Measuring platform of coaxial double-sided microscope

Abstract

The embodiment of the utility model provides a measuring platform of a coaxial double-sided microscope. The measuring platform comprises a base, a table disc and at least one angle adjusting structure, the table plate is rotatably arranged on the base, and a clamping seat is arranged in the central area of the table plate and used for placing a to-be-measured product; the angle adjusting structure is used for adjusting the rotation angle of the table disc so as to adjust the rotation angle of the to-be-measured product. According to the measuring platform provided by the embodiment of the invention, the rotation angle of the table disc is adjusted through the angle adjusting structure to adjust the placement offset of the to-be-measured product, the angle of the product does not need to be adjusted by manually moving the product, the product loss risk caused by manually moving the product is avoided, the operation speed of personnel is improved, and the production efficiency is improved.

Description

Technical Field

[0001] The disclosed embodiments belong to the technical field of coaxial double-sided microscopes, and particularly relate to a measurement platform for a coaxial double-sided microscope. Background Art

[0002] The coaxial double-sided microscope has a visual camera on the upper and lower platforms. The upper and lower visual cameras are positioned in the same position and can measure the same position on the front and back of the product, checking the front and back conditions of the same point.

[0003] Currently, the stage support structure of the coaxial double-sided microscope measurement platform can only accommodate 12-inch products containing iron rings for measurement. Products of other sizes cannot be placed for measurement. Products of other sizes require other measurement platforms. In addition, the stage is fixed and can only move in the X / Y direction and cannot be rotated. If the product is placed offset, it must be manually rotated, which poses a risk of product loss, slows operation speed, and reduces production efficiency.

[0004] In view of the above problems, it is necessary to propose a measurement platform for a coaxial double-sided microscope that has a reasonable design and can effectively improve the above problems. Utility Model Content

[0005] The embodiments of the present disclosure aim to solve at least one of the technical problems existing in the prior art and provide a measurement platform for a coaxial double-sided microscope.

[0006] The embodiment of the present disclosure provides a measurement platform for a coaxial double-sided microscope, comprising a base, a stage, and at least one angle adjustment structure;

[0007] The table is rotatably arranged on the base, and a card seat is provided in the central area of ​​the table, and the card seat is used to place the product to be measured;

[0008] The angle adjustment structure is used to adjust the rotation angle of the table to adjust the rotation angle of the product to be measured.

[0009] Optionally, the angle adjustment structure includes an adjustment column and an adjustment slot;

[0010] The adjustment column is fixed to the edge area of ​​the base, and the adjustment slot is provided at the edge area of ​​the table;

[0011] The adjusting column is slidably arranged in the adjusting slot.

[0012] Optionally, the adjustment column is located at an outer corner end of the base, and the adjustment slot is located at an outer corner end of the table.

[0013] Optionally, there are two angle adjustment structures, and the two angle adjustment structures are symmetrically distributed.

[0014] Optionally, the angle adjustment structure further includes an adjustment handle, and the adjustment handle is disposed on the table.

[0015] Optionally, the base is provided with a fixing column, and the platform is provided with a through hole;

[0016] The fixing post is inserted into the through hole, so that when the angle adjustment structure adjusts the rotation angle of the table, the table can rotate along the fixing post.

[0017] Optionally, the angle adjustment range of the angle adjustment structure is 0° to 4°.

[0018] Optionally, the table is provided with a plurality of holders of different sizes, and each holder is used to place a product to be measured that matches its size.

[0019] Optionally, the card seat is provided with a card slot, and the card slot is used to clamp the product to be measured that matches its size.

[0020] Optionally, the small-sized card seat is arranged in the large-sized card seat, or the small-sized card seat intersects with the large-sized card seat.

