Substrate support structure

Abstract

The utility model provides a substrate support structure, including a plurality of support rod members and a plurality of adjusting assemblies, the plurality of support rod members are arranged at intervals and are used for jointly supporting a substrate, the end part of each support rod member is provided with the adjusting assembly, and the adjusting assembly is used for adjusting the deflection of the correspondingly arranged support rod member. According to the substrate supporting structure provided by the utility model, the adjustment operation of the substrate supporting structure in the later maintenance process is simple and convenient, and the adjustment efficiency of the later maintenance of the substrate supporting structure is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a substrate supporting structure. Background Art

[0002] After preparation, the substrate can be temporarily placed on a substrate support rack. An existing substrate support rack comprises multiple vertically spaced support layers, each of which comprises multiple horizontally spaced support rods. Each support rod has multiple height-adjustable support components spaced apart along its extension direction. By providing support components protruding from the support rods, a robot can facilitate placement of the substrate on the support rack. Multiple support components on multiple support rods in the same support layer are used to jointly support the same substrate.

[0003] In actual applications, in order to meet the ever-increasing size requirements of displays, the size of substrates continues to increase. Consequently, the size of substrate support frames also continues to increase, the span of support rods also continues to increase, and the number of support components also continues to increase, which causes the support rods to be easily bent and deformed during long-term use. At this time, it is necessary to adjust the heights of multiple support components on the support rods so that the top ends of the multiple support components that jointly support the same substrate are in the same horizontal plane, so that the substrates placed on the multiple support components can be in a horizontal state.

[0004] However, during the later maintenance of the substrate support frame, due to the large span of the support rod and the small spacing between two adjacent support layers, the support components in the middle area cannot be adjusted, and only the support components in the edge area can be adjusted. In addition, due to the continuous increase in the number of support components, the number of support components that need to be adjusted continues to increase, which makes the adjustment operation of the substrate support frame in the later maintenance process complicated and inconvenient, and the adjustment efficiency is low. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art and proposes a substrate support structure, which can make the adjustment operation of the substrate support structure in the later maintenance process simple and convenient, and improve the adjustment efficiency of the substrate support structure in the later maintenance.

[0006] In order to achieve the purpose of the present invention, a substrate support structure is provided, which includes multiple support rods and multiple adjustment components. The multiple support rods are arranged at intervals and are used to jointly support the substrate. The end of each support rod is provided with the adjustment component, and the adjustment component is used to adjust the deflection of the corresponding support rod.

[0007] Optionally, the adjustment assembly includes an adjustment component and a force-applying component, the adjustment component is connected to the support rod, and one end of the adjustment component is rotatably fixed, and the force-applying component is arranged in cooperation with the adjustment component to apply downward pressure or upward force to the adjustment component, so that the adjustment component rotates downward or upward to drive the support rod to bend and deform downward or upward.

[0008] Optionally, the adjustment component also includes a fixing component and a rotating shaft, the support structure also includes a support beam, the fixing component is connected to the support beam, part of the adjustment component is connected to the end of the support rod, and one end of the adjustment component is rotatably connected to the fixing component through the rotating shaft.

[0009] Optionally, the end of the support rod is located above the support beam, part of the adjusting component is inserted into the support rod and connected to the support rod, one end of the adjusting component is located outside the support rod, part of the fixing component is covered on the support rod, and the other part is covered on the end of the adjusting component located outside the support rod, and is rotatably connected to the end of the adjusting component located outside the support rod through the rotating shaft.

[0010] Optionally, the force-applying component includes an elastic component and a threaded adjustment component, the elastic component is arranged above the end of the support rod, and a portion of the fixing component is covered on the elastic component. The threaded adjustment component can be rotatably passed through the fixing component, the elastic component and the support rod in sequence, and is threadedly connected to the portion of the adjustment component that penetrates into the support rod, and is abutted against the upper surface of the fixing component.

[0011] Optionally, the threaded adjustment member includes a threaded connection portion and a gripping rotating portion, the threaded connection portion can be rotatably passed through the fixed component, the elastic component and the support rod in sequence, and is threadedly connected to the portion of the adjustment member that penetrates into the support rod, and is abutted against the upper surface of the fixed component, the gripping rotating portion is connected to the threaded connection portion, and is located outside the fixed component, and the axis of the gripping rotating portion has an angle with the axis of the threaded connection portion.

