Diaphragm valve

Abstract

The diaphragm valve comprises a valve body, a valve seat, a diaphragm and an actuator, the actuator comprises a shell assembly and an actuating assembly, the actuating assembly specifically comprises a screw rod, a pushing piece and a diaphragm pressing piece, the diaphragm pressing piece is located above the diaphragm in an axial moving mode, the screw rod is in threaded fit with the shell assembly, and the pushing piece is located above the diaphragm. The pushing piece is located between the screw and the diaphragm pressing piece and is in radial clearance fit with the screw after being connected with the screw in an inserted mode, and the pushing piece can only axially abut against the screw and axially move to abut against the diaphragm pressing piece when the screw rotates downwards, so that the diaphragm pressing piece extrudes the diaphragm, and the diaphragm deforms and is sealed with the valve seat. The pushing piece basically only axially moves under the rotating movement effect of the screw rod, the pushing piece cannot cause rotation of the diaphragm pressing piece, the situation that the screw rod directly makes contact with the diaphragm pressing piece and drives the diaphragm pressing piece to rotate is avoided, and rotation abrasion to the surface of the diaphragm is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of valves, in particular to a diaphragm valve. Background Art

[0002] A modular gas supply system (IGS) is a device used for gas control in the semiconductor industry. As semiconductor manufacturing processes become more advanced, the requirements for gas control equipment are also increasing. The modular gas system uses a combination of flow blocks and fluid controllers (stacked blocks) to form at least one pipeline line on a substrate, using a modular design. While reducing the size of the equipment, installation and maintenance become simpler. For example, an existing fluid control device / system includes at least one pipeline line, each of which includes several fluid controllers and flow blocks. The fluid controller can be a pneumatic diaphragm valve, a manual diaphragm valve, etc. Valves in the pipeline are mainly used to control the on and off of process gases.

[0003] In the prior art, a manual diaphragm valve includes a valve body and a manual actuator connected to the valve body. The valve body is provided with a diaphragm, a valve seat, a fluid inlet passage, and a fluid outlet passage. The diaphragm is located above the valve seat and its outer edge is pressed and sealed. Under the action of the manual actuator, the diaphragm undergoes elastic deformation, abutting and sealing or separating with the valve seat, thereby isolating or opening the fluid inlet passage and the fluid outlet passage. The manual actuator includes a threaded screw. The screw is manually rotated to move up and down. When the screw is rotated in a first direction, the screw moves downward against the diaphragm pressing member, causing the diaphragm to deform downward and abut against the valve seat, thereby blocking the fluid inlet passage and the fluid outlet passage. When the screw is rotated in a second direction opposite to the first direction, the screw moves upward and no longer abuts the diaphragm pressing member, causing the diaphragm to gradually return to its original state upward, thereby releasing the diaphragm and the valve seat from abutment, opening the fluid inlet passage and the fluid outlet passage.

[0004] However, in the prior art, the screw that can rotate directly axially abuts against the movably arranged diaphragm pressing part. Although the screw that rotates downward can directly push the diaphragm pressing part axially, there is a risk of causing large rotational wear to the diaphragm pressing part and driving the diaphragm pressing part to rotate during the rotation process, which in turn causes the rotating diaphragm pressing part to cause rotational wear on the surface of the diaphragm, and even causes the diaphragm to be twisted under force, causing the extrusion seal of the outer edge of the diaphragm to fail, which is not conducive to the use accuracy and life of the valve. Utility Model Content

[0005] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a diaphragm valve that solves the problem that the rotating screw of the existing diaphragm valve directly presses the diaphragm pressing piece, which easily causes rotational wear and rotation of the diaphragm pressing piece and the diaphragm surface.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A diaphragm valve, comprising:

[0008] A valve body having a first fluid passage and a second fluid passage;

[0009] an annular valve seat, disposed on the valve body and surrounding an outer circumference of a top end of the first fluid channel, wherein the first fluid channel and the second fluid channel are connected via the valve seat;

[0010] a diaphragm, elastically deformable and sealingly disposed above the valve seat;

[0011] an actuator connected to the top end of the valve body, for driving the diaphragm to abut against or separate from the valve seat to isolate or open the diaphragm valve;

[0012] The actuator includes a housing assembly and an actuating assembly provided in the housing assembly, the actuating assembly includes a screw, a pusher, and a diaphragm pressing member, the diaphragm pressing member is axially movable and is located above the diaphragm, and the screw is threadedly engaged with the housing assembly;

[0013] The pushing member is located between the screw and the diaphragm pressing member. The pushing member is inserted into the screw and matched with the radial clearance. When the screw rotates downward, the pushing member can only axially abut against the screw and axially move to abut the diaphragm pressing member, so that the diaphragm pressing member squeezes the diaphragm, causing the diaphragm to deform and seal with the valve seat.

