Diaphragm valve

Abstract

The utility model discloses a diaphragm valve which comprises a valve body and an annular valve seat arranged on the valve body. The diaphragm can be elastically deformed and is arranged above the valve seat, and the outer edge of the diaphragm is pressed and sealed; the actuator is connected to the top of the valve body and used for driving the diaphragm to abut against or separate from the valve seat so as to cut off or open the diaphragm valve; the actuator comprises a shell, a connecting seat used for applying force to the outer edge of the diaphragm is arranged between the shell and the valve body, the connecting seat comprises a connecting part connected with the shell, a lower thread in threaded connection with the valve body and an operating part, and the operating part is used for being matched with a torsion tool to screw the connecting seat; the operating part is located on the radial inner side of the connecting part or the lower thread and located within the covering range of the shell, the outer surface, exposed out of the shell and the valve body, of the connecting base cannot be damaged, and even if the operating part of the connecting base is scratched or damaged when the connecting base is screwed, normal use and appearance completeness of the diaphragm valve cannot be affected.

Description

Technical Field

[0001] The utility model relates to the technical field of valves, in particular to a diaphragm valve. Background Art

[0002] A modular gas supply system (IGS) is a type of gas control equipment used in the semiconductor industry. As semiconductor manufacturing processes become increasingly advanced, the requirements for gas control equipment are also increasing. A modular gas system uses a combination of flow blocks and fluid controllers (like stacking blocks) to form at least one pipeline line on a substrate. This modular design reduces the size of the equipment while simplifying installation and maintenance. For example, existing fluid control systems include at least one pipeline line, each of which includes several fluid controllers and flow blocks. The fluid controllers can be pneumatic diaphragm valves, manual diaphragm valves, etc. Valves in the pipeline line are primarily used to control the on / off of process gases.

[0003] Existing diaphragm valves include a valve body and an actuator. The valve body is equipped with a diaphragm, a valve seat, and fluid inlet and outlet passages. If the actuator is gas-driven, it constitutes a pneumatic diaphragm valve; if it is manually driven, it constitutes a manual diaphragm valve. The actuator is used to press or release the diaphragm, sealing or separating the diaphragm from the valve seat, thereby opening and closing the fluid inlet and outlet passages. The actuator includes a housing, which is threadedly connected to the valve body via a connecting seat, that is, the housing is detachably connected to the top of the valve body. At the same time, the connecting seat is used to directly or indirectly apply force to the outer edge of the diaphragm, creating a pressure seal between the outer edge of the diaphragm and the valve body.

[0004] Specifically, the connector generally includes a connector body, and, from top to bottom, an upper thread, an operating portion with a certain shape and contour, and a lower thread, which are arranged on the outer wall of the connector body. The connector is assembled with the valve body and the shell as follows: first, the lower thread of the connector is connected to the thread that adapts to the top of the valve body. Then, the thread that adapts to the bottom of the shell is connected to the upper thread. After the initial installation and positioning is completed, the operating portion is exposed to the outside space. Finally, the operating portion of the connector and the shell need to be tightened in sequence with a torque wrench to ensure the consistency of the overall assembly. The actual operating portion is a hexagonal structure. Twisting the operating portion with a torque wrench causes the connector to rotate downward, so that the local force of the connector applies to the pressing joint to tightly press the outer edge of the diaphragm to achieve effective sealing.

[0005] However, in order to achieve effective pressure sealing on the outer edge of the diaphragm, a very large torque needs to be applied to the connecting seat when screwing it, which often causes the exposed operating part to be deformed or damaged, causing the appearance of the connecting seat to be deformed or damaged, making the product unqualified. Even if it is not damaged, scratches on the outer surface of the operating part will also affect the appearance of the connecting seat. Utility Model Content

[0006] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a diaphragm valve that solves the problem that the outer surface of the connecting seat is easily damaged when tightening the connecting seat, thereby affecting the appearance of the diaphragm valve.

[0007] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0008] A diaphragm valve comprising:

[0009] A valve body having a first fluid passage and a second fluid passage;

[0010] an annular valve seat disposed in the valve body and surrounding an outer circumference of a top portion of the first fluid channel, the first fluid channel being in communication with the second fluid channel via the valve seat;

[0011] a diaphragm, elastically deformable, disposed above the valve seat, with the outer edge of the diaphragm being pressed and sealed;

[0012] an actuator connected to the top of the valve body, for driving the diaphragm to abut against or separate from the valve seat to isolate or open the diaphragm valve;

[0013] The actuator includes a housing, a connecting seat for applying force to the outer edge of the diaphragm is provided between the housing and the valve body, the connecting seat includes a connecting portion connected to the housing, a lower thread threadedly connected to the valve body, and an operating portion, the operating portion being used to cooperate with a torque tool to screw the connecting seat;

[0014] The operating portion is arranged on a radially inner side of the connecting portion or the lower thread and is located within a covering range of the housing.

[0015] The diaphragm valve of the present invention utilizes a connecting seat to connect the actuator and the valve body respectively, and at the same time changes the position of the operating part, and the operating part is set on the radial inner side of the connecting part or the lower thread, and a torque tool that cooperates with the operating part is used to apply sufficient torque to make the connecting seat screw down to effectively press and seal the outer edge of the diaphragm, and after the connecting seat and the valve body are connected and fixed with the torque tool, the housing of the actuator is connected and fixed to the connecting seat through the connecting part. The meaning that the operating part is located within the coverage range of the shell is that the top projection of the shell covers and shields the operating part, so as to cover the operating part in the shell, so that the operating part is basically not observed by the naked eye from the connection gap, thereby not causing damage to the outer surface of the connecting seat exposed to the shell and the valve body. Even if the operating part of the connecting seat is scratched or damaged when tightening the connecting seat, it will not affect the normal use and appearance integrity of the diaphragm valve, and there is no need to set up additional outer packaging to shield the operating part, and the cost is low.

