Automatic boxing machine for wafer products

Abstract

The utility model discloses an automatic boxing machine for wafer products. The automatic boxing machine comprises a first purification chamber, a second purification chamber and a detection part, a manual station is arranged in the first purification chamber; four automatic stations are arranged on the outer side of the second purification chamber; a turnover part is arranged in the second purification chamber; the detection part comprises a base plate, a three-legged turntable rotationally connected to the base plate, a four-legged bracket longitudinally connected to the base plate in a sliding manner, and a camera arranged on the base plate; and the four-leg bracket is selectively positioned above or below the three-leg turntable. When the detection part carries out machine vision detection, workers in the first purification chamber can also participate in the detection part to carry out reinspection, sampling inspection or manual feeding to the detection part, and then boxing is carried out through the turnover part. And according to the wafer information provided by the detection part, the turnover part places the mark numbers of the wafers in the wafer boat box of the discharging station according to the size sequence. The automatic process is added to improve the detection efficiency, and meanwhile, manual operation can be compatible.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer packaging, and in particular relates to an automatic boxing machine for wafer products. Background Art

[0002] In terms of inspection, packaging and shipment of wafer glass products, the wafer glass needs to be packaged in standard wafer boat boxes. In addition, the labels on the surface of the wafer glass need to be sorted in order of size. In addition, the inherent properties of the material need to be tested and reviewed. In addition, for wafer-level glass products, cleanliness is particularly important. In particular, human touch during the appearance inspection may cause surface abnormalities. Therefore, it is necessary to design a completely contactless automatic boxing equipment.

[0003] The Chinese patent document with publication number CN217516182U discloses a multifunctional fully automatic wafer packaging device, including a work platform, an automatic robotic arm, and a wafer boat box; the automatic robotic arm is located in the middle of the work platform, the wafer boat box is arranged on the periphery of the work platform, and the wafer boat box's access opening faces the middle of the work platform; the automatic robotic arm includes a transverse slide rail, a longitudinal slide rail, a vertical slide rail, and a pick-and-place device, the transverse slide rail is fixedly connected to the work platform, the longitudinal slide rail can be slid laterally to the transverse slide rail, the vertical slide rail can be slid longitudinally to the longitudinal slide rail, and the pick-and-place device can be slid vertically to the vertical slide rail. This multifunctional fully automatic wafer packaging device can replace manual placement of wafer spacers, improve wafer processing efficiency, and prevent human skin from touching the wafers and causing damage to the wafers during manual placement.

[0004] The above patent solution can only complete the automatic boxing of wafers. In actual working scenarios, machine vision inspection of wafers is still required to judge the wafer quality and automatically sort the wafer labels, which still requires human participation. Human participation will inevitably cause damage due to human touch. Even if automated inspection equipment is used, a separate wafer moving device will be required. The linkage between multiple stations will increase the required work space and make it inconvenient to carry out automated control. Therefore, the above patent solution cannot meet actual usage needs to a certain extent. Utility Model Content

[0005] In order to overcome the technical problems that the automatic wafer boxing device in the prior art cannot automatically inspect the wafers, and the additional automatic inspection device requires an additional wafer moving device, and the linkage between multiple stations requires a large work space, which is inconvenient for automatic control. One purpose of the utility model is to provide an automatic boxing machine for wafer products, which comprises two adjacent first clean rooms and second clean rooms and a detection unit arranged therebetween. While the detection unit performs automated inspection, manual re-inspection and random inspection can also be performed in the first clean room. In the second clean room, the wafers are circulated between the detection unit and each wafer boat box through the turnover unit. The highly integrated machine reduces the occupied space while meeting the inspection needs of various methods.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solutions: a wafer product automatic boxing machine, comprising a first clean chamber, a second clean chamber and a detection part arranged between the first clean chamber and the second clean chamber; a manual workstation is arranged inside the first clean chamber; four automated workstations are arranged outside the second clean chamber; a turnover part is arranged inside the second clean chamber; the turnover part is used to circulate wafers between the four automated workstations and the detection part; wherein, the detection part comprises a substrate, a tripod turntable rotatably connected to the substrate, a four-legged bracket longitudinally slidably connected to the substrate and a camera arranged on the substrate; the camera is located above the tripod turntable; the four-legged bracket is located on the outer periphery of the tripod turntable, and can be selectively located above or below the tripod turntable.

