Filter detection device and wafer transfer box

Abstract

The utility model provides a filter detection device and a wafer transfer box, and relates to the technical field of semiconductor manufacturing, and the filter detection device comprises a base station, a moving mechanism and a detection mechanism; the moving mechanism is installed on the base table and used for driving the detection mechanism to do linear reciprocating motion. The detection mechanism comprises a pressure buffer assembly, a contact assembly and a pressure detection assembly; the contact assembly is connected with the moving mechanism through the pressure buffering assembly, and the contact assembly is communicated with the pressure buffering assembly and used for covering the periphery of the filter, so that the filter and the pressure buffering assembly form a closed environment; the pressure buffering assembly is installed on the moving mechanism, and gas is introduced into the contact assembly to be used for buffering gas pressure. The pressure detection assembly is arranged on the pressure buffering assembly and used for detecting the pressure value in the pressure buffering assembly. Whether the filter is damaged or leaks air or not can be judged according to the pressure value, equipment faults caused by the damage of the filter are reduced, the maintenance cost is reduced, the downtime is shortened, potential safety hazards can be prevented, and the safety of the working environment is ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a filter detection device and a wafer transfer box. Background Art

[0002] In the field of semiconductor manufacturing, the pod is a crucial component, serving as a carrier for wafers. The filters on the pod filter air, isolating the pod from the outside world. Currently, a common pod has two air inlets and two air outlets, each equipped with a filter. The filters are unidirectional. The inlet filters conduct air from the outside to the pod, while the outlet filters conduct air from the inside to the outside.

[0003] Existing filter detection devices can only detect whether the flow rate of the filter is in a normal state, but cannot detect whether the filter is damaged. Utility Model Content

[0004] The present application mainly provides a filter detection device to solve the technical problems such as detecting filter damage proposed in the above background technology.

[0005] The technical solutions adopted by this application to solve the above technical problems are:

[0006] A filter detection device comprises a base, a moving mechanism and a detection mechanism; the moving mechanism is mounted on the base and is used to drive the detection mechanism to perform linear reciprocating motion; the detection mechanism comprises a pressure buffer component, a contact component and a pressure detection component; the contact component is connected to the moving mechanism through the pressure buffer component, and the contact component is communicated with the pressure buffer component, and is used to cover the periphery of the filter so that the filter and the pressure buffer component form a closed environment; the pressure buffer component is mounted on the moving mechanism, and gas is passed into the contact component to buffer the air pressure; the pressure detection component is arranged on the pressure buffer component and is used to detect the pressure value in the pressure buffer component.

[0007] Optionally, the detection mechanism also includes an intake boost pipeline and an exhaust pressure relief pipeline; the intake boost pipeline is connected to the buffer assembly, and a first pneumatic valve is provided on the intake boost pipeline. When the contact assembly covers around the filter, the first pneumatic valve is opened to allow the intake boost pipeline to ventilate and pressurize the pressure buffer assembly; the exhaust pressure relief pipeline is connected to the buffer assembly, and a second pneumatic valve is provided on the exhaust pressure relief pipeline. When the pressure detection assembly completes the detection, the second pneumatic valve is opened to allow the gas in the pressure buffer assembly to be discharged from the exhaust pressure relief pipeline.

[0008] Optionally, the pressure buffer assembly includes a plurality of pressure chambers, each of the plurality of pressure chambers is connected to the intake boost pipe and the exhaust pressure relief pipe, and one end of each of the plurality of pressure chambers is connected to the contact assembly.

[0009] Optionally, the contact assembly includes a plurality of contact heads, which are arranged in one-to-one correspondence with the pressure chambers. The contact heads are concave in the middle and convex on the outside, and are used to cover around the filter.

[0010] Optionally, the pressure detection component is a pressure sensor, which is arranged on the pressure chamber and is used to detect the pressure value in the pressure chamber.