[0016] Preferably, the connecting seat comprises an upper ring portion and a lower ring portion, the connecting portion is an upper thread provided on the outer circumference of the upper ring portion, and the lower thread is provided on the outer circumference of the lower ring portion;

[0017] The bottom of the housing has a groove, the top of the valve body has a recess, the upper ring portion at least partially extends into the groove and is threadedly connected to the inner wall of the groove, and the lower ring portion at least partially extends into the recess and is threadedly connected to the inner wall of the recess;

[0018] The operating portion is provided on the upper surface of the upper ring portion or the lower ring portion, and at least a portion of the operating portion extends into the groove or the recess.

[0019] In this arrangement, the lower ring portion is threadedly connected to the valve body and is at least partially inserted into the valve body, and the upper ring portion is threadedly connected to the shell and is at least partially inserted into the shell. If the operating portion is located on the upper surface of the lower ring portion and can extend into the groove or the recess, or if the operating portion is arranged on the upper surface of the upper ring portion and can extend into the groove or the recess, the upper surface or upper space of the upper ring portion or the lower ring portion is utilized to provide a larger operating space when cooperating with the torque tool, and it is ensured that after the upper ring portion is connected to the shell, the operating portion is at least partially inserted into the groove or the recess, and can be covered by the shell without being exposed to the outside.

[0020] In a specific embodiment, the operating portion is an operating hole, which is opened axially from the upper surface of the upper ring portion; the operating hole is concavely arranged on the upper surface of the upper ring portion, and the axial height of the upper ring portion is used to set the operating hole, which will not increase the height of the entire diaphragm valve, and the torque tool is inserted into the operating hole for screwing, which causes less damage and deformation to the hole wall of the operating hole, and even if there is slight damage, it will not be noticeable.

[0021] In another specific embodiment, the operating portion is an operating protrusion, which is protruded from the upper surface of the upper ring portion. Although the operating protrusion slightly increases the height of the entire diaphragm valve, it does not reduce the solid wall thickness of the upper ring portion, thereby ensuring the structural strength of the upper ring portion. At the same time, when screwing, a torque tool cover is required to be placed on the operating protrusion and rotated with the center of the connecting seat as the center of a circle. In this way, the outer wall of the operating protrusion is less damaged and deformed, and even if there is slight damage, it is within the coverage of the shell and will not affect the appearance of the diaphragm valve.

[0022] Preferably, there are multiple operating holes or operating protrusions, and the multiple operating holes or multiple operating protrusions are spaced apart around the central axis of the upper ring portion. The multiple operating holes or operating protrusions can disperse the force applied by the torque tool to each operating hole or operating protrusion, avoiding damage caused by excessive force applied to a single operating hole or operating protrusion; the multiple operating holes or operating protrusions are circumferentially distributed around the central axis of the upper ring portion. When the upper ring portion and the lower ring portion are concentrically arranged, they are naturally concentrically arranged with the lower thread on the outer circumference of the lower ring portion, so that when the connecting seat is screwed, the lower thread smoothly connects with the thread within the valve body.

[0023] Preferably, the shell includes a shell body and a support seat, the support seat is threadedly connected to the shell body, the support seat is threadedly connected to the upper thread of the connecting seat, and the support seat covers the operating part and abuts against the upper surface of the operating part or the connecting seat.

[0024] It is arranged in this way because there is a accommodating cavity inside the shell body for accommodating other components of the actuator to realize the function of driving the diaphragm to abut or separate from the valve seat to isolate or open the diaphragm valve, and the other internal components require a support structure. Therefore, a support seat separately connected to the shell body is provided to facilitate the assembly of other components of the actuator first so that other components will not interfere with the operating part, and then the support seat is connected to the shell body to confine the other components in the accommodating cavity. Finally, the support seat is threadedly connected to the connecting seat, and the support seat is supported and abutted against the upper surface of the operating part or the connecting seat and covers the operating part inside the support seat.

[0025] Preferably, the support seat includes a connecting portion, an inner extending portion radially protruding from an inner upper end of the connecting portion, and an outer extending portion radially protruding from an outer lower end of the connecting portion, wherein the inner extending portion inwardly covers the operating portion and abuts against the operating portion or the upper surface of the connecting seat, and a gap is formed between the outer extending portion and the top surface of the valve body;

[0026] The outer side surface of the connecting portion has a first thread threadedly connected to the shell body, and the first thread is located above the outer extension portion. The inner side surface of the connecting portion has a second thread threadedly connected to the upper thread of the connecting seat, and the second thread is located below the inner extension portion.

[0027] With this arrangement, the inner extension of the support seat serves to support and restrict other components within the housing, while also covering the operating portion to prevent direct contact between the operating portion and other components within the housing. The outer extension of the support seat serves to axially limit the housing while maintaining a gap with the top surface of the valve body to prevent excessive threading that could damage the lower surface of the outer extension or the top surface of the valve body, thereby affecting the proper operation and appearance of the diaphragm valve. Furthermore, due to the gap between the outer extension and the top surface of the valve body, combined with the contact between the inner extension and the operating portion or the upper surface of the connecting seat, the position of other components within the housing can be controlled by controlling the overall length of the connecting seat.

