the chamber. Therefore, a jig that allows for horizontal installation and removal of the electrostatic chuck outside the chamber is urgently needed. Utility Model Content

[0004] The purpose of the utility model is to provide a jig for loading and unloading an electrostatic chuck, which can facilitate personnel to operate outside the reaction chamber, ensure the horizontal loading and unloading of the electrostatic chuck, thereby reducing the damage to the electrostatic chuck caused by collisions and ensuring the safety of the sensor installed under the electrostatic chuck.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a fixture for loading and unloading an electrostatic suction cup arranged in a reaction chamber of a semiconductor processing device, comprising: a main frame, which can be fixedly installed on the top of the reaction chamber; a support member, which is fixedly connected to the main frame and can be located at the top of the reaction chamber; at least two limit members, each of which passes through the support member and can move up and down; a balance member, which is fixedly connected to the lower end of each of the limit members and has an extended shape in the horizontal plane; an assembly rod, which is fixedly connected to the balance member in the horizontal direction and is located at least between the lower ends of two of the limit members, and both ends of the assembly rod are provided with a fixing portion that can be fixedly connected to the electrostatic suction cup; a lifting device, one end of which is arranged on the support member, and the other end passes through the support member and is connected to the assembly rod to drive the assembly rod to rise and fall, thereby realizing loading and unloading of the electrostatic suction cup.

[0006] Optionally, the jig further includes a plurality of lifting members, each of which passes through a through hole provided on the main frame. When the assembly rod is fixed to the electrostatic suction cup, the lifting member can move downward along the through hole on the main frame until the bottom of the lifting member abuts against the top of the reaction chamber to provide an upward force to separate the electrostatic suction cup from the reaction chamber.

[0007] Optionally, the lifting member is a jackscrew, and the through hole is a screw hole matching the jackscrew.

[0008] Optionally, the main frame includes two first rods, which are arranged parallel to each other on both sides of the top of the reaction chamber.

[0009] Optionally, both ends of the support member are fixedly connected to the first rod, so that the support member spans over the top of the reaction chamber.

[0010] Optionally, each of the first rods is provided with a first mounting hole at both ends, the first mounting hole corresponds to the position of the second mounting hole on the top of the reaction chamber, and the first rod is fixed to the reaction chamber by passing a first fixing member through the first mounting hole and the second mounting hole.

[0011] Optionally, each of the first rods includes a lap portion extending toward the outside of the reaction chamber and a first rod body, wherein the lap portion is vertically connected to the first rod body to form an "L" shape with an opening downward, and the first rod is clamped on the reaction chamber through the opening.

[0012] Optionally, the main frame also includes two second rods arranged parallel to each other, the second rods are arranged between the first rods, and are fixedly connected to the first rods vertically; a plurality of positioning portions are arranged on the second rods at intervals along the extension direction of the second rods, and the two ends of the support member are aligned with the positioning portions and then fixedly connected to the second rods.

[0013] Optionally, the assembly rod and the support member are arranged perpendicular to each other; each of the fixing portions includes an assembly hole passing through the assembly rod and a second fixing member, and the second fixing member passes through the assembly hole and is connected to the electrostatic chuck.

[0014] Optionally, the balancing member is in the shape of a ring or a disc.

[0015] Optionally, a pad is provided between the bottom of the lifting member and the top of the reaction chamber, and the bottom of the lifting member is pressed against the top of the reaction chamber through the pad.

[0016] Optionally, the lifting device is a rocker mechanism, which includes a handwheel, a fixing nut and a screw; the fixing nut is fixedly arranged at the center of the support member; the screw passes through the fixing nut, and the thread on the surface of the screw matches the thread on the inner wall of the fixing nut; the bottom end of the screw is connected to the assembly rod through a bearing, and the top end of the screw is connected to the handwheel.

[0017] Optionally, the fixture further includes a protective soft cover. When the electrostatic chuck is installed and removed, the protective soft cover is placed on the surface of the electrostatic chuck and below the assembly rod.

[0018] Compared with the prior art, the technical solution of the utility model has at least the following advantages:

[0019] The fixture is fixed to the top of the reaction chamber by setting a main frame, and the assembly rod is fixedly connected to the electrostatic chuck through the fixing part. The lifting device drives the assembly rod to rise and fall along the vertical direction of the reaction chamber, driving the electrostatic chuck to move up and down, reducing the collision of the electrostatic chuck.

