Coating equipment

Abstract

The utility model provides coating equipment. The coating equipment comprises a cavity and a power supply module, the cavity comprises a cavity main body and cavity doors arranged on the cavity main body, the cavity main body and the cavity doors are enclosed to form a coating space, each cavity door can rotate relative to the cavity main body to open or close the coating space, and one side, close to the coating space, of each cavity door is used for installing a target material and a cathode connected with the target material. The power supply module is arranged on the cavity main body and is used for being electrically connected with the cathode. The power module is arranged on the cavity main body, so that the distance from the negative electrode to the negative electrode of the power module is reduced, the energy loss and the reaction time on a path are reduced, the weight of the power module can be completely borne by the cavity main body, no extra load is added to the hinge of the cavity door, the abrasion of the hinge is reduced, and the service life of the hinge is prolonged. And the disassembly of the cathode is simpler.

Description

Technical Field

[0001] The present application belongs to the field of film coating technology, and specifically relates to a film coating device. Background Art

[0002] Coating technology is widely used in various fields, including aerospace, new energy vehicles, and circuit boards. High-power pulsed magnetron sputtering (HiPIMS) offers the advantages of high ionization rates and the ease with which dense, smooth, and uniform high-quality thin films can be produced over large areas. However, current high-power pulsed magnetron sputtering equipment typically houses the power supply in a separate cabinet, which is then connected to the cathode of the target material via wires. Due to the high discharge frequency and short discharge time of high-power pulsed power supplies, significant energy loss occurs along the current transmission path. Utility Model Content

[0003] In view of this, the present application provides a coating device, which includes:

[0004] A chamber, comprising a chamber body and a chamber door mounted on the chamber body, wherein the chamber body and the chamber door enclose a coating space, each of the chamber doors being rotatable relative to the chamber body to open or close the coating space, and a side of the chamber door close to the coating space being used for mounting a target material and a cathode connected to the target material;

[0005] A power supply module is arranged on the cavity body and is used for electrically connecting to the cathode.

[0006] The coating equipment provided in the present application enables the power module to be installed on the cavity body, which first makes the relative position of the power module and the cathode shorter, thereby reducing the wire distance from the power module to the cathode, thereby reducing the energy loss in the transmission path and reducing the reaction time of the current.

[0007] Secondly, the coating equipment provided by this application places the heavier power module on the cavity body instead of on the cavity door. While ensuring that the distance between the power module and the cathode is short, the weight of the power module can be entirely borne by the cavity body, without adding additional load to the hinge of the cavity door, thereby preventing the hinge from wearing out faster and improving the stability of the door opening and closing. Moreover, placing the power module on the cavity body provides more space than the cavity door, and the power module capacity is more expandable. And when disassembling the cathode, the cathode can be disassembled by disconnecting the wire connected to the power module, reducing the difficulty of operation.

[0008] In summary, the present application sets the power module on the cavity body, which not only reduces the distance from the negative pole to the cathode of the power module, reduces the energy loss and reaction time on the path, but also the weight of the power module can be borne entirely by the cavity body, and will not add additional load to the hinge of the cavity door, thereby reducing the wear of the hinge and making the disassembly of the cathode simpler.

[0009] The chamber body includes a top plate and a bottom plate that are arranged opposite to each other, the chamber door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, and the coating equipment also includes a cantilever assembly and a connecting piece, the cantilever assembly is fixed to the top plate and can rotate relative to the top plate, the power module is slidably and rotatably connected to the cantilever assembly, one end of the connecting piece is fixed to the power module, and the other end is fixed to the chamber door;

[0010] When the cavity door rotates relative to the cavity body, the power module is driven to rotate synchronously through the connecting piece, and the power module drives the cantilever assembly to rotate relative to the top plate, and the power module also slides and rotates relative to the cantilever assembly.

[0011] Among them, the cantilever assembly includes a boom base, a boom slide rail, a pulley, and a matching part. The boom base is fixed to the top plate, the boom slide rail is mounted on the boom base and rotatably connected to the boom base, one end of the pulley is slidably connected to the boom slide rail, and the other end of the pulley is rotatably connected to the matching part, and the matching part is fixedly connected to the power module.

[0012] In which, the boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall, two side walls, and two bottom walls away from the power module, the two side walls are bent and connected to the opposite sides of the top wall, each side of the side wall away from the top wall is bent and connected to one bottom wall, and the two bottom walls are close to each other and a gap is set, the top wall, the two side walls, and the two bottom walls are surrounded to form a sliding space, one end of the pulley is set in the sliding space, and the other end of the pulley passes through the gap between the two bottom walls and is rotatably connected to the mating part.

[0013] In which, the boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall and a bottom wall arranged opposite to each other, and a partition wall arranged between the top wall and the bottom wall, the top wall is farther away from the power module than the bottom wall, and the top wall, the bottom wall, and the partition wall are arranged to form two separated sliding spaces; the pulley includes a first sub-pulley, a second sub-pulley, and a connecting part, the first sub-pulley is arranged in one of the sliding spaces, and the second sub-pulley is arranged in the other sliding space, one end of the connecting part is connected to the first sub-pulley and the second sub-pulley, and the other end of the connecting part is rotatably connected to the mating part.

[0014] The cantilever assembly further includes a limiter, which is fixed to the sliding portion. The cantilever assembly satisfies at least one of the following conditions:

[0015] When the chamber door rotates relative to the chamber body to close the coating space, the pulley abuts against the limiting member;

[0016] When the chamber door rotates relative to the chamber body at a preset angle to open the coating space, the pulley abuts against the limiting member.

[0017] The cavity body includes a top plate and a bottom plate that are arranged opposite to each other, the cavity door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, and the power module is fixed to the top plate.

[0018] Wherein, the coating equipment further includes an electrical connector, one end of which is fixedly connected to the power module, and the other end of which is used to connect to the cathode.

[0019] In which, the coating equipment also includes an electrical connector, one end of which is detachably plugged into the power module, and the other end is connected to the cathode. When the chamber door rotates relative to the chamber body to open the coating space, one end of the electrical connector is separated from the power module; when the chamber door rotates relative to the chamber body to close the coating space, one end of the electrical connector is plugged into the power module.

[0020] In which, the coating equipment includes multiple power modules and multiple electrical connectors, and the side of the chamber door close to the coating space is used to correspond to multiple targets and multiple cathodes, each cathode is set on one target, one end of each electrical connector is connected to one power module, and the other end is connected to the cathode, and the lengths of multiple electrical connectors are equal. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments of the present application will be described below.

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of a coating device in one embodiment of the present application.

[0023] Figure 2 for Figure 1 A top view of the coating equipment is shown.

[0024] Figure 3 for Figure 1 A front view of the coating equipment is shown.

[0025] Figure 4 for Figure 1 Exploded view of the coating equipment shown.

[0026] Figure 5 for Figure 3 A partial enlarged view of the coating equipment shown.

[0027] Figure 6 Schematic diagram of the three-dimensional structure of a connector in one embodiment of the present application.

[0028] Figure 7 Schematic diagram of the three-dimensional structure of the cantilever assembly in one embodiment of the present application.