[0028] Preferably, the valve seat and the diaphragm are located in the recess, the first fluid channel and the second fluid channel are respectively connected to the recess, and the lower ring portion extends into the recess to apply force to the outer edge of the diaphragm, so that the outer edge of the diaphragm is sealed and fixed in the recess.

[0029] With such a configuration, the recess forms a space for accommodating the valve seat and the diaphragm, and accommodates the lower ring portion. During the process of threaded connection between the lower ring portion and the inner side wall of the recess, an extrusion force is continuously applied to the diaphragm to press the outer edge of the sealing diaphragm, resulting in a good sealing effect. The side wall of the recess can be simply connected to the lower ring portion, and can radially limit the diaphragm and the lower ring portion.

[0030] Preferably, an annular pressing joint is provided in the recess, and a pressing step is provided on the outer periphery of the pressing joint. The bottom end of the lower ring portion is pressed against the upper surface of the pressing step, and the lower surface of the pressing step seals and presses the outer edge of the diaphragm.

[0031] With this arrangement, the outer edge of the diaphragm is directly squeezed by the pressing joint instead of the lower ring part, which can avoid rotational wear on the outer edge of the diaphragm when the lower ring part is screwed to the valve body, and can also avoid the lower ring part driving the diaphragm to rotate and causing the diaphragm to shift; the pressing joint abuts against the lower ring part and is squeezed downward under the push of the lower ring part. The whole process is relatively smooth. Even if the pressing joint produces a small amount of circumferential deviation, the impact on the rotational wear of the diaphragm is small, thereby ensuring the sealing effect on the outer edge of the diaphragm.

[0032] Preferably, the actuator comprises an axially movable piston rod disposed in the housing, the piston rod respectively penetrating the inner sides of the upper ring portion and the lower ring portion, and the piston rod moves axially to directly or indirectly press the diaphragm;

[0033] The diameter of the operation hole is D1, and the radial width of the upper ring portion is D2, satisfying D1:D2=0.3-0.7. The depth of the operation hole is L1, and the axial height of the upper ring portion is L2, satisfying L1:L2=0.3-0.7.

[0034] In this arrangement, the center of the upper ring portion is a hollow structure for the piston rod to pass through. When the operating portion is an operating hole, the operating hole opened in the upper ring portion will weaken the structural strength of the upper ring portion. Therefore, the diameter and depth of the operating hole are limited by combining the above two parameter ratios to ensure the structural strength of the upper ring portion and avoid affecting the threaded connection between the upper ring portion and the shell and the guide limit of the piston.

[0035] Preferably, a connecting section is provided between the upper ring portion and the lower ring portion, and part of the upper thread extends on the connecting section, thereby appropriately reducing the axial height of the upper ring portion, lowering the height of the entire diaphragm valve, and ensuring that the upper thread has a sufficient effective length, and the threaded connection with the shell is more stable.

[0036] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0037] The diaphragm valve of the present invention utilizes a connecting seat to connect the actuator and the valve body respectively, and at the same time changes the position of the operating part, and the operating part is set on the radial inner side of the connecting part or the lower thread, and a torque tool that cooperates with the operating part is used to apply sufficient torque to make the connecting seat screw down to effectively press and seal the outer edge of the diaphragm, and after the connecting seat and the valve body are connected and fixed by the torque tool, the housing of the actuator is connected and fixed to the connecting seat through the connecting part. The meaning that the operating part is located within the coverage range of the housing is that the top projection of the housing covers and shields the operating part, so as to cover the operating part inside the housing, so that the operating part is basically not observed by the naked eye from the connection gap, thereby not causing damage to the outer surface of the connecting seat exposed to the housing and the valve body. Even if the operating part of the connecting seat is scratched or damaged when tightening the connecting seat, it will not affect the normal use and appearance integrity of the diaphragm valve, and there is no need to provide additional outer packaging to cover the operating part, and the cost is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0039] Figure 1 This is a cross-sectional schematic diagram of a diaphragm valve according to an embodiment of the present invention, wherein the diaphragm valve is a double-piston normally closed valve.

[0040] Figure 2 This is a cross-sectional schematic diagram of a diaphragm valve according to another embodiment of the present invention, wherein the diaphragm valve is a double-piston normally open valve.

[0041] Figure 3 This is a cross-sectional schematic diagram of a diaphragm valve according to another embodiment of the present invention, wherein the diaphragm valve is a single-piston normally closed valve.

[0042] Figure 4 This is a cross-sectional schematic diagram of a diaphragm valve according to another embodiment of the present invention, wherein the diaphragm valve is a single-piston normally open valve.

[0043] Figure 5 This is a schematic top view of the connecting socket according to an embodiment of the present invention.