[0020] At the same time, the limit piece provides vertical guidance for the up and down movement of the assembly rod, and the balance piece provides balancing force for the assembly rod in the circumferential direction, ensuring that the assembly rod remains horizontal during the up and down movement, avoiding tilting due to gravity or uneven force, and effectively preventing the electrostatic suction cup from tilting, thereby realizing horizontal loading and unloading of the electrostatic suction cup.

[0021] Secondly, the electrostatic chuck and the base can be separated by setting a lifting piece, which makes it easier for the lifting device to remove the electrostatic chuck from the base, improving the convenience of removing the electrostatic chuck and avoiding damage to the electrostatic chuck caused by violent removal. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a top view of a fixture of the present invention arranged on the top of a reaction chamber;

[0023] Figure 2 for Figure 1 A schematic cross-sectional view of the jig shown in FIG. 1 along the AA direction;

[0024] Figure 3 This is a top view of another embodiment of the present invention disposed on the top of the reaction chamber;

[0025] Figure 4 for Figure 3 Schematic cross-sectional view of the jig shown in FIG. 1 along the BB direction. DETAILED DESCRIPTION

[0026] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] It should be noted that, in this document, the terms "include," "comprise," "have," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or terminal device that includes a series of elements includes not only those elements but also other elements not explicitly listed, or also includes elements inherent to such process, method, article, or terminal device. In the absence of further limitations, elements defined by the phrase "include..." or "comprising..." do not exclude the presence of additional elements in the process, method, article, or terminal device that includes the elements.

[0028] It should be noted that the drawings are all in a very simplified form and use non-precise ratios. In the present invention, relational terms such as first and second are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. They are only used to conveniently and clearly assist in explaining the purpose of an embodiment of the present invention.

[0029] The cross-sectional schematic diagram of the reaction chamber 10 of the semiconductor processing device is shown in FIG. Figure 2 and Figure 4 As shown, a base 11 is provided at the bottom of the reaction chamber 10, and the base 11 is used to support the electrostatic chuck 12. A sealing ring 13 is provided between the electrostatic chuck 12 and the base 11 to ensure the vacuum reaction environment in the reaction chamber 10. When the electrostatic chuck 12 needs to be loaded and unloaded, the top cover of the reaction chamber 10 is opened, and the electrostatic chuck 12 is taken in and placed through the installation window 14 located at the top of the reaction chamber 10. However, when the existing portable jig is used to install or remove the electrostatic chuck, if the personnel apply uneven force, the electrostatic chuck 12 will be tilted, which can easily cause the electrostatic chuck 12 to be damaged by collision. In particular, after a long period of process reaction in a high-temperature vacuum environment, the electrostatic chuck 12 is tightly connected to the base 11, resulting in the need to apply great force to separate the electrostatic chuck 12 from the base 11 when the electrostatic chuck 12 and the base 11 are separated by hand. In this process, once the personnel apply uneven force, it is more likely to cause damage to the electrostatic chuck 12. At the same time, the electrostatic chuck 12 is provided with a lifting pin inside and various sensors (not shown) below. If the electrostatic chuck 12 tilts during installation and removal, the lifting pin and the sensors may be damaged.

[0030] In view of the above-mentioned defects, the present invention provides a fixture 100 for loading and unloading the electrostatic chuck 12 in the reaction chamber 10. Figure 1 and Figure 2As shown, it includes: a main frame 101, which can be fixedly installed on the top of the reaction chamber 10 to support the entire fixture 100. The main frame 101 can be flexibly set in shape according to the upper space of the reaction chamber. For example, in this embodiment, the main frame 101 is in the shape of a long strip and placed on the upper edge of the reaction chamber. In other embodiments, it can also be other shapes fixed to the reaction chamber; a support member 102, which is fixedly connected to the main frame 101 and can be located at the top of the reaction chamber 10; at least two limiting members 103, each of which passes through the support member 102 and can move up and down in the vertical direction to provide a driving force for the electrostatic chuck 12 The guiding role when moving up and down; the balance member 104, which is fixedly connected to the lower end of each of the limit members 103 and has an extended shape in the horizontal plane to prevent the electrostatic suction cup 12 from tilting in the horizontal plane during the up and down movement; the assembly rod 105, which is fixedly connected to the balance member 104 in the horizontal direction and is located between the lower ends of at least two of the limit members 103, and the two ends of the assembly rod 105 are provided with a fixing part 151 that can be fixedly connected to the electrostatic suction cup 12; the lifting device 106, one end of which is arranged on the support member 102, and the other end passes through the support member 102 and is connected to the assembly rod 105 to drive the assembly rod 105 to move up and down.

