Chip frame removing structure

Abstract

The utility model discloses a chip frame removing structure. The chip frame removing structure comprises an X-axis module, an auxiliary sliding rail parallel to the X-axis module, a Y-axis module erected between the X-axis module and the auxiliary sliding rail, a Z-axis module vertically arranged on the Y-axis module, and a frame removing unit arranged on the Z-axis module. According to the chip frame removing structure provided by the invention, mechanical equipment is effectively utilized to replace manual work, so that the consumption of human resources is greatly reduced, the chip frame removing efficiency and effect are effectively improved, and the development and progress of enterprises and industries are well promoted.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production equipment, and more specifically to a chip frameless structure. Background Art

[0002] During the chip production process, there will be a circle of border around the chip. Before the chip is stripped, the border around the chip needs to be removed first. At present, the removal of the chip border mainly relies on ordinary workers to remove it, and the removal method is to use a flat-bladed spatula to scrape the border. However, the manual scraping method has the following problems: (1) The efficiency of manual scraping is low, and it requires a lot of manpower and time costs; (2) Because the chip border is removed manually, it is inevitable that the chip will be scratched and damaged by the operator during the operation; (3) The frame fragments are messy. Utility Model Content

[0003] In response to the shortcomings of the existing technology, this application provides a chip border removal structure that effectively uses mechanical equipment to replace manual labor, which not only greatly reduces the consumption of human resources, but also effectively improves the efficiency and effect of chip border removal, and greatly promotes the development and progress of enterprises and industries.

[0004] A chip frame removal structure includes an X-axis module, an auxiliary slide rail arranged parallel to the X-axis module, a Y-axis module mounted between the X-axis module and the auxiliary slide rail, a Z-axis module vertically arranged on the Y-axis module, and a frame removal unit arranged on the Z-axis module.

[0005] Preferably, the Z-axis module is further provided with a camera and a light source, and both the camera and the light source are arranged facing downward.

[0006] Furthermore, the frame removal unit is composed of a fixing part, a slot-shaped photoelectric device arranged on the fixing part, an exhaust pipe arranged in the slot-shaped photoelectric device, an air collecting hood arranged at the bottom end of the exhaust pipe, a rotating control part arranged on the exhaust pipe, and a frame removal head arranged on the fixing part.

[0007] Preferably, the top end of the air extraction pipe is externally connected to an air extraction pump.

[0008] Furthermore, the rotation control unit is composed of an angle steering motor arranged on a fixing member, a synchronous wheel arranged on an output shaft of the angle steering motor, and a synchronous belt simultaneously mounted on the synchronous wheel and the exhaust pipe.

[0009] Furthermore, the frame removing head is composed of a rotating motor fixed obliquely on the exhaust pipe, a coupling arranged on the output shaft of the rotating motor, and an umbrella-shaped scraper arranged on the coupling.

[0010] Preferably, the umbrella-shaped scraper penetrates the wind collecting cover from the side, the lowest plane of the umbrella-shaped scraper is parallel to the lowest surface of the wind collecting cover, and the lowest plane of the umbrella-shaped scraper is lower than the lowest surface of the wind collecting cover.

[0011] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0012] The utility model effectively utilizes mechanical equipment to replace manual labor, which not only greatly reduces the consumption of human resources, but also effectively improves the efficiency and effect of chip border removal, and greatly promotes the development and progress of enterprises and industries.

[0013] Some additional features of the present application may be described in the following description. Some additional features of the present application will be apparent to those skilled in the art from an inspection of the following description and accompanying drawings, or from a thorough understanding of the production or operation of the embodiments. The features disclosed in this application may be realized and achieved through the practice or use of the various methods, means, and combinations of the specific embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The exemplary embodiments of the present application and their descriptions are used to explain the present application and do not constitute a limitation of the present application. In each figure, the same reference numerals represent the same components.

[0015] Figure 1 It is a structural diagram of the present utility model.