[0021] The measuring platform of the coaxial double-sided microscope of the disclosed embodiment includes a base, a table, and at least one angle adjustment structure. The table is rotatably mounted on the base, and a holder is provided in the central area of ​​the table for placing the product to be measured. The angle adjustment structure is used to adjust the rotation angle of the table to adjust the rotation angle of the product to be measured. The measuring platform of the disclosed embodiment adjusts the rotation angle of the table by adjusting the angle adjustment structure to adjust the placement offset of the product to be measured. This eliminates the need to manually move the product to adjust the product angle, avoids the risk of product loss caused by manual movement, improves operator speed, and enhances production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic structural diagram of a measurement plane of a mutually coaxial double-sided microscope according to one embodiment of the present disclosure. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0024] like Figure 1 As shown, an embodiment of the present disclosure provides a measurement platform 100 for a coaxial double-sided microscope, comprising a base 110 , a stage 120 and at least one angle adjustment structure 130 .

[0025] The table 120 is rotatably mounted on the base 110. A holder 121 is provided in the central area of ​​the table 120. The holder 121 is used to place the product to be measured. The product to be measured is a product containing an iron ring, such as a wafer.

[0026] The angle adjustment structure 130 is used to adjust the rotation angle of the table 120 to adjust the rotation angle of the product to be measured.

[0027] Specifically, the product to be measured is placed on the base of the table 120, and the upper and lower visual cameras are adjusted for measurement. If the rotation angle of the product to be measured is found to be offset, the rotation angle of the table 120 is adjusted through the angle adjustment structure 130, thereby adjusting the rotation angle of the product to be measured.

[0028] The measuring platform of the coaxial double-sided microscope of the disclosed embodiment includes a base, a table, and at least one angle adjustment structure. The table is rotatably mounted on the base, and a holder is provided in the central area of ​​the table for placing the product to be measured. The angle adjustment structure is used to adjust the rotation angle of the table to adjust the rotation angle of the product to be measured. The measuring platform of the disclosed embodiment adjusts the rotation angle of the table by adjusting the angle adjustment structure to adjust the placement offset of the product to be measured. This eliminates the need to manually move the product to adjust the product angle, avoids the risk of product loss caused by manual movement, improves operator speed, and enhances production efficiency.

[0029] For example, Figure 1 As shown, the angle adjustment structure 130 includes an adjustment column 131 and an adjustment slot 132. The adjustment column 131 is fixed to the edge area of ​​the base 110, and the adjustment slot 132 is provided at the edge area of ​​the table 120. The adjustment column 131 is slidably provided in the adjustment slot 132. The adjustment slot 132 can limit the angle adjustment range of the table 120.

[0030] Specifically, the table 120 is pushed, and the adjustment column 131 slides in the adjustment slot 132, so that the table 120 rotates on the base 110, thereby adjusting the rotation angle of the table 120. It should be noted that in this embodiment, the adjustment slot 132 can be arc-shaped or linear, and the selection can be based on actual needs.

[0031] In this embodiment, by sliding the adjustment column in the adjustment slot, the table can be limitedly rotated on the base to adjust the rotation angle of the table, and then the placement offset of the product to be measured can be adjusted. There is no need to manually move the product to adjust the product angle, which avoids the risk of product loss caused by manual movement of the product, improves the operating speed of personnel, and improves production efficiency.

[0032] For example, Figure 1As shown, the adjustment column 131 is located at the outer corner end of the base 110 , and the adjustment slot 132 is located at the outer corner end of the table 120 .

[0033] For example, Figure 1 As shown, there are two angle adjustment structures 130 , which are respectively arranged at the two outer corner ends of the platform and are symmetrically distributed, so that adjustment can be convenient.

[0034] Exemplarily, the angle adjustment structure 130 further includes an adjustment handle 133 disposed on the table 120. By pushing the adjustment handle 133, the table 120 can be rotated on the base 110, thereby adjusting the rotation angle of the table 120. Specifically, in this embodiment, the adjustment handle 133 is disposed at a corner end of the table 120 at the adjustment slot 132. The specific location of the adjustment handle 133 is not limited and can be selected based on actual needs.

[0035] In this embodiment, the rotation angle of the table can be adjusted more conveniently by adjusting the handle, and the operation is simple.

[0036] For example, Figure 1 As shown, the base 110 is provided with a fixing column 111, and the table is provided with a through hole 122. The fixing column 111 is inserted into the through hole 122 so that when the angle adjustment structure 130 adjusts the rotation angle of the table 120, the table 120 can rotate along the fixing column 111. Specifically, as shown in FIG. Figure 1 As shown, the fixing column 111 is disposed at the center of the inner edge region of the base 110 .

