Conducting ring installation clamp structure

By designing a conductive ring installation fixture including a base, a slide groove, a sliding block, a clamping claw and a knob, the problem of adjusting the outer diameter when replacing the conductive ring is solved, the fixation and shape protection of the conductive ring are achieved, the replacement process is simplified, and the installation efficiency and reliability are improved.

CN223357802UActive Publication Date: 2025-09-19GUWEI SEMICON TECH (JIANGSU) CO LTD
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Patent Information

Application Number
CN202422168484.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-05
Publication Date
2025-09-19
Estimated Expiration
2034-09-05

AI Technical Summary

Technical Problem

In semiconductor electroplating equipment, the outer diameter of the soft conductive ring needs to be adjusted to match the size of the electroplating equipment when it is replaced. However, strong compression may destroy its shape, and the existing fixture cannot evenly apply force, which affects its function.

Method used

A conductive ring mounting fixture is designed, which includes a base, a slide groove, a sliding block, a clamping claw, a threaded rod and a knob. The position of the pressure plate is adjusted by the knob to make the sliding block evenly stressed, driving the clamping claw to slide synchronously, thereby achieving the fixation and size adjustment of the conductive ring and avoiding shape deformation.

Benefits of technology

The conductive ring has a simplified replacement procedure, ensuring that the circular shape is not deformed, the clamping jaws are automatically aligned and do not separate from the inner wall of the metal ring, thus avoiding bending, and improving the installation efficiency and reliability of the conductive ring.

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Abstract

The utility model discloses a conducting ring installation clamp structure which comprises a base, a plurality of hollowed-out sliding grooves are formed in the base, sliding blocks are arranged in the sliding grooves, clamping jaws are integrally formed at the ends of the sliding blocks, the clamping jaws are located at the bottom of the base, a threaded rod is arranged in the center of the base, a rotary knob is sleeved on the threaded rod, a pressing disc is arranged below the rotary knob, and the pressing disc is arranged on the base. The side edge of the pressure plate is an inclined table and is in contact with the sliding block; the device is simple in structure, the vertical position of the pressure plate can be changed by rotating the knob, so that the sliding block is uniformly stressed and is driven to synchronously slide, the position of the clamping jaw is synchronously adjusted, the conducting ring is clamped by the clamping jaw, the fixing of the conducting ring is realized, and then the knob is rotated anticlockwise, so that the sliding block synchronously slides in the sliding chute; the clamping jaw is driven to compress the conducting ring, so that the size of the conducting ring is adjusted, the step of replacing the conducting ring is simplified, and meanwhile it can be guaranteed that the circular shape of the conducting ring is not affected and not bent.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a conductive ring mounting fixture structure. Background Art

[0002] In the field of semiconductor electroplating equipment, circular conductive rings need to be replaced frequently. When replacing, the outer diameter of the conductive ring needs to be changed to match the size required by the electroplating equipment. However, since the conductive ring itself is soft, strong compression may destroy its original shape, resulting in affected function of the conductive ring. Therefore, a clamp that can evenly apply force is needed to shrink the outer diameter of the conductive ring to meet the size requirements during installation. Summary of the Invention

[0003] The purpose of the present invention is to provide a conductive ring mounting fixture structure to solve the problems raised in the above-mentioned background technology. To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a conductive ring mounting fixture structure, comprising a base, the base having a plurality of hollowed-out slots, a sliding block provided in the slots, a clamping claw integrally formed at the end of the sliding block, the clamping claw being located at the bottom of the base, a threaded rod provided in the center of the base, a knob provided on the threaded rod, a pressure plate provided below the knob, the pressure plate having an inverted trapezoidal cross-section, and a sloped platform on the side of the pressure plate, which contacts the sliding block.

[0004] Preferably, a plurality of fixed blocks are evenly distributed around the base, and the number of the fixed blocks is the same as that of the sliding blocks, and a spring is connected between the fixed blocks and the sliding blocks.

[0005] Preferably, the clamping jaws are designed with an angled design to clamp the metal conductive ring.

[0006] Preferably, the knob is internally provided with threads corresponding to the threaded rod.

