Adjusting device for vertically mounted half lens

Abstract

The utility model relates to the technical field of photoetching lenses, in particular to an adjusting device of a vertically mounted half lens, which comprises a lens mounting frame, an adjusting mechanism is arranged in the lens mounting frame, and a photoetching lens body is fixedly connected to the top of the lens mounting frame. By designing the adjusting device of the vertically mounted half lens and utilizing the adjusting mechanism in the device to adjust the position of the half lens, the problems that the light path trend of the existing photoetching lens is that the incident light is in the horizontal direction, and the incident light is not in the horizontal direction are solved. The photoetching lens passes through the half lens which is vertically arranged, passes through the reflecting mirror which is arranged at an angle of 45 degrees, vertically upwards passes through the three upper lenses to the uppermost concave mirror to be reflected, vertically downwards passes through the four lenses to be imaged on the lowermost imaging surface, and due to the high precision of the photoetching lens, the precision of the placing positions of all the lenses is extremely high; and the position of the half lens is inconvenient to adjust.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography lenses, in particular to an adjustment device for a vertically mounted half lens. Background Art

[0002] The photolithography lens is a lens device used for imaging the target surface, but the existing photolithography lens still has shortcomings. Specifically, the light path of the existing photolithography lens is that the incident light is in the horizontal direction, passes through the vertically placed half-lens, passes through the three lenses above vertically upward through the 45-degree placed reflector, and is reflected vertically downward through the four lenses until it reaches the bottom imaging surface to form an image. Due to the high precision of the photolithography lens, the accuracy of the placement of all lenses is also extremely high, and the position adjustment of the half-lens is relatively inconvenient.

[0003] Therefore, a device for adjusting a vertically mounted half-lens mirror is needed to solve the problems raised in the above background technology. Utility Model Content

[0004] The purpose of the present invention is to provide an adjustment device for a vertically mounted half-lens lens to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A device for adjusting a vertically mounted half-lens lens comprises a lens mounting frame, an adjustment mechanism disposed within the lens mounting frame, a photolithography lens body fixedly connected to the top of the lens mounting frame, and a reflector mounted on the outer wall of the lens mounting frame and on the back of the adjustment mechanism;

[0007] The adjustment mechanism includes a base plate fixedly connected to the outer wall of the lens mounting frame, a lower adjustment bar is slidably connected to the top center of the base plate, an upper adjustment bar is slidably connected to the top of the lower adjustment bar, a half lens is fixedly connected to the top of the upper adjustment bar, right-angle adjustment blocks are installed on the top of the base plate and on the front, back and both sides of the lower adjustment bar, a lower adjustment screw is installed inside the right-angle adjustment block and at a corresponding position of the lower adjustment bar, and an upper adjustment screw is installed on the outer wall of the right-angle adjustment block and at a corresponding position of the upper adjustment bar.

[0008] As a preferred solution of the present invention, the lens mounting frame is made of aluminum alloy, and the reflector is installed obliquely outside the lens mounting frame.

[0009] As a preferred solution of the present invention, the bottom plate, the lower adjustment bar, the upper adjustment bar and the right-angle adjustment blocks are all made of aluminum alloy, and six groups of the right-angle adjustment blocks are provided.

[0010] As a preferred solution of the present invention, the right-angle adjustment block is designed as an L-shaped structure, and the lower adjustment screw passes through the right-angle adjustment block and extends into the lower adjustment strip.

[0011] As a preferred solution of the present invention, the upper adjustment screw passes through the right-angle adjustment block and extends into the upper adjustment strip, and multiple groups of the upper adjustment screws and the lower adjustment screws are provided.

