Multifunctional gas dispersing device of deposition furnace

Abstract

The utility model relates to the technical field of deposition furnaces, in particular to a multifunctional gas dispersing device of a deposition furnace, which comprises a movable seat and a gas cover, the gas cover is movably sleeved at the top end of the movable seat, four groups of through gas outlets are arranged at the gas cover, and gas dispersing pipes are connected at the gas outlets. An air dispersing nozzle and an air dispersing port are assembled at the output end of the air dispersing pipe respectively, a flow channel is formed in the air dispersing nozzle, a fixed seat is welded in the flow channel, a blocking groove is formed in the fixed seat, a plug is movably connected in the blocking groove in a sleeved mode, a movable block is welded to the top end of the plug, and branch pipes are welded to the four corners of the top end of the air dispersing nozzle respectively. According to the multifunctional air dispersing device for the deposition furnace, the sealing ring groove is formed, the four groups of air dispersing nozzles are arranged at the bottom end of the air cover, the impact force of airflow is dispersed through the design of the movable plug and the airflow holes in multiple positions, air is automatically dispersed according to the air pressure, and therefore the risk that the internal structure is damaged by the airflow is reduced; and the problem of overpressure high-temperature airflow impact is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of deposition furnaces, in particular to a multifunctional gas dispersion device for a deposition furnace. Background Art

[0002] Deposition furnaces are essential equipment for the manufacture of graphite and carbon products, high-performance fibers and composite materials, and non-metallic mineral products. They deposit materials under high-temperature and high-pressure conditions. Intake requires precise delivery of specific gases into the deposition furnace to initiate chemical reactions, while exhaust is the process of removing residual gases and byproducts after the reaction. Both processes often involve high airflow pressures. Without a suitable gas dispersion device, the airflow can directly impact the internal structure of the deposition furnace, potentially damaging the equipment.

[0003] Many current air diffusers utilize a single channel design, resulting in uneven airflow. To address this issue, the current solution is to install multiple diffuser nozzles at the diffuser outlet. These nozzles disperse the airflow, reducing the impact of a single channel. However, excessive nozzles prevent automatic air distribution based on air pressure, compromise the integrity of the device, and increase piping redundancy.

[0004] Therefore, there is an urgent need for a multifunctional gas diffusion device for a deposition furnace to solve the technical defects proposed in the above technology. Utility Model Content

[0005] The purpose of the utility model is to provide a multifunctional gas diffusion device for a deposition furnace, so as to solve the problem in the above background technology that the gas cannot be automatically diffused according to the gas pressure.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a multifunctional gas diffusion device for a deposition furnace, comprising a movable seat and an gas cover, the top of the movable seat being movably sleeved with an gas cover, the gas cover being provided with four groups of through-going gas outlets, the gas outlets being connected with gas diffusion pipes, the output ends of the gas diffusion pipes being respectively equipped with gas diffusion nozzles and gas diffusion outlets, a flow channel being provided in the gas diffusion nozzle, a fixed seat being welded in the flow channel, a plugging groove being provided inside the fixed seat, a plug being movably sleeved in the plugging groove, a movable block being welded on the top of the plug, branch pipes being welded on the four corners of the top of the gas diffusion nozzle, rod grooves being provided in the four corners of the movable block, the branch pipes passing through the rod grooves and being fixedly connected to a top plate upwards, a spring being fixedly connected between the top plate and the movable block.

[0007] Preferably, the inner side walls of the branch pipes are each provided with a tube hole, the tube hole being provided inside the rod groove, the inner diameter of the tube hole being smaller than the rod groove, and the branch pipe is sleeved with a plug above the rod groove.

[0008] Preferably, the side wall of the fixing seat is provided with a plurality of side air holes, and the side air holes are circular holes connected to the flow channel.

[0009] Preferably, a sealing ring groove is processed at the bottom end of the air diffusion port, a rubber sealing gasket is installed at the sealing ring groove, and the air diffusion port is connected to the air diffusion pipe.

[0010] Preferably, the bottom end of the branch pipe is bent and extends into the interior of the flow channel, and the branch pipe is in an "L" shape.

