Silicon-based precursor filling device
By setting up liquid and gas filters in the silicon-based precursor filling device and using multi-layer filter plates and filter elements to filter the silicon-based precursor material and inert gas, the problem of impurities introduced into the existing device is solved, the material purity and the sealing of the device are improved, and the product quality is ensured.
Patent Information
- Application Number
- CN202422260760.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-14
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-09-14
AI Technical Summary
Existing filling devices may introduce impurities or contaminants, resulting in a decrease in the purity of silicon-based precursor materials, affecting product quality and subsequent processes.
A silicon-based precursor filling device was designed, which includes a liquid filter and a gas filter. Coarse filter plates, fine filter plates, activated carbon filter plates and filter elements were used to filter silicon-based precursor materials and inert gases respectively. Valves and sealing structures were combined to control the flow direction and prevent impurities from entering.
The purity of silicon-based precursor materials is improved, filling accuracy and product quality are ensured, external impurities are prevented from entering, and the sealing and flexibility of the device are enhanced.
Smart Images
Figure CN223341117U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical filling, and more particularly to a silicon-based precursor filling device. Background Art
[0002] Semiconductor precursor materials are core materials in the integrated circuit industry, enjoying significant and widespread applications. The rapid growth of the integrated circuit industry in recent years, coupled with robust demand for wafers from downstream manufacturers, has driven rapid growth in the semiconductor materials market. Precursors are key raw materials for semiconductor thin-film deposition processes (ALC / CVD / PVD) and epitaxy / etching, forming thin film layers during semiconductor manufacturing. The precursor market is poised for rapid growth driven by demand from the semiconductor industry. With the advancement of industries like terminal logic and storage, DRAM process sizes are narrowing, and the manufacturing requirements for high-aspect ratios for large-capacity memory cells are increasing, driving rapid growth in the precursor market.
[0003] With the development of the semiconductor industry and the continuous advancement of integrated circuit process technology, silicon-based precursor materials, including bis(diethylamino)silane (BDEAS), diisopropylaminosilane (DIPAS), and trisilylamine (TSA), are important components of integrated circuit electronic functional materials. To meet production and application needs, the purity requirements of silicon-based precursor materials are extremely strict.
[0004] Existing filling devices may introduce impurities or contaminants, reducing the purity of the source liquid. This not only affects the quality of the final product but may also adversely affect subsequent processes or usage. Therefore, when designing and using source liquid filling devices, full consideration must be given and effective measures must be taken to ensure the purity of the liquid being filled. Utility Model Content
[0005] (1) Technical problems solved
[0006] In response to the problems existing in the prior art, the present invention provides a silicon-based precursor filling device to solve the technical problem mentioned in the background art that the existing filling devices may introduce impurities or contaminants, resulting in a decrease in the purity of the filled liquid source. This not only affects the quality of the final product.
[0007] (2) Technical solution
[0008] To achieve the above-mentioned object, the present invention provides the following technical solution: a silicon-based precursor filling device, comprising a raw material bottle, an upper end surface of the raw material bottle and a pressure pipe connected to one side, a liquid filter provided at the other end of the pressure pipe, a connecting pipe provided at the lower end of the liquid filter, a sampling bottle provided at the bottom of the connecting pipe, a filling pipe provided on the outer wall of the connecting pipe, a branch pipe provided on the outer wall of the filling pipe and at the bottom, three groups of the branch pipes are provided and a filling bottle is provided at the lower end thereof, the liquid filter comprises a shell, strip blocks are provided on the inner wall of the shell and on both sides, the strip blocks are provided in three groups and a slot is opened on the outer wall thereof, a coarse filter plate, a fine filter plate and an activated carbon filter plate are slidably provided in the interior of the slots respectively, a cover body is provided on the upper end surface of the shell, the cover body is bolted to the shell, a top block is provided on the lower end surface of the cover body, the top block is in contact with the upper end surfaces of the coarse filter plate, the fine filter plate and the activated carbon filter plate, and an air guide tube is provided on the upper end surface of the raw material bottle and on one side of the pressure pipe.
