Multifunctional dust collector for cleaning chamber of thin film deposition equipment

Abstract

The utility model provides a multifunctional dust collector for cleaning a cavity of film deposition equipment, which relates to the field of dust collectors and comprises a dust collector body, a water filter pipe is fixedly mounted in the dust collector body, and a water filter device is mounted above one end of the water filter pipe positioned in the dust collector body. The dust collector body is filled with clean water, and a dry-wet motor is installed on the inner top wall of the dust collector body. According to the device, through cooperation of the dust collector body, the water filtering pipe, the water filtering device, clean water, the polymer sponge filtering device, the dry-wet motor, the air outlet, the blow-down valve, the magnetic attraction mechanism and the ultrasonic dust collection mechanism, the magnetic attraction mechanism and the ultrasonic dust collection mechanism can be used for cleaning film particles adhered to a cavity in a targeted mode; the water circulation filtering device is used for dedusting and filtering, the device is easy to manufacture and low in cost, fine filtering and multi-layer filtering can be achieved, and secondary pollution is avoided.

Description

Technical Field

[0001] The utility model relates to a multifunctional vacuum cleaner, in particular to a multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device, belonging to the technical field of vacuum cleaners. Background Art

[0002] Currently, thin-film deposition equipment chambers are cleaned with standard industrial vacuum cleaners. However, as thin film accumulates, it becomes difficult to completely absorb the condensed film on the chamber walls. This is especially true for metal-plated chambers, where the film's adhesion to the chamber is stronger, making it impossible for standard vacuum cleaners to remove it. This makes chamber cleaning difficult and also affects the quality of the film.

[0003] Nowadays, vacuum cleaner filtration devices generally use bag-type microporous filtration, which has the problem of low initial filtration effect and easy to cause "secondary pollution". As the dirt increases, the pores are blocked, the suction force decreases and the motor suction power is reduced. When removing the dirt, it is easy to cause "secondary pollution" again and the process is inconvenient and unhygienic. Moreover, during the entire process of cleaning the chamber, we noticed that the brightness inside the chamber was very unsatisfactory and the light was very dim, which brought great inconvenience to the cleaning work and may lead to some potential problems. Utility Model Content

[0004] (1) Technical problems solved

[0005] The purpose of the present invention is to provide a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device in order to solve the above-mentioned problem, so as to solve the problem that the bag-type microporous filtration commonly used in the prior art has a low initial filtration effect and is prone to "secondary pollution".

[0006] (2) Technical solution

[0007] The present invention is realized through the following technical solutions: a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition equipment, comprising a vacuum cleaner body, a water filter tube fixedly installed inside the vacuum cleaner body, a water filter device installed above one end of the water filter tube inside the vacuum cleaner body, clean water is installed inside the vacuum cleaner body, a dry-wet motor is installed on the inner top wall of the vacuum cleaner body, a polymer sponge filter device is fixedly provided on the outside of the dry-wet motor, two air outlets are installed on the upper end of the vacuum cleaner body, a connecting pipe is detachably installed on one end of the water filter tube located outside the vacuum cleaner body, a magnetic suction mechanism and an ultrasonic suction mechanism are provided on the end of the connecting pipe away from the vacuum cleaner body, a lighting mechanism is installed on the end of the connecting pipe away from the vacuum cleaner body, and a power switch is installed above the vacuum cleaner body.

[0008] Preferably, the magnetic attraction mechanism includes a magnetic suction head, and a magnet, a magnetic attraction device and an iron core are fixedly installed inside the magnetic suction head.

[0009] Preferably, the ultrasonic vacuum cleaning mechanism includes an ultrasonic vacuum cleaning head, an ultrasonic transducer and a radiation plate are fixedly installed inside the ultrasonic vacuum cleaning head, a control device is fixedly installed on the outer surface of the ultrasonic vacuum cleaning head, the ultrasonic transducer is electrically connected to the control device, and a battery device is fixedly installed inside the ultrasonic vacuum cleaning head.

[0010] Preferably, the lighting mechanism includes a fixing device, which can be fixed at a position of the connecting pipe away from one end of the vacuum cleaner body. A fixing rod is fixedly connected to the fixing device, and a battery is fixedly connected to the interior of the fixing rod.

[0011] Preferably, a control button is installed on the outer surface of the fixing rod, one end of the fixing rod is fixedly connected to a rotating device, one end of the rotating device is fixedly connected to the outer surface of the lighting lamp, and a magnifying glass is fixedly connected to the inner circumference of the lighting lamp.

[0012] Preferably, a sewage discharge valve is fixedly mounted on the bottom surface of the vacuum cleaner body, and a water inlet valve is fixedly mounted on the side surface of the vacuum cleaner body.