[0011] Preferably, the plug is embedded in the plugging groove, and the inner diameter of the groove at the bottom end of the plugging groove is smaller than the plug.

[0012] Preferably, a rolling groove is provided between the movable seat and the air cover, and a plurality of groups of balls are embedded between the rolling groove and the movable seat, and the balls form rolling connections with the movable seat and the rolling groove respectively.

[0013] Preferably, four groups of the air diffuser nozzles are provided at the bottom end of the air cover, and the air diffuser nozzles are distributed in a ring around the center of the air cover.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: the multifunctional gas diffusion device of the deposition furnace not only realizes automatic gas diffusion according to the gas pressure, reduces the risk of damage to the internal structure by the air flow, realizes automatic blocking to prevent foreign objects from entering the gas diffusion port, but also realizes more flexible installation;

[0015] The air diffuser is provided with a sealing ring groove, an air diffusion port, a fixed seat, a side air hole, a flow channel, a branch pipe, a top plate, a spring, a movable block, a plug, a plugging groove, a rod groove, a pipe hole, and a plugging plate. The air diffuser is provided with four groups at the bottom of the air cover. When the high-temperature furnace gas rushes out from the air diffusion port, under the airflow pressure, the plug is pushed out by the airflow toward the movable block. At this time, the plug is separated from the plugging groove at the fixed seat. When the plug is completely separated from the plugging groove, the side air holes are opened, and the air rushes into the flow channel from the multiple groups of side air holes and disperses outward. If the airflow pressure is too strong, part of the airflow will enter from the bottom of the branch pipe, and the movable block will be compressed by the airflow. The movement of the movable block will remove the plugging plate from the rod groove, and the airflow entering the branch pipe will rush out from the exposed pipe hole. The design of the movable plug and multiple airflow holes disperses the impact force of the airflow, and the air is automatically dispersed according to the air pressure, thereby reducing the risk of damage to the internal structure by the airflow.

[0016] By arranging the flow channel, the pipe hole, the spring, the movable block, the plug, the blocking groove, the side air hole, and the air diffuser, the air flow is dispersed from the flow channel and the pipe hole, which can quickly relieve the pressure. When the pressure of the deposition furnace gradually returns to equilibrium, the spring gradually rebounds, driving the movable block to reset, the plug falls back into the blocking groove, and the side air hole is re-blocked, realizing automatic blocking, preventing foreign objects from entering the air diffuser, and realizing the function of automatically closing the air hole;

[0017] By providing an air cover, a movable seat, and ball bearings, the air diffuser nozzle is installed at the bottom end of the air cover. The air cover and the movable seat can rotate relative to each other. Multiple sets of ball bearings ensure that the air cover and the movable seat rotate smoothly relative to each other. During assembly, there is no need to remove the air diffuser nozzles one by one. It is only necessary to rotate and adjust the relative position of the air cover and the movable seat to adjust the installation direction of the air diffuser nozzle, so as to cooperate with the cooling component to cool the outgoing air flow, and has a more flexible installation function. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the bottom-up structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the internal structure of the air diffuser nozzle of the utility model;

[0020] Figure 3 This is a schematic diagram of the three-dimensional structure of the fixing seat of the utility model;

[0021] Figure 4 It is a schematic diagram of the three-dimensional structure of the air cover of the present utility model.