[0009] The utility model is further configured as follows: a recoil pipe is provided on the outer wall of the connecting pipe and at the upper end of the filling pipe, the other end of the air guide pipe is connected to the recoil pipe, an external pipe is provided on the outer wall of the recoil pipe and at the upper end, a gas filter is connected at the upper end of the external pipe, the gas filter includes a cylinder, an internal threaded sleeve is provided on the inner wall of the cylinder and at the bottom, a threaded ring is provided inside the internal threaded sleeve, the threaded ring is threadedly installed with the internal threaded sleeve, a filter element is fixed on the upper end surface of the threaded ring, and a buckle cover is provided on the upper end of the cylinder to facilitate filtering the inert gas introduced into the raw material bottle.
[0010] The utility model is further configured such that a sealing groove is provided on the bottom of the buckle cover, the cylinder is located inside the sealing groove and is threadedly connected to the inner wall of the sealing groove, and an air inlet pipe is fixed on the upper end surface of the buckle cover to facilitate disassembly of the filter element.
[0011] The utility model is further configured such that a first conical surface is provided on the inner wall of the branch pipe and at the bottom, a second conical surface is provided on the upper end of the filling bottle, a retaining ring is provided at the lower end of the second conical surface, and a fastening nut is provided at the connection position between the retaining ring and the branch pipe to facilitate increasing the sealing between the branch pipe and the filling bottle.
[0012] The utility model is further configured such that an exhaust pipe is provided on the outer wall of the recoil pipe and on one side of the external pipe, and a vacuum pipe is provided on one side of the exhaust pipe to facilitate the discharge of gas.
[0013] The utility model is further configured such that a first valve is provided at the lower end of the liquid filter and on the outer wall of the connecting pipe, a second valve is provided on the outer wall of the recoil pipe, a third valve is provided on the air guide pipe, a fourth valve is provided on the outer wall of the external pipe, a fifth valve is provided on the outer wall of the exhaust pipe, and a sixth valve is provided on the outer wall of the vacuum pipe, so as to facilitate control of the flow direction of gas and liquid inside the device.
[0014] The utility model is further configured such that a seventh valve is provided on the outer wall of the connecting tube and at the upper end of the sampling bottle, and an eighth valve, a ninth valve and a tenth valve are provided on the branch pipes respectively, so as to facilitate filling or sampling of the liquid.
[0015] The present invention is further configured such that an eleventh valve and a twelfth valve are respectively provided on the upper end of the raw material bottle and located on the air guide pipe and the material pressing pipe.
[0016] (3) Beneficial effects
[0017] Compared with the prior art, the present invention provides a silicon-based precursor filling device with the following beneficial effects:
[0018] 1. By arranging a coarse filter plate, a fine filter plate and an activated carbon filter plate inside the liquid filter, the silicon-based precursor material to be filled can be filtered to remove the impurities inside and improve the filling accuracy. Later, the user can disassemble the cover body with bolts to remove the coarse filter plate, the fine filter plate and the activated carbon filter plate for easy cleaning.
[0019] 2. By setting up a gas filter and a filter element, the user can introduce inert gas into the raw material bottle through the gas filter to reduce the oxygen content inside it, thereby protecting the product. The filter element can filter the inert gas before entering the raw material bottle to remove the impurities inside it, further increasing the overall purity of the silicon-based precursor material. Later, the user can remove the buckle cover to rotate the filter element to separate the thread ring from the internal thread sleeve for easy cleaning.
[0020] 3. By setting the first conical surface and the second conical surface, the user can insert the second conical surface at the upper end of the filling bottle into the first conical surface at the lower end of the branch pipe, and then tighten the fastening nut to tighten the retaining ring inside to increase the sealing of the connection between the branch pipe and the filling bottle, prevent impurities in the outside air from entering, and facilitate use. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is an overall schematic diagram of a silicon-based precursor filling device in an unused state;
[0022] Figure 2A schematic diagram of the installation positions of the control components on the device;
[0023] Figure 3 This is a schematic diagram of the installation of components inside the shell;
[0024] Figure 4 This is a cross-sectional view of the installation of the cylinder, internal thread sleeve, thread ring, filter element and buckle cover;
[0025] Figure 5 This is a cross-sectional view of the installation of the branch pipe, filling bottle and fastening nut.