[0012] Optionally, the substrate support structure further includes a plurality of support components, each of the support rods is provided with a plurality of the support components, the plurality of support components are spaced apart in the extension direction of the corresponding support rods, and the support rod supports the substrate through the plurality of support components.

[0013] Optionally, the support component includes a support column and an adjustment portion, the support column is arranged on the support rod, the adjustment portion passes through the support rod and the portion of the adjustment component that penetrates into the support rod, and is connected to the support column, for adjusting the length of the support column on the support rod.

[0014] Optionally, the support rod is provided with a first through hole for the adjusting part to pass through, and the adjusting component is provided with a second through hole corresponding to the first through hole for the adjusting part to pass through, the second through hole is a long hole, and the long axis direction of the second through hole is parallel to the length direction of the adjusting component.

[0015] Optionally, the support rod is made of stainless steel.

[0016] The utility model has the following beneficial effects:

[0017] The substrate support structure provided by the utility model can adjust the deflection of the corresponding support rod through the adjustment component when the support rod is bent and deformed during use, and adjust the support rod as a whole so that the top ends of multiple support components on the support rod can be in the same horizontal plane without the need to adjust the multiple support components separately. In addition, by arranging the adjustment component at the end of the support rod, the operation of the adjustment component can be facilitated, thereby making the adjustment operation of the substrate support structure simple and convenient during the later maintenance process, thereby improving the adjustment efficiency of the later maintenance of the substrate support structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the three-dimensional structure of the substrate support structure provided by an embodiment of the present utility model;

[0019] Figure 2 A schematic diagram of the main structure of the substrate support structure provided by an embodiment of the present utility model;

[0020] Figure 3 A schematic top view of the substrate support structure provided by an embodiment of the present utility model;

[0021] Figure 4 A schematic side cross-sectional view of a substrate support structure provided by an embodiment of the present invention;

[0022] Figure 5 for Figure 4 Schematic diagram of a local enlarged structure;

[0023] Figure 6 A schematic diagram of a partially exploded structure of a substrate support structure provided by an embodiment of the present utility model;

[0024] Figure 7A schematic diagram of a partially exploded structure of an adjustment assembly provided in an embodiment of the present utility model;

[0025] Figure 8 A schematic diagram of a partial cross-sectional structure of a substrate support structure provided by an embodiment of the present utility model;

[0026] Figure 9 A schematic diagram of a partial top view of a substrate support structure provided by an embodiment of the present utility model;

[0027] Figure 10 A diagram illustrating the principle of a substrate support structure provided by an embodiment of the present utility model;

[0028] Figure 11 A schematic diagram of the principle of the substrate support structure provided by an embodiment of the present utility model;

[0029] Figure 12 A schematic structural diagram of a substrate support structure provided by an embodiment of the present invention in which the support rods are bent and deformed above the horizontal line;

[0030] Figure 13 for Figure 12 Schematic diagram of a local enlarged structure;

[0031] Figure 14 A schematic structural diagram of a substrate support structure provided by an embodiment of the present invention in which the support rods are bent and deformed below the horizontal line;

[0032] Figure 15 for Figure 14 Schematic diagram of a local enlarged structure;

[0033] Description of reference numerals:

[0034] 1-support rod; 11-first assembly through hole; 12-first through hole; 13-first adjustment through hole;

[0035] 2-adjustment assembly; 21-adjustment component; 211-first threaded connection hole; 212-first shaft through hole; 213-second through hole; 214-adjustment threaded hole; 22-threaded adjustment member; 221-threaded connection part; 222-gripping rotation part; 23-fixing component; 231-second assembly through hole; 232-second shaft through hole; 233-third adjustment through hole; 24-rotating shaft; 25-elastic member; 251-second adjustment through hole; 3-support beam; 31-second threaded connection hole; 41-first threaded connection member; 42-second threaded connection member; 5-support component; 51-support column; 52-adjustment part; 6-support frame. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solution of the present invention, the substrate support structure provided by the present invention is described in detail below with reference to the accompanying drawings.