[0031] When using the jig 100 provided by the present invention to install or remove the electrostatic suction cup 12, the main frame 101 is fixed to the top of the reaction chamber 10, so that the support member 102 spans the installation window 14, and the assembly rod 105 is fixedly connected to the electrostatic suction cup 12 through the fixing portion 151, and then the assembly rod 105 is driven to rise and fall in the vertical direction of the reaction chamber 10 through the lifting device 106, driving the electrostatic suction cup 12 to move up and down. At the same time, the limit member 103 passes through the support member 102 and moves up and down in the vertical direction, providing a vertical guide for the up and down movement of the assembly rod 105, and the balance member 104 provides a balancing force for the assembly rod 105 in the circumferential direction, ensuring that the assembly rod 105 remains horizontal during the up and down movement, avoiding tilting due to gravity or uneven force, thereby effectively preventing the electrostatic suction cup 12 from tilting and realizing horizontal loading and unloading of the electrostatic suction cup 12.

[0032] In this embodiment, if Figure 1 As shown, the main frame 101 includes two first rods 111, which are arranged parallel to each other on both sides of the top of the reaction chamber 10. Furthermore, the two ends of the support member 102 are fixedly connected to the first rods 111, so that the support member 102 spans above the reaction chamber 10, thereby aligning the lifting device 106 located at the center of the support member 102 with the installation position of the electrostatic chuck 12.

[0033] In this embodiment, if Figure 1As shown, each first rod 111 has a first mounting hole 112 at each end. The first mounting hole 112 corresponds to the position of the second mounting hole on the top of the reaction chamber 10. A first fixing member 113 passes through the first mounting hole 112 and the second mounting hole to fix the first rod 111 to the reaction chamber 10, thereby achieving a fixed connection between the main frame 101 and the reaction chamber 10. Optionally, the first fixing member 113 is a bolt.

[0034] Furthermore, the support member 102 is a support rod with a certain thickness, and the support rod is provided with two guide channels running through the upper and lower surfaces of the support rod. Each of the limit members 103 is set in the corresponding guide channel, and the limit member 103 moves up and down along the guide channel, thereby limiting the horizontal deviation of the assembly rod 105, thereby preventing the electrostatic suction cup 12 from scratching the side wall of the reaction chamber 10 during the up and down movement.

[0035] Among them, such as Figure 1 As shown, the assembly rod 105 and the support member 102 are arranged perpendicular to each other, so that the connection line between the assembly rod 105 and the limit member 103 is perpendicular to each other; at the same time, the balance member 104 fixes the lower ends of the two limit members 103 and the assembly rod 105 in a clockwise or counterclockwise direction in the horizontal plane, thereby forming a ring-shaped or disc-shaped balance member 104 in the horizontal circumferential direction ( Figure 1 The ring-shaped or disc-shaped balancing member 104 is annular in shape. The limiting member 103 vertically limits the annular or disc-shaped balancing member 104, thereby preventing the assembly rod 105 from twisting when subjected to force, ensuring the assembly rod 105 is horizontal. This further prevents the balancing member 104 and the assembly rod 105 from tilting horizontally, ensuring horizontal assembly and disassembly of the electrostatic chuck 12.

[0036] Specifically, such as Figure 4 As shown, each fixing portion 151 includes a mounting hole 1511 extending through the mounting rod 105 and a second fixing member 1512. The second fixing member 1512 is connected to the electrostatic chuck 12 through the mounting hole 1511. Optionally, the second fixing member 1512 is a bolt. In other embodiments, the fixing portion 151 and the electrostatic chuck 12 may be fixed by a snap fastener, and the mounting rod 105 and the electrostatic chuck 12 may be fixed in a detachable manner.