[0029] Figure 8 for Figure 7 A schematic cross-sectional view of the cantilever assembly is shown.

[0030] Figure 9 for Figure 8 The diagram shows a partial enlarged cross-sectional view of the pulley and the mating part in the cantilever assembly.

[0031] Figure 10 This is a partial three-dimensional structural diagram of the cantilever assembly and the power module in one embodiment of the present application.

[0032] Figure 11 for Figure 7 Another perspective structural diagram of the cantilever assembly is shown.

[0033] Figure 12 for Figure 8 The diagram shows a partial enlarged cross-sectional view of the boom base and the rotating part of the cantilever assembly.

[0034] Figure 13 This is a schematic diagram of the three-dimensional structure of the cantilever assembly in another embodiment of the present application.

[0035] Figure 14 for Figure 13Another perspective structural diagram of the cantilever assembly is shown.

[0036] Figure 15 Schematic diagram of the three-dimensional structure of a pulley in one embodiment of the present application.

[0037] Figure 16 This is a schematic diagram of the three-dimensional structure of the cantilever assembly and the limiting member when they cooperate in another embodiment of the present application.

[0038] Figure 17 Schematic diagram of the three-dimensional structure of the limiting member in one embodiment of the present application.

[0039] Figure 18 This is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application.

[0040] Figure 19 for Figure 18 A top view of the coating equipment is shown.

[0041] Figure 20 for Figure 18 A front view of the coating equipment is shown.

[0042] Figure 21 This is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application.

[0043] Figure 22 for Figure 21 A top view of the coating equipment is shown.

[0044] Figure 23 for Figure 21 A front view of the coating equipment is shown.

[0045] Description of labels:

[0046] Coating equipment-1, chamber-10, chamber body-11, chamber door-12, hinge-120, coating space-13, top plate-14, bottom plate-15, side plate-16, column-17, front door-18, insulation-19, power module-20, thickening part-21, cantilever assembly-30, cantilever base-31, third step surface-310, cantilever slide rail-32, rotating part-320, first step surface-3201, second step surface-3202, shaft slot-3203, sliding part-321, top wall-3210, bottom wall-3211, side wall-3 212, partition wall-3213, sliding space-322, pulley-33, first sub-pulley-331, second sub-pulley-332, connecting part-333, matching part-34, top cover-340, bottom cover-341, rotating structure-342, limiting part-35, first sub-limiting part-351, second sub-limiting part-352, limiting groove-353, screw-354, fixing plate-355, buffer part-356, reinforcing rib-36, bearing-37, connecting part-40, avoidance groove-41, electrical connecting part-50, cathode-60, molecular pump-70. DETAILED DESCRIPTION

[0047] The following are preferred implementations of the present application. It should be noted that ordinary technicians in this technical field can make several improvements and modifications without departing from the principles of the present application. These improvements and modifications are also considered to be within the scope of protection of the present application.

[0048] Before introducing the technical solutions provided by this application, the technical problems in related technologies are introduced in detail.

[0049] Coating technology is widely used in aerospace, new energy vehicles, circuit boards, magnetic materials, sensors, silicone rubber, seals, medical devices, and other fields. Coating equipment of different specifications and types can be selected according to process requirements. Coating equipment can be mainly divided into evaporation coating, magnetron sputtering coating, and ion plating. High-power impulse magnetron sputtering (HiPIMS), a new physical vapor deposition (PVD) technology, has attracted great attention in domestic and international markets and academia due to its high ionization rate and ease of achieving dense, smooth, and uniform large-area high-quality films.

[0050] The power supply of high-power pulsed magnetron sputtering coating equipment uses a pulsed power supply with a rectangular wave voltage instead of a traditional DC power supply for magnetron sputtering deposition, which can effectively suppress the generation of arcs and eliminate the resulting film defects. At the same time, it has a series of significant advantages such as increasing the sputtering deposition rate and reducing the deposition temperature.

[0051] However, current high-power pulsed magnetron sputtering coating machines typically house the power supply in a separate cabinet, which is then electrically connected to the cathode of the target material via wires. This results in a long current transmission path, or wire length. Because high-power pulsed power supplies discharge frequently and over short periods of time, long wires result in significant energy loss and prolonged response times along the current transmission path.

[0052] In addition, the coating equipment usually includes a cavity body and a cavity door. Some coating equipment places the power supply on the cavity door of the coating equipment. Although this reduces the energy loss and reaction time along the path, due to the heavy weight of the high-power power supply module, during the cavity door opening and closing process, the load is entirely borne on the hinge connecting the cavity door and the cavity body. Affected by inertia, the cavity door has poor stability and is prone to accelerated wear of the hinge.

[0053] At the same time, the limited space in the cavity door, which in turn limits the space for the power module, restricts the expandability of the power supply. Furthermore, when the power module is mounted on the cavity door, increasing the power supply capacity requires a thicker cavity and larger, more numerous hinges to support the larger and heavier power module.

[0054] Moreover, when the power module is installed on the chamber door, if the target material needs to be replaced and the cathode needs to be removed, all the power modules installed on the outside of the chamber door need to be removed before the cathode can be removed, which is a complicated and tedious operation.

[0055] In view of this, in order to solve the above problems, this application provides a coating device. Please refer to Figure 1-Figure 5 , Figure 1 This is a schematic diagram of the three-dimensional structure of a coating device in one embodiment of the present application. Figure 2 for Figure 1 A top view of the coating equipment is shown.

[0056] Figure 3 for Figure 1 A front view of the coating equipment is shown. Figure 4 for Figure 1 Exploded view of the coating equipment shown. Figure 5 for Figure 3 A partial enlarged view of the coating equipment shown.

[0057] The coating apparatus 1 provided in this embodiment includes a chamber 10 and a power module 20. The chamber 10 includes a chamber body 11 and a chamber door 12 mounted on the chamber body 11. The chamber body 11 and the chamber door 12 enclose a coating space 13. Each chamber door 12 can rotate relative to the chamber body 11 to open or close the coating space 13. The side of the chamber door 12 adjacent to the coating space 13 is used to mount a target and a cathode 60 connected to the target. The power module 20 is mounted on the chamber body 11 and is electrically connected to the cathode 60.

[0058] The coating equipment 1 provided in this embodiment is mainly used for coating. During coating, the target material is usually installed on the inner side of the chamber door 12 of the coating equipment 1, and then the component to be coated is placed in the coating equipment 1, and then charged particles are introduced. Under the action of the electric field, the charged particles bombard the target material, causing the target material to sputter and deposit onto the surface of the component, thereby forming a uniform coating layer on the surface of the component, thereby enabling the coated component to obtain better physical properties.

[0059] The coating device 1 provided in this embodiment is a high-power pulsed magnetron sputtering coating device 1. Of course, in other embodiments, the coating device 1 can also be other types of coating devices 1, such as an evaporative coating device 1. This embodiment is only schematically illustrated using a high-power pulsed magnetron sputtering coating device 1.