[0012] As a preferred solution of the present invention, the half-lens is designed as a semicircular structure, and the lower adjustment strip passes through and extends to the outside of the bottom plate.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. In the utility model, a device for adjusting a vertically mounted half-lens lens is designed. The adjustment mechanism in the device is used to adjust the position of the half-lens. The center positions of the two hemispheres of the vertical half-lens are measured. Adjustment shims are inserted between the downward adjustment bar and the base plate, and the number of inserted adjustment shims is changed to change the vertical up and down position of the half-lens. If horizontal translation is required, the lower adjustment screws corresponding to the lower adjustment bar on the six groups of right-angle adjustment blocks are rotated respectively. After adjustment is in place, the connecting screws between the lower adjustment bar and the base plate are tightened to move the half-lens in the horizontal direction. Then, the vertical half-lens is adjusted. The horizontal rotation position is achieved by rotating the upper adjustment screws corresponding to the upper adjustment bars on the 6 groups of right-angle adjustment blocks to push the half-lens to rotate horizontally, thereby completing the position adjustment of the half-lens. The adjustment process has high precision, which solves the problem that the light path of the existing photolithography lens is that the incident light is in the horizontal direction, passes through the vertically placed half-lens, passes vertically upward through the three lenses above through the 45-degree placed reflector to the top concave mirror, and then passes vertically downward through the four lenses to the bottom imaging surface. Due to the high precision of the photolithography lens, the precision of the placement of all lenses is also extremely high, and the position adjustment of the half-lens is relatively inconvenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the three-dimensional structure of the adjustment mechanism of the utility model;

[0017] Figure 3 This is a schematic diagram of the three-dimensional structure of the half-lens of the utility model.

[0018] In the figure: 1. Lens mounting frame; 2. Adjustment mechanism; 3. Photolithography lens body; 4. Reflector; 201. Base plate; 202. Lower adjustment bar; 203. Upper adjustment bar; 204. Half lens; 205. Right-angle adjustment block; 206. Lower adjustment screw; 207. Upper adjustment screw. DETAILED DESCRIPTION

[0019] The following will combine the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0020] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings, and several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0021] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a central element. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are for the purpose of describing specific embodiments only and are not intended to limit this invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0023] For examples, see Figure 1-3 , the utility model provides a technical solution:

[0024] A device for adjusting a vertically mounted half-lens lens comprises a lens mounting frame 1, an adjustment mechanism 2 being provided inside the lens mounting frame 1, a photolithography lens body 3 being fixedly connected to the top of the lens mounting frame 1, and a reflector 4 being mounted on the outer wall of the lens mounting frame 1 and on the back of the adjustment mechanism 2;

[0025] The lens mounting frame 1 is made of aluminum alloy, and the reflector 4 is obliquely mounted outside the lens mounting frame 1;

[0026] In this embodiment, reference Figure 2 and Figure 3 The adjustment mechanism 2 includes a bottom plate 201 fixedly connected to the outer wall of the lens mounting frame 1, a lower adjustment bar 202 is slidably connected to the center of the top of the bottom plate 201, an upper adjustment bar 203 is slidably connected to the top of the lower adjustment bar 202, a half lens 204 is fixedly connected to the top of the upper adjustment bar 203, right-angle adjustment blocks 205 are installed on the top of the bottom plate 201 and on the front, back and both sides of the lower adjustment bar 202, a lower adjustment screw 206 is installed inside the right-angle adjustment block 205 and at a position corresponding to the lower adjustment bar 202, and an upper adjustment screw 207 is installed on the outer wall of the right-angle adjustment block 205 and at a position corresponding to the upper adjustment bar 203;

[0027] The bottom plate 201, the lower adjustment strip 202, the upper adjustment strip 203 and the right-angle adjustment block 205 are all made of aluminum alloy. The right-angle adjustment block 205 is provided with six groups. The right-angle adjustment block 205 is designed in an L-shaped structure. The lower adjustment screw 206 passes through the right-angle adjustment block 205 and extends into the lower adjustment strip 202. The upper adjustment screw 207 passes through the right-angle adjustment block 205 and extends into the upper adjustment strip 203. Both the upper adjustment screw 207 and the lower adjustment screw 206 are provided with multiple groups. The half-piece lens 204 is designed in a semicircular structure. The lower adjustment strip 202 passes through and extends to the outside of the bottom plate 201. The lower adjustment strip 202 is inserted between the bottom plate 201 and the bottom plate 201. Adjust the gaskets and change the number of inserted adjustment gaskets so that the lower adjustment bar 202 drives the upper adjustment bar 203 and the half-piece lens 204 to move up and down, and the vertical up and down position of the half-piece lens 204 changes. Rotate the lower adjustment screws 206 corresponding to the lower adjustment bar 202 on the 6 groups of right-angle adjustment blocks 205. After adjusting into place, tighten the connecting screws between the lower adjustment bar 202 and the base plate 201 to move the half-piece lens 204 in the horizontal direction. Rotate the upper adjustment screws 207 corresponding to the upper adjustment bar 203 on the 6 groups of right-angle adjustment blocks 205 to push the half-piece lens 204 to rotate horizontally, thereby completing the position adjustment of the half-piece lens 204.