[0037] like Figure 1-Figure 5 As shown, an embodiment of the present invention provides a substrate support structure, including multiple support rods 1 and multiple adjustment components 2. The multiple support rods 1 are arranged at intervals and are used to jointly support the substrate. An adjustment component 2 is provided at the end of each support rod 1, and the adjustment component 2 is used to adjust the deflection of the corresponding support rod 1.

[0038] The substrate support structure provided by the embodiment of the present invention can adjust the deflection of the corresponding support rod 1 through the adjustment component 2 when the support rod 1 is bent and deformed during use, and adjust the support rod 1 as a whole so that the top ends of the multiple support components 5 on the support rod 1 can be in the same horizontal plane without the need to adjust the multiple support components 5 separately. In addition, by setting the adjustment component 2 at the end of the support rod 1, the adjustment component 2 can be easily operated, so that the adjustment operation of the substrate support structure in the later maintenance process can be simple and convenient, thereby improving the adjustment efficiency of the later maintenance of the substrate support structure.

[0039] like Figure 6-Figure 9 As shown, in one embodiment of the present invention, the adjustment assembly 2 may include an adjustment component 21 and a force-applying component. The adjustment component 21 is connected to the support rod 1, and one end of the adjustment component 21 is rotatably fixed. The force-applying component is cooperatively arranged with the adjustment component 21 to apply downward pressure or upward force to the adjustment component 21, so that the adjustment component 21 rotates downward or upward to drive the support rod 1 to bend and deform downward or upward.

[0040] Specifically, the principle of adjusting the deflection of the support rod 1 by the substrate support structure provided by the embodiment of the present invention is first introduced. Figure 10 As shown in the figure, tanβ=d / c=b / a. When the c value and a value remain unchanged, the d value increases or decreases, and the b value increases or decreases compared with the same period. Figure 11As shown, fixed point 1 is the rotation axis of one end of the adjusting component 21 that can be rotatably fixed, fixed point 2 is the center of the connection between the force-applying component and the adjusting component 21, position 1 is the position of fixed point 2 when the support rod 1 is in a horizontal state, position 2 is the position of fixed point 2 when the force-applying component applies an upward lifting force to the adjusting component 21, causing the adjusting component 21 to rotate upward, position 3 is the position of the midpoint of the support rod 1 when the support rod 1 is in a horizontal state, position 4 is the position of the midpoint of the support rod 1 when the force-applying component applies an upward lifting force to the adjusting component 21, causing the adjusting component 21 to rotate upward, driving the support rod 1 to bend and deform upward, distance B is the distance between position 1 and position 2, distance A is the distance between position 3 and position 4, distance X is the distance between fixed point 1 and fixed point 2, and length L is the length of the support rod 1. If the angle between the support rod 1 in a horizontal state and the support rod 1 when driven by the adjustable component 21 to bend and deform upward is α, then tanα=B / X=2A / L, the length L and the distance X remain unchanged after the substrate support structure is assembled, and by adjusting the distance B to become larger or smaller, the distance A will become larger or smaller accordingly. That is to say, by using the force-applying component to rotate the adjusting component 21 downward or upward, the support rod 1 can be driven to bend and deform downward or upward.

[0041] like Figure 12-15 As shown, in actual application, the support rod 1 may have the following two forms that need to be adjusted. Figure 12 and Figure 13 As shown, support rod 1 is deflected and deformed above the horizontal line. At this time, a force-applying component can be used to apply downward pressure to adjustment component 21, causing adjustment component 21 to rotate downward, thereby driving support rod 1 to deflect downward and adjust support rod 1 to a horizontal position. Taking the process of support rod 1 being adjusted from above the horizontal line to the horizontal line as an example, distance B = 0.1mm, length L = 2200mm, and distance X = 60mm, then distance A = 0.5L*B / X (approximately 1.8mm).

[0042] like Figure 14 and Figure 15 As shown, support rod 1 is deflected and deformed below the horizontal line. At this time, the force-applying component can apply an upward force to the adjustment component 21, causing the adjustment component 21 to rotate upward, thereby driving the support rod 1 to deflect upward and adjust the support rod 1 to a horizontal position. Taking the process of support rod 1 from below the horizontal line to being adjusted to the horizontal line as an example, distance B = 0.1mm, length L = 2200mm, and distance X = 60mm, then distance A = 0.5L*B / X (approximately 1.8mm).