[0022] In the figure: 1. Air diffuser; 2. Movable seat; 3. Rolling groove; 4. Ball bearing; 5. Air outlet; 6. Air diffuser; 7. Air cover; 8. Sealing ring groove; 9. Air diffuser; 10. Fixed seat; 11. Side air hole; 12. Flow channel; 13. Branch pipe; 14. Top plate; 15. Spring; 16. Movable block; 17. Plug; 18. Plug groove; 19. Rod groove; 20. Pipe hole; 21. Plug. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Example 1: Please refer to Figure 1-4A multifunctional gas diffusion device for a deposition furnace comprises a movable seat 2 and a gas cover 7. The top of the movable seat 2 is movably sleeved with the gas cover 7. The gas cover 7 is provided with four groups of through-going gas outlets 5. The gas outlets 5 are all connected to gas diffusion pipes 6. The output ends of the gas diffusion pipes 6 are respectively equipped with gas diffusion nozzles 1 and gas diffusion ports 9. A flow channel 12 is provided in the gas diffusion nozzle 1. A fixed seat 10 is welded in the flow channel 12. A blocking groove 18 is provided inside the fixed seat 10. A plug 17 is movably sleeved in the blocking groove 18. A movable block 16 is welded to the top of the plug 17. Branch pipes 13 are welded to the four corners of the top of the gas diffusion nozzle 1. Rod grooves 19 are provided in the four corners of the movable block 16. The branch pipes 13 pass through the rod grooves 19 and are fixedly connected to the top plate 14 upward. A spring 15 is fixedly connected between the top plate 14 and the movable block 16.

[0025] Specifically, if Figure 1 、 Figure 2 and Figure 3 As shown, the air diffuser 1 is provided with four groups at the bottom end of the air cover 7. When the high-temperature furnace gas rushes out from the air diffuser 9, under the airflow pressure, the plug 17 is pushed out by the airflow toward the movable block 16. At this time, the plug 17 is separated from the blocking groove 18 at the fixed seat 10. When the plug 17 is completely separated from the blocking groove 18, the side air hole 11 is opened, and the air flows from the multiple groups of side air holes 11 to the flow channel 12 and disperses outward. If the airflow pressure is too strong, part of the airflow will enter from the bottom of the branch pipe 13, and the movable block 16 will be impacted by the airflow to compress the spring 15. The movable block 16 moves to remove the blocking piece 21 from the rod groove 19, and the airflow entering the branch pipe 13 will rush out from the exposed pipe hole 20. The design of the movable plug 17 and multiple airflow holes disperses the impact force of the airflow, and the air is automatically dispersed according to the air pressure.

[0026] Embodiment 2: The inner wall of the branch pipe 13 is provided with a tube hole 20, which is provided inside the rod groove 19. The inner diameter of the tube hole 20 is smaller than that of the rod groove 19. The branch pipe 13 is sleeved with a plug 21 above the position of the rod groove 19. The side wall of the fixed seat 10 is provided with multiple groups of side air holes 11. The side air holes 11 are circular holes connected to the flow channel 12. The bottom end of the air diffuser 9 is processed with a sealing ring groove 8. A rubber sealing gasket is installed at the sealing ring groove 8. The air diffuser 9 is connected to the air diffuser pipe 6. The bottom end of the branch pipe 13 is bent and extended to the inside of the flow channel 12. The branch pipe 13 is "L"-shaped. The plug 17 is embedded in the plugging groove 18. The inner diameter of the groove at the bottom end of the plugging groove 18 is smaller than that of the plug 17.

[0027] Specifically, if Figure 1 、 Figure 2 and Figure 3 As shown, the air flow is divided and dispersed from the flow channel 12 and the pipe hole 20, which can quickly relieve pressure. When the pressure in the deposition furnace gradually returns to equilibrium, the spring 15 gradually rebounds, driving the movable block 16 to reset, and the plug 17 falls back into the plugging groove 18, and the side air hole 11 is re-blocked, achieving automatic blocking.

[0028] Example 3: A rolling groove 3 is provided between the movable seat 2 and the air cover 7. A plurality of groups of balls 4 are embedded between the rolling groove 3 and the movable seat 2. The balls 4 are in rolling connection with the movable seat 2 and the rolling groove 3 respectively. Four groups of air diffusers 1 are provided at the bottom end of the air cover 7. The air diffusers 1 are distributed in an annular manner around the center of the air cover 7.

[0029] Specifically, if Figure 1 and Figure 4 As shown, the air diffuser nozzle 1 is installed at the bottom end of the air cover 7. The air cover 7 and the movable seat 2 can rotate relative to each other. Multiple sets of balls 4 ensure that the air cover 7 and the movable seat 2 rotate smoothly relative to each other. During assembly, there is no need to remove the air diffuser nozzles 1 one by one. It is only necessary to rotate and adjust the relative position of the air cover 7 and the movable seat 2 to adjust the installation direction of the air diffuser nozzle 1 so as to cooperate with the cooling component to cool the outgoing air flow.