[0028] The working process of the present utility model is as follows: when the adjustment device for the vertically installed half-piece lens designed by the present invention is in operation, the center positions of the two hemispheres of the vertical half-piece lens 204 are measured, and according to the measurement results, adjustment gaskets are inserted between the lower adjustment bar 202 and the base plate 201, and the number of the inserted adjustment gaskets is changed, so that the lower adjustment bar 202 drives the upper adjustment bar 203 and the half-piece lens 204 to move up and down, and the vertical up and down position of the half-piece lens 204 changes, and the lower adjustment screws 206 corresponding to the lower adjustment bar 202 on the 6 groups of right-angle adjustment blocks 205 are rotated. After adjustment into place, the connecting screws between the lower adjustment bar 202 and the base plate 201 are tightened to move the half-piece lens 204 in the horizontal direction, and the upper adjustment screws 207 corresponding to the upper adjustment bar 203 on the 6 groups of right-angle adjustment blocks 205 are rotated to push the half-piece lens 204 to rotate horizontally, thereby completing the position adjustment of the half-piece lens 204.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for adjusting a vertically mounted half lens, comprising a lens mounting frame (1), characterized in that: An adjustment mechanism (2) is provided inside the lens mounting frame (1), a photolithography lens body (3) is fixedly connected to the top of the lens mounting frame (1), and a reflector (4) is installed on the outer wall of the lens mounting frame (1) and on the back side of the adjustment mechanism (2); The adjustment mechanism (2) comprises a base plate (201) fixedly connected to the outer wall of the lens mounting frame (1); a lower adjustment bar (202) is slidably connected to the center of the top of the base plate (201); an upper adjustment bar (203) is slidably connected to the top of the lower adjustment bar (202); a half-lens (204) is fixedly connected to the top of the upper adjustment bar (203); a right-angle adjustment block (205) is installed on the top of the base plate (201) and on the front, back and both sides of the lower adjustment bar (202); a lower adjustment screw (206) is installed inside the right-angle adjustment block (205) and at a corresponding position of the lower adjustment bar (202); and an upper adjustment screw (207) is installed on the outer wall of the right-angle adjustment block (205) and at a corresponding position of the upper adjustment bar (203).

2. The adjustment device for a vertically mounted half-lens lens according to claim 1, characterized in that: The lens mounting frame (1) is made of aluminum alloy, and the reflector (4) is tiltedly mounted outside the lens mounting frame (1).

3. The adjustment device for a vertically mounted half-lens lens according to claim 1, characterized in that: The bottom plate (201), the lower adjustment bar (202), the upper adjustment bar (203), and the right-angle adjustment block (205) are all made of aluminum alloy, and six groups of the right-angle adjustment blocks (205) are provided.

4. The adjustment device for a vertically mounted half-lens lens according to claim 1, characterized in that: The right-angle adjustment block (205) is designed as an L-shaped structure, and the lower adjustment screw (206) passes through the right-angle adjustment block (205) and extends into the lower adjustment bar (202).

5. The adjustment device for a vertically mounted half-lens lens according to claim 1, characterized in that: The upper adjustment screw (207) passes through the right-angle adjustment block (205) and extends into the upper adjustment bar (203). Multiple groups of the upper adjustment screw (207) and the lower adjustment screw (206) are provided.

6. The adjustment device for a vertically mounted half-lens lens according to claim 1, characterized in that: The half-lens (204) is designed as a semicircular structure, and the lower adjustment strip (202) penetrates and extends to the outside of the bottom plate (201).

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