Unilateral air inlet type drying device
By setting an air inlet plate on one side of the drying tank and an air outlet plate on the other side, a single-sided air inlet and outlet drying mode is achieved, which solves the problem of uneven drying caused by airflow counterattack in the drying tank and improves the drying efficiency of silicon wafers and the stability of the tank.
Patent Information
- Application Number
- CN202421921766.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-08-09
AI Technical Summary
During the mass production of silicon wafers in existing drying troughs, the counterflow of airflow caused by blowing air from both sides results in poor drying effect for the silicon wafers in the middle basket, especially in the middle of the trough, where the wafers are prone to not being dried.
A single-side air inlet drying device is adopted. By setting an air inlet plate structure on one side of the tank body and an air outlet plate structure on the other side, a single-side air inlet and single-side air outlet drying mode is realized to avoid airflow collision. The gas is heated by a heating device and blown into the tank body through the air inlet plate structure to dry the silicon wafers. After drying, the gas flows out through the air outlet plate structure and is recycled.
It effectively improves the drying effect, reduces the deformation of the tank caused by drastic temperature changes, and improves the drying efficiency and uniformity of silicon wafers.
Smart Images
Figure CN223345786U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of drying tanks, and in particular to a single-side air-inlet drying device. Background Art
[0002] For solar cleaning equipment and wet processing equipment, in the process of mass production of silicon wafers, it is often necessary to clean and dry the silicon wafers after acid etching and alkaline polishing, and a drying tank is generally used for the drying process.
[0003] Inside the drying trough, baskets holding silicon wafers are placed. Fans blow heated, purified air from the sides or bottom onto the baskets, ensuring complete evaporation of moisture from the wafer surfaces. With the continuous expansion of wet-process equipment production capacity, the capacity of a single trough has increased from four to six baskets. The more baskets placed in a trough, the higher the drying requirements. This is especially true for the baskets located in the center of the trough. Traditional methods of blowing air from both sides weakened the drying effect due to counteracting airflow, making it difficult to dry the center baskets and wafers.
[0004] Therefore, a single-side air inlet drying device is proposed to solve the above-mentioned technical problems. Utility Model Content
[0005] Based on this, a single-side air inlet drying device is provided, which can solve the problem of airflow counter-attack loss caused by blowing air on both sides of the drying tank and poor drying effect.
[0006] In order to solve the above problems, a single-side air inlet drying device is provided, comprising: an air supply device, a heating device and a trough body; an air inlet plate structure is provided on one side of the trough body, and an air outlet plate structure is provided on the other opposite side; the air outlet of the air supply device is connected to one end of the heating device, and the heating device is used to heat the gas introduced by the air supply device; the other end of the heating device is connected to the air inlet plate structure of the trough body; the trough body is used to dry flower baskets and silicon wafers, and the air outlet plate structure of the trough body is connected to the air supply device.
[0007] An optional solution is that the air inlet plate structure includes an air inlet cavity formed on the side wall of the tank body and an air inlet hole provided on a side of the air inlet cavity close to the interior of the tank body.
[0008] An optional solution is that an air expansion box is provided at the bottom of the trough body corresponding to the position of the air intake cavity; one end of the air expansion box is connected to the air intake cavity, and the other end is connected to an air circulation pipe; the air circulation pipe is connected to the heating device.
[0009] An optional solution is that there are several air inlet holes and they are distributed in an array.
[0010] An optional solution is that the air inlet is configured as a fine and small air filter hole.
[0011] An optional solution is that the air inlet has a trumpet-shaped structure.
[0012] An optional solution is that the air outlet plate structure includes an air outlet cavity formed on the side wall of the trough body and air outlet holes arranged on a side of the air outlet cavity close to the interior of the trough body.
[0013] An optional solution is that an air expansion box is provided at the bottom of the trough body corresponding to the position of the air outlet cavity; one end of the air expansion box is connected to the air outlet cavity, and the other end is connected to an air outlet circulation pipe; the air outlet circulation pipe is connected to the air supply device.
