MICROFLUIDIC DEVICES WITH MECHANICALLY SEALED DIAPHRAGM VALVES
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2011-08-20
- Publication Date
- 2026-04-01
AI Technical Summary
Existing microfluidic devices face challenges in efficiently regulating fluid flow with durable and reliable diaphragm valves that maintain low leakage and failure rates, particularly in complex fluidic systems requiring precise control and integration of macroscale and nanoscale components.
A microfluidic device design featuring a diaphragm valve configuration with a monolithic, flat sheet elastic layer sandwiched between a fluidics and actuation layer, sealed by a raised sealing ring, allowing for mechanically sealed and actuated fluid flow control using positive or negative pressure, enabling durable and low-leakage operation.
The design achieves reliable fluid flow regulation with low failure rates and leakage, supporting complex fluidic circuits and integration of macroscale and nanoscale components, facilitating high-density array fabrication and operation across varying conditions.