Mask film coating device

Abstract

The utility model belongs to the technical field of mask manufacturing, and particularly discloses a mask coating device which comprises a main body base, a box body, a jig and an evaporation heating unit, the box body is located at the top end of the main body base, and the jig is located in the box body; the evaporation heating unit is installed in the box body, solid AF pills are arranged on the evaporation heating unit, and the evaporation heating unit can enable the AF pills to be heated and evaporated into steam to be coated on a mask plate; and the sputtering end of the magnetron sputtering device is positioned in the box body. According to the mask film coating device, the magnetron sputtering device and the AF film coating structure are integrated on the box body, so that magnetron sputtering film coating and AF film coating can be simultaneously realized on the mask film coating device, and the operation efficiency is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask manufacturing, in particular to a mask coating device. Background Art

[0002] After the mask is produced, some customers may need to apply an anti-fingerprint (AF) coating to the surface. AF coating is a nano-organic fluorine and siloxane ultra-micromatrix chemical material, typically applied by spraying onto common products like architectural glass and mobile phone screens.

[0003] Since the AF film is a layer of nano-organic fluorine and silicone ultra-fine matrix chemical materials, and the mask product base has both glass and Cr metal (precision graphics), the spraying method used in the existing technology is not dense enough and cannot evenly apply the AF film to the mask product, resulting in a significant deterioration in the AF effect.

[0004] Therefore, to improve the uniformity of the AF film, evaporation coating is used. To improve the bonding strength between the AF film and the mask, a layer of silicide is deposited on the mask surface using magnetron sputtering before coating the AF film. This is followed by coating a layer of AF film, which significantly increases the lifespan of the mask after coating with the AF film.

[0005] However, in the prior art, magnetron sputtering and AF coating typically require separate processing within a magnetron sputtering device and an AF coating device, resulting in complex operational processes. Furthermore, the jig used to mount the mask during coating in the prior art coating device is simple in structure and can typically only hold and secure masks of one size, severely limiting its use. Furthermore, during the coating and magnetron sputtering processes, the jig must be manually flipped to rotate the mask, allowing for coating on all sides. This operating method is inefficient and inconvenient. Utility Model Content

[0006] The utility model provides a mask coating device, which aims to combine AF coating and magnetron sputtering coating in one device to coat the mask, thereby improving operation efficiency.

[0007] The utility model is realized by the following technical solution: a mask coating device, comprising a main body base, a box, a fixture and an evaporation heating unit, wherein the box is located at the top of the main body base, and the fixture is located in the box;

[0008] The evaporation heating unit is installed in the box body. Solid AF pills are provided on the evaporation heating unit. The evaporation heating unit can evaporate the AF pills into steam under heat and then coat them on the mask. The sputtering end of the magnetron sputtering device is located inside the box body.

[0009] Compared with the existing technology, this solution has the following advantages and beneficial effects:

[0010] In this solution, the evaporation heating unit can heat the solid AF pills, evaporate them, and then coat them on the product surface. The sputtering end of the magnetron sputtering device is located inside the box. Therefore, the magnetron sputtering device sputters particles through the sputtering end to form a layer of silicide on the surface of the mask plate on the fixture.

[0011] In this solution, the structures of the magnetron sputtering device and the AF coating are integrated on the box, so that magnetron sputtering coating and AF coating can be simultaneously achieved on a mask coating device of this solution, thereby effectively improving the operating efficiency.

[0012] Furthermore, a driving unit for driving the fixture to rotate is provided in the box.

[0013] Beneficial effect: The driving unit in this solution can drive the jig to rotate, and the jig is used to install the mask. Therefore, the mask in this solution will rotate in the box. In this way, during the coating process of the mask, there is no need to manually flip the mask, and the mask can be automatically rotated, thereby automatically coating the mask on all sides.

[0014] Furthermore, the driving units are provided with two groups, which are respectively located on the top wall and the bottom wall of the box body. The driving units are motors, and the output ends of the two groups of motors are respectively connected to the top and the bottom end of the fixture.

[0015] Beneficial effect: In this solution, the driving unit is provided with two groups, which can make the upper and lower ends of the fixture have rotation points, which has a better support effect on the fixture and makes the fixture more stable during rotation.

