Glass substrate carrying platform

Abstract

The utility model relates to a glass substrate carrying table which is arranged on a glass macroscopic inspection device and comprises a frame and an adsorption structure. The adsorption structure comprises a supporting rod and a plurality of suction cups, the two ends of the supporting rod are connected with the frame, the suction cups are arranged on the supporting rod at intervals and communicate with the supporting rod, a partition plate is arranged in the supporting rod and divides the inner space of the supporting rod into an upper cavity and a lower cavity, the upper cavity communicates with the suction cups, and the lower cavity communicates with the suction cups. A first negative pressure channel is formed in the upper cavity. According to the technical scheme, the problem that in the prior art, the adsorption force of a plurality of suction cups is not uniform is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of glass substrate production equipment, and in particular to a glass substrate carrier. Background Art

[0002] In the production process of flat-panel displays (LCDs), such as liquid crystal displays (LCDs), product inspection is a crucial step in the overall production process. For example, LCD panels typically undergo macroscopic and microscopic inspections to ensure product quality. Macroscopic inspection involves visually inspecting the appearance of transparent substrates, such as glass substrates, manufactured throughout the various manufacturing processes using macroscopic inspection equipment to confirm the presence of defects such as macroscopic defects.

[0003] Some existing devices (for example, the authorization publication number is CN 109799627B, and the title is "Macroscopic Inspection Device for Glass Substrates"), when securing a glass substrate, use a first positioning member and a second positioning member to position the glass substrate, and then use suction cups to absorb and secure the glass substrate. Multiple suction cups are arranged on a mounting beam, and the multiple suction cups are all connected to the mounting beam. The internal space of the mounting beam forms a first negative pressure channel. The multiple mounting beams are spaced apart within the frame. To ensure that the strength of the mounting beams meets the requirements, there are restrictions on the size of the mounting beams. In actual applications, due to the large internal space of the mounting beams and the slow flow rate of the compressed gas, the suction cups at different positions on the mounting beams have uneven suction force. When securing the glass substrate, this can easily lead to uneven force on the glass substrate, resulting in slight deformation or even cracking. Utility Model Content

[0004] The present application provides a glass substrate carrier to solve the problem of uneven adsorption force of multiple suction cups in the prior art.

[0005] According to the present application, a glass substrate carrier is provided on a glass macro-inspection device and includes a frame and a suction structure. The suction structure includes a support rod and multiple suction cups. Both ends of the support rod are connected to the frame. The multiple suction cups are spaced apart and connected to the support rod. A partition is provided inside the support rod, which divides the internal space of the support rod into an upper chamber and a lower chamber. The upper chamber and the multiple suction cups are connected, and a first negative pressure channel is formed inside the upper chamber.

[0006] In some embodiments, the adsorption structure also includes a mounting seat, a sealing gasket and a mounting joint, the first end of the mounting seat is connected to the support rod, the second end of the mounting seat is abutted against the frame, the sealing gasket is located at the connection position between the mounting seat and the support rod, the first end of the mounting joint is connected to the mounting seat, and the second end of the mounting joint is connected to the frame.

[0007] In some embodiments, the sealing gasket has a through hole, the mounting seat has a second negative pressure channel, the mounting joint has a third negative pressure channel, and the third negative pressure channel, the second negative pressure channel, the through hole and the first negative pressure channel are connected in sequence.

[0008] In some embodiments, the suction cup includes a suction cup head and a suction cup support, the first end of the suction cup support is connected to the support rod, the second end of the suction cup support is connected to the suction cup head, the suction cup support has a fourth negative pressure channel, the suction cup head has a fifth negative pressure channel, the fourth negative pressure channel is connected to the first negative pressure channel, and the fifth negative pressure channel is connected to the fourth negative pressure channel.

[0009] In some embodiments, the glass substrate carrier further includes multiple groups of alignment structures, the frame is a rectangular frame, the multiple groups of alignment structures are arranged at intervals along the length and width directions of the frame, and the multiple groups of alignment structures respectively located on the two length sides of the frame are arranged one-to-one, and the multiple groups of alignment structures respectively located on the two width sides of the frame are arranged one-to-one.