[0014] An optional solution is that there are several air outlet holes and they are distributed in an array.
[0015] An optional solution is that the air outlet is configured as a large air filtering hole.
[0016] An optional solution is that the air supply device includes a primary filter box, a secondary filter box and a circulating fan; the primary filter box is connected to the circulating fan through a fresh air inlet pipe; the circulating fan is connected to the heating device through a fresh air outlet pipe; the heating device is connected to the secondary filter box through a hot air circulation pipe; the secondary filter box is connected to the air inlet orifice structure through a filter air circulation pipe; the air outlet orifice structure is connected to the circulating fan through a return air circulation pipe.
[0017] An optional solution is that a first reinforcing rib is provided on the outer side of the bottom of the trough body.
[0018] An optional solution is that the first reinforcing rib is coated with polyvinylidene fluoride material.
[0019] An optional solution is that a second reinforcing rib is provided at the bottom of the flower basket positioning bracket in the trough body.
[0020] An optional solution is that the material of the second reinforcing rib is set to carbon fiber.
[0021] Beneficial effects:
[0022] The above-mentioned single-side air inlet drying device is provided with an air inlet plate structure and an air outlet plate structure on opposite sides of the trough body. The air supply device introduces the gas into the heating device for heating to generate heated gas. The heated gas is blown into the interior of the trough body from the air inlet plate structure to dry the flower baskets and silicon wafers in the trough body. After the drying process is completed, the heated gas flows out from the air outlet plate structure to the air supply device for circulation, thereby forming a single-side air inlet and single-side air outlet drying mode, which effectively reduces the airflow loss caused by blowing on both sides when the drying trough is in use, and can greatly reduce the deformation of the drying trough caused by drastic temperature changes. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 This is a schematic plan view of the structure of a single-side air-inlet drying device in one embodiment;
[0024] Figure 2 for Figure 1 Middle AA section diagram;
[0025] Figure 3 This is a schematic diagram of the three-dimensional structure of a single-side air-inlet drying device in one embodiment, with some pipes omitted;
[0026] Figure 4 This is a schematic structural diagram of a secondary filter box in one embodiment;
[0027] Figure 5 This is a structural diagram of an embodiment in which an air expansion and air inlet box is arranged at the bottom of the tank body corresponding to the air inlet orifice structure;
[0028] Figure 6 This is a structural diagram of an embodiment in which an air expansion and outlet box is arranged at the bottom of the tank body corresponding to the air outlet plate structure;
[0029] Figure 7 This is a schematic diagram of a structure in which a first reinforcing rib is provided at the bottom of the tank body in one embodiment;
[0030] Figure 8 This is a schematic structural diagram of a second reinforcing rib provided at the bottom of the flower basket positioning bracket in one embodiment.
[0031] Figure numerals: 1. Air supply device; 11. Primary filter box; 12. Secondary filter box; 13. Circulation fan; 14. Fresh air inlet pipe; 15. Fresh air outlet pipe; 16. Hot air circulation pipe; 17. Filtered air circulation pipe; 18. Return air circulation pipe; 19. Exhaust pipe; 2. Heating device; 3. Trough body; 31. Air inlet plate structure; 311. Air inlet; 32. Air outlet plate structure; 321. Air outlet; 4. Air expansion inlet box; 41. Air intake circulation pipe; 5. Air expansion outlet box; 51. Air outlet circulation pipe; 6. First reinforcing rib; 7. Flower basket positioning bracket; 8. Second reinforcing rib. DETAILED DESCRIPTION
[0032] In order to make the purpose, technical solutions and advantages of this application more clear, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.
[0033] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present application in a schematic manner. Therefore, the illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.
