Automatic welding device for quartz boat frame

Abstract

The utility model discloses an automatic welding device for a quartz boat frame, and belongs to the field of welding devices. The two side plate positioning clamps are movably connected to the two sides of the rack respectively; the two end plate positioning clamps are movably connected to the two ends of the rack respectively; the reinforcer positioning clamp is connected with the rack and located in an area defined by the two side plate positioning clamps and the two end plate positioning clamps; and the welding assembly is movably connected with the rack. The utility model has the technical effects that the positioning performance is good, so that the welding performance of the related quartz boat frame is good.

Description

Technical Field

[0001] The utility model relates to a welding device, in particular to an automatic welding device for a quartz boat frame. Background Art

[0002] A quartz boat is a device used to carry silicon wafers for diffusion, oxidation, annealing and other process treatments, and is widely used in the field of semiconductor manufacturing.

[0003] In order to increase welding efficiency, the relevant quartz boat is generally welded using a welding device. However, the positioning performance of the relevant welding device is poor, which easily leads to poor welding performance of the relevant quartz boat and makes it difficult to meet the assembly accuracy requirements of the relevant quartz boat. Utility Model Content

[0004] Purpose of the utility model: The purpose of the utility model is to provide a quartz boat automatic welding device, which has good positioning performance and facilitates the welding performance of the relevant quartz boat.

[0005] Technical solution:

[0006] A quartz boat automatic welding device, comprising:

[0007] frame;

[0008] Two side panel positioning fixtures movably connected to both sides of the frame;

[0009] Two end plate positioning fixtures movably connected to both ends of the frame;

[0010] A reinforcement member positioning fixture connected to the frame, the reinforcement member positioning fixture being located within an area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures;

[0011] A welding assembly movably connected to the frame.

[0012] Optionally, the side panel positioning fixture includes:

[0013] a first driving unit, one end of the first driving unit being connected to the frame;

[0014] A first fixing base is connected to the other end of the first driving unit.

[0015] Optionally, the side panel positioning fixture further includes:

[0016] a plurality of first through holes each provided on the first fixing seat;

[0017] A first vacuum unit is connected to the plurality of first through holes.

[0018] Optionally, the end plate positioning fixture includes:

[0019] a second driving unit, one end of the second driving unit being connected to the frame;

[0020] A second fixing base connected to the other end of the second driving unit.

[0021] Optionally, the end plate positioning fixture further includes:

[0022] a plurality of second through holes each provided on the second fixing seat;

[0023] A second vacuum unit is connected to the plurality of second through holes.

[0024] Optionally, the reinforcement member positioning fixture includes:

[0025] a first lifting unit, one end of which is connected to the frame;

[0026] a clamp unit connected to the other end of the first lifting unit;

[0027] Wherein, the first lifting unit and the clamp unit are both located in an area enclosed by the two side plate positioning clamps and the two end plate positioning clamps.

[0028] Optionally, the clamp unit includes:

[0029] a positioning platform connected to the other end of the first lifting unit;

[0030] a first pressing block, one end of which is connected to the positioning platform;

[0031] a second pressing block detachably connected to the other end of the first pressing block;

[0032] The positioning platform, the first pressing block and the second pressing block are all located in an area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures.

[0033] Optionally, the clamp unit further includes:

[0034] a first receiving groove provided in the first pressing block;

[0035] a second accommodating groove provided in the second pressing block, the second accommodating groove being in communication with the first accommodating groove;

[0036] Wherein, the first accommodating groove and the second accommodating groove are both located in the area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures.

[0037] Optionally, the welding assembly includes:

[0038] a second lifting unit, one end of which is connected to the frame;

[0039] A plurality of flame guns are connected to the other end of the second lifting unit.

[0040] Optionally, the welding assembly further includes:

[0041] a fixing member connected to the other end of the second lifting unit, wherein the fixing member is connected to the plurality of flame guns;

[0042] A guide rod is movably connected to the frame, and the guide rod is connected to the fixing piece.