[0043] like Figure 6-Figure 9As shown, in one embodiment of the present invention, the adjustment component 2 may also include a fixing component 23 and a rotating shaft 24, and the supporting structure may also include a support beam 3, the fixing component 23 is connected to the support beam 3, part of the adjustment component 21 is connected to the end of the support rod 1, and one end of the adjustment component 21 is rotatably connected to the fixing component 23 through the rotating shaft 24.

[0044] By providing a fixing component 23 connected to the support beam 3 and rotatably connecting one end of the adjusting component 21 to the fixing component 23 via the rotating shaft 24, the one end of the adjusting component 21 is rotatably fixed. By partially connecting the adjusting component 21 to the end of the support rod 1, the end of the support rod 1 can be connected to the fixing component 23 via the adjusting component 21, thereby connecting the end of the support rod 1 to the support beam 3 via the adjusting component 21 and the fixing component 23. In actual application, the support beam 3 can extend in the direction of spacing between multiple support rods 1, so that the ends of multiple support rods 1 can be connected to the support beam 3 via the corresponding adjusting components 21 and fixing components 23.

[0045] Optionally, both ends of the support rod 1 can be connected to two support beams 3 in a one-to-one correspondence.

[0046] like Figure 6-Figure 9 As shown, in one embodiment of the present invention, the end of the support rod 1 can be located above the support beam 3, part of the adjusting component 21 is inserted into the support rod 1 and connected to the support rod 1, one end of the adjusting component 21 is located outside the support rod 1, a part of the fixing component 23 is covered on the support rod 1, and the other part is covered on the end of the adjusting component 21 located outside the support rod 1, and is rotatably connected to the end of the adjusting component 21 located outside the support rod 1 through the rotating shaft 24.

[0047] Optionally, the support rod 1 may be a hollow rod having a hollow interior and openings at both ends, and a portion of the adjusting component 21 may be rod-shaped so as to be able to penetrate into the support rod 1 from the end of the support rod 1. The portion of the adjusting component 21 that penetrates into the support rod 1 may be provided with a first threaded connection hole 211, and the support rod 1 may be provided with a first assembly through hole 11 that corresponds one-to-one with the first threaded connection hole 211. By passing the first threaded connection member 41 through the first assembly through hole 11 and threading it into the first threaded connection hole 211, the portion of the adjusting component 21 that penetrates into the support rod 1 can be connected to the support rod 1, thereby realizing the connection between the adjusting component 21 and the support rod 1.

[0048] Optionally, a plurality of first threaded connection holes 211 may be provided on opposite sides of the portion of the adjusting component 21 that penetrates into the end portion of the support rod 1. By passing the plurality of first threaded connection members 41 through the plurality of first assembly through holes 11 one by one and threadedly connected to the plurality of first threaded connection holes 211 one by one, the stability of the connection between the adjusting component 21 and the support rod 1 can be improved.

[0049] Optionally, the support beam 3 may be provided with a second threaded connection hole 31, and the portion of the fixing component 23 that is covered on the support rod 1 may be provided with a second assembly through hole 231 that corresponds one-to-one with the second threaded connection hole 31. By passing the second threaded connection component 42 through the second assembly through hole 231 and threadedly connected to the second threaded connection hole 31, the portion of the fixing component 23 that is covered above the end of the support rod 1 can be connected to the support beam 3, thereby realizing the connection between the fixing component 23 and the support beam 3.

[0050] Optionally, the support beam 3 can be provided with multiple second threaded connection holes 31 on both sides of the support rod 1. By passing the multiple second threaded connectors 42 through the multiple second assembly through holes 231 one by one and threadedly connected to the multiple second threaded connection holes 31 one by one, the stability of the connection between the fixing component 23 and the support beam 3 can be improved.

[0051] Optionally, the end of the adjusting component 21 located outside the support rod 1 can be provided with a first shaft through hole 212 for the rotating shaft 24 to pass through, and the opposite sides of the part of the fixing component 23 covered on the end of the adjusting component 21 located outside the support rod 1 can be provided with second shaft through holes 232 for the rotating shaft 24 to pass through, and the second shaft through hole 232 is arranged corresponding to the first shaft through hole 212 for the rotating shaft 24 to pass through.