[0011] Optionally, it also includes a control unit; the control unit is electrically connected to the contact component, the pressure detection component, the first pneumatic valve and the second pneumatic valve respectively; the control unit is used to receive a covering signal sent by the contact component, generate a first valve opening signal according to the covering signal, and send it to the first pneumatic valve; the control unit is used to receive a preset pressure value signal and a real-time pressure value signal sent by the pressure detection component, generate a valve closing signal according to the preset pressure value signal, send it to the first pneumatic valve, generate a second valve opening signal according to the real-time pressure value signal, and send it to the second pneumatic valve; the control unit determines whether the filter is leaking according to the real-time pressure value signal; the first pneumatic valve opens the first pneumatic valve according to the first valve opening signal, and closes the first pneumatic valve according to the valve closing signal; the second pneumatic valve opens the second pneumatic valve according to the second valve opening signal.

[0012] Optionally, it also includes a display, which is arranged on the base and electrically connected to the control unit; the control unit generates a pressure curve signal based on the real-time pressure value signal and sends it to the display; the display is used to receive the pressure curve signal sent by the control unit and display a pressure curve graph based on the pressure curve signal.

[0013] Optionally, it also includes a buzzer and a warning light arranged on the base; the buzzer and the warning light are electrically connected to the control unit respectively. When the filter leaks, the control unit sends a leakage signal to the buzzer and the warning light respectively. The buzzer buzzes when receiving the leakage signal, and the warning light flashes when receiving the leakage signal.

[0014] Optionally, an elastic sealing member is provided at one end of the contact assembly to ensure air tightness between the filter and the pressure buffer assembly during detection.

[0015] A wafer transfer box is also provided, comprising a box body, a wafer support frame, a sealing plate, a bottom plate and a filter detection device as described above; the wafer support frame is installed in the box body for supporting the wafer; the sealing plate cover is provided on the box body for sealing the box body; the bottom plate is provided at the bottom of the box body for installing a filter; the filter detection device is provided in the box body for monitoring the filter.

[0016] The present application provides a filter detection device and a wafer transfer box. The contact component is covered around the filter to form a closed environment with the filter and the pressure buffer component, and the pressure buffer component is ventilated and pressurized. The pressure measuring component detects the pressure value in the pressure buffer component. The pressure value is used to determine whether the filter is damaged or leaking. Equipment failures caused by filter damage can be reduced, thereby reducing maintenance costs and downtime, and potential safety hazards can be prevented to ensure the safety of the working environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 This is a side structural diagram of the filter detection device of the present application;

[0019] Figure 2 This is a schematic diagram of the top view of the filter detection device of this application.

[0020] Icons: 10-base; 11-display; 12-buzzer; 13-warning light; 20-moving mechanism; 30-pressure buffer assembly; 31-pressure chamber; 40-contact assembly; 41-contact head; 42-elastic seal; 50-pressure detection assembly; 60-intake boost pipeline; 61-first pneumatic valve; 70-exhaust pressure relief pipeline; 71-second pneumatic valve.

[0021] The realization of the objectives, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] To make the purpose, technical solutions, and advantages of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0023] It should be noted that all directional indications in the embodiments of this application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0024] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement it. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0026] Existing filter detection devices can only detect whether the flow rate of the filter is normal, but cannot detect whether the filter is damaged. In response to the above problems, the embodiments of the present application provide the following technical solutions to overcome the above problems.

[0027] Please refer to Figure 1 and Figure 2, an embodiment of the present application provides a filter detection device, including a base 10, a moving mechanism 20 and a detection mechanism; the moving mechanism 20 is installed on the base 10, and is used to drive the detection mechanism to perform linear reciprocating motion; the detection mechanism includes a pressure buffer component 30, a contact component 40 and a pressure detection component 50; the contact component 40 is connected to the moving mechanism 20 through the pressure buffer component 30, and the contact component 40 is communicated with the pressure buffer component 30, and is used to cover the periphery of the filter so that the filter and the pressure buffer component 30 form a closed environment; the pressure buffer component 30 is installed on the moving mechanism 20, and gas is passed into the contact component 40 to buffer the air pressure; the pressure detection component 50 is arranged on the pressure buffer component 30, and is used to detect the pressure value in the pressure buffer component 30.