[0043] Beneficial effects: The present application uses two side plate positioning fixtures, two end plate positioning fixtures and a reinforcement positioning fixture for positioning and clamping, which facilitates good positioning performance, thereby improving the welding performance of the quartz boat frame and facilitating meeting the assembly accuracy requirements of the quartz boat frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 This is a schematic structural diagram of a quartz boat automatic welding device according to Example 1 of the present utility model;

[0045] Figure 2 for Figure 1 Partial diagram of A in the middle;

[0046] Figure 3 This is a schematic structural diagram of a quartz boat according to Example 1 of the present utility model;

[0047] In the figure: 1. frame; 2. side panel positioning fixture; 21. first drive unit; 22. first fixing seat; 221. first through hole; 3. end plate positioning fixture; 31. second drive unit; 32. second fixing seat; 4. reinforcement positioning fixture; 41. first lifting unit; 42. fixture unit; 421. first pressure block; 4211. first accommodating groove; 422. second pressure block; 4221. second accommodating groove; 423. positioning platform; 5. welding assembly; 51. second lifting unit; 52. flame gun; 53. fixing member; 54. guide rod; 6. quartz boat; 61. side panel; 62. end panel; 63. reinforcement. DETAILED DESCRIPTION

[0048] In order to make the technical solution of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0049] Example 1

[0050] like Figure 1This embodiment provides a quartz boat frame automatic welding device, including: a frame 1; two side plate positioning fixtures 2 movably connected to both sides of the frame 1; two end plate positioning fixtures 3 movably connected to both ends of the frame 1; a reinforcement positioning fixture 4 connected to the frame 1, the reinforcement positioning fixture 4 is located in the area enclosed by the two side plate positioning fixtures 2 and the two end plate positioning fixtures 3; and a welding assembly 5 movably connected to the frame 1.

[0051] Specifically, during welding, first, the two side plates 61 of the quartz boat 6 are placed on the two side plate positioning fixtures 2 respectively; then, the two end plates 62 of the quartz boat 6 are placed on the two end plate positioning fixtures 3 respectively; then, the several reinforcements 63 of the quartz boat 6 are placed on the reinforcement positioning fixture 4; further, the two side plate positioning fixtures 2, the two end plate positioning fixtures 3 and the reinforcement positioning fixture 4 are opened synchronously and fed to the first designated position, while leaving a certain amount of hot work space at the place to be welded; further, the welding assembly 5 is opened and fed to the first designated position. The second designated position is then used to heat the two side panels 61, the two end panels 62 and the several reinforcements 63 to be welded. In order to ensure uniformity, the welding assembly 5 needs to be lifted and lowered back and forth during heating. After completion, the welding assembly 5 is turned off and reset. Further, the two side panel positioning fixtures 2, the two end panel positioning fixtures 3 and the reinforcement positioning fixture 4 are synchronously opened and fed to the third designated position, so that the two side panels 61, the two end panels 62 and the several reinforcements 63 are docked into a quartz boat frame 6. After cooling for a specified time, the quartz boat frame 6 is removed.

[0052] The frame 1 is used to carry two side plate positioning fixtures 2, two end plate positioning fixtures 3, etc. The frame 1 can be specifically formed by connecting a number of profiles through fasteners; the two side plate positioning fixtures 2 are used to clamp the two side plates 61 of the quartz boat 6, which can be clamped by vacuum negative pressure, fasteners, etc., preferably by vacuum negative pressure; the two end plate positioning fixtures 3 are used to clamp the two end plates 62 of the quartz boat 6, which can be clamped by vacuum negative pressure, fasteners, etc., preferably by vacuum negative pressure; the reinforcement positioning fixture 4 is used to clamp the multiple reinforcement members 63 of the quartz boat 6. The specific type of the reinforcement members 63 is not limited and can be reinforcement rods, reinforcement plates, etc.; the welding assembly 5 is used to heat the two side plates 61, the two end plates 62 and the multiple reinforcement members 63 to be welded; in summary, the present application uses two side plate positioning fixtures 2, two end plate positioning fixtures 3 and the reinforcement member positioning fixture 4 for positioning and clamping, which facilitates good positioning performance, thereby ensuring good welding performance of the quartz boat 6 and facilitating meeting the assembly accuracy requirements of the quartz boat 6.