[0044] Description of Reference Numerals

[0045] 10. Valve body; 11. First fluid channel; 12. Second fluid channel; 13. Recess; 14. Press joint; 141. Press step; 20. Valve seat; 30. Diaphragm; 40. Actuator; 41. Shell; 411. Shell body; 412. Support seat; 413. Connecting portion; 414. Inner extension portion; 415. Outer extension portion; 416. Groove; 42. Piston rod; 43. Spring; 44. Diaphragm pressing member; 50. Connecting seat; 51. Upper thread; 52. Lower thread; 53. Operating portion; 531. Operating hole; 54. Upper ring portion; 55. Lower ring portion; 56. Connecting section. DETAILED DESCRIPTION

[0046] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0047] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0048] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0049] like Figures 1 to 5 As shown, the diaphragm valve 30 of the embodiment of the present invention includes a valve body 10, a valve seat 20, a diaphragm 30 and an actuator 40. The valve body 10 has a first fluid channel 11 and a second fluid channel 12. The valve seat 20 is an annular structure, which is arranged in the valve body 10 and surrounds the outer peripheral side of the top of the first fluid channel 11; the first fluid channel 11 is connected to the second fluid channel 12 via the valve seat 20.

[0050] In this embodiment, the first fluid channel 11 is a fluid inflow channel, and the second fluid channel 12 is a fluid outflow channel, wherein the fluid is a process gas in a semiconductor manufacturing process; the diaphragm 30 of this embodiment is elastically deformable and is arranged above the valve seat 20, wherein the diaphragm 30 is made of metal, and a diaphragm 30 with an appropriate thickness has sufficient strength and elasticity, such as nickel-cobalt alloy or stainless steel; the valve seat 20 is made of plastic, such as PFA or PTFE or PTCFE.

[0051] The actuator 40 of this embodiment is connected to the top of the valve body 10 and is also located above the diaphragm 30. Its function is to drive the diaphragm 30 to abut or separate from the valve seat 20 to isolate or open the diaphragm valve. The actuator 40 includes a housing 41. A connecting seat 50 is located between the housing 41 and the valve body 10, which is used to apply force to the outer edge of the diaphragm 30. The connecting seat 50 includes a connecting portion connected to the housing 41, a lower thread 52 threadedly connected to the valve body 10, and an operating portion 53. The operating portion 53 is used to cooperate with a torque tool to tighten the connecting seat 50. The operating portion 53 is located radially inward of the connecting portion or lower thread 52 and is located within the coverage area of ​​the housing 41. The operating portion 53 is located within the coverage area of ​​the housing 41. The operating portion 53 is covered and obscured by the top projection of the housing 41. In other words, the operating portion 53 is located radially inward of the outer wall of the housing 41 and is obscured by the solid portion of the housing 41, preventing it from being exposed. In other words, the operating portion 53 is almost invisible to the naked eye at the connection seam.

[0052] It should also be noted that the connecting portion can be the upper thread 51 described below, so that the connecting seat 50 is also threadedly connected to the shell 41 through the thread. The connecting portion can also be the outer wall of the connecting seat 50 itself (that is, the outer wall of the upper ring portion 54 below) or a snap-fit ​​protrusion formed on the outer wall of the connecting seat 50. The connecting seat 50 and the shell 41 are connected and fixed by an interference fit snap-fit ​​method. To be easy to understand, this means that the operating portion 53 is located radially inside the connection between the connecting seat 50 and the shell 41.

[0053] The diaphragm valve of the present invention utilizes a connecting seat 50 to connect the actuator 40 and the valve body 10 respectively. At the same time, the position of the operating part 53 is changed, and the operating part 53 is set on the radial inner side of the connecting part or the lower thread 52. A torque tool that cooperates with the operating part 53 is used to apply sufficient torque to screw the connecting seat 50 downward to effectively press and seal the outer edge of the diaphragm 30. After the connecting seat 50 and the valve body 10 are connected and fixed with the torque tool, the housing 41 of the actuator 40 is connected and fixed to the connecting seat 50, and the operating part 53 is covered in the housing 41. No damage is caused to the outer surface of the connecting seat 50 exposed to the housing 41 and the valve body 10. Even if the operating part 53 of the connecting seat 50 is scratched or damaged when tightening the connecting seat 50, it will not affect the normal use and appearance integrity of the diaphragm 30 valve.

[0054] The actuator 40 in actual products can have various structures, and can be pneumatic or manual, as long as it can achieve the function of driving the diaphragm 30 to abut or separate from the valve seat 20 to isolate or open the diaphragm 30 valve. In this embodiment, the actuator 40 also includes a driving member for driving the diaphragm 30 to abut or separate from the valve seat 20 to isolate or open the diaphragm valve. Because the actuator 40 and the valve body 10 are respectively connected to the axial ends of the seat 50, the driving member needs to directly or indirectly abut the diaphragm 30. The driving member can be a piston rod.

[0055] Therefore, preferably, the bottom of the housing 41 has a groove 416, and the top of the valve body 10 has a recess 13, and the groove 416 and the recess 13 are respectively used to accommodate the connecting seat 50, and the connecting seat 50 includes an upper ring portion 54 and a lower ring portion 55, that is, the center of the connecting seat 50 is an axial hollow structure, through which a common driving member passes, and in order to realize the threaded connection between the connecting seat 50 and the housing 41 and the valve body 10, the upper thread 51 is provided on the outer circumference of the upper ring portion 54, and the lower thread 52 is provided on the outer circumference of the lower ring portion 55. The upper ring portion 54 at least partially extends into the groove 416 and is threadedly connected to the inner wall of the groove 416, and the lower ring portion 55 at least partially extends into the recess 13 and is threadedly connected to the inner wall of the recess 13; thus, during the spiraling process, the lower ring portion 55 is connected to the valve body 10 and is at least partially placed in the valve body 10, and the upper ring portion 54 is connected to the shell 41 and is at least partially placed in the shell 41. At the same time, based on the extrusion sealing effect of the connecting seat 50 on the outer edge of the diaphragm 30, the lower ring portion 55 is generally connected to the valve body thread 10 first.