[0016] Furthermore, the box body is provided with a box door, and the box door can close and open the box body.

[0017] Beneficial effects: The arrangement of the box door facilitates opening or closing the box door, which makes it easy to install and remove the mask when the box is opened, and also facilitates the inspection and replacement of the evaporation heating unit in the box.

[0018] Furthermore, the evaporation heating unit is installed on a side of the cabinet door facing the interior of the cabinet.

[0019] Beneficial effect: In this solution, the evaporation heating unit is installed on the box door, so that after opening the box door, the operator can install or inspect the evaporation heating unit outside the box, and it is convenient to set AF pills on the evaporation heating unit, which makes the operation more convenient.

[0020] Furthermore, the evaporation heating unit includes two heating wires, and a plurality of heat conducting wires are connected between the two heating wires. The heat conducting wires can transfer heat of the heating wires, and the AF pill is arranged on each of the heat conducting wires.

[0021] Beneficial effect: After the heating wire in this solution is energized and heated, the heat can be transferred through the heat conducting wire to heat the AF pellets and evaporate them into steam, which is then coated on the product.

[0022] Furthermore, the heat conducting wire is a copper wire.

[0023] Beneficial effect: The copper wire in this solution has good thermal conductivity, which can make the AF pill evaporate as quickly as possible after being heated to achieve AF coating on the mask.

[0024] Furthermore, the jig includes a jig bracket, two vertical slide rails, a movable transverse slide rail and a fixed transverse slide rail, the two vertical slide rails are respectively vertically connected to the two sides of the jig bracket, the movable transverse slide rail and the fixed transverse slide rail are both arranged perpendicular to the two vertical slide rails, and both ends of the movable transverse slide rail are connected to vertical sliders, and the vertical sliders at both ends of the movable transverse slide rail are respectively slidably matched with the two vertical slide rails;

[0025] The fixed transverse slide rail is connected to the lower part of the jig bracket, and the movable transverse slide rail and the fixed transverse slide rail are both equipped with two symmetrically arranged L-shaped pads for horizontal sliding cooperation; the vertical slider and the L-shaped pad are both provided with fixing parts for limiting their sliding.

[0026] Beneficial effect: In the jig of this solution, the movable horizontal slide rail slides along the two vertical slide rails to adjust the distance in the Y direction between the L-shaped pads located above and below, and the two L-shaped pads on the movable horizontal slide rail and the two L-shaped pads on the fixed horizontal slide rail can slide horizontally to adjust the distance in the X direction. In this way, adaptive adjustment can be made according to different sizes of mask plates, thereby expanding the scope of use of the jig and being able to clamp and fix mask plates with different sizes.

[0027] Furthermore, the movable transverse slide rail and the fixed transverse slide rail are both slidably fitted with an L-shaped pad, and the L-shaped pad is located between the two L-shaped pads. The L-shaped pad is also provided with a fixing part for limiting its sliding.

[0028] Beneficial effect: This solution also provides an I-shaped pad, which can enhance the limiting support function of the mask and ensure the stability and firmness of the mask when installed on the jig.

[0029] Furthermore, the ends of the I-shaped pad and the L-shaped pad that are in contact with the mask are both provided with V-shaped grooves.

[0030] Beneficial effect: The V-shaped groove opened on the pad in this solution can reduce the contact area between the pad and the mask product while ensuring strength, thereby reducing contamination of the edge of the mask substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the accompanying drawings:

[0032] Figure 1 This is a structural schematic diagram of an embodiment of a mask coating device of the present invention;

[0033] Figure 2 This is a front view of a fixture in an embodiment of a mask coating device of the present invention;

[0034] Figure 3 It is a three-dimensional diagram of an L-shaped spacer;

[0035] Figure 4 It is a three-dimensional diagram of a straight-line pad.