[0060] The coating apparatus 1 primarily comprises a chamber 10 and a power supply module 20. The chamber 10 comprises a chamber body 11 and a chamber door 12 mounted on the chamber body 11. The coating apparatus 1 comprises an external housing, wherein the chamber body 11 is the portion of the external housing excluding the chamber door 12, front door 18, and other components. The chamber door 12 is a door panel mounted on the chamber body 11 and can rotate relative to the chamber body 11 to open or close the chamber door 12.

[0061] When the chamber door 12 is closed, the chamber body 11 and the chamber door 12 can together enclose a closed coating space 13. Furthermore, since the chamber door 12 can rotate relative to the chamber body 11, the coating space 13 is also opened or closed when the chamber door 12 is opened or closed. Furthermore, the side of the chamber door 12 that is closest to the coating space 13, i.e., the side of the chamber door 12 that faces the interior of the chamber 10, can be used to secure the cathode 60. The target can then be mounted on the cathode 60, thereby achieving the goal of mounting the target on the side of the chamber door 12 that is closest to the coating space 13, i.e., mounting the target on the inside of the chamber door 12.

[0062] Optionally, since the target material and cathode 60 are disposed on the inner side of the chamber door 12, a through hole can be provided in the chamber door 12 in this embodiment. A conductive structure such as a copper rod or a wire can be disposed in the through hole. One end of the conductive structure is connected to the cathode 60, and the other end is subsequently used to connect to the power module 20. Further optionally, an annular insulating member 19 is typically provided between the conductive structure and the inner wall of the through hole to insulate the conductive structure from the chamber door 12. That is, by disposing the insulating member 19 between the inner wall of the through hole and the conductive structure, the two are separated and insulated from each other. The insulating member 19 includes but is not limited to an annular insulating flange, rubber, etc.

[0063] Optionally, the cavity 10 may be in various shapes such as a cuboid, a prism, etc., and this embodiment is only schematically illustrated using a cuboid. Figure 3 As shown, the chamber body 11 includes a top plate 14, a bottom plate 15, at least one side plate 16, and a plurality of columns 17. The four columns 17 are respectively arranged at the four corners of the top plate 14 and the bottom plate 15, and jointly support the top plate 14 and the bottom plate 15. The top plate 14, the bottom plate 15, the side plates 16, and the chamber door 12 together enclose a coating space 13 inside the chamber 10.

[0064] The bottom plate 15 is the bottom surface of the chamber 10, which is used to subsequently install and fix the coating device 1 on the support frame of the coating device 1. The support frame can also be used to place components such as the controller. The top plate 14 is arranged opposite to the bottom plate 15 and is usually arranged on the top of the coating device 1. In other words, Figure 3 The upper plate of the coating device 1 is a top plate 14 , and the lower plate is a bottom plate 15 .

[0065] The pillars 17 are components in the chamber 10 for supporting the entire chamber 10 and are disposed between and connected to the top plate 14 and the bottom plate 15. The chamber door 12 is rotatably connected to the pillars 17 via hinges 120 so that the chamber door 12 is disposed between the top plate 14 and the bottom plate 15.

[0066] One of the side panels 16 of the cavity body 11 is used to install the molecular pump 70, such as Figure 3 On the middle left side is the molecular pump 70, which is used to evacuate the coating space 13 to create a vacuum environment. At the same time, a cabinet can be provided outside the molecular pump 70 to accommodate and protect the vacuumed molecular pump 70, and even other components can be provided.

[0067] Further optionally, the cavity 10 has two cavity doors 12 and a front door 18, and the two cavity doors 12 are arranged opposite to each other, that is, Figure 3The coating apparatus 1 shown has a chamber door 12 at the front and rear, and a front door 18 on the right. The side panels 16, chamber doors 12, and front door 18 together form the sidewall 3212 of the chamber 10. The inner sides of the two chamber doors 12 are used to mount the target and cathode 60, while the front door 18 is used to mount other components. Both chamber doors 12 and the front door 18 are rotatably connected to the pillar 17 via hinges 120. Each individual door panel can rotate relative to the chamber body 11 to open or close the coating space 13.

[0068] The power module 20 is typically mounted on the chamber body 11, with the negative electrode of the power module 20 electrically connected to the cathode 60, and the positive electrode of the power module 20 electrically connected to the chamber door 12. The power module 20 is used to power the entire coating apparatus 1 during the coating process. During coating, the negative electrode of the power module 20 is electrically connected to the cathode 60, and the cathode 60 is in direct contact with the target material to achieve electrical connection, thereby achieving electrical connection between the negative electrode of the power module 20 and the target material. The negative electrode of the power module 20 is electrically connected to the target material, and the positive electrode is electrically connected to the chamber 10, so that an electric field is formed between the chamber 10 and the target material.

[0069] Optionally, the number of power modules 20 is not fixed, and the coating apparatus 1 may have one or more power modules 20. This embodiment is only schematically illustrated with multiple power modules 20. Further, optionally, multiple power modules 20 may be arranged in groups. For example, when there are six power modules 20, three power modules 20 may be grouped together, and the power modules 20 may be divided into two groups. Each group of power modules 20 further includes a housing for accommodating multiple power modules 20, which protects the power modules 20 and allows the multiple power modules 20 to form a whole.

[0070] In this embodiment, the power module 20 can be installed in the chamber body 11. The negative electrode of the power module 20 is electrically connected to the cathode 60, and the positive electrode is electrically connected to the chamber 10, so that an electric field is formed between the chamber 10 and the target. The power module 20 is used to power the entire coating device 1 during the coating process. During coating, the negative electrode of the power module 20 is electrically connected to the cathode 60, and the cathode 60 is directly in contact with the target to achieve electrical connection, thereby achieving electrical connection between the negative electrode of the power module 20 and the target.

[0071] As can be seen from the above, in the coating apparatus 1 of the related art, the power supply module 20 is separately placed in a cabinet far from the chamber 10 and then connected to the cathode 60 via a wire. The wire is long, resulting in high energy loss along the path and a long reaction time. Based on this, in this embodiment, the power supply module 20 can be installed on the chamber body 11.

[0072] First, compared with the method of installing the power module 20 in a separate cabinet and electrically connecting the cathode 60 through a wire, the coating equipment 1 provided in this embodiment makes the relative position of the power module 20 and the cathode 60 shorter, which can reduce the wire distance from the power module 20 to the cathode 60, thereby reducing the energy loss on the transmission path and reducing the reaction time of the current.

[0073] Secondly, in the related art, some coating equipment 1 also chooses to install the power module 20 on the door panel in order to reduce the distance between the cathode 60 and the negative pole of the power supply, but this will cause the hinge 120 to be loaded with a large load and wear faster, and limit the expansion of the capacity of the power module 20. In this embodiment, the heavier power module 20 is set on the cavity body 11 instead of on the cavity door 12. While ensuring that the distance from the power module 20 to the cathode 60 is short, the weight of the power module 20 can be fully borne by the cavity body 11, and no additional load will be added to the hinge 120 of the cavity door 12, thereby not causing the hinge 120 to wear faster, and the stability of opening and closing the door is better. Moreover, setting the power module 20 on the cavity body 11 provides a larger space than the cavity door 12, and the capacity of the power module 20 is more expandable. And when disassembling the cathode 60, the cathode 60 can be disassembled by disconnecting the wire connected to the power module 20, which reduces the difficulty of operation.

