High-purity gas analysis system

Abstract

The utility model discloses a high-purity gas analysis system which comprises a five-way switching valve, a vacuum main pipe, a jet flow vacuum generator, a chromatographic instrument and a trace water analyzer, four gas inlets of the five-way switching valve are respectively connected with different sample gases, and a gas outlet of the five-way switching valve is connected with the vacuum main pipe; an air suction port of the jet vacuum generator is connected with the vacuum main pipe through the VCR connector and the vacuum diaphragm valve in sequence, the chromatographic instrument is connected with the vacuum main pipe through the chromatographic instrument diaphragm valve and the metering valve in sequence, and the trace water analyzer is connected with the vacuum main pipe through the water analyzer air inlet diaphragm valve. According to the utility model, the jet flow vacuum generator is used for evacuating air in an analysis pipeline and a pipe valve and residues of previous sample gas, so that the influence of foreign gas on an analysis result is eliminated. According to the system, a large amount of sample gas does not need to be used for purging pipelines and valves, the consumption of high-purity gas can be reduced, and the analysis efficiency of the high-purity gas is improved.

Description

Technical Field

[0001] The utility model relates to a high-purity gas analysis system, which can improve the analysis efficiency of the high-purity gas and reduce the consumption of the high-purity gas, and belongs to the field of measurement technology. Background Art

[0002] There are generally multiple types of sample gases for high-purity gas analysis, including high-pressure sample gases packaged in sample gas cylinders and low-pressure sample gases transported through pipelines. Trace impurities such as hydrogen, oxygen, nitrogen, methane, carbon monoxide, and carbon dioxide in these sample gases are generally analyzed using a chromatograph, and trace water contained in the sample gases is analyzed using a trace water analyzer. The high-pressure sample gas inside the sample gas cylinder must be depressurized using a pressure reducing valve before it can enter the chromatograph or trace water analyzer. Multiple sample gases are switched using a five-way valve and then adjusted to a suitable flow rate through a metering valve before entering the chromatograph or trace water analyzer. The internal structure of these pipe valves is relatively complex, and there is a large amount of dead volume. Oxygen, nitrogen and other air impurity components that penetrate from the outside and the residues of the previous sample gas analyzed will cause serious interference to the analysis results of the sample gas. The usual practice is to use a large amount of sample gas for purging and replacement, and to change the percentage (10 -2 The oxygen, nitrogen and other impurities with the sample gas are purged and replaced to 1PPm (10 -6 The disadvantage of this approach is that it takes a long time and consumes a large amount of high-purity sample gas, resulting in a drop in the pressure of the cylinder gas delivered to the user. This makes purging and replacing high-value sample gases such as xenon extremely uneconomical. Furthermore, the long purge time results in a long analysis time for each sample gas. When there are many samples to be analyzed, the analysis efficiency of high-purity gas is extremely low. Utility Model Content

[0003] The purpose of the present invention is to provide a high-purity gas analysis system to address the shortcomings of the existing technology, so as to improve the analysis efficiency of high-purity gas and reduce the consumption of high-purity gas.

[0004] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0005] A high-purity gas analysis system includes a five-way switching valve, a vacuum main, a jet vacuum generator, a chromatograph, and a trace water analyzer. The four air inlets of the five-way switching valve are respectively connected to different sample gases, and the air outlet is connected to the vacuum main. The air intake of the jet vacuum generator is connected to the vacuum main via a VCR connector and a vacuum diaphragm valve in sequence. The chromatograph is connected to the vacuum main via a chromatograph diaphragm valve and a metering valve in sequence. The trace water analyzer is connected to the vacuum main via the water analyzer air inlet diaphragm valve.

[0006] In the above-mentioned high-purity gas analysis system, the high-pressure gas inlet of the jet vacuum generator is connected to the jet high-pressure nitrogen source through a jet nitrogen diaphragm valve and a jet nitrogen pressure reducing valve in sequence; the gas outlet of the jet vacuum generator is connected to the jet nitrogen discharge pipe through a reducing VCR connector.