[0036] Markings and corresponding parts names in the accompanying drawings:

[0037] 1. Main base; 101. Box body; 102. Box door; 2. Magnetron sputtering electrode; 3. Motor; 4. Magnetron sputtering target; 5. Fixture; 6. Heating wire; 7. Copper wire; 8. AF pellet; 9. Hinge; 10. Fixture bracket; 11. Horizontal slider; 12. L-shaped pad; 13. Vertical slide rail; 14. Vertical slider; 15. Movable horizontal slide rail; 16. Fixed horizontal slide rail; 17. I-shaped pad; 18. V-shaped groove; 19. Bolt hole. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The schematic implementation methods of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0039] like Figure 1-Figure 2As shown, this embodiment provides a mask coating device, including a main base 1, a box 101, a fixture 5 and an evaporation heating unit. The box 101 is located at the top of the main base 1 and is integrally formed with the main base 1. The fixture 5 is located in the box 101.

[0040] The evaporation heating unit is installed in the box 101. The evaporation heating unit is provided with a solid AF pill 8. The evaporation heating unit can evaporate the AF pill 8 into steam under heat and then coat it on the mask. Specifically:

[0041] In this embodiment, a driving unit for driving the jig 5 to rotate is provided in the box 101, and there are two groups of driving units, which are respectively located on the top wall and bottom wall of the box 101. In this embodiment, the driving unit is a motor 3, and the output ends of the two groups of motors 3 are respectively threadedly connected to the top and bottom ends of the jig 5 or connected through positioning pins or couplings.

[0042] The two motors 3 can drive the jig 5 to rotate automatically and uniformly, thereby facilitating automatic and uniform coating of the mask.

[0043] In this embodiment, a door 102 is provided on the box body 101. The door 102 can close and open the box body 101. The door 102 and the box body 101 can be hinged by a hinge 9. In the actual manufacturing process, a driving mechanism for driving the door 102 to automatically open or close can be provided on the box body 101. For example, when the door 102 is hingedly connected to the box body 101, the driving mechanism can be a driving motor and a gear mechanism. The driving motor and the gear mechanism cooperate to drive the door 102 to rotate, thereby achieving the function of automatically opening or closing the door 102.

[0044] In another embodiment, the door 102 can be slidably connected to the housing 101, thereby opening or closing the housing 101 by sliding the door 102. In this case, the drive mechanism can rotate the telescopic rod mechanism, and the telescopic rod mechanism can extend and retract to drive the door 102 to slide open or close the housing 101. The connection between the door 102 and the housing 101 and the drive mechanism that activates the opening or closing of the door 102 are prior art and will not be described in detail here. When the door 102 closes the housing 101, a closed chamber is formed.

[0045] In this embodiment, the evaporation heating unit is installed on the side of the box door 102 facing the inside of the box body 101. In this embodiment, the evaporation heating unit includes two heating wires 6. The heating wires 6 have a metal shell on the outside. The heating wires 6 are respectively installed on the upper and lower parts of the box door 102 through the metal shell. Three heat conducting wires are connected between the two heating wires 6. The heat conducting wires can transfer heat from the heating wires 6. A solid AF pill 8 is provided on each heat conducting wire. In this embodiment, the heat conducting wire is a copper wire 7. The three copper wires 7 are distributed at intervals, and each copper wire 7 is passed through three solid AF pills 8 distributed at intervals.

[0046] In this embodiment, the sputtering end of the magnetron sputtering device is located inside the box 101. The sputtering end of the magnetron sputtering device includes a target material 4 and two magnetron sputtering electrodes 2. The two magnetron sputtering electrodes 2 are installed on the top and bottom walls on the right side of the box 101, and the target material 4 is located between the two electrodes.

[0047] like Figure 2 As shown, in this embodiment, the jig 5 includes a jig bracket 10, two vertical slide rails 13, a movable transverse slide rail 15 and a fixed transverse slide rail 16. The two vertical slide rails 13 are vertically connected to both sides of the jig bracket 10 by bolts, and the movable transverse slide rail 15 and the fixed transverse slide rail 16 are both perpendicularly arranged to the two vertical slide rails 13. In this embodiment, both ends of the movable transverse slide rail 15 are connected with vertical sliders 14. The vertical sliders 14 at both ends of the movable transverse slide rail 15 are respectively slidably matched with the two vertical slide rails 13, and the fixed transverse slide rail 16 is fixedly connected to the lower part of the jig bracket 10 by bolts.