[0056] After the connector 50 is connected to the housing 41 and the valve body 10, the operating portion 53 is at least partially inserted into the recess 416 or recessed portion due to its location and specific structural form. Combined with the housing 41, the operating portion 53 is effectively concealed. In one embodiment (not shown), the operating portion 53 is disposed on the upper surface of the lower ring portion 55 and radially inward of the lower thread 52. This closer proximity to the lower thread 52 facilitates application of force when tightening the connector 50. When the lower ring portion 55 is screwed into the recess 13 of the valve body 10, the operating portion 53 is still effectively covered by the housing 41.

[0057] In the attached Figure 1 In the specific embodiment shown, the operating portion 53 is arranged on the upper surface of the upper ring portion 54 and is located radially inward of the upper thread 51. The upper surface or the space above the upper ring portion 54 is utilized to provide a larger operating space when cooperating with a torque tool, and to ensure that after the upper ring portion 54 is connected to the shell 41, the operating portion 53 is also placed in the groove 416 in the shell 41 and is covered by the shell 41 at the same time.

[0058] Better, such as Figure 1 As shown, there is a connecting section 56 between the upper ring portion 54 and the lower ring portion 55. The axial height of the upper ring portion 54 is L2, and the axial height of the upper thread 51 is L3, satisfying L3≥L2, that is, part of the upper thread 51 is extended on the connecting section 56. Therefore, on the one hand, the axial height of the upper ring portion 54 can be appropriately reduced, and the height of the entire diaphragm valve 30 can be reduced. On the other hand, it is ensured that the upper thread 51 has a sufficient effective length, and the threaded connection with the housing 41 is more stable.

[0059] There are many kinds of structures of the operating portion 53, such as an operating hole 531 or an operating protrusion. Specifically, the operating hole 531 is formed by punching a hole axially downward on the upper surface of the upper ring portion 54 or the upper surface of the lower ring portion 55, which will not increase the height of the entire diaphragm valve 30, and the torque tool is inserted into the hole for screwing, which causes little damage and deformation to the hole wall of the operating hole 531, and even if there is slight damage, it will not be noticeable; and the operating protrusion is formed by the upward protrusion of a part or the entire upper surface of the upper ring portion 54. Although the operating protrusion will slightly increase the height of the entire diaphragm valve 30, it will not reduce the solid wall thickness of the upper ring portion 54, thereby ensuring the structural strength of the upper ring portion 54.

[0060] The number of the operating hole 531 can be one, which can be an annular hole concentric with the upper ring portion 54, the inner wall or outer wall of the annular hole is a non-cylindrical surface or has a protrusion, or the operating hole 531 is a polygonal annular hole, or the operating hole 531 is a circular hole on one side and a vertical plane on the other side, forming a "D" hole. Of course, it can also be other non-circular holes; the torque tool includes an embedding portion and a gripping portion, the shape of the embedding portion is adapted to the shape of the operating hole 531, and when in use, the embedding portion is inserted into the operating hole 531 and a rotational force is applied to the gripping portion, thereby driving the connecting seat 50 to rotate.

[0061] like Figure 5 As shown, the number of operating holes 531 can also be multiple, and the multiple operating holes 531 are spaced apart around the central axis of the upper ring portion 54. The multiple operating holes 531 can disperse the torque tool acting on each operating hole 531, avoiding excessive force on a single operating hole 531 and causing damage; the multiple operating holes 531 are circumferentially distributed around the central axis of the upper ring portion 54, and are concentrically arranged with the lower thread 52 on the outer peripheral surface of the lower ring portion 55, so that when the connecting seat 50 rotates, the lower thread 52 is smoothly connected to the internal thread of the valve body 10.

[0062] The center of the upper ring portion 54 is a hollow structure for the piston rod 42 to pass through. When the operating portion 53 is an operating hole 531, the operating hole 531 opened in the upper ring portion 54 will weaken the structural strength of the upper ring portion 54. Therefore, the diameter and depth of the operating hole 531 are limited by the following two parameter ratios to ensure the structural strength of the upper ring portion 54 and avoid affecting the threaded connection between the upper ring portion 54 and the housing 41 and the guide limit of the piston rod 42.

[0063] Specifically, such as Figure 1As shown, the diameter of the operating hole 531 is D1, and the radial width of the upper ring portion 54 is D2, satisfying D1:D2=0.3-0.7. This setting ensures that the actual wall thickness of the upper ring portion 54 will not be too small, and the structural strength of the upper ring portion 54 can meet the torsional force during threaded connection, and will not cause damage to the upper ring portion 54; if D1:D2<0.3, the diameter of the operating hole 531 is too small, and the corresponding embedded diameter of the embedded torque tool is also too small, which is easy to be damaged, thereby affecting the balanced transmission of the torsional force to the upper ring portion 54; if D1:D2>0.7, the wall thickness of the upper ring portion 54 is too small, and when the force of the torque tool acts on the side wall of the upper ring portion 54, it is easy to cause deformation and damage to the side wall of the upper ring portion 54. Similarly, the depth of the operating hole 531 is L1, and the axial height of the upper ring portion 54 is L2, satisfying L1:L2=0.3-0.7, which ensures the contact area between the torque tool and the side wall of the upper ring portion 54 and realizes the dispersion of the torsional force; if L1:L1<0.3, the embedded portion of the torque tool is not inserted into the operating hole 531 to a sufficient depth, and when the torque tool is rotated, the embedded portion is easily disengaged from the operating hole 531, making it difficult to operate; if L1:L2>0.7, the depth of the operating hole 531 is too deep, the bottom wall thickness of the upper ring portion 54 is insufficient, the overall structural strength of the upper ring portion 54 is insufficient, and the overall structure is easily deformed and damaged.