[0037] For example, in this embodiment, the angle adjustment range of the angle adjustment structure 130 is 0° to 4°. It should be noted that the specific adjustment angle of the angle adjustment structure 130 can be selected according to actual needs and is not specifically limited in this embodiment.

[0038] For example, Figure 1 As shown, the table 120 is provided with a plurality of holders 121 of different sizes, and each holder 121 is used to place a product to be measured that matches its size.

[0039] Specifically, in this embodiment, the table 120 is provided with four different sizes of holders 121, which can respectively accommodate 4-inch, 6-inch, 8-inch, and 12-inch products to be measured. The number of holders 121 is not specifically limited and can be selected according to actual needs.

[0040] In this embodiment, the table is provided with a plurality of holders of different sizes, so that one table can hold products of different sizes to be measured without having to replace other measuring devices, thereby improving measurement efficiency.

[0041] For example, Figure 1 As shown, the card holder 121 is provided with a card slot, which is stepped and used to hold the product to be measured that matches its size. By providing the card slot on the card holder, the product to be measured can be fixed on the card holder more firmly, thereby improving measurement accuracy.

[0042] For example, the small-sized card holder 121 is disposed inside the large-sized card holder 121, or the small-sized card holder 121 intersects with the large-sized card holder 121. Figure 1 As shown, in this embodiment, the 4-inch card seat 121 is set in the 6-inch card seat 121, the 8-inch card seat 121 is set in the 12-inch card seat, and the 8-inch card seat 121 and the 12-inch card seat 121 both intersect with the 6-inch card seat.

[0043] It should be noted that the present embodiment does not impose any specific restrictions on the distribution positions of the card holders 121 of different sizes, and they can be selected according to actual needs.

[0044] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the embodiments of the present disclosure, but the embodiments of the present disclosure are not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and essence of the embodiments of the present disclosure, and such modifications and improvements are also considered to be within the scope of protection of the embodiments of the present disclosure.

Claims

1. A measuring platform for a coaxial double-sided microscope, characterized in that: It includes a base, a table and at least one angle adjustment structure; The table is rotatably arranged on the base, and a card seat is provided in the central area of ​​the table, and the card seat is used to place the product to be measured; The angle adjustment structure is used to adjust the rotation angle of the table to adjust the rotation angle of the product to be measured.

2. The measurement platform according to claim 1, characterized in that: The angle adjustment structure includes an adjustment column and an adjustment slot; The adjustment column is fixed to the edge area of ​​the base, and the adjustment slot is provided at the edge area of ​​the table; The adjusting column is slidably arranged in the adjusting slot.

3. The measurement platform according to claim 2, characterized in that: The adjustment column is located at an outer corner end of the base, and the adjustment slot is located at an outer corner end of the table.

4. The measurement platform according to claim 3, characterized in that: There are two angle adjustment structures, and the two angle adjustment structures are symmetrically distributed.

5. The measurement platform according to claim 2, characterized in that: The angle adjustment structure further includes an adjustment handle, which is disposed on the table.

6. The measurement platform according to any one of claims 1 to 4, characterized in that: The base is provided with a fixing column, and the table is provided with a through hole; The fixing post is inserted into the through hole, so that when the angle adjustment structure adjusts the rotation angle of the table, the table can rotate along the fixing post.

7. The measurement platform according to any one of claims 1 to 4, characterized in that: The angle adjustment range of the angle adjustment structure is 0° to 4°.

8. The measuring platform according to any one of claims 1 to 4, characterized in that: The table is provided with a plurality of holders of different sizes, and each holder is used for placing a product to be measured that matches its size.

9. The measurement platform according to claim 8, characterized in that: The card seat is provided with a card slot, and the card slot is used to clamp the product to be measured that matches the size of the card slot.

10. The measurement platform according to claim 8, characterized in that: The small-sized card seat is arranged in the large-sized card seat, or the small-sized card seat intersects with the large-sized card seat.

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