[0034] The structures, proportions, sizes, etc. depicted in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not intended to limit the conditions under which this application can be implemented, and therefore have no substantive technical significance. Any structural modifications, changes in proportional relationships, or adjustments in size, without affecting the efficacy and objectives that can be achieved by this application, should still fall within the scope of the technical contents disclosed in this application.
[0035] The directions or positional relationships indicated in this specification, such as "upper," "lower," "left," "right," "center," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential," are based on the directions or positional relationships shown in the accompanying drawings and are intended solely for the purpose of simplifying the description. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0036] An embodiment of the present application provides a single-side air inlet drying device. By setting relative air inlet orifice plate structures and air outlet orifice plate structures, it is possible to achieve blowing on one side and sucking on the other side, thereby avoiding air flow counter-attack that reduces the drying effect, and can effectively solve the problem of air flow counter-attack loss caused by blowing on both sides.
[0037] The following is a detailed description of a single-side air inlet drying device provided by this embodiment in conjunction with the accompanying drawings. Figure 1-Figure 3 As shown, it includes: an air supply device 1, a heating device 2 and a trough body 3; an air inlet plate structure 31 is provided on one side of the trough body 3, and an air outlet plate structure 32 is provided on the other side thereof. In other words, the air inlet plate structure 31 and the air outlet plate structure 32 are arranged opposite to each other; the air outlet of the air supply device 1 is connected to one end of the heating device 2, and the heating device 2 is used to heat the gas introduced by the air supply device 1; the other end of the heating device 2 is connected to the air inlet plate structure 31 of the trough body 3, and the air outlet plate structure 32 of the trough body 3 is connected to the air supply device 1, and the trough body 3 is used to dry the flower baskets and silicon wafers.
[0038] In this embodiment, an air inlet plate structure 31 and an air outlet plate structure 32 are provided on opposite sides of the trough body 3. The air supply device 1 introduces fresh air into the heating device 2 for heating. The heated hot air is sent into the trough body 3 by the air inlet plate structure 31, and then the flower basket and silicon wafers in the trough body 3 are dried. Subsequently, the hot air in the trough body 3 is sent out by the air outlet plate structure 32 and returned to the air supply device 1 for recycling. Through the above-mentioned structural design, it is possible to achieve blowing by the air inlet plate structure 31 on one side and sucking by the air outlet plate structure 32 on the opposite side, which can avoid the generation of counter-flow inside the trough body 3 to affect the drying effect, and thus can greatly reduce the deformation of the trough body 3 caused by drastic temperature changes.
[0039] Please refer to Figure 1-Figure 4 As shown, in this embodiment, it should be noted that the air supply device 1 includes a primary filter box 11, a secondary filter box 12, and a circulating fan 13. The primary filter box 11 is connected to the circulating fan 13 via a fresh air inlet pipe 14. The circulating fan 13 is connected to the heating device 2 via a fresh air outlet pipe 15. The heating device 2 is connected to the secondary filter box 12 via a hot air circulation pipe 16. The secondary filter box 12 is connected to the air inlet plate structure 31 via a filtered air circulation pipe 17. The air outlet plate structure 32 is connected to the circulating fan 13 via a return air circulation pipe 18, thereby realizing the circulation of the entire gas. Among them, the primary filter box 11 can use a low-efficiency filter. Since the cleanliness requirements in the drying tank are constantly upgraded with the continuous upgrading of wet process equipment, an easily replaceable low-efficiency filter is provided to filter air impurities to prevent the workshop cleanliness from not meeting the standards during equipment installation and commissioning. The secondary filter box 12 can use a high-efficiency filter to filter broken silicon wafers, metal ions from the circulating fan 13 and the heating device 2, and the inlet and outlet ends of the secondary filter box 12 are set as a bell-mouth air expansion structure. This structural setting can ensure the maximum air output of the cycle and improve the drying effect of the drying tank. The heating device 2 can be a heater such as an electric heating tube, etc., which can heat the fresh air through the heater. Preferably, an exhaust pipe 19 is set in the pipeline connected to the circulating fan 13 for timed exhaust. After several cycles, the water vapor content in the tank increases, affecting the drying efficiency. Therefore, the exhaust can be exhausted regularly through the exhaust pipe 19.