[0010] In some embodiments, the alignment structure includes a first mounting plate, an alignment cylinder and an alignment roller. The first mounting plate is mounted on the frame, the alignment cylinder is mounted on the first mounting plate, the alignment roller and the cylinder rod of the alignment cylinder are connected, and the cross-sectional area of ​​the alignment roller gradually decreases from both ends to the center and then remains unchanged.

[0011] In some embodiments, the frame includes four groups of rectangular tubes, which are connected end to end to form a rectangular frame. The rectangular tubes have a storage space, and the side walls of the four groups of rectangular tubes are each provided with multiple openings, and each of the multiple openings is provided with a corresponding cover plate.

[0012] In some embodiments, the adsorption structure further includes a negative pressure tube, which is disposed in the rectangular tube and is connected to the mounting joint.

[0013] In some embodiments, the glass substrate carrier further includes a detection structure including a pressure sensor and a second mounting plate. The second mounting plate is disposed on the frame. The pressure sensor is disposed on the second mounting plate. An air pipe of the pressure sensor is connected to the frame.

[0014] In some embodiments, the detection structure also includes multiple groups of registration sensors and multiple groups of third mounting plates, and the multiple groups of third mounting plates are respectively arranged at the four corners of the frame. The multiple groups of registration sensors and the multiple groups of third mounting plates are arranged in a one-to-one correspondence, and the registration sensors are arranged on the third mounting plates.

[0015] According to the technical solution of the present application, a glass substrate carrier is provided on a glass macro-inspection device for fixing a glass substrate to be subjected to macro-inspection. The glass substrate carrier comprises a frame and an adsorption structure. The adsorption structure comprises a support rod and a plurality of suction cups, both ends of which are connected to the frame. The plurality of suction cups are spaced apart on the support rod. The plurality of suction cups are used to adsorb and fix the glass substrate to facilitate subsequent macro-inspection. The plurality of suction cups are connected to the support rod. A partition is provided inside the support rod, which divides the internal space of the support rod into an upper chamber and a lower chamber. The upper chamber and the plurality of suction cups are connected, and a first negative pressure channel is formed inside the upper chamber. This arrangement ensures that the strength of the support rod is met while also improving the uniformity of the adsorption force of each suction cup. Air flows through the suction cups to the upper chamber, and the space in the upper chamber is reduced compared to the space of the entire support rod, thereby accelerating the flow of air, reducing the difference in adsorption force between the plurality of suction cups, and reducing the difference in the magnitude of the forces acting on the glass substrate, thereby preventing deformation or even cracking of the glass substrate. The technical solution of the present application effectively solves the problem of uneven adsorption force of multiple suction cups in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 A schematic structural diagram of a glass substrate carrier according to an embodiment of the present application is shown;

[0019] Figure 2 A schematic structural diagram of the adsorption structure of an embodiment of the present application is shown;

[0020] Figure 3 Shown Figure 2 A partial enlarged view of the internal structure at point A in the middle;

[0021] Figure 4 A schematic structural diagram of a suction cup according to an embodiment of the present application is shown;

[0022] Figure 5 A schematic structural diagram of the alignment structure of an embodiment of the present application is shown;

[0023] Figure 6 A schematic structural diagram showing another angle of the alignment structure of an embodiment of the present application is shown;

[0024] Figure 7 A schematic structural diagram of a rectangular tube according to an embodiment of the present application is shown;

[0025] Figure 8 A schematic structural diagram of a pressure sensor according to an embodiment of the present application is shown;

[0026] Figure 9 A schematic structural diagram of a registered sensor according to an embodiment of the present application is shown.

[0027] The above drawings include the following reference numerals:

[0028] 10. Frame; 11. Rectangular tube; 111. Cover plate; 20. Adsorption structure; 21. Support rod; 211. Upper chamber; 212. Lower chamber; 22. Suction cup; 221. Suction cup head; 2211. Fifth negative pressure channel; 222. Suction cup support; 2221. Fourth negative pressure channel; 23. Mounting seat; 231. Second negative pressure channel; 24. Sealing gasket; 25. Mounting joint; 251. Third negative pressure channel; 30. Alignment structure; 31. First mounting plate; 32. Alignment cylinder; 33. Alignment roller; 40. Detection structure; 41. Pressure sensor; 42. Second mounting plate; 43. Registration sensor; 44. Third mounting plate. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0030] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present application belongs.