[0074] In summary, this embodiment sets the power module 20 on the cavity body 11, which not only reduces the distance from the negative pole of the power module 20 to the cathode 60, and reduces the energy loss and reaction time on the path, but also the weight of the power module 20 can be fully borne by the cavity body 11, and will not add additional load to the hinge 120 of the cavity door 12, thereby reducing the wear of the hinge 120 and making the disassembly of the cathode 60 simpler.

[0075] Please refer to Figures 1-6 , Figure 6 The figure is a schematic diagram of the three-dimensional structure of the connector in one embodiment of the present application. In this embodiment, the chamber body 11 includes a top plate 14 and a bottom plate 15 arranged opposite each other, the chamber door 12 is arranged between the top plate 14 and the bottom plate 15, and the bottom plate 15 is used to be installed on a support frame. The coating equipment 1 also includes a cantilever assembly 30 and a connector 40. The cantilever assembly 30 is fixed to the top plate 14 and can rotate relative to the top plate 14. The power module 20 is slidably and rotatably connected to the cantilever assembly 30. One end of the connector 40 is fixed to the power module 20, and the other end is fixed to the chamber door 12.

[0076] When the cavity door 12 rotates relative to the cavity body 11, the power module 20 is driven to rotate synchronously through the connecting member 40, and the power module 20 drives the cantilever assembly 30 to rotate relative to the top plate 14, and the power module 20 also slides and rotates relative to the cantilever assembly 30.

[0077] From the above, it can be seen that the chamber body 11 has a top plate 14 and a bottom plate 15, and the chamber door 12 is installed on the column 17 between the top plate 14 and the bottom plate 15. In this embodiment, the coating equipment 1 also includes a cantilever assembly 30 and a connector 40. The cantilever assembly 30 is a component used to bear the weight of the power module 20 and suspend the power module 20 above the chamber 10. The setting of the cantilever assembly 30 allows various movements between the power module 20 and the cantilever assembly 30, as well as between the cantilever assembly 30 and the top plate 14. The connector 40 is used to connect the power module 20 and the chamber door 12 to connect the power module 20 and the chamber door 12 into one.

[0078] One end of the cantilever assembly 30 is fixed to the top plate 14, that is, the top of the cavity body 11, and the cantilever assembly 30 can rotate relative to the top plate 14, that is, the cantilever assembly 30 and the top plate 14 are rotatably connected, for example, the rotational cooperation can be achieved through bearings or gears, etc. Under normal circumstances, the top plate 14 is fixed, and the cantilever assembly 30 can rotate relative to the top plate 14.

[0079] The other end of the cantilever assembly 30 is connected to the power module 20, and the power module 20 can rotate and slide relative to the cantilever assembly 30, that is, the power module 20 can slide in the length direction of the cantilever assembly 30 and can rotate relative to the cantilever assembly 30. One end of the cantilever assembly 30 is connected to the top plate 14, and the other end is connected to the power module 20. In other words, the cantilever assembly 30 suspends the power module 20 at the top of the chamber 10, so that the power module 20 is arranged above the chamber 10. Optionally, there is a gap between the power module 20 suspended by the cantilever assembly 30 and the chamber 10. Under the premise of ensuring that the power module 20 is close to the cathode 60, the power module 20 and the chamber 10 do not contact each other, and the power module 20 does not rub against the top plate 14 when rotating. Optionally, the cantilever assembly 30 can be fixed to the top plate 14 of the chamber 10 and the adjacent cabinet at the same time, so that the chamber 10 and the cabinet jointly bear the weight of the power module 20, thereby enhancing the stability of the cantilever assembly 30.

[0080] One end of the connecting piece 40 is fixed to the power module 20, and the other end is fixed to the chamber door 12, so that when the chamber door 12 is opened and closed, the power module 20 is in a stationary state relative to the chamber door 12, that is, when the chamber door 12 is opened and closed, the power module 20 moves synchronously with the chamber door 12, and the power module 20 does not move relative to the chamber door 12.

[0081] Optionally, the connector 40 is an L-shaped structure, one side of the L-shape is fixed to the outside of the cavity door 12 by screws, and the other side of the L-shape directly contacts the power module 20 and is fixed to the power module 20 .

[0082] Optionally, since the cavity door 12 has a through hole, the conductive circuit passes through the through hole to connect the negative pole of the power module 20 and the cathode 60, so the connector 40 is fixed on one side of the cavity door 12 and has an avoidance groove 41 for avoiding the conductive circuit, so that the connector 40 will not hinder the electrical connection between the negative pole of the power module 20 and the cathode 60.

[0083] Optionally, when the power module 20 is suspended from the top of the cavity 10 via the cantilever assembly 30, the connection method between the power module 20 and the cathode 60, i.e., the conductive path between the power module 20 and the cathode 60, includes but is not limited to a hard connection using a pin, a hard connection using a copper sheet, a flexible connection using a wire, etc. When the connection method is a copper sheet, the width of the copper sheet needs to be greater than the width of the electrode sheet of the negative electrode of the power supply. The copper sheet and the negative electrode of the power module 20 are fixedly connected by screws, forming a separable integral structure. The copper sheet also has an insulating component on the outside to prevent electric shock during operation.

[0084] In this embodiment, the power module 20 is arranged above the cavity 10 and connected via the cantilever assembly 30, so that the distance between the negative electrode of the power module 20 and the cathode 60 is short, the energy loss along the path is small, and the reaction time is fast. At the same time, the power module 20 is connected and fixed to the top of the cavity 10 via the cantilever assembly 30, so that the weight of the power module 20 is entirely borne by the cantilever assembly 30, and then the cantilever assembly 30 transfers the load to the cavity 10, without increasing the burden on the hinge 120 of the cavity door 12. The power module 20 and the cavity door 12 are connected by the connector 40, so that the power module 20 moves synchronously when the cavity door 12 is opened and closed, and the power module 20 can slide and rotate in the length direction of the cantilever assembly 30. Even if the rotation axes of the cantilever assembly 30 and the cavity door 12 are different, it can ensure that the power module 20 does not move relative to the cavity door 12 when the cavity door 12 is opened and closed.

[0085] Please refer to Figure 1 、 Figure 7-10 , Figure 7 Schematic diagram of the three-dimensional structure of the cantilever assembly in one embodiment of the present application. Figure 8 for Figure 7 A schematic cross-sectional view of the cantilever assembly is shown. Figure 9 for Figure 8 The diagram shows a partial enlarged cross-sectional view of the pulley and the mating part in the cantilever assembly. Figure 10 This is a partial three-dimensional structural diagram of the cantilever assembly and the power module in one embodiment of the present application.

[0086] In this embodiment, the cantilever assembly 30 includes a boom base 31, a boom slide rail 32, a pulley 33, and a matching piece 34. The boom base 31 is fixed to the top plate 14, the boom slide rail 32 is sleeved on the boom base 31 and rotatably connected to the boom base 31, one end of the pulley 33 is slidably connected to the boom slide rail 32, and the other end of the pulley 33 is rotatably connected to the matching piece 34, and the matching piece 34 is fixedly connected to the power supply module 20.