[0037] In this embodiment, the lifting device 106 is a rocker mechanism comprising a handwheel 161, a fixing nut 162, and a screw 163. The fixing nut 162 is fixedly mounted at the center of the support member 102. The screw 163 passes through the fixing nut 161, allowing it to be rotatably connected to the support frame 102. The threads on the surface of the screw 163 match the threads on the inner wall of the fixing nut. The bottom end of the screw 163 is connected to the assembly rod 105 via a bearing 164, and the top end of the screw 163 is connected to the handwheel 161. The bearing 164 converts the rotational motion of the screw 163 into linear motion, thereby driving the assembly rod 105 up and down while preventing rotational motion of the assembly rod 105. In other embodiments, the lifting device 106 may also be a pneumatic cylinder or a hydraulic cylinder.

[0038] During actual use, the operator only needs to rotate the handwheel 161 outside the cavity. The rotation of the handwheel 161 drives the screw 163 to rotate in the fixed nut 161, and the rotational motion of the screw 163 is converted into linear motion through the bearing 164, thereby driving the assembly rod 105, the balance member 104 and the limit member 103 to move up and down in the vertical direction. Taking the removal of the electrostatic chuck 12 as an example, the assembly rod 105 uniformly applies an upward pulling force to the electrostatic chuck 12, thereby separating the electrostatic chuck 12 from the base 11 in the vertical direction. During the separation process, due to the restrictions of the balance member 104 and the limit member 103, the electrostatic chuck 12 always remains in a horizontal state, effectively reducing the damage to the electrostatic chuck 12 during the removal process.

[0039] Furthermore, when loading and unloading the electrostatic chuck 12, in order to protect the upper surface of the electrostatic chuck 12, the jig 100 also includes a protective soft cover 108. The protective soft cover 108 is placed on the surface of the electrostatic chuck 12 and is located below the assembly rod 105. It can effectively prevent foreign matter from falling directly on the upper surface of the electrostatic chuck 12 and causing damage to the electrostatic chuck.

[0040] The present invention also provides another fixture 200, such as Figure 3 and Figure 4 As shown, the structure of the fixture 200 is substantially the same as that of the above-described embodiment, differing primarily in the structural improvements of the main frame 201. In this embodiment, the main frame 201 includes two mutually parallel first rods 211 and two mutually parallel second rods 212. The first rods 211 are mutually parallel and arranged on either side of the top of the reaction chamber 10. The second rods 212 are arranged between the first rods 211, and each second rod 212 is fixedly connected perpendicularly to the first rod 211 at both ends, so that the second rods 212 span the top of the reaction chamber 10 and are used to connect to the support member 102.

[0041] In this embodiment, each of the first rods 211 includes a lap portion 2111 extending toward the outside of the reaction chamber 10 and a first rod body 2112. Figure 4 As shown, the overlapping portion 2111 is vertically connected to the first rod body 2112 to form an "L" shape with an opening facing downward. The first rod 211 is clamped to the reaction chamber 10 through the opening. Specifically, the overlapping portion 2111 is disposed at the top of the reaction chamber 10, and the first rod body 2112 is vertically connected to the overlapping portion 2111. The opening formed by the overlapping portion 2111 and the first rod body 2112 is clamped to the side wall of the installation window 14 of the reaction chamber 10, so that the first rod 211 is suspended from the edge of the installation window 14. The provision of the overlapping portion 2111 eliminates the need for a second mounting hole in the top of the reaction chamber to secure the fixture 200, reduces the number of openings in the top of the reaction chamber, and provides redundant space for installing other components.

[0042] Further, if Figure 3 As shown, a plurality of positioning portions 213 are provided on the second rod 212 at intervals along the extension direction of the second rod 212. The two ends of the support member 102 are aligned with the positioning portions 213 and then fixedly connected to the second rod 212. The positioning portions 213 may be positioning holes, positioning grooves, or positioning lines. The positions of the positioning portions 213 on the second rod 212 match the sizes of reaction chambers of different models. By aligning the two ends of the support member 102 with the positioning portions 213 at different positions, the lifting device 106 located at the center of the support member 102 can be aligned with the installation position of the electrostatic chuck in the reaction chamber. In other words, the fixture 200 provided in this embodiment is applicable to semiconductor processing devices of different sizes, has a wide range of applicability, and reduces production costs. In this embodiment, the positioning portion 213 is a positioning hole provided on the second rod 212. The support member 102 is provided with a first mounting hole at both ends. The support member 102 is moved along the extension direction of the second rod 212 so as to be moved above the installation position of the electrostatic chuck 12. Bolts are inserted through the first mounting holes at both ends of each support member 102, and are fixedly connected to the positioning holes on the second rod 212 by bolt connection, thereby achieving the positioning installation of the support member 102. In other embodiments, the distance between the two first rods 211 can be adjusted. For example, the two first rods 211 can be slid on the second rod 212 and then fixed, so as to adapt to different chamber window distances and expand the application range of the fixture.