[0028] Specifically, the pressure buffer assembly 30 is installed on the moving mechanism 20, and a contact assembly 40 is set at one end of the pressure buffer assembly 30. The contact assembly 40 is connected to the pressure buffer assembly 30. The moving mechanism 20 drives the contact assembly 40 to approach and cover the filter to be tested, and then the pressure buffer assembly 30 is ventilated and pressurized to a preset pressure value. Due to the unidirectional conductivity of the filter, the gas will not flow out of the filter. At this time, the pressure detection assembly 50 detects the pressure value in the pressure buffer assembly 30. If the pressure value decreases and is less than the preset pressure value, it indicates that the filter is damaged.

[0029] The present application provides a filter detection device, which covers the filter around the contact component 40 to form a closed environment between the filter and the pressure buffer component 30, and ventilates and pressurizes the pressure buffer component 30. The pressure measuring component detects the pressure value inside the pressure buffer component 30, and determines whether the filter is damaged or leaking based on the pressure value. This can reduce equipment failures caused by filter damage, thereby reducing maintenance costs and downtime, and can prevent potential safety hazards and ensure the safety of the working environment.

[0030] In an embodiment of the present application, the detection mechanism also includes an intake boost pipeline 60 and an exhaust pressure relief pipeline 70; the intake boost pipeline 60 is connected to the buffer assembly, and a first pneumatic valve 61 is provided on the intake boost pipeline 60. When the contact assembly 40 covers around the filter, the first pneumatic valve 61 is opened to allow the intake boost pipeline 60 to ventilate and pressurize the pressure buffer assembly 30; the exhaust pressure relief pipeline 70 is connected to the buffer assembly, and a second pneumatic valve 71 is provided on the exhaust pressure relief pipeline 70. When the pressure detection assembly 50 completes the detection, the second pneumatic valve 71 is opened to allow the gas in the pressure buffer assembly 30 to be discharged from the exhaust pressure relief pipeline 70.

[0031] Specifically, the intake boost line 60 is responsible for providing compressed gas to the pressure buffer assembly 30 to ensure that there is sufficient pressure inside the pressure buffer assembly 30 during the detection process, and the first pneumatic valve 61 is responsible for controlling the on-off of the intake boost line 60. When the contact assembly 40 covers the filter, the first pneumatic valve 61 opens, allowing compressed gas to enter the pressure buffer assembly 30 to pressurize the filter. The exhaust pressure relief line 70 is used to discharge the gas in the pressure buffer assembly 30 and restore it to normal pressure after the detection is completed. The second pneumatic valve 71 is responsible for controlling the on-off of the exhaust pressure relief line 70. When the pressure detection assembly 50 completes the detection, the second pneumatic valve 71 opens to allow gas to be discharged from the pressure buffer assembly 30.

[0032] By providing the intake boost line 60 and the exhaust pressure relief line 70, the pressure within the pressure buffer assembly 30 can be precisely controlled, ensuring pressure stability and controllability during the test process. During the test, the pressure boost and pressure relief control can avoid excessive pressure shock to the filter, protecting the filter from damage.

[0033] In an embodiment of the present application, the pressure buffer assembly 30 includes multiple pressure chambers 31, and the multiple pressure chambers 31 are connected to the intake boost pipe 60 and the exhaust pressure relief pipe 70, and one end of the multiple pressure chambers 31 is connected to the contact assembly 40.

[0034] Specifically, the pressure buffer assembly 30 is composed of multiple pressure chambers 31, which are connected to the intake boost pipe 60 and the exhaust pressure relief pipe 70 to ensure that the gas can circulate during the boost and pressure relief process. In addition, the setting of multiple pressure chambers 31 can better buffer the pressure, prevent the filter from being damaged by excessive instantaneous pressure, and further protect the filter.