[0087] In this embodiment, the boom assembly 30 can be divided into a boom base 31, a boom slide 32, a pulley 33, and a fitting 34. The boom base 31 is the portion that secures the boom assembly 30 to the top plate 14. The boom slide 32 is used to rotatably connect to the boom base 31 and provide a sliding path for the pulley 33. The pulley 33 is used to slide within the track of the boom slide 32. The fitting 34 is used to connect to the pulley 33 and rotatably connect to the power module 20.

[0088] The boom base 31 is fixed to the top plate 14 and serves as the foundation for the cantilever assembly 30. Optionally, the boom base 31 can be indirectly fixed to the top plate 14 via a boom base 31 fixing plate 355. One end of the boom slide rail 32 is sleeved on the boom base 31 and is rotatably connected to the boom base 31, allowing the boom slide rail 32 to rotate relative to the boom base 31. One end of the pulley 33 is connected to the boom slide rail 32 and can slide on the boom slide rail 32. The other end of the pulley 33 is connected to the matching piece 34, which is fixed to the power module 20. The matching piece 34 has a rotating structure 342, allowing the power module 20 to rotate relative to the pulley 33. Optionally, the rotating structure 342 of the matching piece 34 is a bearing.

[0089] Optionally, when the boom base 31 and the boom slide rail 32 are connected through a bearing 37 to enable the boom slide rail 32 to rotate relative to the boom base 31, the bearing 37 has an axis clamp on the side close to the boom base and the side close to the boom slide rail 32 to clamp the bearing 37 so that the bearing 37 will not fall off, thereby preventing the boom base 31 and the boom slide rail 32 from separating and falling off.

[0090] Optionally, the fitting 34 is divided into a top cover 340, a bottom cover 341, and a rotating structure 342. The bottom cover 341 is used to contact the power module 20 and support the rotating structure 342. The top cover 340 presses on the bottom cover 341 and fixes the rotating structure 342 between the top cover 340 and the bottom cover 341. Similarly, when the rotating structure 342 of the fitting 34 is a bearing, the bearing is fixed to the top of the power module 20 by the top cover 340 and the bottom cover 341 of the fitting 34. The side of the bearing away from the power module 20, i.e., the top of the bearing, has a shaft clamp to ensure that the bearing does not fall off.

[0091] Optionally, the cantilever assembly 30 also includes a reinforcing rib 36 for strengthening the strength of the cantilever assembly 30. The reinforcing rib 36 is arranged in the angle between the boom base 31 and the boom slide rail 32 to assist the boom base 31 in supporting the boom slide rail 32. For example, the reinforcing rib 36 is a right-angled trapezoid. The boom slide rail 32 can be divided into a rotating part 320 perpendicular to the top plate 14 and sleeved on the boom base 31, and a sliding part 321 parallel to the bottom plate 15 and having a sliding space 322. One of the right-angled sides of the reinforcing rib 36 is fixed to the rotating part 320, and the other adjacent right-angled side is fixed to the sliding part 321, so that a stable structure is provided between the boom base 31 and the boom slide rail 32, so that the boom slide rail 32 can withstand a larger weight, thereby making the cantilever assembly 30 not easily bent and deformed.

[0092] Optionally, when the power module 20 is suspended on the top of the cavity 10 by the cantilever assembly 30, the outer shell of the side where the power module 20 is connected to the mating part 34, that is, the top of the power module 20, has a structure that increases the structural strength. For example, the top outer shell of the power module 20 has an I-shaped thickened portion 21, which increases the structural strength of the power module 20 and makes the top outer shell of the power module 20 less likely to deform.

[0093] Through the mutual cooperation of the boom base 31, the boom slide rail 32, the pulley 33, and the matching part 34, the power supply module 20 connected to the cantilever assembly 30 can slide on the cantilever assembly 30 during the process of opening and closing the chamber door 12, and can also rotate relative to the cantilever assembly 30. In the process of the power supply module 20 following the movement of the chamber door 12, it is ensured that the relative position of the power supply module 20 and the chamber door 12 can remain unchanged.

[0094] It can be seen from the above content that the cantilever assembly 30 includes a boom slide rail 32. The present application provides two structures of the boom slide rail 32, which will be described in detail below.

[0095] Please refer to Figure 6 、 Figure 11 、 Figure 12 , Figure 11 for Figure 7 Another perspective structural diagram of the cantilever assembly is shown. Figure 12 for Figure 8The diagram shows a partial enlarged cross-sectional view of the boom base and the rotating part of the cantilever assembly. The cam 322 is a block diagram of a block diagram of a rotatable plate 320 for a rotatable plate 320. The cam 322 is a block diagram of a block diagram of a rotatable plate 320 for a rotatable plate 320. The cam 322 is a block diagram of a block diagram of a rotatable plate 320 for a rotatable plate 320. The cam 322 is a block diagram of a block diagram of a rotatable plate 320 for a rotatable plate 320.

[0096] In the first embodiment, the boom slide rail 32 can be divided into a rotating portion 320 and a sliding portion 321. The rotating portion 320 is mounted on the boom base 31 to enable the boom slide rail 32 to rotate relative to the top plate 14. The sliding portion 321 is fixed to the end of the rotating portion 320 facing away from the top plate 14 and has a sliding space 322 for accommodating the pulley 33. The sliding portion 321 has a top wall 3210 facing away from the power module 20, two side walls 3212, and two bottom walls 3211. The two side walls 3212 are bent and connected to opposite sides of the top wall 3210, and each side wall 3212 is further bent on the side facing away from the top wall 3210 to form two bottom walls 3211. The two bottom walls 3211 are close to each other, but there is a gap between them. The top wall 3210, the two side walls 3212, and the two bottom walls 3211 are together arranged to form a sliding space 322 with an opening at the bottom for the pulley 33 to slide. One end of the pulley 33 is set in the sliding space 322 and the other end of the pulley 33 passes through the gap between the bottom walls 3211, that is, the opening at the bottom, to pass through the sliding space 322 and be connected to the mating part 34.

[0097] In this embodiment, the top wall 3210, two side walls 3212, and two bottom walls 3211 collectively enclose a sliding space 322, allowing the pulley 33 to slide in the sliding space 322. This allows the pulley 33 to slide along the length of the cantilever assembly 30, thereby enabling the power module 20 connected to the pulley 33 via the fitting 34 to slide along the length of the cantilever assembly 30. Furthermore, the top wall 3210, side walls 3212, and bottom wall 3211 collectively enclose a relatively closed sliding space 322, which reduces interference with the pulley 33 during sliding, resulting in smoother sliding.

[0098] Optionally, the portion where the rotating portion 320 is connected to the boom base 31 has two sets of bearings 37 , each set of bearings 37 includes two bearings 37 , and the two sets of bearings 37 are spaced apart along their axial direction to make the rotation between the rotating portion 320 and the boom base 31 more stable.