[0040] Please refer to Figure 1 、 Figure 3 as well as Figure 5As shown, the air inlet plate structure 31 includes an air inlet compartment and an air inlet hole 311. The air inlet compartment is formed on a side wall of the trough body 3, such as on the side wall in the long side direction of the trough body 3. The side wall of the trough body 3 can be formed into a sealed air inlet compartment by protruding outward or recessing inward, and the air inlet hole 311 is arranged on the side of the air inlet compartment close to the interior of the trough body 3. In other words, an air inlet equalizing plate is added, and the air inlet equalizing plate is spaced apart from the inner side wall of the trough body 3 to form a gap, and the other open positions of the gap are sealed so that an air inlet compartment can also be formed, and the air inlet hole 311 is arranged on the air inlet equalizing plate. How to specifically set the air inlet plate structure 31 is not specifically limited in this embodiment. In this embodiment, the use of the air inlet compartment can gather the blown gas, and the gathered gas is then blown into the interior of the trough body 3 from the air inlet hole 311.
[0041] Preferably, the number of air inlet holes 311 is several and they are distributed in an array. The air inlet holes 311 can be distributed in a rectangular array or a circular array. In this embodiment, a rectangular array is used as an example for description. The air inlet holes 311 in the rectangular array form a rectangular air inlet area, which can evenly introduce air into the tank body 3. The air inlet holes 311 are configured as fine and small air filtering holes, and the air inlet holes 311 have a trumpet-shaped structure. In other words, the air inlet holes 311 are chamfered at one end facing the tank body 3. By configuring the air inlet holes 311 as fine and small air filtering holes with a small aperture, air intake uniformity can be ensured during air intake. Furthermore, configuring the air inlet holes as a trumpet-shaped structure is conducive to air expansion and increased air intake uniformity.
[0042] Preferably, the air inlet hole 311 can be set as an elliptical hole, a strip hole, a rectangular hole, or a circular hole. In this embodiment, the air inlet hole 311 is preferably set as a circular hole.
[0043] Please refer to Figure 1 、 Figure 2 as well as Figure 5 As shown, in some embodiments, an air expansion air inlet box 4 is provided at the bottom of the trough body 3 at a position corresponding to the air intake compartment. The number of air expansion air inlet boxes 4 can be set to a plurality, and in this embodiment, two are provided. The air expansion air inlet box 4 is configured in a trumpet shape, with the wider end of the air expansion air inlet box 4 connected to the air intake compartment, and the narrower end of the air expansion air inlet box 4 connected to the air intake circulation pipe 41, which is connected to the air filter circulation pipe 17. After being filtered by the secondary filter box 12, the heated gas flows through the air filter circulation pipe 17 and the air intake circulation pipe 41 to the air expansion air inlet box 4, and then flows to the air intake compartment through the air expansion air inlet box 4. In this process, the use of the trumpet-shaped air expansion air inlet box 4 can ensure that the hot air is evenly blown into the interior of the trough body 3, and is conducive to air expansion and rapid air intake.
[0044] Please refer to Figure 1 、 Figure 2 as well as Figure 6As shown, in this embodiment, it should be noted that the air outlet plate structure 32 includes an air outlet cavity and air outlet holes 321. The air outlet cavity is formed on a side wall of the trough body 3, such as on the side wall in the long side direction of the trough body 3. The side wall of the trough body 3 can be formed into a sealed air outlet cavity by protruding outward or recessing inward, and the air outlet holes 321 are arranged on the side of the air outlet cavity close to the interior of the trough body 3. In other words, an air outlet equalizing plate is added, and the air outlet equalizing plate is spaced apart from the inner side wall of the trough body 3 to form a gap, and the other open positions of the gap are sealed so as to form an air outlet cavity, and the air outlet holes 321 are arranged on the air outlet equalizing plate. How to specifically set the air outlet plate structure 32 is not specifically limited in this embodiment. In this embodiment, the blown gas can be gathered by using the air outlet cavity.