[0007] The inspection unit can perform visual inspection on the wafer, including inspection of relevant parameters such as appearance and reading of relevant record marks; at the same time, the human in the first clean room can also synchronously participate in the inspection process of the inspection unit and perform random inspection and re-inspection and other operations.

[0008] Furthermore, four second legs are provided at the upper end of the four-legged bracket, and the four second legs are evenly distributed along the circumference of the tripod turntable; a limiting block is provided at the upper end of the second legs near the outer periphery; the wafer is located between the four limiting blocks; and a slope is provided at one end of the limiting block facing the tripod turntable.

[0009] The limit block on the four-legged bracket accurately locates the position of the wafer, making it convenient for the turnover part to take and place the wafer; when the four-legged bracket is located above the tripod turntable, the second leg lifts the wafer, and the turnover part takes and places the wafer; when the four-legged bracket is located below the tripod turntable, the wafer is located on the tripod turntable, and the tripod turntable drives the wafer to rotate synchronously.

[0010] Specifically, a background plate is provided on the upper end of the base plate; the background plate is located between two adjacent limit blocks; the tripod turntable is located above the background plate; and the camera is facing the background plate.

[0011] Furthermore, a cantilever is provided at the upper end of the substrate; the camera is provided on the cantilever; two fine-tuning parts are provided between the camera and the cantilever; the two fine-tuning parts are respectively used to adjust the longitudinal displacement of the camera and the radial displacement of the camera along the wafer.

[0012] Furthermore, the four automated workstations are distributed in pairs on the left and right sides of the second clean room; the four automated workstations are sequentially a feeding station, a discharging station, a defective product station, and a buffer station along the circumferential direction.

[0013] Furthermore, a working area is provided at one end of the first clean room away from the second clean room; and a recess for manual operation is provided in the working area near the detection part.

[0014] Furthermore, the automated workstation includes a transverse plate horizontally slidably connected to the outside of the second clean room, a storage plate arranged above the transverse plate, and a locking portion arranged on the storage plate for locking the crystal boat box; wherein, three leveling screws are threadedly connected to the upper end of the transverse plate, and the three leveling screws are evenly distributed along the circumferential direction, and the upper end of the leveling screw is against the lower end of the storage plate; the height of the leveling screw can be adjusted.

[0015] Specifically, a waist-shaped hole is provided at the center of the lower end of the crystal boat box; three positioning grooves are provided at the lower end of the crystal boat box and are evenly distributed in the circumferential direction; a T-shaped rod is rotatably connected to the storage plate; the T-shaped rod can be selectively located above or below the storage plate; three conical caps are provided at the upper end of the storage plate and are evenly distributed in the circumferential direction.

[0016] Furthermore, the automated workstation includes a door opening portion arranged in the second clean room, an unlocking portion arranged at one end of the door opening portion facing the adjacent wafer boat box, and a displacement module arranged outside the second clean room; the displacement module can selectively drive the door opening portion to slide horizontally and vertically.

[0017] Furthermore, the turnover part includes a transverse module horizontally slidably connected to the second clean room, a lifting module longitudinally slidably connected to the transverse module, a steering module rotatably connected to the lifting module, and a telescopic module arranged on the steering module; an insert plate is provided on the movable end of the telescopic module; the insert plate can selectively move the wafer between the four automated workstations and the detection part.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. Through the adjacent first and second clean rooms and the inspection department set between them, when the inspection department is performing machine vision inspection, workers in the first clean room can also participate in it, and conduct re-inspection, random inspection or manually load materials to the inspection department for boxing by the turnover department.