[0048] The movable transverse slide 15 and the fixed transverse slide 16 are both horizontally slidably fitted with two L-shaped pads 12 arranged symmetrically with each other. In this embodiment, the movable transverse slide 15 and the fixed transverse slide 16 are both slidably fitted with a straight-line pad 17, and the straight-line pad 17 is located between the two L-shaped pads 12; the straight-line pad 17, the vertical slider 14 and the L-shaped pad 12 are all provided with fixings for limiting their sliding. In this embodiment, the straight-line pad 17 and the L-shaped pad 12 are both fixedly connected to the transverse slider 11, and the fixings are bolts. The transverse slider 11 on the straight-line pad 17, the vertical slider 14 and the transverse slider 11 on the L-shaped pad 12 are all provided with multiple bolt holes 19. When the position adjustment of the straight-line pad 17, the vertical slider 14 and the L-shaped pad 12 is completed, the straight-line pad 17, the vertical slider 14 and the L-shaped pad 12 can be locked and fixed by tightening the bolts in the bolt holes 19.

[0049] Combine Figure 3 and Figure 4 As shown, in another embodiment, a V-shaped groove 18 is formed on one end of the I-shaped pad and the L-shaped pad 12 that contacts the mask.

[0050] The fixture 5 in this embodiment can achieve automatic coating of masks of all sizes below 813*1379*4.8 by adjusting the positions of the pads in the X and Y directions.

[0051] The specific implementation process is as follows:

[0052] The top and bottom of the fixture bracket 10 are connected to the output end of the motor 3 through positioning pins, so that the fixture bracket 10 is fixed in the cavity of the coating box 101.

[0053] Adjust the positions of the L-shaped pads 12 and the I-shaped pads 17 on the fixed transverse rail 16 and the movable transverse rail 15 according to the size of the mask product so that the product can be placed between the two symmetrically arranged L-shaped pads 12 on the fixed transverse rail 16 and stuck in the V-shaped groove 18. Then, tighten the bolts to prevent the mask from moving in the X direction.

[0054] Then, the movable horizontal rail 15 on the jig 5 is slid downward along the vertical rail 13 via the vertical sliders 14 at both ends to adjust the size until the L-shaped pads 12 and the V-shaped grooves 18 on the straight pads 17 on the movable horizontal rail 15 engage the upper end of the mask. The bolts on the vertical sliders 14 and horizontal sliders 11 are then tightened to prevent movement in the Y direction. This completely secures the mask to the jig 5.

[0055] Then, 9 AF pellets 8 (solid) are evenly placed on the copper wire 7 of the evaporation heating device. After the magnetron sputtering target 4 is installed, the box door 102 is closed to make the box body 101 closed, and the inside of the box body 101 is vacuumed by a vacuum pump.

[0056] The motor 3 inside the housing 101 is activated, causing the mask product to rotate at a constant speed within the cavity of the housing 101 along with the jig 5. The magnetron sputtering device is turned on, and argon gas is introduced. Under vacuum conditions, the magnetron sputtering electrode 2 creates an electric field, which ionizes the argon gas into argon ions and electrons. The argon ions are then accelerated by the electric field and bombard the target material 4, sputtering molecules, atoms, ions, and electrons from the target material 4's surface. The sputtered particles, carrying a certain amount of kinetic energy, are guided in a specific direction by the magnetic field toward the product surface, forming a silicide coating.

[0057] Finally, the magnetron sputtering device is turned off, and the heating wire 6 is energized to generate heat, and the AF pill 8 (solid state) is heated and evaporated into steam and then coated on the surface of the product to form a dense AF film. Since the mask rotates at a constant speed along with the fixture 5 while evaporating the film, the uniformity of the coating can be significantly improved.

[0058] 1. The utility model can automatically coat all sizes of masks below 813*1379*4.8;

[0059] 2. In this embodiment, all areas in contact with the mask product are made of anti-static Teflon material, which has high strength and insulation properties and will not generate static electricity and cause damage to the product;

[0060] 3. The I-shaped pad 17 and the L-shaped pad 12 of the present invention are both provided with a V-shaped groove 18, which can reduce the contact area between the pad and the mask product while ensuring strength, thereby reducing contamination of the edge of the mask substrate;

[0061] 4. The utility model adopts a method combining evaporation coating and magnetron sputtering coating, which can make the water drop angle of the AF film on the surface of the mask product greater than 115 degrees and the fluctuation does not exceed 1%;

[0062] 5. After the mask is coated with AF film on the surface, it can resist friction and anti-static 7KV, effectively extending the service life of the mask;

[0063] 6. The utility model is simple and convenient to operate, wherein the fixture bracket 10 can be made of high-strength stainless steel, and the coating process of the product is safe and reliable.