[0016] Figure 2 This is a structural diagram of the frame removal unit of the present invention.

[0017] Explanation of the accompanying drawings: 1. X-axis module; 2. Y-axis module; 3. Z-axis module; 4. Auxiliary slide rail; 5. Camera; 6. Light source; 7. Frame removal unit; 7-1. Fixing part; 7-2. Angle steering motor; 7-3. Slot-type photoelectric; 7-4. Synchronous belt; 7-5. Synchronous wheel; 7-6. Exhaust pipe; 7-7. Rotating motor; 7-8. Coupling; 7-9. Umbrella-shaped scraper; 7-10. Wind hood. DETAILED DESCRIPTION

[0018] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0019] It should be noted that, if the description and claims of the present application and the above-mentioned drawings relate to the terms "first", "second", etc., they are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein. In addition, if the terms "including" and "having" and any of their variations are involved, it is intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0020] In this application, when terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inside," "outside," "center," "vertical," "horizontal," "transverse," and "longitudinal" are used, the orientations or positional relationships they indicate are based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0021] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0022] Furthermore, in this application, the terms "installed," "disposed," "provided with," "connected," "connected," and "socketed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0023] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0024] Example 1

[0025] like Figure 1As shown, a chip de-frame structure includes an X-axis module 1, an auxiliary slide rail 4 arranged parallel to the X-axis module 1, a Y-axis module 2 mounted between the X-axis module 1 and the auxiliary slide rail 4, a Z-axis module 3 vertically arranged on the Y-axis module 2, and a de-frame unit 7 arranged on the Z-axis module 3.

[0026] The X-axis module, Y-axis module and Z-axis module are conventional technologies in the industry. By setting the X-axis module, Y-axis module and Z-axis module, the position of the de-frame unit can be adjusted arbitrarily within a limited range, so that the de-frame unit can reach the position of any chip that needs to be de-framed within the limited range.

[0027] The Z-axis module 3 is further provided with a camera 5 and a light source 6 , and both the camera 5 and the light source 6 are arranged facing downward.

[0028] The camera can be used to effectively photograph the chips that need to be framed. The operator can adjust the operating parameters of the equipment based on the photos taken, or the controller can be set to enable the equipment to adjust the operating parameters by itself, thereby greatly improving the intelligence and automation of production and effectively improving production efficiency.

[0029] The light source can illuminate the processed chip, avoiding parameter adjustment errors caused by insufficient lighting, further improving the clarity of the photo, and making the operation of the equipment more stable and accurate.

[0030] like Figure 2 As shown, the de-frame unit 7 is composed of a fixing part 7-1, a slot-shaped photoelectric device 7-3 arranged on the fixing part 7-1, an exhaust pipe 7-6 arranged in the slot-shaped photoelectric device 7-3, an air collecting cover 7-10 arranged at the bottom end of the exhaust pipe 7-6, a rotation control part arranged on the exhaust pipe 7-6, and a de-frame head arranged on the fixing part 7-1.

[0031] The top end of the air extraction pipe 7-6 is externally connected to an air extraction pump.

[0032] The vacuum pump can keep the vacuum pipe and the air hood in a negative pressure state at all times. When the chip frame is scraped off, the chip itself and the debris can be quickly discharged, which ensures the cleanliness of the equipment working area, effectively avoids impurities remaining on the chip, reduces the difficulty of subsequent processing steps, and further improves the use effect of the product.

[0033] The rotation control unit is composed of an angle steering motor 7-2 arranged on a fixing member 7-1, a synchronous wheel 7-5 arranged on the output shaft of the angle steering motor 7-2, and a synchronous belt 7-4 simultaneously mounted on the synchronous wheel 7-5 and the exhaust pipe 7-6.

[0034] The angle steering motor can control the forward and reverse rotation of the synchronous wheel, and the synchronous belt can complete the rotation control of the exhaust pipe angle, so that the frame removal head can adjust the angle parameters according to actual production needs, thereby enabling it to better complete the removal of chip frames from different angles, further improving the use effect of the equipment.