[0007] The above-mentioned high-purity gas analysis system, the trace water analyzer is provided with a purge device, the purge device includes a purge nitrogen source, a purge nitrogen diaphragm valve, a purge nitrogen pressure reducing valve, a water analyzer diaphragm valve, a purge nitrogen vent diaphragm valve and a purge nitrogen discharge pipe, the water analyzer air inlet diaphragm valve is connected to the trace water analyzer in sequence through the purge nitrogen pressure reducing valve and the water analyzer diaphragm valve, the purge nitrogen source is connected to the water analyzer air inlet diaphragm valve and the pipeline between the purge nitrogen pressure reducing valve through the purge nitrogen diaphragm valve, the pipeline between the purge nitrogen pressure reducing valve and the water analyzer diaphragm valve is connected to the purge nitrogen discharge pipe through the purge nitrogen vent diaphragm valve.

[0008] In the above-mentioned high-purity gas analysis system, the sample gas connected to each air inlet of the five-way switching valve is a high-pressure sample gas packaged in a sample gas bottle or a low-pressure sample gas transported through a pipeline. The high-pressure sample gas packaged in the sample gas bottle is connected to the five-way switching valve through a sample gas pressure reducing valve.

[0009] In the above-mentioned high-purity gas analysis system, a vacuum indicator is installed on the vacuum main pipe.

[0010] This utility model uses a jet vacuum generator to evacuate air and residual sample gas from analytical pipelines and valves, eliminating the effects of impurity gases on analysis results. This system eliminates the need to purge pipelines and valves with large amounts of sample gas, reducing high-purity gas consumption and improving high-purity gas analysis efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0012] Figure 1 It is a structural diagram of the present utility model.

[0013] The numbers in the figure are as follows: 1. Sample gas bottle; 2. Sample gas pressure reducing valve; 3. Five-way switching valve; 4. First sample gas pipeline; 5. Second sample gas pipeline; 6. Third sample gas pipeline; 7. Jet nitrogen exhaust pipe; 8. Reducer VCR connector; 9. Jet vacuum generator; 10. VCR connector; 11. Vacuum diaphragm valve; 12. Jet nitrogen diaphragm valve; 13. Jet nitrogen pressure reducing valve; 14. Jet high-pressure nitrogen source; 15. Vacuum indicator; 16. Chromatograph diaphragm valve; 17. Metering valve; 18. Chromatograph; 19. Purge nitrogen diaphragm valve; 20. Water analyzer inlet diaphragm valve; 21. Purge nitrogen pressure reducing valve; 22. Water analyzer diaphragm valve; 23. Purge nitrogen vent diaphragm valve; 24. Trace water analyzer; 25. Purge nitrogen source; 26. Vacuum main pipe; 27. Purge nitrogen exhaust pipe. DETAILED DESCRIPTION

[0014] The utility model aims to address the shortcomings of the existing technology and provides a high-purity gas analysis system. The system adopts jet vacuum technology to remove impurities such as oxygen, nitrogen, and water in the pipeline and valve system, thereby realizing rapid purging and replacement of the high-purity gas to be analyzed, which can effectively improve the analysis efficiency of the high-purity gas, reduce the consumption of high-purity gas samples, and solve the problems existing in the background technology.

[0015] See Figure 1 The utility model mainly includes a sample gas bottle 1, a sample gas pressure reducing valve 2, a five-way switching valve 3, a first sample gas pipeline 4, a second sample gas pipeline 5, a third sample gas pipeline 6, a jet nitrogen discharge pipe 7, a reducing VCR connector 8, a jet vacuum generator 9, a VCR connector 10, a vacuum diaphragm valve 11, a jet nitrogen diaphragm valve 12, a jet nitrogen pressure reducing valve 13, a jet high-pressure nitrogen source 14, a vacuum indicator 15, a chromatograph diaphragm valve 16, a metering valve 17, a chromatograph 18, a purge nitrogen diaphragm valve 19, a water analyzer air inlet diaphragm valve 20, a purge nitrogen pressure reducing valve 21, a water analyzer diaphragm valve 22, a purge nitrogen vent diaphragm valve 23, a trace water analyzer 24, a purge nitrogen source 25, a vacuum main pipe 26 and a purge nitrogen discharge pipe 27.