[0052] like Figure 7 and Figure 8 As shown, in one embodiment of the present invention, the force-applying component may include an elastic component 25 and a threaded adjustment component 22. The elastic component 25 is arranged above the end of the support rod 1, and a portion of the fixing component 23 is covered on the elastic component 25. The threaded adjustment component 22 can be rotatably passed through the fixing component 23, the elastic component 25 and the support rod 1 in sequence, and is threadedly connected to the portion of the adjustment component 21 that penetrates into the support rod 1, and is against the upper surface of the fixing component 23.

[0053] When assembling the substrate support structure, the elastic member 25 can be assembled between the support rod 1 and the fixed component 23 in a compressed and deformed state, and the threaded adjustment member 22 can be in a tightened state. At this time, the support rod 1 can be in a horizontal position, and the elastic member 25 can play a role in preventing loosening and reducing shock, as well as assisting in adjusting the gap between the support rod 1 and the fixed component 23. When the support rod 1 is flexed and deformed above the horizontal line, the threaded adjustment member 22 can be loosened counterclockwise. At this time, the compressed deformation of the elastic member 25 can be restored, thereby applying downward pressure to the adjustment member 21, causing the adjustment member 21 to rotate downward, driving the support rod 1 to flex downward and return to a horizontal position. When the support rod 1 is flexed and deformed below the horizontal line, the threaded adjustment member 22 can be tightened clockwise to apply an upward lifting force to the adjustment member 21, causing the adjustment member 21 to rotate upward, driving the support rod 1 to flex upward and return to a horizontal position. During this process, the elastic member 25 is continuously compressed and deformed.

[0054] However, in actual applications, the structure of the force-applying component is not limited thereto. For example, the force-applying component may include a threaded connection portion and an upper force-applying portion and a lower force-applying portion connected to the threaded connection portion, wherein the threaded connection portion passes through the fixing component 23 and is threadedly connected to the fixing component 23, the upper force-applying portion is located above the adjusting component 21, and the lower force-applying portion is located below the adjusting component 21. In actual applications, by rotating the threaded connection portion, the upper force-applying portion can be lowered to abut against the top of the adjusting component 21, thereby applying downward pressure to the adjusting component 21 and causing the adjusting component 21 to rotate downward. Alternatively, the lower force-applying portion can be raised to abut against the bottom of the adjusting component 21, thereby applying an upward lifting force to the adjusting component 21 and causing the adjusting component 21 to rotate upward.

[0055] like Figure 7 and Figure 8 As shown, in one embodiment of the present invention, the threaded adjustment member 22 may include a threaded connection portion 221 and a gripping rotating portion 222. The threaded connection portion 221 can be rotatably passed through the fixed component 23, the elastic member 25 and the support rod 1 in sequence, and is threadedly connected to the part of the adjustment component 21 that penetrates into the support rod 1, and is abutted against the upper surface of the fixed component 23. The gripping rotating portion 222 is connected to the threaded connection portion 221 and is located outside the fixed component 23, and the axis of the gripping rotating portion 222 has an angle with the axis of the threaded connection portion 221.

[0056] Optionally, the portion of the adjusting component 21 that penetrates into the support rod 1 can be provided with an adjusting threaded hole 214 for threaded connection with the threaded connection portion 221, the support rod 1 can be provided with a first adjusting through hole 13 corresponding to the adjusting through hole 214, the elastic component 25 can be provided with a second adjusting through hole 251 corresponding to the first adjusting through hole 13, the fixing component 23 can be provided with a third adjusting through hole 233 corresponding to the second adjusting through hole 251, the end of the threaded adjusting component 22 can be provided with an external thread, and the threaded connection portion 221 can pass through the third adjusting through hole 233, the second adjusting through hole 251 and the first adjusting through hole 13 in sequence, and be threadedly connected to the adjusting threaded hole 214.

[0057] In actual application, the threaded connection part 221 can be rotated by holding the holding rotating part 222 and rotating it. By setting the holding rotating part 222 to be connected with the threaded connection part 221, and making the holding rotating part 222 located outside the fixed part 23, and making the axis of the holding rotating part 222 and the axis of the threaded connection part 221 have an angle, it is convenient to rotate the threaded connection part 221 by holding the rotating part 222, and the force required to rotate the threaded connection part 221 can be reduced.