[0035] The frame removing head is composed of a rotating motor 7-7 fixed obliquely on the exhaust pipe 7-6, a coupling 7-8 arranged on the output shaft of the rotating motor 7-7, and an umbrella-shaped scraper 7-9 arranged on the coupling 7-8.

[0036] The umbrella-shaped scraper 7-9 passes through the wind gathering cover 7-10 from the side, and the lowest plane of the umbrella-shaped scraper 7-9 is parallel to the lowest surface of the wind gathering cover 7-10, and the lowest plane of the umbrella-shaped scraper 7-9 is lower than the lowest surface of the wind gathering cover 7-10.

[0037] When the rotating motor is running, it can drive the umbrella-shaped scraper to rotate through the coupling. The chip frame can be scraped off by the rotation of the umbrella-shaped scraper. The umbrella-shaped scraper can be controlled to work at any position and any height at any angle within the working range through the X-axis module, Y-axis module, Z-axis module and angle steering motor, thereby meeting production needs and effectively scraping off chip frames at different angles.

[0038] It should be noted that all features disclosed in this specification, or steps in all methods or processes disclosed, except for mutually exclusive features and / or steps, can be combined in any manner.

[0039] In addition, the above-mentioned specific embodiments are merely illustrative. Those skilled in the art may devise various solutions based on the disclosure of this utility model, and such solutions fall within the scope of disclosure and the scope of protection of this utility model. Those skilled in the art should understand that the specification and drawings of this utility model are illustrative and do not constitute limitations of the claims. The scope of protection of this utility model is defined by the claims and their equivalents.

Claims

1. A chip frameless structure, characterized in that: The invention comprises an X-axis module (1), an auxiliary slide rail (4) arranged parallel to the X-axis module (1), a Y-axis module (2) arranged between the X-axis module (1) and the auxiliary slide rail (4), a Z-axis module (3) arranged vertically on the Y-axis module (2), and a frame removal unit (7) arranged on the Z-axis module (3).

2. The chip frameless structure according to claim 1, characterized in that: The Z-axis module (3) is also provided with a camera (5) and a light source (6), and the camera (5) and the light source (6) are both arranged facing downward.

3. The chip frameless structure according to claim 2, characterized in that: The frame removal unit (7) is composed of a fixing member (7-1), a slot-shaped photoelectric device (7-3) arranged on the fixing member (7-1), an exhaust pipe (7-6) arranged in the slot-shaped photoelectric device (7-3), an air collecting cover (7-10) arranged at the bottom end of the exhaust pipe (7-6), a rotation control unit arranged on the exhaust pipe (7-6), and a frame removal head arranged on the fixing member (7-1).

4. The chip frameless structure according to claim 3, characterized in that: The top end of the air extraction pipe (7-6) is externally connected to an air extraction pump.

5. The chip frameless structure according to claim 4, characterized in that: The rotation control unit is composed of an angle steering motor (7-2) arranged on a fixing member (7-1), a synchronous wheel (7-5) arranged on an output shaft of the angle steering motor (7-2), and a synchronous belt (7-4) simultaneously sleeved on the synchronous wheel (7-5) and the exhaust pipe (7-6).

6. The chip frameless structure according to claim 5, characterized in that: The frame removing head is composed of a rotating motor (7-7) fixed obliquely on an exhaust pipe (7-6), a coupling (7-8) arranged on an output shaft of the rotating motor (7-7), and an umbrella-shaped scraper (7-9) arranged on the coupling (7-8).

7. The chip frameless structure according to claim 6, characterized in that: The umbrella-shaped scraper (7-9) penetrates the wind collecting cover (7-10) from the side, the lowest plane of the umbrella-shaped scraper (7-9) is parallel to the lowest surface of the wind collecting cover (7-10), and the lowest plane of the umbrella-shaped scraper (7-9) is lower than the lowest surface of the wind collecting cover (7-10).

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