[0013] The utility model provides a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition equipment, which has the following beneficial effects:

[0014] 1. The multifunctional vacuum cleaner for cleaning the chamber of the thin film deposition equipment is equipped with a vacuum cleaner body, a water filter tube, a water filter device, clean water, a polymer sponge filter device, a dry and wet motor, an air outlet, a drain valve, a magnetic suction mechanism and an ultrasonic dust suction mechanism. The magnetic suction mechanism and the ultrasonic dust suction mechanism can be used to clean the thin film particles adhered to the chamber in a targeted manner, and a water circulation filter device is used for dust removal and filtration. Not only is the device simple to manufacture and low in cost, but it can also perform fine filtration and multi-layer filtration to avoid secondary pollution.

[0015] 2. The multifunctional vacuum cleaner for cleaning the chamber of the thin film deposition equipment is designed with a lighting lamp, a magnifying glass, a rotating device, a control button, a fixing device and a fixing rod. The lighting lamp and the magnifying glass are installed to clearly observe tiny debris and improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic cross-sectional view of the overall structure of the utility model;

[0017] Figure 2 This is a cross-sectional view of the magnetic attraction mechanism of the present utility model;

[0018] Figure 3 This is a cross-sectional view of the ultrasonic dust collection mechanism of the utility model;

[0019] Figure 4 This is a schematic diagram of the lighting mechanism of the present utility model.

[0020]

Main component symbol description

[0021] 1. Vacuum cleaner body; 2. Water filter tube; 3. Water filter device; 4. Clean water; 5. Polymer sponge filter device; 6. Wet and dry motor; 7. Air outlet; 8. Drain valve; 9. Water inlet valve; 10. Power switch; 11. Connecting pipe; 12. Magnetic suction head; 13. Magnet; 14. Magnetic device; 15. Iron core; 16. Ultrasonic transducer; 17. Radiating plate; 18. Control device; 19. Battery device; 20. Light; 21. Magnifying glass; 22. Rotating device; 23. Control button; 24. Fixing device; 25. Fixing rod; 26. Ultrasonic suction head. DETAILED DESCRIPTION

[0022] An embodiment of the utility model provides a multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device.

[0023] See also Figure 1 , including a vacuum cleaner body 1, a power switch 10 is installed above the vacuum cleaner body 1, a water filter tube 2 is fixedly installed inside the vacuum cleaner body 1, water filtration can be performed through the water filter tube 2, the water filter tube 2 is located above one end of the vacuum cleaner body 1 and a water filter device 3 is installed, the water filter device 3 can use existing water filter materials for filtering, which is the existing technology and this application will not go into details about it, and can filter dust and dirt. Clean water 4 is installed inside the vacuum cleaner body 1, and the clean water 4 can filter the dirt entering from the outside.

[0024] A dry and wet motor 6 is installed on the inner top wall of the vacuum cleaner body 1, and a polymer sponge filter device 5 is fixedly installed on the outside of the dry and wet motor 6 to filter the air and facilitate the discharge of the filtered clean air. Two air outlets 7 are installed on the upper end of the vacuum cleaner body 1, which can discharge the filtered clean gas from the air outlet 7. The water filter tube 2 is located on the outside of the vacuum cleaner body 1 and is detachably installed with a connecting pipe 11 at one end. The disassembly method of the connecting pipe 11 and the vacuum cleaner body 1 can use conventional disassembly methods, such as snap-on, threaded connection and other connection methods.

[0025] See also Figure 2A magnetic suction mechanism and an ultrasonic suction mechanism are provided at the end of the connecting pipe 11 away from the vacuum cleaner body 1. The magnetic suction mechanism includes a magnetic suction head 12. A magnet 13, a magnetic suction device 14 and an iron core 15 are fixedly installed inside the magnetic suction head 12. The ferrous metal particles passing through the magnetic suction head 12 can be adsorbed to prevent these substances from splashing around during the cleaning process. Dust or other debris are sucked into the vacuum cleaner body 1 for water filtration and cleaning.

[0026] See also Figure 3 The ultrasonic vacuuming mechanism includes an ultrasonic vacuuming head 26, an ultrasonic transducer 16 and a radiation plate 17 are fixedly installed inside the ultrasonic vacuuming head 26, a control device 18 is fixedly installed on the outer surface of the ultrasonic vacuuming head 26, the ultrasonic transducer 16 is electrically connected to the control device 18, a battery device 19 is fixedly installed inside the ultrasonic vacuuming head 26, the ultrasonic transducer 16 is used to convert electrical energy into ultrasonic energy, the radiation plate 17 is used to transmit ultrasonic energy to the surface to be cleaned, the control device 18 is used to control the operation of the ultrasonic transducer 16 to realize automatic control, and a plurality of micropores are provided on the surface of the radiation plate 17, which are used to increase the propagation area of ​​ultrasonic waves and improve the cleaning effect.