[0026] Figure: 1, raw material bottle; 2, pressurizing pipe; 3, liquid filter; 4, connecting pipe; 5, sampling bottle; 6, filling pipe; 7, branch pipe; 8, filling bottle; 9, housing; 10, strip block; 11, slot; 12, coarse filter plate; 13, fine filter plate; 14, activated carbon filter plate; 15, cover; 16, top block; 17, air guide tube; 18, backflush pipe; 19, external pipe; 20, gas filter; 21, cylinder; 22, internal thread sleeve; 23, thread ring; 24, filter element 25. Buckle cover; 26. Sealing groove; 27. Inlet pipe; 28. First cone surface; 29. Second cone surface; 30. Retaining ring; 31. Fastening nut; 32. Exhaust pipe; 33. Vacuum tube; 34. First valve; 35. Second valve; 36. Third valve; 37. Fourth valve; 38. Fifth valve; 39. Sixth valve; 40. Seventh valve; 41. Eighth valve; 42. Ninth valve; 43. Tenth valve; 44. Eleventh valve; 45. Twelfth valve. DETAILED DESCRIPTION
[0027] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.
[0028] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.
[0029] In the present invention, unless otherwise specified, directions such as "up" and "down" are usually relative to the directions shown in the drawings, or relative to the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "left" and "right" are usually relative to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned direction words are not used to limit the present invention.
[0030] See also Figure 1-5A silicon-based precursor filling device includes a raw material bottle 1, a material pressure pipe 2 is connected to the upper end surface of the raw material bottle 1 on one side, a liquid filter 3 is provided at the other end of the material pressure pipe 2, a connecting pipe 4 is provided at the lower end of the liquid filter 3, a sampling bottle 5 is connected to the bottom of the connecting pipe 4, a filling pipe 6 is provided on the outer wall of the connecting pipe 4, a branch pipe 7 is provided on the outer wall of the filling pipe 6 and at the bottom, three groups of branch pipes 7 are provided and a filling bottle 8 is provided at the lower end of each group, the liquid filter 3 includes a shell 9, the shell 9 Strip blocks 10 are provided on the inner wall and on both sides. There are three groups of strip blocks 10 and slots 11 are provided on the outer walls. A coarse filter plate 12, a fine filter plate 13 and an activated carbon filter plate 14 are slidably provided inside the slots 11. A cover body 15 is provided on the upper end face of the shell 9, and a top block 16 is provided on the lower end face of the cover body 15. The top block 16 is in contact with the upper end faces of the coarse filter plate 12, the fine filter plate 13 and the activated carbon filter plate 14. An air guide tube 17 is provided on the upper end face of the raw material bottle 1 and on one side of the pressing pipe 2.
[0031] In this embodiment, a recoil pipe 18 is provided on the outer wall of the connecting pipe 4 and at the upper end of the filling pipe 6, and the other end of the air guide pipe 17 is connected to the recoil pipe 18. An external pipe 19 is provided on the outer wall of the recoil pipe 18 and at the upper end. The upper end of the external pipe 19 is connected to a gas filter 20, and the gas filter 20 includes a cylinder 21, and an internal threaded sleeve 22 is provided on the inner wall of the cylinder 21 and at the bottom. A threaded ring 23 is provided inside the internal threaded sleeve 22, and the threaded ring 23 is threadedly installed with the internal threaded sleeve 22. A filter element 24 is fixed on the upper end surface of the threaded ring 23, and a buckle cover 25 is provided on the upper end of the cylinder 21. A sealing groove 26 is opened on the bottom of the buckle cover 25. The cylinder 21 is located inside the sealing groove 26 and is threadedly connected to the inner wall of the sealing groove 26. An air inlet pipe 27 is fixed on the upper end surface of the buckle cover 25.
[0032] More specifically, during the filling process, the coarse filter plate 12, the fine filter plate 13 and the activated carbon filter plate 14 can filter the silicon-based precursor material to be filled to remove the impurities inside it and improve the filling accuracy. Later users can disassemble the cover 15 with bolts to remove the coarse filter plate 12, the fine filter plate 13 and the activated carbon filter plate 14 from the inside of the card slot 11 to facilitate subsequent cleaning. When it is necessary to introduce inert gas into the raw material bottle 1, the filter element 24 can filter the inert gas before entering the raw material bottle 1 to remove the impurities inside it and further increase the overall purity of the silicon-based precursor material. Later users can rotate the filter element 24 by removing the buckle cover 25 to separate the threaded ring 23 from the internal threaded sleeve 22 to facilitate cleaning.