[0043] When the semiconductor processing device is operated at high temperature for a long time, the sealing ring 13 between the electrostatic chuck 12 and the base 11 will tightly adhere the electrostatic chuck 12 and the base 11, making it time-consuming and labor-intensive to remove the electrostatic chuck 12. Figures 1 to 4The fixture of any embodiment shown further includes a lifting member 107. The first rods of the main frame members 101 and 201 are provided with a plurality of through holes 171. The lifting member 107 can pass through the through holes 171 and contact the top of the reaction chamber 10. Figure 1 and Figure 2 Take the jig 100 shown as an example. When the jig 100 is used to remove the electrostatic suction cup 12 from the base 11, the main frame 201 is first installed on the top of the reaction chamber 10, and the assembly rod 105 is fixedly connected to the electrostatic suction cup 12. In this embodiment, the lifting member 107 is in the shape of a cylindrical pin with equal diameter. By applying an impact force to the cylindrical pin, the cylindrical pin can move downward along the through hole 171 of the main frame 101 until the bottom of the cylindrical pin is against the top of the reaction chamber 10, and then the cylindrical pin provides an upward force to separate the electrostatic suction cup 12 from the base 11. By providing the lifting member 107, the electrostatic suction cup 12 and the base 11 can be separated in advance, which facilitates the later removal of the electrostatic suction cup 12 from the base 11 by the lifting device 106. It should be noted that in Figure 3 and Figure 4 In the illustrated embodiment, the through hole 171 is provided on the overlapping portion 2111 , so that the lifting member 107 can abut against the top of the reaction chamber after passing through the through hole 171 , thereby providing an upward force to separate the electrostatic chuck 12 from the base 11 .

[0044] Optionally, the lifting member 107 is a top screw, and the through hole 171 is a screw hole that matches the top screw. The top screw is screwed into the screw hole, so that the top screw moves downward along the main frame until the top screw is against the top of the reaction chamber 10. The top screw provides an upward force to separate the electrostatic suction cup 12 from the base 11 by 2 to 5 mm. Through the top screw structure, the impact force provided by humans is converted into mechanical force, which saves manpower and avoids damage to the top of the reaction chamber 10 caused by excessive impact force. At the same time, controlling the rotation angle of the top screw can also control the vertical movement distance of each top screw, so that the movement distance of each top screw remains the same, effectively preventing the electrostatic suction cup 12 from tilting.

[0045] Furthermore, a pad is provided between the bottom of the lifting member 107 and the top of the reaction chamber 10. The bottom of the lifting member 107 is supported against the top of the reaction chamber 10 by the pad, thereby preventing the lifting member 107 from moving downward and causing damage to the top of the reaction chamber 10. Optionally, the pad is made of Teflon material.

[0046] In summary, the jig for loading and unloading the electrostatic suction cup provided by the present invention fixes the jig on the top of the reaction chamber 10 by setting a main frame 101, and fixes the assembly rod 105 to the electrostatic suction cup 12 through the fixing portion 151. The lifting device 106 drives the assembly rod 105 to rise and fall in the vertical direction of the reaction chamber 10, driving the electrostatic suction cup 12 to move up and down, thereby reducing the collision of the electrostatic suction cup.

[0047] At the same time, the limit member 103 provides a vertical guide for the up and down movement of the assembly rod 105, and the balance member 104 provides a balancing force for the assembly rod 105 in the circumferential direction, ensuring that the assembly rod 105 remains horizontal during the up and down movement, avoiding tilting due to gravity or uneven force, and effectively preventing the electrostatic suction cup 12 from tilting, thereby realizing horizontal loading and unloading of the electrostatic suction cup 12.