[0016] Figure 1It is shown that the sample gas bottle 1 is connected to an air inlet of the five-way switching valve 3 through the sample gas pressure reducing valve 2, and the other three air inlets of the five-way switching valve 3 are connected to three low-pressure sample gases through the first sample gas pipeline 4, the second sample gas pipeline 5, and the third sample gas pipeline 6 respectively. The gas outlet of the five-way switching valve 3 is connected to the vacuum main pipe 26, and the vacuum main pipe 26 is connected to the air intake of the jet vacuum generator 9 in turn through the vacuum indicator 15, the vacuum diaphragm valve 11 and the VCR connector 10. The jet high-pressure nitrogen source 14 is connected to the high-pressure gas inlet of the jet vacuum generator 9 in turn through the jet nitrogen pressure reducing valve 13 and the jet nitrogen diaphragm valve 12. The jet vacuum generator 9 The gas outlet is connected to the jet nitrogen discharge pipe 7 through the reducing VCR connector 8, the chromatograph 18 is connected to the vacuum main pipe 26 in sequence through the chromatograph diaphragm valve 16 and the metering valve 17, the vacuum main pipe 26 is connected to the trace water analyzer 24 in sequence through the water analyzer air inlet diaphragm valve 20, the purge nitrogen pressure reducing valve 21, and the water analyzer diaphragm valve 22, the purge nitrogen source 25 is connected to the pipeline between the water analyzer air inlet diaphragm valve 20 and the purge nitrogen pressure reducing valve 21 through the purge nitrogen diaphragm valve 19, and the pipeline between the purge nitrogen pressure reducing valve 21 and the water analyzer diaphragm valve 22 is connected to the purge nitrogen discharge pipe 27 through the purge nitrogen vent diaphragm valve 23.

[0017] The workflow of this utility model is as follows:

[0018] First, connect the sample gas bottle 1 to the sample gas pressure reducing valve 2, close the chromatograph diaphragm valve 16 and the water analyzer air inlet diaphragm valve 20, and the high-pressure nitrogen with ultra-low water content output by the purge nitrogen source 25 is continuously purged to the trace water analyzer 24 through the purge nitrogen diaphragm valve 19, the purge nitrogen pressure reducing valve 21, and the water analyzer diaphragm valve 22. The five-way valve switching valve 3 is switched to the sample gas bottle 1 (it can also be switched to the first sample gas pipeline 4, the second sample gas pipeline 5 or the third sample gas pipeline 6), and the jet nitrogen diaphragm valve 12 is opened to allow the high-pressure nitrogen output by the jet high-pressure nitrogen source 14 to enter the jet vacuum generator 9 through the jet nitrogen pressure reducing valve 13 and then be vented through the reducer VCR connector 8 and the jet nitrogen discharge pipe 7. At the same time, due to the jet effect, the high-pressure nitrogen at the VCR connector 10, the vacuum diaphragm valve 11, the vacuum main pipe 26, the sample gas pressure reducing valve 2, the five-way switching valve 3, and the metering valve 17 A vacuum is created in the sample bottle, removing any remaining air or sample gas from the previous sample. When the vacuum indicator 15 stops decreasing, close the vacuum diaphragm valve 11 and open the bottle valve on the sample gas bottle 1. The high-purity sample gas passes through the sample gas pressure reducing valve 2, the five-way switching valve 3, and the vacuum main 26 to the metering valve 17. At this point, open the chromatograph diaphragm valve 16, and the sample gas enters the chromatograph 18 for analysis. Because the entire pipeline and valve system are now in a vacuum state, the sample gas to be analyzed fills the entire pipeline and valve system, achieving the purpose of rapid purging and replacement. After the chromatograph 18 completes analysis, close the chromatograph diaphragm valve 16. At the same time, close the nitrogen purge diaphragm valve 19 and open the water analyzer inlet diaphragm valve 20. The sample gas to be analyzed then passes from the vacuum main 26 through the water analyzer inlet diaphragm valve 20, the nitrogen purge pressure reducing valve 21, and the water analyzer diaphragm valve 22 to the trace water analyzer 24. Since the pipeline and valve from the water analyzer air inlet diaphragm valve 20 to the water analyzer diaphragm valve 22 have been purged with high-pressure nitrogen with ultra-low water content, the water content of the sample gas can quickly reach equilibrium after it comes in, shortening the purging and replacement time and improving the analysis efficiency of high-purity gas.