[0099] Further optionally, as Figure 12 As shown, the inner surface of the rotating portion 320 has a first stepped surface 3201 and a second stepped surface 3202. The first stepped surface 3201 abuts against the lower surface of the bearing 37 away from the top plate 14, i.e., the lower surface of the upper bearing 37, and the second stepped surface 3202 abuts against the upper surface of the bearing 37 closer to the top plate 14, i.e., the upper surface of the lower bearing 37. Simultaneously, both sides of the rotating portion 320 also have shaft retaining grooves 3203 for mounting shaft clamps, which securely engage the shaft clamps in the shaft retaining grooves 3203. The boom base 31 has a third stepped surface 310, which abuts against the lower surface of the bearing 37 closer to the top plate 14, i.e., the lower surface of the lower bearing 37. Through the structural coordination between the rotating portion 320 and the boom base 31 and the use of the shaft clamps, the bearing 37 is fixed between the boom base 31 and the rotating portion 320 and prevents it from falling off.

[0100] Please refer to Figure 13-15 , Figure 13 This is a schematic diagram of the three-dimensional structure of the cantilever assembly in another embodiment of the present application. Figure 14 for Figure 13 Another perspective structural diagram of the cantilever assembly is shown. Figure 15 Schematic diagram of the three-dimensional structure of the pulley in one embodiment of the present application. In this embodiment, the boom slide rail 32 includes a rotating portion 320 and a sliding portion 321. The rotating portion 320 is sleeved on the boom base 31 and rotatably connected to the boom base 31. The sliding portion 321 includes a top wall 3210 and a bottom wall 3211 that are arranged opposite to each other, and a partition wall 3213 provided between the top wall 3210 and the bottom wall 3211. The top wall 3210 is farther away from the power module 20 than the bottom wall 3211. The top wall 3210, the bottom wall 3211, The partition wall 3213 is arranged to form two separated sliding spaces 322; the pulley 33 includes a first sub-pulley 331, a second sub-pulley 332, and a connecting portion 333, the first sub-pulley 331 is arranged in one of the sliding spaces 322, and the second sub-pulley 332 is arranged in the other sliding space 322, one end of the connecting portion 333 connects the first sub-pulley 331 and the second sub-pulley 332, and the other end of the connecting portion 333 is rotatably connected to the mating piece 34.

[0101] In the second embodiment, the boom slide rail 32 can be divided into a rotating portion 320 and a sliding portion 321. The rotating portion 320 is mounted on the boom base 31 to enable the boom slide rail 32 to rotate relative to the top plate 14. The sliding portion 321 is fixed to the end of the rotating portion 320 away from the top plate 14 and has a sliding space 322 for accommodating the pulley 33. The sliding portion 321 can also include a top and bottom wall 3211 arranged opposite to each other, and a partition wall 3213 arranged between the top wall 3210 and the bottom wall 3211, that is, Figure 14 The cantilever assembly 30 shown has a top wall 3210 at the top, a bottom wall 3211 at the bottom, and a partition wall 3213 in the middle. The top wall 3210, bottom wall 3211, and partition wall 3213 together form an I-shape, enclosing two separate sliding spaces 322. The pulley 33 includes a first sub-pulley 331, a second sub-pulley 332, and a connecting portion 333. The first sub-pulley 331 is disposed in one of the sliding spaces 322, and the second sub-pulley 332 is disposed in the other sliding space 322. The connecting portion 333 is U-shaped, with the upper ends of the U connecting the first sub-pulley 331 and the second sub-pulley 332, and the bottom of the U connecting to the mating member 34.

[0102] In this embodiment, the top wall 3210, the partition wall 3213, and the bottom wall 3211 collectively enclose two sliding spaces 322, allowing the pulley 33 to slide in the sliding spaces 322. This allows the pulley 33 to slide along the length of the cantilever assembly 30, thereby enabling the power module 20 connected to the pulley 33 via the fitting 34 to slide along the length of the cantilever assembly 30. Furthermore, the top wall 3210, the partition wall 3213, and the bottom wall 3211 are formed into an I-shape, which enhances the structural strength of the cantilever assembly 30 and provides it with a greater load-bearing capacity.

[0103] Please refer to Figure 16-17 , Figure 16 This is a schematic diagram of the three-dimensional structure of the cantilever assembly and the limiting member when they cooperate in another embodiment of the present application. Figure 17 The figure is a schematic diagram of the three-dimensional structure of a position limiting member in one embodiment of the present application. In this embodiment, the cantilever assembly 30 further includes a position limiting member 35, which is fixed to the sliding portion 321. The cantilever assembly 30 satisfies at least one of the following conditions: when the chamber door 12 rotates relative to the chamber body 11 to close the coating space 13, the pulley 33 abuts against the position limiting member 35. When the chamber door 12 rotates relative to the chamber body 11 by a predetermined angle to open the coating space 13, the pulley 33 abuts against the position limiting member 35.

[0104] In this embodiment, the cantilever assembly 30 further includes a stopper 35, which is a component used to limit the position of the pulley 33. The stopper 35 is fixed to the sliding portion 321 of the boom rail 32 in the cantilever assembly 30. The stopper 35 can be positioned on the side of the sliding portion 321 near the rotating portion 320, so that when the chamber door 12 is closed, that is, when the power module 20 slides toward the rotating portion 320, the pulley 33 connected to the power module 20 can abut against the stopper 35. Alternatively, the stopper 35 can be positioned on the side of the sliding portion 321 away from the rotating portion 320, so that when the chamber door 12 is opened to a predetermined angle, that is, when the power module 20 slides away from the rotating portion 320, the pulley 33 connected to the power module 20 can abut against the stopper 35. Of course, the stopper 35 can also be positioned on both sides of the sliding portion 321, so that the power module 20 can abut against the stopper 35 whether it is close to or away from the rotating portion 320.

[0105] Optionally, the side of the limiting member 35 that contacts the pulley 33 further has a buffer portion 356 for buffering the impact force when the pulley 33 contacts the limiting member 35, so that the limiting member 35 and the pulley 33 are not easily damaged.

[0106] The positioning member 35 restricts the pulley 33 to slide within a predetermined range within the cantilever assembly 30, preventing the pulley 33 from sliding out of the cantilever assembly 30. Furthermore, since the pulley 33 is connected to the power module 20, which is in turn connected to the door 12, limiting the sliding range of the pulley 33 also limits the opening and closing angle of the door 12, making it less likely for the door 12 to strike the cabinet when opened, thereby preventing damage to the door 12 or the cabinet.

[0107] Alternatively, as can be seen from the above description, the sliding portion 321 of the boom slide rail 32 can have two configurations, and therefore the position limiting member 35 can also have two configurations. In the first embodiment, the top wall 3210, two side walls 3212, and two bottom walls 3211 of the sliding portion 321 collectively enclose a sliding space 322 with an opening at the bottom. Based on this, the position limiting member 35 can be placed directly in the sliding space 322 and secured with screws, thereby securing the position limiting member 35 in the sliding space 322 and thereby limiting the position of the pulley 33.