[0031] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0032] like Figures 1 to 3 As shown, an embodiment provides a glass substrate carrier, which is disposed on a glass macro-inspection device and includes a frame 10 and a suction structure 20. The suction structure 20 includes a support rod 21 and a plurality of suction cups 22. Both ends of the support rod 21 are connected to the frame 10. The plurality of suction cups 22 are spaced apart on the support rod 21 and are in communication with the support rod 21. A partition is disposed within the support rod 21, which divides the interior space of the support rod 21 into an upper chamber 211 and a lower chamber 212. The upper chamber 211 and the plurality of suction cups 22 are in communication, forming a first negative pressure channel within the upper chamber 211.

[0033] Applying the technical solution of this embodiment, a glass substrate carrier is set on a glass macro-inspection device for fixing a glass substrate that needs to be macro-inspected. The glass substrate carrier includes: a frame 10 and an adsorption structure 20. The adsorption structure 20 includes a support rod 21 and a plurality of suction cups 22. Both ends of the support rod 21 are connected to the frame 10. The plurality of suction cups 22 are spaced apart on the support rod 21. The plurality of suction cups 22 are used to adsorb and fix the glass substrate to facilitate subsequent macro-inspection. The plurality of suction cups 22 are all connected to the support rod 21. A partition is provided inside the support rod 21. The partition divides the internal space of the support rod 21 into an upper chamber 211 and a lower chamber 212. The upper chamber 211 and the plurality of suction cups are all connected. A first chamber 211 is formed inside the upper chamber 211. The negative pressure channel arrangement ensures that the strength of the support rod 21 is met while also improving the uniformity of the suction force of each suction cup 22. Air flows through the suction cup 22 to the upper chamber 211, and the space in the upper chamber 211 is reduced compared to the overall space of the support rod 21. This accelerates the flow of air, reduces the difference in suction force between the multiple suction cups 22, improves the uniformity of suction force, and reduces the difference in the magnitude of the various forces acting on the glass substrate, thus preventing deformation or even cracking of the glass substrate. The technical solution of this embodiment effectively solves the problem of uneven suction force of multiple suction cups 22 in the prior art.

[0034] like Figure 2 and Figure 3 As shown, in some embodiments, the adsorption structure 20 also includes a mounting seat 23, a sealing gasket 24 and a mounting joint 25. The first end of the mounting seat 23 is connected to the support rod 21, and the second end of the mounting seat 23 is abutted against the frame 10. The sealing gasket 24 is located at the connection position between the mounting seat 23 and the support rod 21, and can seal the connection between the mounting seat 23 and the support rod 21. The first end of the mounting joint 25 is connected to the mounting seat 23 to facilitate subsequent connection with the vacuum generator. The second end of the mounting joint 25 is connected to the frame 10 to achieve support for the adsorption structure 20 as a whole.

[0035] like Figure 3 As shown, in some embodiments, the sealing gasket 24 has a through hole, the mounting seat 23 has a second negative pressure channel 231, and the mounting joint 25 has a third negative pressure channel 251. The third negative pressure channel 251, the second negative pressure channel 231, the through hole and the first negative pressure channel are connected in sequence to realize a complete negative pressure channel.

[0036] like Figure 4As shown, in some embodiments, the suction cup 22 includes a suction cup head 221 and a suction cup support 222. The first end of the suction cup support 222 is connected to the support rod 21, and the second end of the suction cup support 222 is connected to the suction cup head 221. The suction cup support 222 has a fourth negative pressure channel 2221, and the suction cup head 221 has a fifth negative pressure channel 2211. The fourth negative pressure channel 2221 is connected to the first negative pressure channel, and the fifth negative pressure channel 2211 is connected to the fourth negative pressure channel 2221, thereby achieving the function of adsorbing and fixing the glass substrate through negative pressure. The diameter of the fifth negative pressure channel 2211 is greater than or equal to the diameter of the fourth negative pressure channel 2221. The purpose of this configuration is to allow gas to flow quickly through the fourth negative pressure channel 2221, thereby enhancing the adsorption effect of the fifth negative pressure channel 2211.