[0014] The diaphragm valve of the present invention is provided with a pusher between the screw and the diaphragm pressing piece. The pusher is plugged into the screw and matched with the radial clearance. The screw and the diaphragm pressing piece do not need to be in direct contact. When the screw rotates downward, the pusher and the screw are only in axial contact and the side walls have no circumferential friction contact. The bottom end of the pusher is in contact with the diaphragm pressing piece, that is, the rotation of the screw applies an axial force to the pusher. The pusher moves axially under the action of the screw, and is basically not directly rotated by the screw. Then the axially moving pusher generally exerts an axial force on the diaphragm pressing piece, and the diaphragm pressing piece The pressing piece can basically only move axially and cannot rotate. Therefore, the pushing piece prevents the screw from directly contacting the diaphragm pressing piece and driving the diaphragm pressing piece to rotate. Even if the pushing piece rotates slightly due to the circumferential friction force at the axial abutment position with the screw, the wear effect on the diaphragm pressing piece is not obvious and is not enough to drive the diaphragm pressing piece to rotate. The diaphragm pressing piece only applies axial force to the diaphragm surface in the shell assembly, thereby avoiding the problem of applying circumferential rotational force to the diaphragm surface causing rotational wear of the diaphragm surface or distortion of the diaphragm affecting the sealing.

[0015] Preferably, the actuating assembly further comprises a rotating rod, which is rotatably disposed above the screw rod and movably plugged into the screw rod to drive the screw rod to rotate.

[0016] Such a setting sets up a movable plug-in fitting relationship between the rotating rod and the screw, wherein the rotating rod only rotates without axial displacement, and the screw rotates and moves axially under the drive of the rotating rod, and because the screw is located inside the shell assembly, its axial movement will not affect the axial height of the rotating rod, nor will it interfere with the external space, which is conducive to the operation of the diaphragm valve in a narrow space. In addition, the split screw cooperates with the rotating rod with movable plug-in fitting on the upper side and the pusher with radial clearance fitting on the lower side. Compared with the prior art in which the one-piece long screw directly abuts the diaphragm pressing member, the rotating rod only rotates, the screw rotates, and the pusher moves axially, while the various split parts perform different movements, which can avoid different problems caused by the screw rotating up and down, and is easy to operate.

[0017] Alternatively, the screw has a planar pressing portion, and the pushing member has a planar pressure-receiving portion. When the screw rotates downward, the planar pressing portion abuts against the planar pressure-receiving portion.

[0018] The screw and the pusher in the present invention adopt planar contact abutment, and the planar contact area is controlled within an appropriate range, avoiding the stress concentration caused by the small arc contact area in the prior art, which leads to a large degree of wear on the screw and the pusher, thereby affecting the set stroke of the screw and the control accuracy of the diaphragm valve; it also avoids the contact area being too large, which increases the wear area between the screw and the pusher, thereby increasing the friction force, making the rotation of the screw and the rotating rod more laborious.

[0019] Preferably, the bottom end of the screw has a first hole extending axially, the pushing member includes a mounting body and a pushing body fixed to the mounting body, the mounting body is loosely fitted in the first hole, and the pushing body is located outside the first hole;

[0020] The flat pressing portion is the bottom end plane of the screw, and the flat pressed portion is the top end plane of the pushing body;

[0021] or,

[0022] The bottom end of the screw has a first hole extending axially, the pushing member includes a mounting body and a pushing body fixed to the mounting body, the mounting body is loosely fitted in the first hole, the pushing body is located outside the first hole, a protrusion is provided on the inner wall of the first hole, the planar pressing portion is the bottom end plane of the protrusion, and the planar pressure portion is the top end plane of the mounting body;

[0023] or,

[0024] The top of the pusher is provided with an axially extending cavity, the bottom end of the screw has an axially extending protrusion, the protrusion is loosely fitted in the cavity, the planar pressing portion is the bottom end plane of the protrusion, and the planar pressure portion is the bottom wall plane of the cavity.

[0025] With such an arrangement, there are multiple ways of plugging and fitting between the screw and the pusher. The pusher can be plugged into the screw, or the screw can be plugged into the pusher, so that the screw and the pusher can move axially synchronously to ensure the control accuracy of the diaphragm valve. At the same time, the pusher and the screw are plugged and fitted with a radial gap. The rotation of the screw will basically not cause circumferential friction with the side wall of the screw to drive the pusher to rotate, thereby avoiding the pusher causing rotational wear on the surface of the diaphragm pressing member or driving the diaphragm pressing member to rotate.

[0026] Preferably, the pusher is made of aluminum and the screw is made of stainless steel. Since the friction coefficient between aluminum and stainless steel is good, the rotational wear at the axial contact point between the pusher and the screw can be reduced.

[0027] Preferably, the contact area between the planar pressing portion and the planar pressure-receiving portion is smaller than the bottom end area of ​​the screw, that is, the contact area between the screw and the pushing member is smaller than the direct contact area between the screw and the diaphragm pressing member, so that the wear area between the screw and the pushing member is smaller, making the rotation of the screw and the rotating rod more labor-saving, and also avoiding driving the diaphragm pressing member to rotate.

[0028] Preferably, the contact area between the planar pressing portion and the planar pressure receiving portion is S1, and the area of ​​the plane at the bottom end of the screw is S2, satisfying 0.1≤S1:S2≤0.5.