[0019] The utility model utilizes the vacuum generated by the jet vacuum generator to extract the residual sample gas or air between the pipeline and the valve, thereby eliminating the interference of these impurities on the sample gas to be analyzed, reducing the loss of high-value sample gas and improving the gas analysis efficiency.

Claims

1. A high-purity gas analysis system, characterized in that: The invention comprises a five-way switching valve (3), a vacuum main pipe (26), a jet vacuum generator (9), a chromatograph (18) and a trace water analyzer (24), wherein the four air inlets of the five-way switching valve (3) are respectively connected to different sample gases, and the air outlet is connected to the vacuum main pipe (26), the air intake of the jet vacuum generator (9) is connected to the vacuum main pipe (26) via a VCR connector (10) and a vacuum diaphragm valve (11) in sequence, the chromatograph (18) is connected to the vacuum main pipe (26) via a chromatograph diaphragm valve (16) and a metering valve (17) in sequence, and the trace water analyzer (24) is connected to the vacuum main pipe (26) via a water analyzer air inlet diaphragm valve (20).

2. A high-purity gas analysis system according to claim 1, characterized in that: The high-pressure gas inlet of the jet vacuum generator (9) is connected to the jet high-pressure nitrogen source (14) via a jet nitrogen diaphragm valve (12) and a jet nitrogen pressure reducing valve (13) in sequence; the gas outlet of the jet vacuum generator (9) is connected to the jet nitrogen discharge pipe (7) via a variable-diameter VCR connector (8).

3. A high-purity gas analysis system according to claim 1 or 2, characterized in that: The trace water analyzer (24) is provided with a purging device, which includes a purging nitrogen source (25), a purging nitrogen diaphragm valve (19), a purging nitrogen pressure reducing valve (21), a water analyzer diaphragm valve (22), a purging nitrogen venting diaphragm valve (23) and a purging nitrogen discharge pipe (27). The water analyzer air inlet diaphragm valve (20) is connected to the trace water analyzer (24) via the purging nitrogen pressure reducing valve (21) and the water analyzer diaphragm valve (22) in sequence. The purging nitrogen source (25) is connected to the pipeline between the water analyzer air inlet diaphragm valve (20) and the purging nitrogen pressure reducing valve (21) through the purging nitrogen diaphragm valve (19). The pipeline between the purging nitrogen pressure reducing valve (21) and the water analyzer diaphragm valve (22) is connected to the purging nitrogen discharge pipe (27) via the purging nitrogen venting diaphragm valve (23).

4. A high-purity gas analysis system according to claim 3, characterized in that: The sample gas connected to each gas inlet of the five-way switching valve (3) is a high-pressure sample gas packaged in a sample gas bottle (1) or a low-pressure sample gas transported through a pipeline. The high-pressure sample gas packaged in the sample gas bottle 1 is connected to the five-way switching valve (3) through the sample gas pressure reducing valve (2).

5. A high-purity gas analysis system according to claim 4, characterized in that: A vacuum indicator (15) is installed on the vacuum main pipe (26).

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