[0058] Optionally, the elastic member 25 may be an elastic gasket.

[0059] like Figure 1-Figure 5 As shown, in one embodiment of the present invention, the substrate support structure may also include multiple support components 5, each support rod 1 is provided with multiple support components 5, and the multiple support components 5 are spaced apart in the extension direction of the corresponding support rod 1, and the support rod 1 supports the substrate through the multiple support components 5.

[0060] By arranging the support component 5 on the support rod 1, since the support component 5 protrudes upward relative to the upper surface of the support rod 1, it is convenient for the robot to place the substrate on multiple support components 5, and it is convenient for the robot to remove the substrate from multiple support components 5.

[0061] like Figure 6 and Figure 8 As shown, in one embodiment of the present invention, the support component 5 may include a support column 51 and an adjustment portion 52. The support column 51 is arranged on the support rod 1. The adjustment portion 52 passes through the support rod 1 and the part of the adjustment component 21 that penetrates into the support rod 1 and is connected to the support column 51 for adjusting the length of the support column 51 on the support rod.

[0062] In actual applications, when assembling the substrate support structure, due to preparation or assembly reasons, the support rod 1 may be in a non-horizontal and flat shape, and the top ends of the multiple support components 5 on the multiple support rods 1 supporting the same substrate may be in non-same planes. Therefore, when assembling the substrate support structure, it is necessary to adjust the protruding length of the support column 51 relative to the upper surface of the support rod 1 so that the top ends of the multiple support components 5 on the multiple support rods 1 supporting the same substrate can be in the same plane.

[0063] like Figure 6-Figure 9 As shown, in one embodiment of the present invention, the support rod 1 can be provided with a first through hole 12 for the adjusting portion 52 to pass through, and the adjusting component 21 is provided with a second through hole 213 corresponding to the first through hole 12 for the adjusting portion 52 to pass through, the second through hole 213 is a long hole, and the long axis direction of the second through hole 213 is parallel to the length direction of the adjusting component 21.

[0064] In actual application, the portion of the adjustment component 21 that penetrates into the support rod 1 may, due to its length, block the adjustment portion 52 of the support component 5 located at the end of the support rod 1 from connecting with the support column 51. Therefore, by providing a first through hole 12 on the support rod 1 for the adjustment portion 52 to pass through, and providing a second through hole 213 on the adjustment component 21 corresponding to the first through hole 12 for the adjustment portion 52 to pass through, the adjustment portion 52 of the support component 5 located at the end of the support rod 1 can pass through the first through hole 12 and the second through hole 213 from the bottom of the support rod 1 to connect with the support column 51. Furthermore, by designing the second through hole 213 as an elongated hole, with the long axis direction of the second through hole 213 parallel to the length direction of the adjustment component 21, it is possible to prevent the adjustment portion 52 from interfering with the adjustment component 21 when the adjustment component 21 rotates downward or upward, thereby preventing the adjustment component 21 from rotating.

[0065] Optionally, the adjusting portion 52 may be threadedly connected to the supporting column 51 .

[0066] like Figure 1-Figure 3 As shown, optionally, both ends of each support rod 1 may be provided with an adjustment component 2 .

[0067] In practical applications, the deflection of the support rod 1 can be adjusted separately by means of two adjustment components 2 provided at both ends of the support rod 1. In this way, on the one hand, the deflection of the support rod 1 can be adjusted from both ends of the support rod 1, thereby facilitating the adjustment of the support rod 1. On the other hand, the adjustment of the deflection of the support rod 1 can be made more balanced, thereby facilitating the adjustment of the support rod 1 to the horizontal.

[0068] Optionally, the substrate support structure may include a plurality of support layer groups, which are vertically spaced apart to form a multi-layer structure, and each support layer group includes a plurality of support rods 1 and a plurality of adjustment components 2 .

[0069] like Figure 1-Figure 5 As shown, in actual application, the substrate support structure may include a support frame 6 , and the multiple support rods 1 of each support layer group may be connected to the support frame 6 through a support beam 3 .

[0070] In one embodiment of the present invention, the support rod 1 can be made of stainless steel.