[0030] Working principle: There are four groups of diffuser nozzles 1 at the bottom of the gas cover 7. When the high-temperature furnace gas rushes out from the diffuser port 9, under the pressure of the air flow, the plug 17 is pushed out by the air flow toward the movable block 16. At this time, the plug 17 is separated from the blocking groove 18 at the fixed seat 10. When the plug 17 is completely separated from the blocking groove 18, the side air holes 11 are opened, and the air flows from the multiple groups of side air holes 11 to the flow channel 12 and disperses outward. If the air flow pressure is too strong, part of the air flow will enter from the bottom of the branch pipe 13, and the movable block 16 will be compressed by the air flow impact spring 15. The movement of block 16 causes the plug 21 to be removed from the rod groove 19, and the airflow entering the branch pipe 13 will rush out from the exposed pipe hole 20. The impact force of the airflow is dispersed through the design of the movable plug 17 and multiple air flow holes, and the air is automatically dispersed according to the air pressure. The airflow is divided into branches and dispersed from the flow channel 12 and the pipe hole 20, which can quickly relieve pressure. When the air pressure in the deposition furnace gradually returns to equilibrium, the spring 15 gradually rebounds, driving the movable block 16 to reset, and the plug 17 falls back into the plugging groove 18. The side air hole 11 is re-blocked to achieve automatic blocking.

[0031] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A multifunctional gas dispersion device for a deposition furnace, comprising a movable seat (2) and a gas cover (7), characterized in that: The top of the movable seat (2) is movably sleeved with an air cover (7), and the air cover (7) is provided with four groups of through-going air outlets (5). The air outlets (5) are all connected to a diffuser pipe (6), and the output ends of the diffuser pipe (6) are respectively equipped with a diffuser nozzle (1) and a diffuser port (9). A flow channel (12) is provided in the diffuser nozzle (1), and a fixed seat (10) is welded in the flow channel (12). A blocking groove (18) is provided in the fixed seat (10), and a plug (17) is movably sleeved in the blocking groove (18). A movable block (16) is welded to the top of the plug (17). Branch pipes (13) are welded to the four corners of the top of the diffuser nozzle (1), and rod grooves (19) are provided in the four corners of the movable block (16). The branch pipes (13) pass through the rod groove (19) and are fixedly connected to a top plate (14) upwards. A spring (15) is fixedly connected between the top plate (14) and the movable block (16).

2. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: The inner wall of each branch pipe (13) is provided with a tube hole (20), the tube hole (20) is provided inside the rod groove (19), the inner diameter of the tube hole (20) is smaller than the rod groove (19), and the branch pipe (13) is sleeved with a blocking piece (21) above the rod groove (19).

3. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: The side wall of the fixing seat (10) is provided with a plurality of side air holes (11), and the side air holes (11) are circular holes communicating with the flow channel (12).

4. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: A sealing ring groove (8) is processed at the bottom end of the air diffusion port (9), a rubber sealing gasket is installed at the sealing ring groove (8), and the air diffusion port (9) is connected to the air diffusion pipe (6).

5. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: The bottom end of the branch pipe (13) is bent and extends into the interior of the flow channel (12), and the branch pipe (13) is in an "L" shape.

6. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: The plug (17) is embedded in the plugging groove (18), and the inner diameter of the groove at the bottom end of the plugging groove (18) is smaller than the plug (17).

7. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: A rolling groove (3) is provided between the movable seat (2) and the air cover (7), and a plurality of groups of balls (4) are embedded between the rolling groove (3) and the movable seat (2). The balls (4) are in rolling connection with the movable seat (2) and the rolling groove (3), respectively.

8. The multifunctional gas diffusion device for a deposition furnace according to claim 1, characterized in that: Four groups of the air diffusion nozzles (1) are provided at the bottom end of the air cover (7), and the air diffusion nozzles (1) are distributed in a ring around the center of the air cover (7).

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