[0035] In an embodiment of the present application, the contact assembly 40 includes a plurality of contact heads 41 , which are arranged in one-to-one correspondence with the pressure chambers 31 . The contact heads 41 are concave in the middle and convex on the outside, and are used to cover around the filter.

[0036] Specifically, the contact assembly 40 includes multiple contact heads 41, each recessed in the center and convex on the outside. This structure allows the contact heads 41 to tightly cover the filter. This design helps create a sealed environment, ensuring accurate pressure detection. Furthermore, the contact heads 41 correspond one-to-one with the pressure chambers 31, allowing the device to adapt to multiple filters for testing, increasing its versatility and applicability.

[0037] In an embodiment of the present application, the pressure detection component 50 is a pressure sensor, which is disposed on the pressure chamber 31 and is used to detect the pressure value in the pressure chamber 31 .

[0038] Specifically, the pressure sensor is a device used to detect the pressure within pressure chamber 31. When gas enters pressure chamber 31 and exerts pressure, the pressure sensor detects changes in pressure. This provides real-time pressure monitoring, ensuring that pressure changes around the filter are accurately detected and recorded. By monitoring pressure changes in real time, it is possible to more accurately determine whether the filter is damaged or leaking, thereby improving detection accuracy.

[0039] In an embodiment of the present application, a control unit is also included; the control unit is electrically connected to the contact component 40, the pressure detection component 50, the first pneumatic valve 61 and the second pneumatic valve 71 respectively; the control unit is used to receive the covering signal sent by the contact component 40, generate a first valve opening signal according to the covering signal, and send it to the first pneumatic valve 61; the control unit is used to receive the preset pressure value signal and the real-time pressure value signal sent by the pressure detection component 50, generate a valve closing signal according to the preset pressure value signal, send it to the first pneumatic valve 61, generate a second valve opening signal according to the real-time pressure value signal, and send it to the second pneumatic valve 71; the control unit determines whether the filter is leaking according to the real-time pressure value signal; the first pneumatic valve 61 opens the first pneumatic valve 61 according to the first valve opening signal, and closes the first pneumatic valve 61 according to the valve closing signal; the second pneumatic valve 71 opens the second pneumatic valve 71 according to the second valve opening signal.

[0040] Specifically, the control unit is responsible for receiving signals from various components and sending instructions. It communicates with the contact component 40, the pressure detection component 50, the first pneumatic valve 61 and the second pneumatic valve 71 through electrical connections.

[0041] When the contact assembly 40 covers the filter, it sends a covering signal to the control unit, which generates a first valve opening signal based on the signal, instructing the first pneumatic valve 61 to open, allowing gas to enter the pressure buffer assembly 30 .

[0042] The pressure detection assembly 50 monitors the pressure in the pressure chamber 31 in real time and transmits the preset and real-time pressure values ​​to the control unit. Based on the preset pressure value, the control unit generates a valve-closing signal, instructing the first pneumatic valve 61 to close, preventing gas from entering. Based on the real-time pressure value, the control unit generates a second valve-opening signal, instructing the second pneumatic valve 71 to open, allowing gas to escape from the pressure buffer assembly 30.

[0043] The first pneumatic valve 61 and the second pneumatic valve 71 are opened or closed according to the instruction of the control unit. The first pneumatic valve 61 controls the inlet of gas, while the second pneumatic valve 71 controls the exhaust of gas.

[0044] The control unit determines whether there is a leak in the filter based on the received real-time pressure value signal. If the real-time pressure value is less than the preset pressure value, it indicates that the filter is damaged or leaking.

[0045] With the above-mentioned configuration, through the intelligent control of the control unit, the filter detection device can achieve automated, accurate and efficient detection, while improving safety, reducing maintenance costs and improving detection efficiency.

[0046] Please refer to Figure 1 and Figure 2 In an embodiment of the present application, a display 11 is further included, which is arranged on the base 10 and electrically connected to the control unit; the control unit generates a pressure curve signal according to the real-time pressure value signal and sends it to the display 11; the display 11 is used to receive the pressure curve signal sent by the control unit and display a pressure curve graph according to the pressure curve signal.