[0108] In a second embodiment, the top wall 3210, bottom wall 3211, and partition wall 3213 of the sliding portion 321 are combined to form an I-shape, enclosing two separate sliding spaces 322. On this basis, the limiter 35 can be a split structure, including a first sub-limiter 351 and a second sub-limiter 352. Part of the first sub-limiter 351 is disposed in one sliding space 322, and part of the second sub-limiter 352 is disposed in the other sliding space 322. The first sub-limiter 351 and the second sub-limiter 352 have limiting grooves 353 near the bottom wall 3211 so that the first sub-limiter 351 and the second sub-limiter 352 can be stuck on the bottom wall 3211 and will not move up and down. The first and second sub-limiting members 351, 352 each have screw holes below the limiting grooves 353. These are connected together via screws 354, forming a single unit and preventing them from moving horizontally. Furthermore, a fixing plate 355, aligned with the bottom wall 3211, is located above the limiting grooves 353. The fixing plate 355 has screw holes that allow the limiting member 35 to be secured to the bottom wall 3211, preventing it from sliding along the length of the sliding portion 321.

[0109] Please refer to Figures 18-20 , Figure 18 This is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application. Figure 19 for Figure 18 A top view of the coating equipment is shown. Figure 20 for Figure 18 In this embodiment, the chamber body 11 includes a top plate 14 and a bottom plate 15 arranged opposite to each other, the chamber door 12 is arranged between the top plate 14 and the bottom plate 15, the bottom plate 15 is used to be arranged on a support frame, and the power module 20 is fixed to the top plate 14.

[0110] In addition to suspending the power module 20 on the top of the chamber 10 via the cantilever assembly 30 as described above, in this embodiment, the power module 20 can also be directly placed on the top of the chamber 10, that is, on the top plate 14 of the chamber body 11, so that the weight of the power module 20 is directly supported by the chamber body 11. By directly placing the power module 20 on the top of the chamber 10, the overall structure of the coating apparatus 1 is simplified, that is, the installation steps of the power module 20 are simplified, and the difficulty of operation is reduced.

[0111] Please refer again Figures 18-20 In this embodiment, the coating device 1 further includes an electrical connector 50 , one end of which is fixedly connected to the power module 20 , and the other end of which is connected to the cathode 60 .

[0112] On the premise that the power module 20 is directly arranged on the top of the cavity 10, this embodiment can connect the negative pole of the power supply and the cathode 60 through the electrical connector 50, thereby realizing the electrical connection between the negative pole of the power supply and the cathode 60. Optionally, the electrical connector 50 is a cable, one end of the cable is connected to the negative pole of the power supply, and the other end is connected to the cathode 60. When the cavity door 12 is opened, the cable is soft and can be deformed, and the cable is not disconnected, that is, the negative pole of the power supply and the cathode 60 can also be electrically connected when the cavity door 12 is opened. In addition, due to the setting of the cabinet, the opening angle of the cavity door 12 is limited to prevent the cavity door 12 from being opened too large and causing the cable to be torn off.

[0113] Further optionally, a drag chain can be provided on the outside of the cable so that the cable can only bend in the direction away from the cavity door 12, so that when the cavity door 12 is closed, the cable will not bend toward the cavity door 12 under the action of gravity, and the cable will not be clamped between the cavity door 12 and the cavity body 11.

[0114] In this embodiment, a flexible electrical connector 50 is arranged between the negative pole of the power module 20 and the cathode 60, so that the negative pole of the power module 20 is always connected to the cathode 60 and will not be disconnected when the chamber door 12 is opened and closed, avoiding the need to disconnect the power module 20 and the cathode 60 when opening the chamber door 12, thereby reducing the difficulty of operation.

[0115] Please refer to Figure 21-23 , Figure 21 This is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application. Figure 22 for Figure 21 A top view of the coating equipment is shown. Figure 23 for Figure 21 A front view of the coating equipment is shown.

[0116] In this embodiment, the coating equipment 1 also includes an electrical connector 50, one end of which is detachably plugged into the power module 20, and the other end is connected to the cathode 60. When the chamber door 12 rotates relative to the chamber body 11 to open the coating space 13, one end of the electrical connector 50 is separated from the power module 20. When the chamber door 12 rotates relative to the chamber body 11 to close the coating space 13, one end of the electrical connector 50 is plugged into the power module 20.

[0117] Under the premise that the power module 20 is directly arranged on the top of the cavity 10, this embodiment can connect the negative electrode of the power supply to the cathode 60 through the electrical connector 50, thereby achieving electrical connection between the negative electrode of the power supply and the cathode 60. One end of the electrical connector 50 is detachably plugged into the power module 20, and the other end is connected to the cathode 60 and fixed to the cathode 60 or the insulating member 19. When the cavity door 12 is rotated open, as shown in FIG. Figure 21The top of the electrical connection shown is separated from the power module 20, and the power module 20 is electrically disconnected from the cathode 60. When the chamber door 12 is rotated closed, the electrical connector 50 is plugged into the power module 20, so that the power module 20 is electrically connected to the cathode 60.

[0118] Optionally, the insertion hole on the power module 20 for inserting the electrical connector 50 is wider than the electrical connector 50 , so that the electrical connector 50 can be stably inserted into the power module 20 .

[0119] In this embodiment, the plug-in electrical connector 50 is set so that the power module 20 is completely separated from the chamber door 12 when the chamber door 12 is opened, that is, the power module 20 is electrically disconnected from the cathode 60. When the chamber door 12 is closed, the electrical connector 50 is plugged into the power module 20 to realize the electrical connection between the power module 20 and the cathode 60, that is, the connection and disconnection of the power module 20 and the cathode 60 are automatically realized by the switch of the chamber door 12, avoiding the need to manually disconnect the power module 20 and the cathode 60 when opening the chamber door 12, thereby reducing the difficulty of operation.

[0120] Please refer again Figure 1-Figure 4 In this embodiment, the coating equipment 1 includes a plurality of the power modules 20 and a plurality of the electrical connectors 50. The side of the chamber door 12 close to the coating space 13 is used to correspond to a plurality of the targets and a plurality of the cathodes 60. Each cathode 60 is arranged on a target. One end of each electrical connector 50 is connected to a power module 20, and the other end is connected to the cathode 60. The lengths of the plurality of electrical connectors 50 are equal.

[0121] On the basis of setting the power module 20 at the top of the cavity 10, this embodiment can also include multiple power modules 20 and multiple electrical connectors 50. Synchronously, the side of the cavity door 12 close to the coating space 13 is correspondingly provided with multiple targets and multiple cathodes 60, each cathode 60 is provided with a target, each electrical connector 50 connects a power module 20 and a cathode 60, and the length of each electrical connector 50 is equal.

[0122] Optionally, multiple power modules 20 are arranged at intervals and are split structures from each other. The negative pole of each power module 20 is facing the cathode 60 arranged in the cavity door 12 below it, so that the distance between the negative pole of each power module 20 and the corresponding cathode 60 is shorter, reducing the energy loss on the transmission path. At the same time, the split power module 20 facilitates the disassembly and maintenance of a single power module 20.