[0064] In other embodiments, the operating portion 53 is an operating protrusion, the number of the operating protrusion is one, and the operating portion 53 is an annular structure having an outer diameter equal to or smaller than the outer diameter of the upper ring portion 54. The inner wall or outer wall of the annular structure is a non-cylindrical surface or has a protrusion. For example, the operating protrusion is a polygonal annular protrusion, or the operating protrusion is a circular annular protrusion on one side and a vertical plane on the other side, forming an annular structure similar to "D". The torque tool corresponding to the operating protrusion includes a sleeve portion and a grip portion. The sleeve portion has a through hole whose shape is adapted to the shape of the operating protrusion. When in use, the sleeve portion needs to be sleeved on the operating protrusion, and a rotational force is applied to the grip portion to drive the connecting seat 50 to rotate. In summary, the torque tool is mainly a customized tooling for cooperating with the operating portion to screw the connecting seat 50, and is not specifically limited.

[0065] In other embodiments, there are multiple operating protrusions, spaced apart around the central axis of the upper ring portion 54. Multiple operating protrusions can disperse the force applied by the torque tool to each operating protrusion, preventing damage to a single operating protrusion due to excessive force. Multiple operating protrusions are circumferentially distributed around the central axis of the upper ring portion 54 and concentrically arranged with the lower threads 52 on the outer circumference of the lower ring portion 55, so that when the connecting seat 50 rotates, the lower threads 52 smoothly connect with the internal threads of the valve body 10. The number and specific distribution of the operating holes 531 or operating protrusions can be set according to user requirements.

[0066] like Figures 1 to 4In the pneumatic valves of the illustrated embodiments, the actuator 40 includes a housing 41 connected to the top of the valve body 10, a piston rod 42 disposed in the housing 41, and a spring 43 elastically pressing against the piston rod 42. The piston rod 42 is axially movable and is located above the diaphragm 30. The piston rod 42 can directly or indirectly press against the diaphragm 30. The difference is that Figure 1 It is a double-piston normally closed valve, that is, the spring 43 is arranged on the side of the piston rod 42 away from the diaphragm 30, and has two pistons; Figure 2 It is a double-piston normally open valve, that is, the spring 43 is arranged on the side of the piston rod 42 assembly close to the diaphragm 30, and has two pistons; Figure 3 It is a single-piston normally closed valve, that is, the spring 43 is arranged on the side of the piston rod 42 away from the diaphragm 30, and it has only one piston; Figure 4 It is a single-piston normally open valve, that is, the spring 43 is arranged on the side of the piston rod 42 component close to the diaphragm 30, and it has only one piston.

[0067] For the normally closed valve, when the driving gas is not passed, the spring 43 pushes the piston rod 42 and the diaphragm pressing member 44 toward the diaphragm 30 due to the compressed rebound force, so that the diaphragm pressing member 44 abuts against the diaphragm 30, the diaphragm 30 is deformed and sealed against the valve seat 20, the first fluid channel 11 and the second fluid channel 12 are disconnected, and the diaphragm 30 valve is in a closed state at this time; after the driving gas is passed, the driving gas is generally an inert gas, and the upward force of the driving gas on the piston rod 42 is greater than the downward force of the spring 43 on the piston rod 42, the piston rod 42 moves axially upward to move away from the diaphragm 30, and the piston rod 42 removes the squeezing effect on the diaphragm pressing member 44. The diaphragm 30 recovers under the action of its own reset force and the process gas force between the first fluid channel 11 and the second fluid channel 12, pushing up the diaphragm pressing member 44, and the diaphragm 30 valve is in an open state.

[0068] For the normally open valve, when the driving gas is not passed, the spring 43 pushes the piston rod 42 and the diaphragm pressing member 44 away from the diaphragm 30, so that the diaphragm pressing member 44 does not abut against the diaphragm 30, the diaphragm 30 is not deformed, and the first fluid channel 11 and the second fluid channel 12 are connected, and the diaphragm 30 valve is in an open state; after ventilation, the downward force of the driving gas on the piston rod 42 is greater than the upward force of the spring 43 on the piston rod 42, the piston rod 42 moves axially downward rapidly, abutting against the diaphragm pressing member 44, and then the diaphragm pressing member 44 abuts against the diaphragm 30, the diaphragm 30 is deformed and sealed against the valve seat 20, the first fluid channel 11 and the second fluid channel 12 are disconnected, and the pneumatic diaphragm 30 valve is in a closed state.

[0069] like Figure 1In the illustrated embodiment, the housing 41 includes a housing body 411 and a support seat 412. The housing body 411 has an internal cavity for accommodating other components of the actuator 40 to achieve the function of driving the diaphragm 30 to abut or separate from the valve seat 20 to isolate or open the diaphragm 30 valve. The other components include but are not limited to a mounting seat for the piston rod 42. Since the other internal components require a support structure, a support seat 412 is provided, which is separate from the housing body 411. The support seat 412 is threadedly connected to the housing body 411 to facilitate assembly of the internal components of the actuator 40. The support seat 412 is then connected to the housing body 411 to confine the components in the cavity. The support seat 412 is threadedly connected to the upper thread 51 of the connecting seat 50. The support seat 412 covers the operating portion 53 and abuts the operating portion 53 or the upper surface of the connecting seat 50 to achieve connection between the support seat 412 and the connecting seat 50, and covers the operating portion 53 within the support seat 412. Similarly, the support seat 412 is also an annular structure, with the piston rod 42 passing through the middle.