[0029] Preferably, the top end of the screw has an axially extending second hole, and the second hole is a special-shaped hole. The bottom end of the rotating rod has a limiting portion, and the limiting portion is adapted to the shape of the second hole and can be inserted into the second hole to drive the screw to rotate; the shapes of the limiting portion and the second hole are both non-circular, which realizes the transmission of rotational force between the rotating rod and the screw, and the height of the limiting portion inserted into the second hole is greater than the axial movement distance of the screw, and the depth of the second hole is greater than the total height of the limiting portion, ensuring that the rotating rod can always drive the screw to rotate.

[0030] Preferably, the second hole is any one of square, rounded rectangle, racetrack shape or a combination of any one of them and circle; the shape of the second hole is diverse, and a suitable shape can be selected according to the use requirements or process requirements to ensure the circumferential limit fit between the rotating rod and the screw.

[0031] Preferably, a groove is formed on the top surface of the diaphragm pressing member, a portion of the pushing member is loosely fitted in the groove and abuts against the bottom wall of the groove, and the top surface of the diaphragm pressing member is spaced apart from the bottom end surface of the screw.

[0032] With this arrangement, the purpose of the groove is to radially limit the pusher to avoid radial displacement of the pusher relative to the screw or diaphragm pressing member, thereby ensuring accurate insertion and axial synchronous movement of the pusher and the screw; at the same time, the groove can also shorten the overall height of the entire actuator, making the diaphragm valve smaller and more suitable for installation and use in narrow spaces, while the diaphragm pressing member and the screw always maintain an axial spacing setting to avoid the screw transmitting rotation to the diaphragm pressing member, causing rotational wear on the diaphragm pressing member or driving the diaphragm pressing member to rotate, a part of the pusher is matched with the clearance of the groove and then coordinated with the radial clearance of the pusher and the screw. Even if the pusher rotates slightly, the side wall of the pusher will not circumferentially rub against the inner wall of the groove, further preventing adverse rotation of the diaphragm pressing member.

[0033] Preferably, the top end of the rotating rod extends to the outside of the shell assembly, and the actuator also includes a rotating assembly arranged above the shell assembly, the rotating assembly includes a rotating wheel fixed to the top end of the rotating rod and a knob covered outside the rotating wheel and fixed to the rotating wheel, the knob is provided with a grip for cooperating with a human hand, and the bottom end surface of the rotating wheel is clearance-matched with the top end surface of the shell assembly.

[0034] With such a configuration, the function of the rotating wheel is to make the rotation of the rotating rod smoother. The bottom end surface of the rotating wheel is clearance-matched with the top end surface of the shell assembly to avoid friction between the rotating wheel and the shell assembly that interferes with the rotation of the knob, making the rotation of the rotating wheel more labor-saving; the function of the grip of the knob is to facilitate the operator's operation and make it easier to rotate the rotating wheel.

[0035] Preferably, the shell assembly includes a hollow shell and a hollow connecting seat; the upper and lower ends of the connecting seat are respectively connected to the shell and the valve body, the inner wall of the connecting seat is provided with a thread engaged with the screw thread, the screw thread is connected to the connecting seat, and the rotating rod is rotatably arranged in the shell.

[0036] With this arrangement, the function of the connecting seat is to connect the housing and the valve seat on the one hand, and to be threadedly connected to the screw on the other hand, to radially limit the screw so that it maintains the axial setting and rotates axially, thereby ensuring the set stroke of the screw and the control accuracy of the diaphragm valve.

[0037] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0038] The diaphragm valve of the present invention has a pusher provided between the screw and the diaphragm pressing piece. The pusher is plugged into the screw and matched with the radial clearance. The screw and the diaphragm pressing piece do not need to be in direct contact. When the screw rotates downward, the pusher and the screw are only in axial contact without circumferential friction contact. The bottom end of the pusher is in contact with the diaphragm pressing piece, that is, the rotation and movement of the screw exert an axial force on the pusher. The pusher moves axially under the action of the screw, and is basically not directly rotated by the screw. Therefore, the axially moving pusher generally exerts an axial force on the diaphragm pressing piece, and the diaphragm The membrane pressing part can basically only move axially and cannot rotate. Therefore, the pushing part avoids the situation where the screw directly contacts the diaphragm pressing part and drives the diaphragm pressing part to rotate. Even if the pushing part rotates slightly at the abutment position with the screw due to the action of circumferential friction, the wear effect on the diaphragm pressing part is not obvious, and it is not enough to drive the diaphragm pressing part to rotate. The diaphragm pressing part only applies axial force to the diaphragm surface in the shell assembly, thereby avoiding the problem of applying circumferential rotational force to the diaphragm surface causing rotational wear of the diaphragm surface or distortion of the diaphragm affecting the sealing. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 This is a schematic diagram of the appearance of a diaphragm valve according to an embodiment of the present utility model.

[0041] Figure 2 This is a cross-sectional schematic diagram of the diaphragm valve according to the first embodiment of the present invention.

[0042] Figure 3 This is a structural diagram of the rotating rod of Example 1 of the present utility model.

[0043] Figure 4 This is a schematic structural diagram of the screw rod of the first embodiment of the present invention.