[0053] Further, such as Figure 1The side plate positioning fixture 2 includes a first drive unit 21, one end of which is connected to the frame 1; and a first fixing base 22 connected to the other end of the first drive unit 21. Specifically, the first drive unit 21 is used to move the first fixing base 22 along the frame 1. The first drive unit 21 may include a motor, a belt drive module, and a screw nut module. The first fixing base 22 is used to position and clamp the side plate 61 of the quartz boat 6.

[0054] Further, such as Figure 2 The side plate positioning fixture 2 further includes: a plurality of first through holes 221 disposed on the first fixing base 22; and a first vacuum unit connected to the plurality of first through holes 221. Specifically, the first vacuum unit facilitates the first fixing base 22 to adhere to the side plates 61 of the quartz boat 6 by applying negative pressure via the plurality of first through holes 221. The first vacuum unit may be a vacuum pump, for example.

[0055] Further, such as Figure 1 The end plate positioning fixture 3 includes a second drive unit 31, one end of which is connected to the frame 1; and a second fixing base 32 connected to the other end of the second drive unit 31. Specifically, the second drive unit 31 is used to move the second fixing base 32 along the frame 1. The second drive unit 31 may include a motor, a belt drive module, and a screw nut module. The second fixing base 32 is used to position and clamp the end plate 62 of the quartz boat 6.

[0056] Further, such as Figure 1 The end plate positioning fixture 3 further includes: a plurality of second through holes disposed on the second fixing base 32; and a second vacuum unit connected to the plurality of second through holes. Specifically, the second vacuum unit facilitates the second fixing base 32 to absorb the end plate 62 of the quartz boat 6 by applying negative pressure via the plurality of second through holes. The second vacuum unit may be a vacuum pump, for example.

[0057] Further, such as Figure 1 The reinforcement member positioning fixture 4 includes a first lifting unit 41, one end of which is connected to the frame 1; and a clamp unit 42 connected to the other end of the first lifting unit 41. Both the first lifting unit 41 and the clamp unit 42 are located within the area enclosed by the two side plate positioning fixtures 2 and the two end plate positioning fixtures 3. Specifically, the first lifting unit 41 is used to support the frame 1 and to drive the clamp unit 42 upward and downward. The first lifting unit 41 can be pneumatically or hydraulically operated. The clamp unit 42 is used to clamp the reinforcement members 63 of the quartz boat 6.

[0058] Further, such as Figure 2The fixture unit 42 includes a positioning platform 423 connected to the other end of the first lifting unit 41; a first pressure block 421, one end of which is connected to the positioning platform 423; and a second pressure block 422 detachably connected to the other end of the first pressure block 421. The positioning platform 423, the first pressure block 421, and the second pressure block 422 are all located within the area enclosed by the two side plate positioning fixtures 2 and the two end plate positioning fixtures 3. Specifically, the first pressure block 421 and the second pressure block 422 are used to clamp the reinforcement members 63 of the quartz boat 6. The number of first pressure blocks 421 and second pressure blocks 422 is equal to the number of reinforcement members 63.

[0059] Further, such as Figure 2 The fixture unit 42 further includes a first receiving groove 4211 disposed within the first pressing block 421; and a second receiving groove 4221 disposed within the second pressing block 422. The second receiving groove 4221 communicates with the first receiving groove 4211. Both the first receiving groove 4211 and the second receiving groove 4221 are located within the area enclosed by the two side panel positioning fixtures 2 and the two end panel positioning fixtures 3. Specifically, the first receiving groove 4211 and the second receiving groove 4221 are each configured to accommodate the reinforcement member 63.