[0027] The battery device 19 is used for ultrasonic power supply. In actual use, the ultrasonic cleaner head 26 is installed at the air inlet of the dust collector, the control device 18 is started, the ultrasonic transducer 16 starts to work, generates ultrasonic energy, and transmits it to the surface to be cleaned through the radiation plate 17. The ultrasonic vibration causes dust and particulate matter to fall off the surface and be sucked in and filtered by the vacuum cleaner body 1. A lighting mechanism is installed at the end of the connecting pipe 11 away from the vacuum cleaner body 1.

[0028] See also Figure 4 The lighting mechanism includes a fixing device 24, which can be fixed at a position where the connecting pipe 11 is away from one end of the vacuum cleaner body 1. A fixing rod 25 is fixedly connected to the fixing device 24, and a battery is fixedly connected to the inside of the fixing rod 25. A control button 23 is installed on the outer surface of the fixing rod 25, and one end of the fixing rod 25 is fixedly connected to a rotating device 22. One end of the rotating device 22 is fixedly connected to the outer surface of the illuminating lamp 20. The rotating device 22 can be rotated by a pin shaft. During use, the fixing device 24 is used to fix it to the position of the vacuum cleaner head, and the control button 23 can be used to adjust the brightness of the lighting mode. The position can be adjusted by the rotating device 22 according to actual needs during use, making the dust removal process more convenient. A magnifying glass 21 is fixedly connected to the inner circumference of the illuminating lamp 20, which can clearly observe tiny debris and improve work efficiency.

[0029] Working principle: When in use, turn on the power switch 10, the vacuum cleaner body 1 starts to work, and the dust-laden air passes through the suction head ( Figure 2 or Figure 3), enters the connecting pipe 11, and then enters the water filter tube 2 inside the vacuum cleaner body 1. In the water filter tube 2, dust and debris are separated out, and through strong water filtration, the filtered clean air is discharged through the air outlet 7 after passing through the polymer sponge filter device 5. When the dust and dirt on the water filter device 3 accumulate to a certain extent, the drain valve 8 is opened to discharge the filtered sewage, and the water inlet valve 9 is opened to replenish clean water 4 to achieve the effect of recycling. The use of ultrasonic and magnetic dust collector heads can be used to clean the film particles adhered to the chamber in a targeted manner. The use of water circulation filtration can effectively avoid secondary pollution caused by debris. The combined use can greatly improve the cleanliness of the chamber film and save manpower and financial resources.

[0030] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device, comprising a vacuum cleaner body (1), characterized in that: A water filter tube (2) is fixedly installed inside the vacuum cleaner body (1), and a water filter device (3) is installed above one end of the water filter tube (2) inside the vacuum cleaner body (1). Clean water (4) is installed inside the vacuum cleaner body (1), and a dry-wet motor (6) is installed on the inner top wall of the vacuum cleaner body (1). A polymer sponge filter device (5) is fixedly installed outside the dry-wet motor (6). Two air outlets (7) are installed at the upper end of the vacuum cleaner body (1). A connecting pipe (11) is detachably installed at one end of the water filter tube (2) outside the vacuum cleaner body (1). A magnetic suction mechanism and an ultrasonic dust suction mechanism are provided at one end of the connecting pipe (11) away from the vacuum cleaner body (1). A lighting mechanism is installed at one end of the connecting pipe (11) away from the vacuum cleaner body (1). A power switch (10) is installed above the vacuum cleaner body (1).

2. The multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition equipment according to claim 1, characterized in that: The magnetic suction mechanism comprises a magnetic suction dust suction head (12), wherein a magnet (13), a magnetic suction device (14) and an iron core (15) are fixedly installed inside the magnetic suction dust suction head (12).

3. The multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition equipment according to claim 1, characterized in that: The ultrasonic dust collection mechanism comprises an ultrasonic dust collection head (26), an ultrasonic transducer (16) and a radiation plate (17) are fixedly installed inside the ultrasonic dust collection head (26), a control device (18) is fixedly installed on the outer surface of the ultrasonic dust collection head (26), the ultrasonic transducer (16) is electrically connected to the control device (18), and a battery device (19) is fixedly installed inside the ultrasonic dust collection head (26).

4. The multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition equipment according to claim 1, characterized in that: The lighting mechanism comprises a fixing device (24), which can be fixed at a position of the connecting pipe (11) away from one end of the vacuum cleaner body (1), and a fixing rod (25) is fixedly connected to the fixing device (24), and a battery is fixedly connected inside the fixing rod (25).

5. The multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition equipment according to claim 4, characterized in that: A control button (23) is installed on the outer surface of the fixing rod (25), one end of the fixing rod (25) is fixedly connected to a rotating device (22), one end of the rotating device (22) is fixedly connected to the outer surface of the lighting lamp (20), and the inner circumferential surface of the lighting lamp (20) is fixedly connected to a magnifying glass (21).

6. The multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition equipment according to claim 1, characterized in that: A sewage discharge valve (8) is fixedly mounted on the bottom surface of the vacuum cleaner body (1), and a water inlet valve (9) is fixedly mounted on the side surface of the vacuum cleaner body (1).

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