[0044] Figure 5 for Figure 4 A schematic structural diagram of the screw shown at another angle.

[0045] Figure 6 This is a structural diagram of the pushing member of the first embodiment of the present utility model.

[0046] Figure 7 This is a schematic diagram of the cooperation between the screw and the pushing member in the second embodiment of the present invention.

[0047] Figure 8 This is a schematic diagram of the cooperation between the screw and the pushing member in the third embodiment of the present invention.

[0048] Figure 9 This is a schematic diagram of the cooperation between the screw and the pushing member in the fourth embodiment of the present utility model.

[0049] Figure 10 This is a schematic diagram of the cooperation between the screw and the pushing member in the fifth embodiment of the present utility model.

[0050] Description of Reference Numerals

[0051] 10. Valve body; 11. First fluid channel; 12. Second fluid channel;

[0052] 20. Valve seat;

[0053] 30. Diaphragm;

[0054] 40. Housing assembly; 41. Housing; 42. Connecting seat;

[0055] 50. Actuating assembly; 51. Screw; 511. First hole; 512. Second hole; 513. Protrusion; 514. Protrusion; 515. Planar pressing portion; 52. Rotating rod; 521. Position-limiting portion; 53. Pushing member; 531. Planar pressure portion; 532. Mounting body; 533. Pushing member; 534. Concave cavity; 54. Diaphragm pressing member; 541. Groove;

[0056] 60. Rotating assembly; 61. Rotating wheel; 611. Circular mounting post; 612. Threaded hole; 62. Knob; 621. Cavity; 622. Through hole. DETAILED DESCRIPTION

[0057] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0058] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0059] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0060] like Figure 1 and 2 As shown, a diaphragm valve according to an embodiment of the present invention includes a valve body 10, a valve seat 20, a diaphragm 30, and an actuator. The valve body 10 has a first fluid channel 11 and a second fluid channel 12. The valve seat 20 is an annular structure disposed within the valve body 10 and surrounds the outer periphery of the top end of the first fluid channel 11. The first fluid channel 11 communicates with the second fluid channel 12 via the valve seat 20. In this embodiment, the first fluid channel 11 is a fluid inflow channel, and the second fluid channel 12 is a fluid outflow channel. The fluid is a process gas used in semiconductor manufacturing processes. The diaphragm 30 of this embodiment is elastically deformable and disposed above the valve seat 20. The outer edge of the diaphragm 30 is pressed and sealed to prevent the process gas from exiting the first fluid channel 11 through the inner side of the annular valve seat 20 and leaking out of the outer edge of the diaphragm 30. The diaphragm 30 is made of metal with an appropriate thickness to provide sufficient strength and elasticity, such as nickel-cobalt alloy or stainless steel. The valve seat 20 is made of plastic, such as PFA, PTFE, or PTCFE.

[0061] The actuator of this embodiment is connected to the top of the valve body 10 and is also located above the diaphragm 30. Its function is to drive the diaphragm 30 to abut against or separate from the valve seat 20 to isolate or open the diaphragm valve.

[0062] like Figure 2 In the first embodiment shown, the actuator includes a housing assembly 40 and an actuating assembly 50 arranged on the housing assembly 40. The housing assembly 40 is used to install and position the actuating assembly 50. The actuating assembly 50 includes a screw 51, a rotating rod 52, a pushing member 53 and a diaphragm pressing member 54. The diaphragm pressing member 54 is axially movable and is located above the diaphragm 30 for directly pressing the diaphragm 30. The screw 51 is threadedly engaged with the housing assembly 40. The rotating rod 52 is rotatably arranged above the screw 51 and movably plugged into the screw 51 to drive the screw 51 to rotate, that is, the screw 51 rotates and moves axially under the action of the rotating rod 52, while the rotating rod 52 itself does not move axially, that is, the external height of the actuator does not change, and there is no interference with the external space when operating the diaphragm valve.

[0063] When the screw 51 rotates downward, an axial driving force is applied to the pusher 53, and an axial driving force is also applied to the diaphragm pressing member 54 through the pusher 53, so that the diaphragm pressing member 54 moves axially and squeezes the diaphragm 30. Since the screw 51 does not directly contact the diaphragm pressing member 54, it will not drive the diaphragm pressing member 54 to rotate. The pusher 53 is plugged into the screw 51 and the radial clearance is matched, which greatly reduces the possibility of driving the pusher 53 to rotate when the screw 51 rotates. Even if the pusher 53 rotates slightly under the action of the circumferential friction force at the axial abutment position with the screw 51, the wear effect on the diaphragm pressing member 54 is not obvious, and it will not drive the diaphragm pressing member 54 to rotate, ensuring that the diaphragm pressing member 54 only moves axially in the housing assembly 40, and only applies axial force to the surface of the diaphragm 30, avoiding rotational wear on the diaphragm surface. On the contrary, when the screw 51 rotates upward, the screw 51 removes the axial contact with the pusher 53, and the pusher 53 is supported on the diaphragm pressing member 54. The screw 51 rotates relative to the pusher 53 but does not drive the pusher 53 to rotate. The deformed diaphragm 30 elastically recovers upward, thereby separating from the valve seat 20, allowing the first fluid channel 11 and the second fluid channel 12 to be conductive. Figure 2 The vertical direction in the diagram refers to the radial direction, which is the horizontal direction. A radial clearance fit indicates that there is a gap between the two in the horizontal direction. Furthermore, when the screw 51 rotates downward, the pusher 53 and the screw 51 only contact each other axially. This means that the sidewalls of the pusher 53 and the screw 51 do not experience circumferential frictional contact and are subject to force only at the axial contact point.