[0070] Furthermore, in order to reduce the height of the entire diaphragm valve 30, the support seat 412 includes a connecting portion 413 and an inner extension portion 414 radially protruding from the inner upper end of the connecting portion 413. The connecting portion 413 and the inner extension portion 414 form a groove 416 for accommodating the upper ring portion 54. The inner side surface of the connecting portion 413 has a second thread threadedly connected to the upper thread 51 of the connecting seat 50. The second thread is located below the inner extension portion 414. The inner side surface of the connecting portion 413 is threadedly connected to the upper ring portion 54 and the upper ring portion 54 is accommodated radially on the inner side of the connecting portion 413; and the function of the inner extension portion 414 of the support seat 412 is, on the one hand, to support other components inside the shell body 411, and on the other hand, to radially cover the operating portion 53 to avoid direct contact between the operating portion 53 and other components inside the shell body 411.

[0071] The support seat 412 also includes an outer extension portion 415 radially protruding from the outer lower end of the connecting portion 413. The outer side surface of the connecting portion 413 has a first thread that is threadedly connected to the shell body 411. The first thread is located above the outer extension portion 415. The outer side surface of the connecting portion 413 is threadedly connected to the shell body 411. At the same time, the outer extension portion 415 of the support seat 412 serves to axially limit the shell body 411 and maintain a gap with the top surface of the valve body 10 to avoid excessive screwing and damage to the lower surface of the outer extension portion 415 or the top surface of the valve body 10, which would affect the normal operation and appearance of the diaphragm valve. It should be noted that Figure 1 The middle dotted line defines the connection portion 413 , the inner extension portion 414 and the outer extension portion 415 in the Z-shape.

[0072] In addition, the upper surface of the upper ring portion 54 is abutted against the lower surface of the inner extension portion 414, and the piston rod 42 extends from the lower surface of the inner extension portion 414, passes through the connecting seat 50 and extends into the valve seat 20, and the connection position of the lower ring portion 55 and the valve body 10 is fixed, that is, the axial distance from the lower ring portion 55 to the diaphragm 30 is fixed. Therefore, the distance from the extended length of the piston rod 42 to the diaphragm 30 is related to the axial length of the connecting seat 50, and the extended length of the piston rod 42 is related to the sealing performance of the diaphragm 30 and the valve seat 20. Therefore, when designing the axial length of the connecting seat 50, it is necessary to ensure that it can meet the maximum extended length of the piston rod 42 so that the diaphragm 30 and the valve seat 20 can be sealed tightly to ensure the sealing performance between the diaphragm 30 and the valve seat 20. Better yet, some design margin can be retained so that the piston rod 42 can still seal and press the diaphragm 30 firmly on the valve seat 20 after slight compression deformation during long-term use.

[0073] like Figure 1 As shown, the valve seat 20 and the diaphragm 30 are located within the recess 13, and the first fluid channel 11 and the second fluid channel 12 are respectively connected to the recess 13. The recess 13 can act as a radial limit for the diaphragm 30, so that the center of the diaphragm 30 is substantially coaxial with the center of the valve seat 20, thereby improving the sealing effect after the diaphragm 30 and the valve seat 20 abut. At the same time, the accommodation function of the recess 13 can also shorten the overall height of the pneumatic diaphragm valve, making the overall structure of the valve more compact. Of course, in other embodiments, the recess 13 may not be provided at the top of the valve body 10. Instead, the valve seat 20 is directly provided on the plane of the top surface of the valve body 10, and the housing 41 of the actuator 40 is used to seal the valve body 10 and seal the diaphragm 30. The first fluid channel 11 and the second fluid channel 12 are respectively connected to the valve seat 20.

[0074] like Figure 1 In the embodiment shown, the lower ring portion 55 extends into the recess 13 and applies force to the outer edge of the diaphragm 30. The outer edge of the diaphragm 30 is sealed and fixed in the recess 13. During the process of threaded connection between the lower thread 52 and the inner side wall of the recess 13, an extrusion force is continuously applied to the diaphragm 30 to seal the outer edge of the diaphragm 30. The side wall of the recess 13 can form a seal and protection for the internal components thereof. The connection method between the lower ring portion 55 and the lower ring portion 55 is simple and the sealing effect is good.

[0075] Better, such as Figure 1In the illustrated embodiment, an annular pressing joint 14 is provided in the recess 13, and a pressing step 141 is provided on the outer periphery of the pressing joint 14. The bottom end of the lower ring portion 55 is pressed and abutted against the upper surface of the pressing step 141, and the lower surface of the pressing step 141 seals and presses the outer edge of the diaphragm 30. The pressing joint 14 is used instead of the connecting portion 413 to directly squeeze the outer edge of the diaphragm 30, which can avoid rotational wear on the outer edge of the diaphragm 30 when the lower ring portion 55 is screwed to the valve body 10, and can also avoid the lower ring portion 55 driving the diaphragm 30 to rotate and cause the diaphragm 30 to shift. The pressing joint 14 abuts against the lower ring portion 55 and is squeezed downward under the push of the lower ring portion 55. The whole process is relatively smooth. Even if the pressing joint 14 produces a small amount of circumferential deviation, the impact on the diaphragm 30 is small, thereby ensuring the sealing effect on the outer edge of the diaphragm 30.