[0037] like Figure 1 As shown, in some embodiments, the glass substrate carrier further includes a plurality of alignment structures 30, which are used to position the glass substrate so that the glass substrate is in an optimal position after being adsorbed and fixed, thereby facilitating macroscopic inspection of the glass substrate. The frame 10 is a rectangular frame, and the plurality of alignment structures 30 are spaced apart along the length and width directions of the frame 10. The plurality of alignment structures 30 respectively located on the two length sides of the frame 10 are arranged in a one-to-one correspondence, and the plurality of alignment structures 30 respectively located on the two width sides of the frame 10 are arranged in a one-to-one correspondence. The alignment structures 30 arranged opposite to each other can more accurately position the glass substrate.

[0038] like Figure 5 and Figure 6 As shown, in some embodiments, the alignment structure 30 includes a first mounting plate 31, an alignment cylinder 32 and an alignment roller 33. The first mounting plate 31 is mounted on the frame 10, and the alignment cylinder 32 is mounted on the first mounting plate 31. The alignment roller 33 is connected to the cylinder rod of the alignment cylinder 32. The position of the alignment roller 33 is adjusted by the extension and contraction of the cylinder rod, so that the alignment roller 33 can position glass substrates of various sizes. The cross-sectional area of ​​the alignment roller 33 gradually decreases from both ends to the center and then remains unchanged. This arrangement forms a card slot at the center of the alignment roller 33, and the glass substrate is positioned in the card slot. At the same time, this arrangement also enables the card slot to position glass substrates of various thicknesses.

[0039] like Figure 1 and Figure 7As shown, in some embodiments, the frame 10 includes four groups of rectangular tubes 11, which are connected end to end to form a rectangular frame. The rectangular tubes 11 have a storage space, and the rectangular tubes 11 can be used to place circuits to prevent the circuits from being exposed to the outside and affecting the macroscopic inspection of the glass substrate. Negative pressure tubes for connecting negative pressure can also be placed in the rectangular tubes 11. Multiple openings are provided on the side walls of the four groups of rectangular tubes 11, and cover plates 111 are correspondingly provided on the multiple openings. The cover plates 111 realize the opening and closing of the openings. The setting of the openings facilitates the operator to inspect the circuits and connect the negative pressure tubes.

[0040] In some embodiments, the adsorption structure 20 further includes a negative pressure tube disposed within the rectangular tube 11. The negative pressure tube communicates with the mounting connector 25 and has a through-hole formed in the rectangular tube 11, through which the negative pressure tube passes and connects to an external vacuum generator. A solenoid valve is provided on the negative pressure tube to facilitate control of the amount of gas within the tube, thereby adjusting the adsorption force. By controlling the opening of the solenoid valve, the glass substrate is adsorbed or lifted. Lifting facilitates positioning of the alignment structure 30 and prevents scratches on the back of the glass substrate.

[0041] like Figure 1 and Figure 8 As shown, in some embodiments, the glass substrate stage further includes a detection structure 40, which includes a pressure sensor 41 and a second mounting plate 42. The second mounting plate 42 is disposed on the frame 10, and the pressure sensor 41 is disposed on the second mounting plate 42. The air pipe of the pressure sensor 41 is connected to the frame 10. Specifically, the air pipe of the pressure sensor 41 is connected to a negative pressure pipe disposed within the rectangular tube 11, and can detect the air pressure within the negative pressure pipe.

[0042] like Figure 1 and Figure 9 As shown, in some embodiments, the detection structure 40 further includes multiple sets of registration sensors 43 and multiple sets of third mounting plates 44. The multiple sets of third mounting plates 44 are respectively disposed at the four corners of the frame 10. The multiple sets of registration sensors 43 and the multiple sets of third mounting plates 44 are disposed in a one-to-one correspondence, and the registration sensors 43 are disposed on the third mounting plates 44. The registration sensors 43 can detect whether the glass substrate is placed on the adsorption structure 20 and whether the glass is placed flat. The registration sensors 43 transmit detection signals to the control module (e.g., a PLC controller) and display module (e.g., a display screen) of the glass macro-inspection device, facilitating operator viewing and operation.