[0064] In order to realize the force transmission between the screw 51 and the pushing member 53, the screw 51 has a flat pressing portion 515, and the pushing member 53 has a flat pressure portion 531. When the screw 51 rotates downward, the flat pressing portion 515 abuts against the flat pressure portion 531. The flat pressing portion 515 and the flat pressure portion 531 are both flat, ensuring that the two are in flat contact when they abut. The advantage is that the contact area is controlled within an appropriate range, avoiding stress concentration due to a small contact area, which leads to a large degree of wear on the screw 51 and the pushing member 53, thereby affecting the set stroke of the screw 51 and the control accuracy of the diaphragm valve, and avoiding an excessively large contact area, which increases the wear area between the screw 51 and the pushing member 53, thereby increasing the friction force, making it more difficult for the screw 51 and the rotating rod 52 to rotate.

[0065] Based on the different structures of the screw rod 51 and the pusher 53, there are various ways of plugging the two together, which are described in the following examples.

[0066] As attached Figure 2In the first embodiment shown, the bottom end of the screw 51 has an axially extending first hole 511, and the pushing member 53 includes a mounting body 532 and a pushing body 533 fixed to the mounting body 532. The mounting body 532 is loosely fitted in the first hole 511, that is, there is a radial gap of reasonable size between the outer wall of the mounting body 532 and the inner wall of the first hole 511 in a circumferential direction. The pushing body 533 is located outside the first hole 511, the flat pressing portion 515 is the bottom end plane of the screw 51, and the flat pressure portion 531 is the top end plane of the pushing body 533. The first hole 511 and the mounting body 532 can both be cylindrical, such as Figure 6 As shown, the mounting body 532 is cylindrical, and its side wall is radially spaced from the inner wall of the first hole 511, or the first hole 511 is irregular in shape and the mounting body 532 is cylindrical, or no matter what shape the first hole 511 and the mounting body 532 are set to, the radial gap between the two is of a reasonable size so that when the first hole 511 rotates with the screw 51, the inner wall of the first hole 511 will not rotate and rub against the outer wall of the mounting body 532.

[0067] The bottom plane of the pushing body 533 contacts the top surface of the diaphragm pressing member 54. When the diaphragm valve is in the open state, the flat pressing portion 515 on the screw 51 and the flat pressure portion 531 on the pushing member 53 can be set at intervals, or can be in a state of contact but without force. When the diaphragm valve needs to be closed, the rotating rod 52 is rotated, the screw 51 rotates and moves downward, and the flat pressing portion 515 abuts against the flat pressure portion 531, so that the screw 51 and the pushing member 53 move axially synchronously to ensure the control accuracy of the diaphragm valve; the axial pushing force of the screw 51 is transmitted to the diaphragm pressing member 54 through the pushing member 53, and the rotation of the screw 51 will not drive the pushing member 53 to rotate, thereby avoiding the pushing member 53 causing rotational wear on the surface of the diaphragm pressing member 54 or driving the diaphragm pressing member 54 to rotate.

[0068] At the same time, in order to achieve synchronous rotation between the rotating rod 52 and the screw 51, the top end of the screw 51 has an axially extending second hole 512, and the second hole 512 is an irregular hole. The bottom end of the rotating rod 52 has a limiting portion 521, which is adapted to the shape of the second hole 512 and can be inserted into the second hole 512 and drive the screw 51 to rotate; the depth of the limiting portion 521 inserted into the second hole 512 is greater than the axial movement distance of the screw 51, ensuring that the rotating rod 52 can always drive the screw 51 to rotate.

[0069] In this embodiment, the first hole 511 and the second hole 512 are connected. Figure 5As shown, the first hole 511 is a cylindrical hole, and the second hole 512 is an irregular hole. The second hole 512 is any one of a square, a rounded rectangle, and a runway shape, or a combination of any one of them and a circle. The shape of the second hole 512 is diverse, and you can choose a suitable shape according to your own usage requirements or process requirements to ensure the circumferential limit fit between the rotating rod 52 and the screw rod 51.