[0033] See also Figure 1 and Figure 5As an implementation method for increasing the sealing performance between the branch pipe 7 and the filling bottle 8: a first conical surface 28 is provided on the inner wall of the branch pipe 7 and at the bottom, a second conical surface 29 is provided at the upper end of the filling bottle 8, a retaining ring 30 is provided at the lower end of the second conical surface 29, and a fastening nut 31 is provided at the connection position between the retaining ring 30 and the branch pipe 7, an exhaust pipe 32 is provided on the outer wall of the backflush pipe 18 and on one side of the external pipe 19, and a vacuum pipe 33 is provided on one side of the exhaust pipe 32.
[0034] Specifically, when connecting the filling bottle 8, the user can insert the second conical surface 29 at the upper end of the filling bottle 8 into the first conical surface 28 at the lower end of the branch pipe 7, and then tighten the fastening nut 31 to tighten the retaining ring 30 inside it, so as to increase the sealing of the connection position between the branch pipe 7 and the filling bottle 8, prevent impurities in the outside air from entering, and facilitate use.
[0035] Please refer to Figure 2 As a further implementation method for controlling the filling pipeline: a first valve 34 is provided at the lower end of the liquid filter 3 and on the outer wall of the connecting pipe 4, a second valve 35 is provided on the outer wall of the backflush pipe 18, a third valve 36 is provided on the air guide pipe 17, a fourth valve 37 is provided on the outer wall of the external pipe 19, a fifth valve 38 is provided on the outer wall of the exhaust pipe 32, a sixth valve 39 is provided on the outer wall of the vacuum pipe 33, a seventh valve 40 is provided on the outer wall of the connecting pipe 4 and at the upper end of the sampling bottle 5, an eighth valve 41, a ninth valve 42 and a tenth valve 43 are respectively provided on the branch pipe 7, and an eleventh valve 44 and a twelfth valve 45 are respectively provided at the upper end of the raw material bottle 1 and on the air guide pipe 17 and the pressing pipe 2.
[0036] Specifically, the user can flexibly control the flow direction of gas and liquid inside the device through the above valves, so as to increase the flexibility of the device when in use.
[0037] In summary, when the overall device is in use: during the filling process, the coarse filter plate 12, the fine filter plate 13 and the activated carbon filter plate 14 can filter the silicon-based precursor material to be filled to remove the impurities inside it and improve the filling accuracy. Later, the user can disassemble the cover 15 by bolts to remove the coarse filter plate 12, the fine filter plate 13 and the activated carbon filter plate 14 from the inside of the card slot 11 to facilitate subsequent cleaning. When it is necessary to introduce inert gas into the raw material bottle 1, the filter element 24 can filter the inert gas before entering the raw material bottle 1 to remove the impurities inside the raw material bottle 1. Internal impurities are removed to further increase the overall purity of the silicon-based precursor material. Later, the user can remove the buckle cover 25 to rotate the filter element 24 to separate the threaded ring 23 from the internal threaded sleeve 22 for easy cleaning. When connecting the filling bottle 8, the user can insert the second conical surface 29 at the upper end of the filling bottle 8 into the first conical surface 28 at the lower end of the branch pipe 7, and then tighten the fastening nut 31 to tighten the retaining ring 30 inside to increase the sealing of the connection position between the branch pipe 7 and the filling bottle 8 to prevent impurities in the outside air from entering, which is convenient for use.
[0038] In all the solutions mentioned above, the connection between two components can be selected according to actual conditions by welding, bolt and nut connection, bolt or screw connection or other well-known connection methods, which are not listed here one by one. In the above, whenever there is a fixed connection, welding is preferably considered. Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
[0039] In all the solutions mentioned above, if there is no clear description about the operation of electrical components, they are all controlled by the controller. Since the devices matched with the controller are common devices, their control principles and circuit connections are well-known and mature technologies. Therefore, their electrical connection relationships and specific circuit structures will not be described in detail here.
[0040] In all the solutions mentioned above, those involving motors can be combined with reducers if necessary. The connection structure and working principle between the motor and the reducer are well-known technologies and will not be described in detail in this utility model.
[0041] In all the solutions mentioned above, those involving the connection between solar panels and batteries can be used in conjunction with essential accessories such as inverters, battery charging controllers, cables, fuses, and brackets. Their control principles and line connections are all well-known and mature technologies. Their electrical connection relationships and specific circuit structures will not be described in detail here.