[0043] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0044] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can, for example, be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0045] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A glass substrate carrier, which is arranged on a glass macro inspection device, characterized in that: include: Frame (10); The adsorption structure (20) comprises a support rod (21) and a plurality of suction cups (22), both ends of the support rod (21) are connected to the frame (10), the plurality of suction cups (22) are arranged on the support rod (21) at intervals, and the plurality of suction cups (22) are connected to the support rod (21), a partition is provided inside the support rod (21), the partition divides the internal space of the support rod (21) into an upper chamber (211) and a lower chamber (212), the upper chamber (211) and the plurality of suction cups (22) are connected, and a first negative pressure channel is formed inside the upper chamber (211).

2. The glass substrate stage according to claim 1, wherein: The adsorption structure (20) further comprises a mounting seat (23), a sealing gasket (24) and a mounting joint (25); a first end of the mounting seat (23) is connected to the support rod (21); a second end of the mounting seat (23) is in contact with the frame (10); the sealing gasket (24) is located at a connection position between the mounting seat (23) and the support rod (21); a first end of the mounting joint (25) is in communication with the mounting seat (23); and a second end of the mounting joint (25) is in communication with the frame (10).

3. The glass substrate stage according to claim 2, wherein: The sealing gasket (24) has a through hole, the mounting seat (23) has a second negative pressure channel (231), the mounting joint (25) has a third negative pressure channel (251), and the third negative pressure channel (251), the second negative pressure channel (231), the through hole and the first negative pressure channel are sequentially connected.

4. The glass substrate carrier according to claim 1, wherein: The suction cup (22) includes a suction cup head (221) and a suction cup support (222), wherein the first end of the suction cup support (222) is connected to the support rod (21), and the second end of the suction cup support (222) is connected to the suction cup head (221), the suction cup support (222) has a fourth negative pressure channel (2221), and the suction cup head (221) has a fifth negative pressure channel (2211), the fourth negative pressure channel (2221) is connected to the first negative pressure channel, and the fifth negative pressure channel (2211) is connected to the fourth negative pressure channel (2221).

5. The glass substrate carrier according to claim 1, wherein: The glass substrate carrier further comprises a plurality of alignment structures (30); the frame (10) is a rectangular frame; the plurality of alignment structures (30) are arranged at intervals along the length and width directions of the frame (10); and the plurality of alignment structures (30) respectively located on the two length sides of the frame (10) are arranged in a one-to-one correspondence, and the plurality of alignment structures (30) respectively located on the two width sides of the frame (10) are arranged in a one-to-one correspondence.

6. The glass substrate carrier according to claim 5, wherein: The alignment structure (30) comprises a first mounting plate (31), an alignment cylinder (32) and an alignment roller (33); the first mounting plate (31) is mounted on the frame (10); the alignment cylinder (32) is mounted on the first mounting plate (31); the alignment roller (33) is connected to the cylinder rod of the alignment cylinder (32); and the cross-sectional area of ​​the alignment roller (33) gradually decreases from both ends to the center and then remains unchanged.

7. The glass substrate stage according to claim 2, wherein: The frame (10) comprises four groups of rectangular tubes (11), the four groups of rectangular tubes (11) being connected end to end in sequence to form a rectangular frame, the rectangular tubes (11) having a receiving space, the side walls of the four groups of rectangular tubes (11) being provided with a plurality of openings, and the plurality of openings being provided with corresponding cover plates (111).

8. The glass substrate carrier according to claim 7, wherein: The adsorption structure (20) further includes a negative pressure pipe, which is arranged in the rectangular tube (11) and is connected to the installation joint (25).

9. The glass substrate stage according to any one of claims 1 to 8, wherein: The glass substrate carrier further includes a detection structure (40), the detection structure (40) including a pressure sensor (41) and a second mounting plate (42), the second mounting plate (42) being arranged on the frame (10), the pressure sensor (41) being arranged on the second mounting plate (42), and the air pipe of the pressure sensor (41) being connected to the frame (10).

10. The glass substrate stage according to claim 9, wherein: The detection structure (40) further comprises a plurality of groups of on-board sensors (43) and a plurality of groups of third mounting plates (44), wherein the plurality of groups of the third mounting plates (44) are respectively arranged at the four corners of the frame (10), the plurality of groups of the on-board sensors (43) and the plurality of groups of the third mounting plates (44) are arranged in a one-to-one correspondence, and the on-board sensors (43) are arranged on the third mounting plates (44).

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