[0045] Preferably, the number of air outlet holes 321 is multiple and they are distributed in an array. The air outlet holes 321 can be distributed in a rectangular array or a circular array. In this embodiment, a rectangular array is used as an example for description. The air outlet holes 321 in the rectangular array form a rectangular air outlet area, which can evenly discharge air out of the tank body 3. The air outlet holes 321 are configured as large air filter holes. By configuring the air outlet holes 321 as large air filter holes with large apertures, rapid air discharge can be achieved.
[0046] Preferably, the air outlet hole 321 can be set as an elliptical hole, a strip hole, a rectangular hole, or a circular hole. In this embodiment, the air outlet hole 321 is preferably set as a strip hole.
[0047] Please refer to Figure 1 、 Figure 3 as well as Figure 6 As shown, in some embodiments, an air expansion outlet box 5 is provided at the bottom of the trough body 3, corresponding to the position of the air outlet compartment. The number of air expansion outlet boxes 5 can be set to multiple, and in this embodiment, there are two air expansion outlet boxes 5. The air expansion outlet box 5 is configured in a trumpet shape, with the wider end of the air expansion outlet box 5 connected to the air outlet compartment, and the narrower end of the air expansion outlet box 5 connected to the air outlet circulation pipe 51, which is connected to the return air circulation pipe 18, and then the return air circulation pipe 18 is connected to the circulation fan 13. The hot air in the trough body 3 is blown into the air outlet compartment through the air outlet holes 321, then flows from the air outlet compartment to the air expansion outlet box 5, then flows through the bottom of the air expansion outlet box 5 to the air outlet circulation pipe 51, the return air circulation pipe 18, and finally to the circulation fan 13 for circulation. In this process, the trumpet-shaped air expansion outlet box 5 ensures that the air is evenly blown out from the trough body 3 to the air expansion outlet box 5, and is conducive to air expansion and rapid air discharge.
[0048] Please refer to Figure 2 、 Figure 7 by Figure 8As shown, in this embodiment, it should also be noted that a first reinforcing rib 6 is provided on the outside of the bottom of the trough body 3. The number of the first reinforcing ribs 6 is set to be several, and the several first reinforcing ribs 6 are spaced apart on the outside of the bottom of the trough body 3. The outside of the first reinforcing rib 6 is coated with PVDF (polyvinylidene fluoride) material. By coating the outer surface of the first reinforcing rib 6 with PVDF material, corrosion resistance and a long service life are achieved. A second reinforcing rib 8 is provided on the bottom of the flower basket positioning bracket 7 in the trough body 3. The material of the second reinforcing rib 8 is set to be carbon fiber. Because the trough body 3 is made of PVDF material, PVDF is made of PVDF resin and extruded into a sheet at high temperature. It has excellent corrosion resistance and heat resistance, and has high mechanical strength and good rigidity, ensuring the normal operation of the drying trough during the high-temperature purge and drying process. Since PVDF is greatly affected by temperature differences, the first reinforcing rib 6 is added to the bottom of the trough body 3 and the second reinforcing rib 8 is added to the bottom of the flower basket positioning bracket 7, effectively reducing the deformation of the PVDF sheet caused by high temperature.