Claims
1. A silicon-based precursor filling device, comprising: The upper end surface of the raw material bottle (1) is connected to a material pressing pipe (2) on one side, the other end of the material pressing pipe (2) is provided with a liquid filter (3), the lower end of the liquid filter (3) is provided with a connecting pipe (4), the bottom of the connecting pipe (4) is connected to a sampling bottle (5), a filling pipe (6) is provided on the outer wall of the connecting pipe (4), a branch pipe (7) is provided on the outer wall of the filling pipe (6) and at the bottom, the branch pipe (7) is provided in three groups and a filling bottle (8) is provided at the lower end of each group, the liquid filter (3) includes a shell (9), the inner wall of the shell (9) and the two branches are provided with a filling bottle (8) The sides are provided with strip blocks (10), three groups of the strip blocks (10) are provided and the outer walls thereof are all provided with a slot (11), the interiors of the slots (11) are respectively provided with a coarse filter plate (12), a fine filter plate (13) and an activated carbon filter plate (14) for sliding, the upper end surface of the shell (9) is provided with a cover body (15), the lower end surface of the cover body (15) is provided with a top block (16), the top block (16) is in contact with the upper end surfaces of the coarse filter plate (12), the fine filter plate (13) and the activated carbon filter plate (14), and the upper end surface of the raw material bottle (1) and located on one side of the pressing pipe (2) is provided with an air guide pipe (17).
2. The silicon-based precursor filling device according to claim 1, characterized in that: A recoil pipe (18) is provided on the outer wall of the connecting pipe (4) and at the upper end of the filling pipe (6). The other end of the air guide pipe (17) is communicated with the recoil pipe (18). An external pipe (19) is provided on the outer wall of the recoil pipe (18) and at the upper end. The upper end of the external pipe (19) is communicated with a gas filter (20). The gas filter (20) comprises a cylinder (21). An internal threaded sleeve (22) is provided on the inner wall of the cylinder (21) and at the bottom. A threaded ring (23) is provided inside the internal threaded sleeve (22). The threaded ring (23) is threadedly mounted on the internal threaded sleeve (22). A filter element (24) is fixedly provided on the upper end surface of the threaded ring (23). A buckle cover (25) is provided at the upper end of the cylinder (21).
3. The silicon-based precursor filling device according to claim 2, characterized in that: A sealing groove (26) is provided on the bottom of the buckle cover (25), the cylinder (21) is located inside the sealing groove (26) and is threadedly connected to the inner wall of the sealing groove (26), and an air inlet pipe (27) is fixedly provided on the upper end surface of the buckle cover (25).
4. The silicon-based precursor filling device according to claim 1, characterized in that: A first conical surface (28) is provided on the inner wall of the branch pipe (7) and at the bottom thereof, a second conical surface (29) is provided on the upper end of the filling bottle (8), a retaining ring (30) is provided at the lower end of the second conical surface (29), and a fastening nut (31) is provided at the connection position between the retaining ring (30) and the branch pipe (7).
5. The silicon-based precursor filling device according to claim 2, characterized in that: An exhaust pipe (32) is provided on the outer wall of the recoil pipe (18) and on one side of the external pipe (19), and a vacuum pipe (33) is provided on one side of the exhaust pipe (32).
6. The silicon-based precursor filling device according to claim 5, characterized in that: A first valve (34) is provided at the lower end of the liquid filter (3) and on the outer wall of the connecting pipe (4), a second valve (35) is provided on the outer wall of the recoil pipe (18), a third valve (36) is provided on the air guide pipe (17), a fourth valve (37) is provided on the outer wall of the external pipe (19), a fifth valve (38) is provided on the outer wall of the exhaust pipe (32), and a sixth valve (39) is provided on the outer wall of the vacuum pipe (33).
7. The silicon-based precursor filling device according to claim 1, characterized in that: A seventh valve (40) is provided on the outer wall of the connecting tube (4) and at the upper end of the sampling bottle (5), and an eighth valve (41), a ninth valve (42) and a tenth valve (43) are respectively provided on the branch tube (7).
8. The silicon-based precursor filling device according to claim 1, characterized in that: An eleventh valve (44) and a twelfth valve (45) are respectively provided at the upper end of the raw material bottle (1) and located on the air guide pipe (17) and the material pressing pipe (2).