[0060] Further, such as Figure 1 The welding assembly 5 includes a second lifting unit 51, one end of which is connected to the frame 1; and a plurality of flame guns 52, each connected to the other end of the second lifting unit 51. Specifically, the second lifting unit 51 is used to support the frame 1 and to drive the flame guns 52 to move up and down. The second lifting unit 51 can be pneumatic or hydraulic. The flame guns 52 are used to heat the areas to be welded on the two side panels 61, the two end panels 62, and the plurality of reinforcements 63.

[0061] Further, such as Figure 1 The welding assembly 5 further includes a fixing member 53 connected to the other end of the second lifting unit 51, the fixing member 53 and the plurality of flame guns 52 being connected; and a guide rod 54 movably connected to the frame 1, the guide rod 54 being connected to the fixing member 53. Specifically, the fixing member 53 is used to fix the plurality of flame guns 52; the guide rod 54 is used for guidance to facilitate the smooth lifting of the fixing member 53 and the flame guns 52.

[0062] The above embodiments merely illustrate several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the concept of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A quartz boat automatic welding device, characterized in that: include: frame; Two side panel positioning fixtures movably connected to both sides of the frame; Two end plate positioning fixtures movably connected to both ends of the frame; A reinforcement member positioning fixture connected to the frame, the reinforcement member positioning fixture being located within an area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures; A welding assembly movably connected to the frame.

2. The quartz boat automatic welding device according to claim 1, characterized in that: The side panel positioning fixture includes: a first driving unit, one end of the first driving unit being connected to the frame; A first fixing base is connected to the other end of the first driving unit.

3. The quartz boat automatic welding device according to claim 2, characterized in that: The side panel positioning fixture also includes: a plurality of first through holes each provided on the first fixing seat; A first vacuum unit is connected to the plurality of first through holes.

4. The quartz boat automatic welding device according to any one of claims 1 to 3, characterized in that: The end plate positioning fixture comprises: a second driving unit, one end of the second driving unit being connected to the frame; A second fixing base connected to the other end of the second driving unit.

5. The quartz boat automatic welding device according to claim 4, characterized in that: The end plate positioning fixture further comprises: a plurality of second through holes each provided on the second fixing seat; A second vacuum unit is connected to the plurality of second through holes.

6. The quartz boat automatic welding device according to any one of claims 1 to 3, characterized in that: The reinforcement member positioning fixture includes: a first lifting unit, one end of which is connected to the frame; a clamp unit connected to the other end of the first lifting unit; Wherein, the first lifting unit and the clamp unit are both located in an area enclosed by the two side plate positioning clamps and the two end plate positioning clamps.

7. The quartz boat automatic welding device according to claim 6, characterized in that: The clamp unit comprises: a positioning platform connected to the other end of the first lifting unit; a first pressing block, one end of which is connected to the positioning platform; a second pressing block detachably connected to the other end of the first pressing block; The positioning platform, the first pressing block and the second pressing block are all located in an area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures.

8. The quartz boat automatic welding device according to claim 7, characterized in that: The clamp unit further includes: a first receiving groove provided in the first pressing block; a second accommodating groove provided in the second pressing block, the second accommodating groove being in communication with the first accommodating groove; Wherein, the first accommodating groove and the second accommodating groove are both located in the area enclosed by the two side plate positioning fixtures and the two end plate positioning fixtures.

9. The quartz boat automatic welding device according to any one of claims 1 to 3, characterized in that: The welding assembly comprises: a second lifting unit, one end of which is connected to the frame; A plurality of flame guns are connected to the other end of the second lifting unit.

10. The quartz boat automatic welding device according to claim 9, characterized in that: The welding assembly further comprises: a fixing member connected to the other end of the second lifting unit, wherein the fixing member is connected to the plurality of flame guns; A guide rod is movably connected to the frame, and the guide rod is connected to the fixing piece.

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