[0071] In the related art, the material of the support rod 1 can be carbon fiber, which has a high strength. For a support rod 1 with a larger span, this can reduce the possibility of the support rod 1 bending and deforming during long-term use, but it cannot completely avoid the support rod 1 bending and deforming during long-term use. In addition, carbon fiber is brittle and expensive. The substrate support structure provided by the embodiment of the present invention makes the material of the support rod 1 stainless steel. On the one hand, stainless steel has a certain strength, and on the other hand, it can reduce the possibility of the support rod 1 bending and deforming during long-term use. In addition, stainless steel has good toughness. When adjusting the support rod 1 to bend and deform downward or upward, it is not easy to cause the support rod 1 to break, thereby improving the stability of the adjustment of the support rod 1. In addition, the cost of stainless steel is low.

[0072] In summary, the substrate support structure provided by the embodiment of the present invention can simplify and facilitate the adjustment operation of the substrate support structure during subsequent maintenance, thereby improving the adjustment efficiency of the substrate support structure during subsequent maintenance.

[0073] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will be able to make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A substrate support structure, characterized in that: The device comprises a plurality of support rods and a plurality of adjustment assemblies, wherein the plurality of support rods are arranged at intervals to support the substrate together, and the end of each support rod is provided with the adjustment assembly, and the adjustment assembly is used to adjust the deflection of the corresponding support rod; The adjustment assembly includes an adjustment component and a force-applying component, wherein the adjustment component is connected to the support rod, and one end of the adjustment component is rotatably fixed. The force-applying component is arranged in cooperation with the adjustment component to apply a downward pressure or an upward force to the adjustment component, so that the adjustment component rotates downward or upward, thereby driving the support rod to bend and deform downward or upward; The support structure further includes a support beam, and a portion of the adjustment component is connected to an end portion of the support rod.

2. The substrate support structure according to claim 1, wherein: The adjusting component further includes a fixing component and a rotating shaft. The fixing component is connected to the support beam. One end of the adjusting component is rotatably connected to the fixing component via the rotating shaft.

3. The substrate supporting structure according to claim 2, wherein: The end of the support rod is located above the support beam, part of the adjusting component is inserted into the support rod and connected to the support rod, one end of the adjusting component is located outside the support rod, part of the fixing component is covered on the support rod, and the other part is covered on the end of the adjusting component located outside the support rod, and is rotatably connected to the end of the adjusting component located outside the support rod through the rotating shaft.

4. The substrate supporting structure according to claim 3, wherein: The force-applying component includes an elastic component and a threaded adjustment component. The elastic component is arranged above the end of the support rod, and a portion of the fixing component is covered on the elastic component. The threaded adjustment component can be rotatably passed through the fixing component, the elastic component and the support rod in sequence, and is threadedly connected to the portion of the adjustment component that penetrates into the support rod, and is abutted against the upper surface of the fixing component.

5. The substrate supporting structure according to claim 4, wherein: The threaded adjustment member includes a threaded connection portion and a gripping rotating portion. The threaded connection portion can be rotated to pass through the fixed component, the elastic component and the support rod in sequence, and is threadedly connected to the portion of the adjustment component that penetrates into the support rod, and is abutted against the upper surface of the fixed component. The gripping rotating portion is connected to the threaded connection portion and is located outside the fixed component, and the axis of the gripping rotating portion has an angle with the axis of the threaded connection portion.

6. The substrate supporting structure according to claim 3, wherein: The substrate support structure further includes a plurality of support components. Each support rod is provided with a plurality of support components. The plurality of support components are spaced apart in the extension direction of the corresponding support rod. The support rod supports the substrate through the plurality of support components.

7. The substrate supporting structure according to claim 6, wherein: The support component includes a support column and an adjustment portion, the support column is arranged on the support rod, the adjustment portion passes through the support rod and the portion of the adjustment component that penetrates into the support rod, and is connected to the support column, for adjusting the length of the support column on the support rod.

8. The substrate supporting structure according to claim 7, wherein: The support rod is provided with a first through hole for the adjusting part to pass through, and the adjusting component is provided with a second through hole corresponding to the first through hole for the adjusting part to pass through. The second through hole is a long hole, and the long axis direction of the second through hole is parallel to the length direction of the adjusting component.

9. The substrate supporting structure according to claim 1, wherein: The support rod is made of stainless steel.

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