[0070] like Figure 7 In the second embodiment shown, the bottom end of the screw 51 has an axially extending first hole 511, and the pushing member 53 includes a mounting body 532 and a pushing body 533 fixed to the mounting body 532. The mounting body 532 is clearance-fitted in the first hole 511, and the pushing body 533 is located outside the first hole 511. The planar pressing portion 515 is the bottom end plane of the screw 51, and the planar pressure portion 531 is the top end plane of the pushing body 533. The bottom plane of the pushing body 533 contacts the top surface of the diaphragm pressing member 54. When the diaphragm valve is in the open state, the flat pressing portion 515 on the screw 51 and the flat pressure portion 531 on the pushing member 53 can be set at intervals, or can be in a state of contact but without force. When the diaphragm valve needs to be closed, the rotating rod 52 is rotated, and the screw 51 rotates and moves downward. The flat pressing portion 515 abuts against the flat pressure portion 531, so that the screw 51 and the pushing rod move axially synchronously to ensure the control accuracy of the diaphragm valve; the axial pushing force of the screw 51 is transmitted to the diaphragm pressing member 54 through the pushing member 53, and the rotation of the screw 51 will not drive the pushing member 53 to rotate, thereby avoiding the pushing member 53 causing rotational wear on the surface of the diaphragm pressing member 54 or driving the diaphragm pressing member 54 to rotate.

[0071] At the same time, in order to achieve synchronous rotation between the rotating rod 52 and the screw 51, the top end of the screw 51 has an axially extending second hole 512, and the second hole 512 is an irregular hole. The bottom end of the rotating rod 52 has a limiting portion 521, which is adapted to the shape of the second hole 512 and can be inserted into the second hole 512 and drive the screw 51 to rotate; the depth of the limiting portion 521 inserted into the second hole 512 is greater than the axial movement distance of the screw 51, ensuring that the rotating rod 52 can always drive the screw 51 to rotate.

[0072] In the second embodiment, the first hole 511 and the second hole 512 are not connected and are both blind holes. The first hole 511 is a cylindrical hole and the second hole 512 is an irregular hole. The second hole 512 is any one of a square, a rounded rectangle, and a runway shape, or a combination of any one of them and a circle. The second hole 512 has various shapes, and the user can choose a suitable shape according to the use requirements or process requirements to ensure the rotational cooperation between the rotating rod 52 and the screw rod 51.

[0073] like Figure 8The third embodiment shown is different from the second embodiment in that the planar pressing portion 515 is the bottom wall plane of the first hole 511 , and the planar pressure-receiving portion 531 is the top plane of the mounting body 532 . The bottom plane of the pushing body 533 contacts the top surface of the diaphragm pressing piece 54. When the diaphragm valve is in the open state, the flat pressing portion 515 on the screw 51 and the flat pressure portion 531 on the mounting body 532 can be set at intervals, or can be in a state of contact but without force. When the diaphragm valve needs to be closed, the rotating rod 52 is rotated, and the screw 51 rotates and moves downward. The flat pressing portion 515 abuts against the flat pressure portion 531, so that the screw 51 and the pushing rod move axially synchronously to ensure the control accuracy of the diaphragm valve; the axial pushing force of the screw 51 is transmitted to the diaphragm pressing piece 54 through the pushing piece 53, and the rotation of the screw 51 will not drive the pushing piece 53 to rotate, thereby avoiding the pushing piece 53 causing rotational wear on the surface of the diaphragm pressing piece 54 or driving the diaphragm pressing piece 54 to rotate.

[0074] like Figure 9 The fourth embodiment shown is different from the first embodiment in that, although the first hole 511 and the second hole 512 are connected, a protrusion 513 is provided on the inner wall of the first hole 511, the flat pressing portion 515 is the bottom end plane of the protrusion 513, the flat pressure portion 531 is the top plane of the mounting body 532, and the bottom end plane of the pushing body 533 contacts the top surface of the diaphragm pressing member 54. When the diaphragm valve is in the open state, the flat pressing portion 515 on the screw 51 and the flat pressure portion 531 on the mounting body 532 can be spaced apart. It can also be in a state of contact but no force. When the diaphragm valve needs to be closed, the rotating rod 52 is rotated, the screw 51 rotates and moves, and the flat pressing part 515 abuts against the flat pressure part 531, so that the screw 51 and the pushing rod move axially synchronously to ensure the control accuracy of the diaphragm valve; the axial pushing force of the screw 51 is transmitted to the diaphragm pressing part 54 through the pushing part 53, and the rotation of the screw 51 will not drive the pushing part 53 to rotate, thereby avoiding the pushing part 53 causing rotational wear on the surface of the diaphragm pressing part 54 or driving the diaphragm pressing part 54 to rotate.

[0075] like Figure 10In the fifth embodiment shown, the top of the pusher 53 is provided with an axially extending concave cavity 534, and the bottom end of the screw 51 has an axially extending protrusion 514, which is adapted to the concave cavity 534. The flat pressing portion 515 is the bottom end plane of the protrusion 514, and the flat pressure portion 531 is the bottom wall plane of the concave cavity 534. The protrusion 514 is cylindrical, and the concave cavity 534 is also cylindrical. The inner wall of the concave cavity 534 and the outer wall of the protrusion 514 have a radial clearance fit, so that the pusher 53 will not be driven to rotate when the screw 51 rotates. At the same time, the bottom end plane of the pusher 53 contacts the top surface of the diaphragm pressing member 54. When the diaphragm valve is in the open state, the flat pressing portion 515 on the protrusion 514 and the flat pressure portion 531 of the concave cavity 534 can be spaced apart, or they can be in contact but not under force. When needed When the diaphragm valve is closed, the rotating rod 52 is rotated, the screw 51 rotates and moves downward, and the flat pressing portion 515 abuts against the flat pressure portion 531, so that the screw 51 and the push rod move axially synchronously to ensure the control accuracy of the diaphragm valve; the axial driving force of the screw 51 is transmitted to the diaphragm pressing member 54 through the pushing member 53, and the rotation of the screw 51 will not drive the pushing member 53 to rotate, thereby avoiding the pushing member 53 causing rotational wear on the surface of the diaphragm pressing member 54 or driving the diaphragm pressing member 54 to rotate.