[0123] In this embodiment, by setting up multiple power modules 20 and multiple cathodes 60, and making the length of each electrical connector 50 connecting the power module 20 and the cathode 60 equal, the components are coated simultaneously by multiple target materials, so that the coating efficiency of the coating equipment 1 is higher. At the same time, the consistent lengths of the multiple electrical connectors 50 make the impact of each electrical connector 50 on the output power basically consistent, thereby ensuring the stability of the operation of each power module 20.

[0124] Optionally, as can be seen from the above content, the power module 20 and the cathode 60 can be connected by a soft electrical connector 50 such as a cable. Since the cable is not disconnected when the chamber door 12 is opened, when there are multiple power modules 20, the electrical connector 50 close to the hinge 120 of the chamber door 12 is shorter than the electrical connector 50 away from the hinge 120. In order to ensure that each electrical connector 50 is the same length, the shorter electrical connector 50 can be appropriately extended so that the shorter electrical connector 50 is extended to the same length as the longest electrical connector 50 to ensure that the length of the electrical connector 50 is consistent.

[0125] When the power module 20 and the cathode 60 are connected by plugging, the lengths of the multiple electrical connectors 50 corresponding to the multiple power modules 20 are the same. At this time, since the electrical connector 50 close to the hinge 120 will be plugged into the power module 20 first, the chamber door 12 needs to be completely closed to achieve the connection between all power modules 20 and the cathode 60. Therefore, the coating is usually performed after the chamber door 12 is completely closed.

[0126] When the power module 20 is suspended on the top of the cavity 10 by a cantilever, the length of the electrical connector 50 near the middle of the cavity door 12 is the shortest. Therefore, the shorter electrical connector 50 can be appropriately bent so that its length after bending is the same as that of the other electrical connectors 50, thereby achieving consistent length of the electrical connectors 50.

[0127] Optionally, the door 12 can be bent into multiple planes, such as Figure 1 As shown, the chamber door 12 can be bent into three planes, that is, the inner surface of the chamber door 12 is also bent into three planes, a cathode 60 is installed on each plane, and a target is installed on each cathode 60. Each target is at an equal distance from the component to be coated. Using multiple targets in an arc shape to coat the components at the same time makes the coating more uniform and the effect better.

[0128] Further optionally, the coating device 1 has a plurality of chamber doors 12 bent into a plurality of planes, for example Figure 4 As shown, two chamber doors 12 bent into three planes are arranged opposite each other, so that there are three targets on each chamber door 12. The six targets on the two chamber doors 12 surround the coated component in a ring shape, making the coating device 1 more uniform and efficient.

[0129] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0130] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0131] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to connection, detachable connection, or integration. They may refer to mechanical connection or electrical connection. They may refer to direct connection or indirect connection through an intermediary. They may refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0132] The above details the contents provided in the embodiments of the present application, and illustrates and describes the principles and embodiments of the present application. These explanations are only intended to help understand the method and core concept of the present application. However, the contents of this specification should not be construed as limiting the present application. Those skilled in the art may make various changes and modifications to the present application without departing from the spirit and scope of the present application. Such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents.

Claims

1. A coating device, characterized in that: The coating equipment includes: A chamber, comprising a chamber body and a chamber door mounted on the chamber body, wherein the chamber body and the chamber door enclose a coating space, each of the chamber doors being rotatable relative to the chamber body to open or close the coating space, and a side of the chamber door close to the coating space being used for mounting a target material and a cathode connected to the target material; A power supply module is arranged on the cavity body and is used for electrically connecting to the cathode.

2. The coating device according to claim 1, wherein: The chamber body includes a top plate and a bottom plate that are arranged opposite to each other, the chamber door is arranged between the top plate and the bottom plate, and the bottom plate is used to be arranged on a support frame. The coating equipment also includes a cantilever assembly and a connecting piece. The cantilever assembly is fixed to the top plate and can rotate relative to the top plate. The power module is slidably and rotatably connected to the cantilever assembly. One end of the connecting piece is fixed to the power module, and the other end is fixed to the chamber door. When the cavity door rotates relative to the cavity body, the power module is driven to rotate synchronously through the connecting piece, and the power module drives the cantilever assembly to rotate relative to the top plate, and the power module also slides and rotates relative to the cantilever assembly.

3. The coating device according to claim 2, characterized in that: The cantilever assembly includes a boom base, a boom slide rail, a pulley, and a matching piece. The boom base is fixed to the top plate, the boom slide rail is sleeved on the boom base and rotatably connected to the boom base, one end of the pulley is slidably connected to the boom slide rail, and the other end of the pulley is rotatably connected to the matching piece, and the matching piece is fixedly connected to the power module.

4. The coating device according to claim 3, wherein: The boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall, two side walls, and two bottom walls facing away from the power module, the two side walls are bent and connected to opposite sides of the top wall, each side of the side wall facing away from the top wall is bent and connected to one bottom wall, and the two bottom walls are close to each other and a gap is set, the top wall, the two side walls, and the two bottom walls are surrounded to form a sliding space, one end of the pulley is set in the sliding space, and the other end of the pulley passes through the gap between the two bottom walls and is rotatably connected to the mating part.

5. The coating device according to claim 3, wherein: The boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall and a bottom wall arranged opposite to each other, and a partition wall arranged between the top wall and the bottom wall, the top wall is farther away from the power module than the bottom wall, and the top wall, the bottom wall, and the partition wall are arranged to form two separated sliding spaces; the pulley includes a first sub-pulley, a second sub-pulley, and a connecting part, the first sub-pulley is arranged in one of the sliding spaces, and the second sub-pulley is arranged in the other sliding space, one end of the connecting part is connected to the first sub-pulley and the second sub-pulley, and the other end of the connecting part is rotatably connected to the mating part.

6. The coating device according to claim 4 or 5, characterized in that: The cantilever assembly further includes a limiter, which is fixed to the sliding portion. The cantilever assembly satisfies at least one of the following conditions: When the chamber door rotates relative to the chamber body to close the coating space, the pulley abuts against the limiting member; When the chamber door rotates relative to the chamber body at a preset angle to open the coating space, the pulley abuts against the limiting member.

7. The coating device according to claim 1, wherein: The cavity body includes a top plate and a bottom plate that are arranged opposite to each other, the cavity door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, and the power module is fixed to the top plate.

8. The coating device according to claim 7, characterized in that: The coating device further includes an electrical connector, one end of which is fixedly connected to the power module, and the other end of which is used to connect to the cathode.

9. The coating device according to claim 7, wherein: The coating equipment also includes an electrical connector, one end of which is detachably plugged into the power module, and the other end is connected to the cathode. When the chamber door rotates relative to the chamber body to open the coating space, one end of the electrical connector is separated from the power module. When the chamber door rotates relative to the chamber body to close the coating space, one end of the electrical connector is plugged into the power module.

10. The coating device according to claim 1, wherein: The coating equipment includes multiple power modules and multiple electrical connectors. The side of the chamber door close to the coating space is used to correspond to multiple targets and multiple cathodes. Each cathode is set on one target. One end of each electrical connector is connected to a power module, and the other end is connected to the cathode. The lengths of the multiple electrical connectors are equal.

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