[0007] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention has a novel design, utilizes a reasonable mechanical structure, and cleverly brings into play the inherent potential of various elements. By rotating the knob, the upper and lower positions of the pressure plate can be changed, so that the sliding block is evenly stressed, driving the sliding block to slide synchronously, thereby synchronously adjusting the position of the clamping claws, so that the clamping claws clamp the conductive ring to achieve the fixation of the conductive ring. Subsequently, the knob is rotated counterclockwise to make the sliding block slide synchronously in the slide groove, driving the clamping claws to compress the conductive ring, thereby achieving the adjustment of the size of the conductive ring, simplifying the steps of replacing the conductive ring, and at the same time ensuring that the circular shape of the conductive ring is not affected and does not bend;

[0008] The clamping jaws are designed with an angle, which can automatically align and guide the metal conductive ring. It will not come off during compression, and can avoid contact with the convex teeth on the inner wall of the metal ring to prevent bending. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0010] Figure 2 This is a schematic diagram of the bottom structure of the utility model;

[0011] Figure 3 for Figure 2 Enlarged view of part A in the middle;

[0012] Figure 4 This is the main view of the utility model;

[0013] Figure 5 Based Figure 4 Enlarged view of middle part B;

[0014] In the figure, base-1, slide groove-11, threaded rod-12, sliding block-2, clamping claw-3, knob-4, pressure plate-5, fixing block-6, spring-7, conductive ring-8. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] See also Figure 1-5 The utility model provides a technical solution: a conductive ring mounting fixture structure, including a base 1, a plurality of hollow slide grooves 11 are opened on the base 1, a sliding block 2 is arranged in the slide groove 11, and a clamping claw 3 is integrally formed at the end of the sliding block 2. The clamping claw 3 is located at the bottom of the base 1 and is used to clamp the metal conductive ring 8. The clamping claw 3 is designed with an inclination angle, which can complete the automatic alignment and introduction of the metal conductive ring 8, and will not fall off during compression. At the same time, it can avoid contact with the convex teeth on the inner wall of the metal ring to avoid bending.

[0017] A plurality of fixed blocks 6 are evenly distributed around the base 1 , and the number of the fixed blocks 6 is the same as the number of the sliding blocks 2 . A spring 7 is connected between the fixed blocks 6 and the sliding blocks 2 .

[0018] A threaded rod 12 is provided in the center of the base 1, and a knob 4 is sleeved on the threaded rod 12. A thread corresponding to the threaded rod 12 is provided inside the knob 4. A pressure plate 5 is provided below the knob 4. The cross-section of the pressure plate 5 is an inverted trapezoidal shape, and the side of the pressure plate 5 is a ramp, which contacts the sliding block 2. By rotating the knob 4, the upper and lower positions of the pressure plate 5 can be changed, so that the sliding block 2 is evenly stressed, driving the sliding block 2 to slide synchronously.

[0019] When the knob 4 is rotated clockwise, the position of the knob 4 gradually decreases, driving the pressure plate 5 to decrease, and the side of the pressure plate 5 presses the sliding block 2, so that the sliding block 2 can slide in the direction away from the axis of the base 1 in the sliding groove 11; when the knob 4 is rotated counterclockwise, the position of the knob 4 gradually rises, the position of the pressure plate 5 moves up, and the pressure of the side of the pressure plate 5 on the sliding block 2 gradually decreases. The tension of the spring 7 pushes the sliding block 2, causing the sliding block 2 to slide in the sliding groove 11 in the direction close to the axis of the base 1.

[0020] When in use, first place the flexible metal conductive ring 8 at the bottom of the clamp, adjust the position of the clamp 3 by rotating the knob 4, so that the clamp 3 clamps the conductive ring to fix the conductive ring 8, and then rotate the knob 4 counterclockwise to make the sliding block 2 slide synchronously in the slide groove 11, driving the clamp 3 to compress the conductive ring, thereby adjusting the size of the conductive ring 8, simplifying the steps of replacing the conductive ring 8, and at the same time ensuring that the circular shape of the conductive ring 8 is not affected and does not bend.

[0021] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A conductive ring mounting fixture structure, comprising a base (1), characterized in that: The base (1) is provided with a plurality of hollow slide grooves (11), a sliding block (2) is provided in the slide grooves (11), a clamping claw (3) is integrally formed at the end of the sliding block (2), and the clamping claw (3) is located at the bottom of the base (1), a threaded rod (12) is provided in the center of the base (1), a knob (4) is sleeved on the threaded rod (12), and a pressure plate (5) is provided below the knob (4), the cross section of the pressure plate (5) is inverted trapezoidal, and the side of the pressure plate (5) is a ramp, which contacts the sliding block (2).

2. The conductive ring mounting fixture structure according to claim 1, characterized in that: A plurality of fixed blocks (6) are evenly distributed around the base (1), the number of which is the same as that of the sliding blocks (2), and a spring (7) is connected between the fixed blocks (6) and the sliding blocks (2).

3. The conductive ring mounting fixture structure according to claim 2, wherein: The clamping jaw (3) is designed with an inclination angle and is used to clamp the metal conductive ring (8).

4. The conductive ring mounting fixture structure according to claim 3, wherein: The knob (4) is internally provided with a thread corresponding to the threaded rod (12).