[0076] In the above embodiments, the contact area between the flat pressing portion 515 and the flat pressure portion 531 is smaller than the bottom end area of ​​the screw 51. Specifically, the contact area between the flat pressing portion 515 and the flat pressure portion 531 is S1, and the area of ​​the bottom plane of the screw 51 is S2. It is preferably satisfied that 0.1≤S1∶S2≤0.5. The contact area between the flat pressing portion 515 and the flat pressure portion 531 within this range makes the wear area between the screw 51 and the pushing member 53 smaller, making the rotation of the screw 51 and the rotating rod 52 more labor-saving; if the contact area is too small, the degree of wear between the screw 51 and the pushing member 53 is greater, thereby affecting the set stroke of the screw 51 and the control accuracy of the diaphragm valve; if the contact area is too large, the wear area between the screw 51 and the pushing member 53 increases, thereby increasing the friction force, making the rotation of the screw 51 and the rotating rod 52 more labor-saving.

[0077] The rotating rod 52 in the above embodiments can be Figure 3 As shown, the shape of the second hole 512 is as follows Figure 4 As shown, the bottom end of the rotating rod 52 has a limiting portion 521, which is adapted to the shape of the second hole 512 and cooperates in circumferential limiting. The limiting portion 521 is in the shape of a bar, and the shape of the second hole 512 is a combination of a bar and a circle, which is convenient for simultaneous processing of the first hole 511 and the second hole 512.

[0078] like Figure 2In the illustrated embodiment, a groove 541 is formed on the top surface of the diaphragm pressing member 54. A portion of the pushing member 53 can extend into the groove 541 and abut against the bottom surface of the groove 541. The top surface of the diaphragm pressing member 54 is spaced apart from the bottom surface of the screw 51. The portion of the pushing member 53 extending into the groove 541 and the groove 541 are both cylindrical and have a radial clearance fit. The purpose of the groove 541 is to radially limit the pushing member 53, preventing the pushing member 53 from radially offsetting relative to the screw 51 or the diaphragm pressing member 54, thereby ensuring accurate insertion and axial synchronous movement of the pushing member 53 and the screw 51. At the same time, the groove 541 can also shorten the overall height of the actuator, making the diaphragm valve smaller and more suitable for installation in small spaces. The diaphragm pressing member 54 and the screw 51 always maintain an axial clearance, preventing the screw 51 from transmitting rotational force to the diaphragm pressing member 54, causing rotational wear on the diaphragm pressing member 54, or driving the diaphragm pressing member 54 to rotate.

[0079] In some manually operated diaphragm valves, in order to facilitate the operation of the rotating rod 52, the actuator also includes a rotating assembly 60 arranged above the shell assembly 40. The top end of the rotating rod 52 extends to the outside of the shell assembly 40. The rotating assembly 60 includes a rotating wheel 61 fixed to the top end of the rotating rod 52 and a knob 62 covered outside the rotating wheel 61 and fixed to the rotating wheel 61. The knob 62 is provided with a grip for cooperating with a human hand, and the bottom end surface of the rotating wheel 61 is gap-fitted with the top end surface of the shell assembly 40.

[0080] The function of the rotating wheel 61 is to make the rotation of the rotating rod 52 more stable and to ensure the rotation angle of the rotating rod 52 and the axial movement distance of the screw 51. The bottom end surface of the rotating wheel 61 is in clearance with the top end surface of the housing assembly 40 to avoid friction between the rotating wheel 61 and the housing assembly 40 that interferes with the rotation of the knob 62, making the rotation of the rotating wheel 61 more labor-saving. The function of the knob 62 is to facilitate the operator's operation and make it easier to rotate the rotating wheel 61. The knob 62 forms a cover to protect the rotating wheel 61 inside. Specifically, Figure 2 As shown, the rotating wheel 61 includes a circular mounting post 611 at the top, the circular mounting post 611 extends into the top of the cavity 621 of the knob 62, and the knob 62 is provided with a radially extending through hole 622, and the circular mounting post 611 is provided with a threaded hole 612, and a screw is inserted into the through hole 622 and is threadedly connected to the threaded hole 612 on the circular mounting post 611, thereby realizing a fixed connection and synchronous rotation between the rotating wheel 61 and the knob 62.