[0047] Specifically, the display 11 is connected to the control unit and is used to display the pressure value detected by the pressure sensor. It can convert the pressure value into an intuitive graphic or digital display for easy observation by the operator.

[0048] As will be appreciated, a pressure sensor is mounted on the pressure chamber 31 to monitor the pressure within the pressure chamber 31 in real time, converting these pressure values ​​into electrical signals and transmitting them to the control unit. The control unit receives the pressure value signals from the pressure sensor, generates pressure curve signals based on these signals, and then transmits these signals to the display 11. The display 11 displays a graph showing pressure changes over time based on the received signals.

[0049] It should be noted that recording the pressure change curve can provide an important basis for subsequent data analysis and fault diagnosis, helping to optimize filter design and maintenance strategies. The intuitive display 11 allows operators to understand the system status without additional measuring equipment, simplifying the operation process.

[0050] In an embodiment of the present application, a buzzer 12 and a warning light 13 are further included on the base 10; the buzzer 12 and the warning light 13 are electrically connected to the control unit respectively. When the filter leaks, the control unit sends a leakage signal to the buzzer 12 and the warning light 13 respectively. The buzzer 12 buzzes when receiving the leakage signal, and the warning light 13 flashes when receiving the leakage signal.

[0051] Specifically, the buzzer 12 is an electronic sound-generating device that emits an audible alarm upon receiving a signal from the control unit. The warning light 13 flashes to provide a visual warning. The control unit determines whether the filter is leaking based on the real-time pressure value signal transmitted by the pressure detection assembly 50. If a leak is detected, the control unit sends a signal to the buzzer 12 and warning light 13.

[0052] With this arrangement, if a filter leak occurs, the buzzer 12 and warning light 13 will immediately sound an alarm, ensuring that the operator can respond quickly and take appropriate measures. This dual audible and visual alarm improves the safety of the working environment and prevents environmental pollution or other safety accidents caused by filter leaks.

[0053] In the embodiment of the present application, an elastic sealing member 42 is provided at one end of the contact assembly 40 to ensure airtightness between the filter and the pressure buffer assembly 30 during testing.

[0054] Specifically, elastic seal 42 is located at one end of contact assembly 40. Its primary function is to ensure airtightness between the filter and pressure buffer assembly 30 during testing. When contact assembly 40 is positioned around the filter, elastic seal 42 elastically deforms, filling and adapting to the tiny gaps and surface irregularities between the filter and pressure buffer assembly 30, thereby achieving a seal. The material and structural design of elastic seal 42 enable it to accommodate filters of varying shapes and sizes, enhancing the versatility and applicability of the device.

[0055] An embodiment of the present application also provides a wafer transfer box, comprising a box body, a wafer support frame, a sealing plate, a bottom plate and a filter detection device as described above; the wafer support frame is installed in the box body for supporting the wafer; the sealing plate cover is provided on the box body for sealing the box body; the bottom plate is provided at the bottom of the box body for installing a filter; the filter detection device is provided in the box body for monitoring the filter.

[0056] Specifically, the box body serves as the main structure of the wafer transfer box and is used to carry and transport wafers. The wafer support frame is installed in the box body to support the wafer, ensure that the wafer is stable during the transfer process, and avoid contamination caused by direct contact with the box body. The sealing cover is provided on the box body to seal the box body to prevent external contaminants from entering and keep the internal environment of the box body clean. The bottom plate is provided at the bottom of the box body for installing a filter. The function of the filter is to filter the gas entering the box body to ensure the cleanliness of the internal environment. The filter detection device is provided in the box body, which can promptly detect whether the filter is damaged or leaking, so as to ensure the cleanliness and safety of the production process.