[0049] The implementation principle of this embodiment is as follows: the fresh air is filtered through the primary filter box 11, and the filtered fresh air flows through the fresh air inlet pipe 14 and flows through the circulation fan 13. The circulation fan 13 is sent to the heating device 2 for heating to form heated gas, and then the heated gas flows to the secondary filter box 12 through the hot air circulation pipe 16 for further filtration. After the secondary filtration, it flows through the filtered air circulation pipe 17 to the intake air circulation pipe 41, and is introduced into the expansion air inlet box 4 by the intake air circulation pipe 41. The expansion air inlet box 4 is used to send the hot air into the air inlet cavity, and is evenly blown into the tank body 3 through the air inlet hole 311 on the air inlet cavity to dry the flower basket and silicon wafers. After the process is completed, the hot air flows to the outlet cavity through the air outlet hole 321, and then flows from the outlet cavity to the expansion air outlet box 5 and the outlet air circulation pipe 51, and finally enters the circulation fan 13 again through the return air circulation pipe 18 to complete the heat cycle.
[0050] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0051] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.
Claims
1. A single-side air inlet drying device, characterized in that: include: Air supply device (1), heating device (2) and tank body (3); An air inlet plate structure (31) is provided on one side of the trough body (3), and an air outlet plate structure (32) is provided on the other opposite side; The air outlet of the air supply device (1) is connected to one end of the heating device (2), and the heating device (2) is used to heat the gas introduced by the air supply device (1); The other end of the heating device (2) is in communication with the air inlet plate structure (31) of the tank body (3); The trough body (3) is used to dry the flower basket and silicon wafers, and the air outlet plate structure (32) of the trough body (3) is connected to the air supply device (1); The air inlet plate structure (31) comprises an air inlet compartment formed on the side wall of the trough body (3) and an air inlet hole (311) provided on a side of the air inlet compartment close to the interior of the trough body (3); The air outlet plate structure (32) comprises an air outlet cavity formed on the side wall of the trough body (3) and an air outlet hole (321) provided on a side of the air outlet cavity close to the interior of the trough body (3).
2. The single-side air inlet drying device according to claim 1, characterized in that: An air expansion and air intake box (4) is provided at the bottom of the tank body (3) at a position corresponding to the air intake compartment; One end of the air expansion and air intake box (4) is connected to the air intake compartment, and the other end is connected to an air intake circulation pipe (41); The air intake circulation pipe (41) is connected to the heating device (2).
3. The single-side air inlet drying device according to claim 1, characterized in that: The number of the air inlet holes (311) is several and they are distributed in an array; And / or, the air inlet (311) is configured as a fine and small air filtering hole; And / or, the air inlet (311) has a trumpet-shaped structure.
4. The single-side air inlet drying device according to claim 1, characterized in that: An air expansion and outlet box (5) is provided at the bottom of the tank body (3) at a position corresponding to the air outlet compartment; One end of the air expansion and outlet box (5) is connected to the air outlet compartment, and the other end is connected to the air outlet circulation pipe (51); The air outlet circulation pipe (51) is connected to the air supply device (1).
5. The single-side air inlet drying device according to claim 1, characterized in that: The number of the air outlet holes (321) is several and they are distributed in an array; And / or, the air outlet (321) is configured as a large air filtering hole.
6. The single-side air inlet drying device according to claim 1, characterized in that: The air supply device (1) comprises a primary filter box (11), a secondary filter box (12) and a circulating fan (13); The primary filter box (11) is connected to the circulation fan (13) via a fresh air intake pipe (14); The circulating fan (13) is connected to the heating device (2) via a fresh air outlet pipe (15); The heating device (2) is connected to the secondary filter box (12) via a hot air circulation pipe (16); The secondary filter box (12) is connected to the air inlet plate structure (31) via a filtered air circulation pipe (17); The air outlet plate structure (32) is connected to the circulation fan (13) via a return air circulation pipe (18).
7. The single-side air inlet drying device according to claim 1, characterized in that: A first reinforcing rib (6) is provided on the outer side of the bottom of the trough body (3); And / or, the first reinforcing rib (6) is coated with polyvinylidene fluoride material.
8. The single-side air inlet drying device according to claim 1 or 7, characterized in that: A second reinforcing rib (8) is provided at the bottom of the flower basket positioning bracket (7) in the trough body (3); And / or, the material of the second reinforcing rib (8) is set to carbon fiber.