[0064] It should be noted that the above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

[0065] In the description of the present invention, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0066] In the description of this document, the terms "up", "down", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only used to illustrate the relative position relationship between the various components or components, and do not particularly limit the specific installation orientation of the various components or components.

[0067] In the descriptions of this document, some terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0068] In this document, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0069] The structures, proportions, sizes, etc. drawn in the drawings in this application are only used to match the contents disclosed in this technical briefing document for those skilled in the art to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.

[0070] The terms used in this document are those commonly used in the art currently in consideration of the functions of the present disclosure, but these terms may vary according to the intentions of those skilled in the art, precedents, or new technologies in the art. In addition, specific terms may be selected by the applicant, and in such cases, their detailed meanings will be described in the detailed description of the present disclosure. Therefore, the terms used in the document should not be understood as simple names, but rather as a general description based on the meaning of the terms and the present disclosure.

[0071] Flowcharts or text are used in this document to illustrate the operational steps performed according to the embodiments of the present application. It should be understood that the operational steps in the embodiments of the present application are not necessarily performed in the exact order in which they are described. Instead, the various steps may be processed in reverse order or simultaneously, as needed. Furthermore, other operations may be added to these processes, or one or more operations may be removed from these processes.

[0072] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A mask coating device, characterized in that: It includes a main body base, a box body, a fixture and an evaporation heating unit, wherein the box body is located at the top of the main body base, and the fixture is located in the box body; The evaporation heating unit is installed in the box body. Solid AF pills are provided on the evaporation heating unit. The evaporation heating unit can evaporate the AF pills into steam under heat and then coat them on the mask. The sputtering end of the magnetron sputtering device is located inside the box body.

2. The mask coating device according to claim 1, characterized in that: A driving unit for driving the fixture to rotate is provided in the box.

3. The mask coating device according to claim 2, characterized in that: There are two groups of driving units, which are respectively located on the top wall and bottom wall of the box. The driving units are motors, and the output ends of the two groups of motors are respectively connected to the top end and bottom end of the fixture.

4. The mask coating device according to claim 1, characterized in that: The box body is provided with a box door, and the box door can close and open the box body.

5. The mask coating device according to claim 4, characterized in that: The evaporation heating unit is installed on a side of the cabinet door facing the interior of the cabinet.

6. The mask coating device according to claim 1, characterized in that: The evaporation heating unit includes two heating wires, and a plurality of heat conducting wires are connected between the two heating wires. The heat conducting wires can transfer heat from the heating wires, and the AF pill is arranged on each of the heat conducting wires.

7. The mask coating device according to claim 6, characterized in that: The heat conducting wire is a copper wire.

8. The mask coating device according to any one of claims 1 to 7, characterized in that: The jig includes a jig bracket, two vertical slide rails, a movable transverse slide rail and a fixed transverse slide rail, the two vertical slide rails are respectively vertically connected to the two sides of the jig bracket, the movable transverse slide rail and the fixed transverse slide rail are both arranged perpendicular to the two vertical slide rails, and both ends of the movable transverse slide rail are connected to vertical sliders, and the vertical sliders at both ends of the movable transverse slide rail are respectively slidably matched with the two vertical slide rails; The fixed transverse slide rail is connected to the lower part of the jig bracket, and the movable transverse slide rail and the fixed transverse slide rail are both equipped with two symmetrically arranged L-shaped pads for horizontal sliding cooperation; the vertical slider and the L-shaped pad are both provided with fixing parts for limiting their sliding.

9. The mask coating device according to claim 8, characterized in that: The movable transverse slide rail and the fixed transverse slide rail are both slidably fitted with an L-shaped pad, and the L-shaped pad is located between the two L-shaped pads. The L-shaped pad is also provided with a fixing piece for limiting its sliding.

10. The mask coating device according to claim 9, characterized in that: The ends of the I-shaped pad and the L-shaped pad in contact with the mask are both provided with V-shaped grooves.

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