[0076] The actuator 40 also includes a diaphragm pressing member 44. In the axial direction, the diaphragm pressing member 44 is located below the piston rod 42, and the piston rod 42 and the diaphragm pressing member 44 are aligned with the central area of ​​the diaphragm 30, so that the central area of ​​the diaphragm 30 is aligned and sealed with the valve seat 20 under the action of the actuator 40; in the radial direction, the diaphragm pressing member 44 is located radially inside the pressing joint 14. Therefore, the function of the pressing joint 14 is also to radially limit the diaphragm pressing member 44, so as to prevent the diaphragm pressing member 44 from being skewed when subjected to the force of the piston rod 42 and unable to align with the central area of ​​the diaphragm 30, affecting the normal deformation stroke of the diaphragm 30 and causing the diaphragm 30 to be unable to seal against the valve seat 20.

[0077] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A diaphragm valve, comprising: A valve body having a first fluid passage and a second fluid passage; an annular valve seat, disposed on the valve body and surrounding an outer circumference of a top portion of the first fluid channel, wherein the first fluid channel is connected to the second fluid channel via the valve seat; a diaphragm, elastically deformable, disposed above the valve seat, with the outer edge of the diaphragm being pressed and sealed; An actuator is connected to the top of the valve body and is used to drive the diaphragm to abut against or separate from the valve seat to isolate or open the diaphragm valve; characterized in that: The actuator includes a housing, a connecting seat for applying force to the outer edge of the diaphragm is provided between the housing and the valve body, the connecting seat includes a connecting portion connected to the housing, a lower thread threadedly connected to the valve body, and an operating portion, the operating portion being used to cooperate with a torque tool to screw the connecting seat; The operating portion is arranged on a radially inner side of the connecting portion or the lower thread and is located within a covering range of the housing.

2. The diaphragm valve according to claim 1, wherein The connecting seat includes an upper ring portion and a lower ring portion, the connecting portion is an upper thread provided on the outer circumference of the upper ring portion, and the lower thread is provided on the outer circumference of the lower ring portion; The bottom of the shell body has a groove, the top of the valve body has a recess, the upper ring portion at least partially extends into the groove and is threadedly connected to the inner wall of the groove, and the lower ring portion at least partially extends into the recess and is threadedly connected to the inner wall of the recess; the operating portion is provided on the upper surface of the upper ring portion or the lower ring portion, and at least a portion of the operating portion extends into the groove or the recess.

3. The diaphragm valve according to claim 2, wherein: The operating portion is an operating hole, and the operating hole is opened axially from the upper surface of the upper ring portion; Alternatively, the operating portion is an operating protrusion, and the operating protrusion is convexly provided on the upper surface of the upper ring portion.

4. The diaphragm valve according to claim 3, wherein: There are multiple operating holes or multiple operating protrusions, and the multiple operating holes or multiple operating protrusions are distributed at intervals around the central axis of the upper ring part.

5. The diaphragm valve according to claim 2, wherein: The shell includes a shell body and a support seat, the support seat is threadedly connected to the shell body, the support seat is threadedly connected to the upper thread of the connecting seat, and the support seat covers the operating part and abuts against the upper surface of the operating part or the connecting seat.

6. The diaphragm valve according to claim 5, wherein: The support seat includes a connecting portion, an inner extension portion radially protruding from an inner upper end of the connecting portion, and an outer extension portion radially protruding from an outer lower end of the connecting portion, wherein the inner extension portion inwardly covers the operating portion and abuts against the operating portion or the upper surface of the connecting seat, and a gap is formed between the outer extension portion and the top surface of the valve body; The outer side surface of the connecting portion has a first thread threadedly connected to the shell body, and the first thread is located above the outer extension portion. The inner side surface of the connecting portion has a second thread threadedly connected to the upper thread of the connecting seat, and the second thread is located below the inner extension portion.

7. The diaphragm valve according to claim 2, wherein: The valve seat and the diaphragm are located in the recess, the first fluid channel and the second fluid channel are respectively connected to the recess, and the lower ring portion extends into the recess to apply force to the outer edge of the diaphragm, so that the outer edge of the diaphragm is sealed and fixed in the recess.

8. The diaphragm valve according to claim 7, wherein: An annular pressing joint is provided in the recess, and a pressing step is provided on the outer periphery of the pressing joint. The bottom end of the lower ring portion is pressed against the upper surface of the pressing step, and the lower surface of the pressing step seals and presses the outer edge of the diaphragm.

9. The diaphragm valve according to claim 3, wherein: The actuator comprises an axially movable piston rod disposed in the housing, the piston rod respectively penetrating the inner sides of the upper ring portion and the lower ring portion, and the piston rod axially moves to directly or indirectly press the diaphragm; The diameter of the operation hole is D1, and the radial width of the upper ring portion is D2, satisfying D1:D2=0.3-0.

7. The depth of the operation hole is L1, and the axial height of the upper ring portion is L2, satisfying L1:L2=0.3-0.

7.

10. The diaphragm valve according to claim 2, wherein: A connecting section is further provided between the upper ring portion and the lower ring portion, and part of the upper thread extends on the connecting section.

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