[0081] like Figure 2As shown, the housing assembly 40 includes a hollow housing 41 and a hollow connecting seat 42; the upper and lower ends of the connecting seat 42 are respectively connected to the housing 41 and the valve body 10, and the bottom end of the connecting seat 42 is also used to apply pressure to the edge of the diaphragm 30 to achieve a sealed installation of the diaphragm 30. At the same time, the inner wall of the connecting seat 42 is provided with a thread that engages with the screw 51. The screw 51 is threadedly connected to the connecting seat 42. The connecting seat 42 radially limits the screw 51, allowing it to maintain an axial setting and rotate axially, thereby ensuring the set stroke of the screw 51 and the control accuracy of the diaphragm valve. The rotating rod 52 is rotatably disposed in the housing 41. In other embodiments, the housing assembly 40 can be simply a hollow housing 41, with threads provided in the hollow housing 41 for engaging with the screw 51, or the housing 41 and the connecting seat 42 can be integrally formed or welded into a single unit.

[0082] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A diaphragm valve, comprising: A valve body having a first fluid passage and a second fluid passage; an annular valve seat, disposed on the valve body and surrounding an outer circumference of a top end of the first fluid channel, wherein the first fluid channel and the second fluid channel are connected via the valve seat; a diaphragm, elastically deformable and sealingly disposed above the valve seat; An actuator is connected to the top of the valve body and is used to drive the diaphragm to abut against or separate from the valve seat to isolate or open the diaphragm valve; characterized in that: The actuator includes a housing assembly and an actuating assembly provided in the housing assembly, the actuating assembly includes a screw, a pusher, and a diaphragm pressing member, the diaphragm pressing member is axially movable and is located above the diaphragm, and the screw is threadedly engaged with the housing assembly; The pushing member is located between the screw and the diaphragm pressing member. The pushing member is inserted into the screw and matched with the radial clearance. When the screw rotates downward, the pushing member can only axially abut against the screw and axially move to abut the diaphragm pressing member, so that the diaphragm pressing member squeezes the diaphragm, causing the diaphragm to deform and seal with the valve seat.

2. The diaphragm valve according to claim 1, wherein The actuating assembly further includes a rotating rod, which is rotatably disposed above the screw and movably plugged into the screw to drive the screw to rotate; or, The screw rod has a planar pressing portion, and the pushing member has a planar pressure receiving portion. When the screw rod rotates downward, the planar pressing portion abuts against the planar pressure receiving portion.

3. The diaphragm valve according to claim 2, wherein: The bottom end of the screw has a first hole extending axially, and the pushing member includes a mounting body and a pushing body fixed to the mounting body, the mounting body is loosely fitted in the first hole, and the pushing body is located outside the first hole; The flat pressing portion is the bottom end plane of the screw, and the flat pressed portion is the top end plane of the pushing body; or, The bottom end of the screw has a first hole extending axially, the pushing member includes a mounting body and a pushing body fixed to the mounting body, the mounting body is loosely fitted in the first hole, the pushing body is located outside the first hole, a protrusion is provided on the inner wall of the first hole, the planar pressing portion is the bottom end plane of the protrusion, and the planar pressure portion is the top end plane of the mounting body; or, The top of the pusher is provided with an axially extending cavity, the bottom end of the screw has an axially extending protrusion, the protrusion is loosely fitted in the cavity, the planar pressing portion is the bottom end plane of the protrusion, and the planar pressure portion is the bottom wall plane of the cavity.

4. The diaphragm valve according to claim 2 or 3, characterized in that: The contact area between the planar pressing portion and the planar pressed portion is smaller than the bottom end area of ​​the screw; and / or The pushing member is made of aluminum, and the screw is made of stainless steel.

5. The diaphragm valve according to claim 4, wherein: The contact area between the planar pressing portion and the planar pressure receiving portion is S1, and the area of ​​the plane at the bottom end of the screw is S2, satisfying 0.1≤S1:S2≤0.

5.

6. The diaphragm valve according to claim 2, wherein: The top end of the screw has a second hole extending axially, and the second hole is a special-shaped hole. The bottom end of the rotating rod has a limiting portion, which is adapted to the shape of the second hole and can be inserted into the second hole to drive the screw to rotate.

7. The diaphragm valve according to claim 6, wherein: The second hole is in any one of a square, a rounded rectangle, and a racetrack shape, or a combination of any one of the square and a circle.

8. The diaphragm valve according to claim 1, wherein: A groove is formed on the top surface of the diaphragm pressing member, a portion of the pushing member is loosely fitted in the groove and abuts against the bottom wall of the groove, and the top surface of the diaphragm pressing member is spaced apart from the bottom end surface of the screw.

9. The diaphragm valve according to claim 2, wherein: The top end of the rotating rod extends to the outside of the shell assembly. The actuator also includes a rotating assembly arranged above the shell assembly. The rotating assembly includes a rotating wheel fixed to the top end of the rotating rod and a knob covered outside the rotating wheel and fixed to the rotating wheel. The knob is provided with a grip for cooperating with a human hand, and the bottom end surface of the rotating wheel is gap-fitted with the top end surface of the shell assembly.

10. The diaphragm valve according to claim 2, wherein: The shell assembly includes a hollow shell and a hollow connecting seat; the upper and lower ends of the connecting seat are respectively connected to the shell and the valve body, the inner wall of the connecting seat is provided with a thread engaged with the screw thread, the screw thread is connected to the connecting seat, and the rotating rod is rotatably arranged in the shell.

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