[0057] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A filter detection device, characterized in that: Including base, moving mechanism and detection mechanism; The moving mechanism is mounted on the base and is used to drive the detection mechanism to perform linear reciprocating motion; The detection mechanism includes a pressure buffer component, a contact component and a pressure detection component; The contact assembly is connected to the moving mechanism through the pressure buffer assembly, and the contact assembly is in communication with the pressure buffer assembly, and is used to cover the filter so that the filter and the pressure buffer assembly form a sealed environment; The pressure buffer component is installed on the moving mechanism and passes gas into the contact component to buffer the air pressure; The pressure detection component is arranged on the pressure buffer component and is used to detect the pressure value in the pressure buffer component.

2. The filter detection device according to claim 1, characterized in that: The detection mechanism also includes an intake pressure boost pipeline and an exhaust pressure relief pipeline; The intake boost pipeline is in communication with the buffer assembly, and a first pneumatic valve is provided on the intake boost pipeline. When the contact assembly covers the filter, the first pneumatic valve is opened to allow the intake boost pipeline to ventilate and pressurize the pressure buffer assembly. The exhaust pressure relief pipeline is connected to the buffer assembly, and a second pneumatic valve is provided on the exhaust pressure relief pipeline. When the pressure detection assembly completes the detection, the second pneumatic valve is opened to discharge the gas in the pressure buffer assembly from the exhaust pressure relief pipeline.

3. The filter detection device according to claim 2, characterized in that: The pressure buffer assembly includes a plurality of pressure chambers, each of which is connected to the intake boost pipe and the exhaust pressure relief pipe, and one end of each of the pressure chambers is connected to the contact assembly.

4. The filter detection device according to claim 3, characterized in that: The contact assembly includes a plurality of contact heads, which are arranged in one-to-one correspondence with the pressure chambers. The contact heads are concave in the middle and convex on the outside, and are used to cover around the filter.

5. The filter detection device according to claim 4, characterized in that: The pressure detection component is a pressure sensor, which is arranged on the pressure chamber and is used to detect the pressure value in the pressure chamber.

6. The filter detection device according to claim 5, characterized in that: Also included is a control unit; The control unit is electrically connected to the contact assembly, the pressure detection assembly, the first pneumatic valve, and the second pneumatic valve respectively; The control unit is used to receive a covering signal sent by the contact component, generate a first valve opening signal according to the covering signal, and send the first valve opening signal to the first pneumatic valve; The control unit is used to receive the preset pressure value signal and the real-time pressure value signal sent by the pressure detection component, generate a valve closing signal according to the preset pressure value signal, and send it to the first pneumatic valve, and generate a second valve opening signal according to the real-time pressure value signal, and send it to the second pneumatic valve; The control unit determines whether the filter is leaking according to the real-time pressure value signal; The first pneumatic valve is opened according to the first valve opening signal and is closed according to the valve closing signal; The second pneumatic valve opens according to the second valve opening signal.

7. The filter detection device according to claim 6, characterized in that: Also included is a display, which is disposed on the base and electrically connected to the control unit; The control unit generates a pressure curve signal according to the real-time pressure value signal and sends the signal to the display; The display is used to receive the pressure curve signal sent by the control unit and display a pressure curve graph according to the pressure curve signal.

8. The filter detection device according to claim 7, characterized in that: Also included is a buzzer and a warning light disposed on the base; The buzzer and the warning light are electrically connected to the control unit respectively. When the filter leaks, the control unit sends a leakage signal to the buzzer and the warning light respectively. The buzzer beeps when receiving the leakage signal, and the warning light flashes when receiving the leakage signal.

9. The filter detection device according to any one of claims 4 to 8, characterized in that: An elastic sealing member is provided at one end of the contact assembly to ensure air tightness between the filter and the pressure buffer assembly during testing.

10. A wafer transfer box, characterized in that: It comprises a box body, a wafer support frame, a sealing plate, a bottom plate and the filter detection device according to any one of claims 1 to 9; The wafer support frame is installed in the box body and is used to support the wafer; The sealing cover is provided on the box body and is used to seal the box body; The bottom plate is arranged at the bottom of the box body and is used for installing the filter; The filter detection device is arranged in the box body and is used to monitor the filter.

Images