[0048] Secondly, by setting up the lifting piece 107, the electrostatic suction cup 12 and the base 11 can be separated, making it easier for the lifting device 106 to remove the electrostatic suction cup 12 from the base 11, thereby improving the convenience of disassembling the electrostatic suction cup 12 and avoiding damage to the electrostatic suction cup 12 caused by violent disassembly.

[0049] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as limiting the present invention. After reading the above description, various modifications and alternatives to the present invention will be readily apparent to those skilled in the art. Therefore, the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A fixture for loading and unloading an electrostatic chuck disposed in a reaction chamber of a semiconductor processing device, characterized in that: include: A main frame, which can be fixedly mounted on the top of the reaction chamber; a support member, which is fixedly connected to the main frame member and can be located on the top of the reaction chamber; At least two limiting members, each of which passes through the supporting member and is movable up and down; a balancing member, which is fixedly connected to the lower end of each of the limiting members and has an extended shape in a horizontal plane; an assembly rod, which is fixedly connected to the balancing member in a transverse direction and is located at least between the lower ends of the two limiting members, and each end of the assembly rod is provided with a fixing portion that can be fixedly connected to the electrostatic chuck; A lifting device has one end arranged on the support member and the other end passing through the support member and connected to the assembly rod to drive the assembly rod to move up and down to realize the loading and unloading of the electrostatic chuck.

2. The fixture according to claim 1, wherein: The device further comprises a plurality of lifting members, each of which passes through a through hole provided on the main frame. When the assembly rod is fixed to the electrostatic chuck, the lifting member can move downward along the through hole on the main frame until the bottom of the lifting member abuts against the top of the reaction chamber, thereby providing an upward force to separate the electrostatic chuck from the reaction chamber.

3. The fixture according to claim 2, wherein: The lifting piece is a jack screw, and the through hole is a screw hole matching the jack screw.

4. The fixture according to claim 1, wherein: The main frame includes two first rods, which are arranged parallel to each other on both sides of the top of the reaction chamber.

5. The fixture according to claim 4, wherein: Both ends of the support member are fixedly connected to the first rod respectively, so that the support member spans above the reaction chamber.

6. The jig according to claim 4, wherein: Each of the first rods has a first mounting hole at both ends, and the first mounting hole corresponds to the position of the second mounting hole on the top of the reaction chamber. The first rod is fixed to the reaction chamber by passing the first mounting hole and the second mounting hole through the first fixing member.

7. The jig according to claim 4, wherein: Each of the first rods includes a lap portion extending toward the outside of the reaction chamber and a first rod body. The lap portion is vertically connected to the first rod body to form an "L" shape with an opening downward. The first rod is clamped to the reaction chamber through the opening.

8. The jig according to claim 4, wherein: The main frame also includes two second rods arranged parallel to each other, the second rods are arranged between the first rods and fixedly connected to the first rods vertically; a plurality of positioning parts are arranged at intervals on the second rods along the extension direction of the second rods, and the two ends of the support member are aligned with the positioning parts and then fixedly connected to the second rods.

9. The jig according to claim 1, wherein: The assembly rod and the support member are arranged perpendicular to each other; each of the fixing parts includes an assembly hole passing through the assembly rod and a second fixing member, and the second fixing member passes through the assembly hole and is connected to the electrostatic chuck.

10. The fixture according to claim 1, wherein: The balancing piece is in the shape of a ring or a disc.

11. The fixture according to claim 2, wherein: A cushion block is provided between the bottom of the lifting member and the top of the reaction chamber, and the bottom of the lifting member is pressed against the top of the reaction chamber through the cushion block.

12. The fixture according to claim 1, wherein: The lifting device is a rocker mechanism, which includes a handwheel, a fixing nut and a screw; The fixing nut is fixedly arranged at the center of the support member; The screw rod passes through the fixing nut, and the thread on the surface of the screw rod matches the thread on the inner wall of the fixing nut; The bottom end of the screw rod is connected to the assembly rod through a bearing, and the top end of the screw rod is connected to the hand wheel.

13. The fixture according to claim 1, wherein: Also includes: A protective soft cover is placed on the surface of the electrostatic chuck and below the assembly rod when the electrostatic chuck is installed and removed.

14. The jig according to claim 6, wherein: The distance between the two first rods can be adjusted to accommodate reaction chambers of different sizes.

Images