[0020] 2. Four automated workstations are set up outside the second clean room. The turnover department circulates wafers back and forth between the four automated workstations and the inspection department. In addition to feeding and unloading, the four automated workstations also have workstations for storing defective products and workstations for caching. The turnover department places the wafer labels in the wafer boat box of the unloading station in order of size based on the wafer information provided by the inspection department.

[0021] 3. The positioning and opening and closing of the wafer boat box in the automated workstation are completed by an automated process without manual intervention. The wafer boat box and the second clean room are sealed against each other to prevent dust and impurities from entering the second clean room and the wafer boat box, thus ensuring the quality of the boxing.

[0022] 4. The addition of automated processes improves detection efficiency, shortens detection time, and is also compatible with manual operations, enriching wafer detection and packaging modes and expanding application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural diagram of the utility model;

[0024] Figure 2 It is a top view and workstation layout diagram of the utility model;

[0025] Figure 3 This is a schematic structural diagram of the detection unit of the present utility model;

[0026] Figure 4 This is a schematic structural diagram of the turnover portion of the present utility model;

[0027] Figure 5 This is a schematic diagram of the exploded structure of the detection unit of the present utility model;

[0028] Figure 6 This is a schematic diagram of the decomposed structure of the automated workstation of the present utility model;

[0029] Figure 7 This is a schematic structural diagram of the transverse plate and storage plate of the present invention;

[0030] Figure 8 This is a schematic structural diagram of the crystal boat box of the present invention.

[0031] Figure: A, feeding station; B, discharging station; C, defective product station; D, buffer station; E, manual station; 1, first cleanroom; 11, working area; 12, notch; 2, second cleanroom; 3, wafer boat box; 31, waist-shaped hole; 32, positioning groove; 33, positioning hole; 4, detection unit; 41, tripod turntable; 411, first leg; 42, rotating motor; 43, four-legged bracket; 431, second leg; 432, limit block; 4321, inclined plane; 44, lifting Cylinder; 45. Camera; 46. Fine-tuning unit; 47. Background plate; 48. Base plate; 5. Turnover unit; 51. Transverse movement module; 52. Lifting module; 53. Steering module; 54. Telescopic module; 55. Insert plate; 61. Transverse movement plate; 62. Storage plate; 621. Conical cap; 622. Positioning column; 63. Leveling screw; 64. Lifting cylinder; 65. Rotating cylinder; 66. T-bar; 67. Transverse movement cylinder; 71. Door opening unit; 72. Unlocking unit; 73. Displacement module. DETAILED DESCRIPTION

[0032] Below, the present invention is further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0033] In the description of the present invention, it should be noted that, for directional words, such as the terms "center", "horizontal", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and so on, indicating directions and positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and cannot be understood as limiting the specific scope of protection of the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Therefore, the terms "first" and "second" may explicitly or implicitly refer to one or more of these features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0035] In this utility model, unless otherwise specified or limited, terms such as "disposed" and "installed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection; direct connection, connection through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.

[0036] See also Figures 1-8 A wafer product automatic boxing machine includes a first clean room 1, a second clean room 2, and a detection part 4 arranged between the first clean room 1 and the second clean room 2; a manual workstation E is arranged inside the first clean room 1; a working area 11 is arranged at one end of the first clean room 1 away from the second clean room 2; a recess 12 for manual operation is arranged in the working area 11 near the detection part 4.

[0037] Four automated workstations are arranged outside the second clean room 2; a turnover part 5 is arranged inside the second clean room 2; the four automated workstations are distributed in pairs on the left and right sides of the second clean room 2; the four automated workstations are arranged in the circumferential direction as a feeding station A, a discharging station B, a defective product station C, and a buffer station D.

[0038] The detection unit 4 includes a base plate 48 disposed between the first cleanroom 1 and the second cleanroom 2, a tripod turntable 41 rotatably connected to a rotating shaft on the base plate 48 and arranged longitudinally, a rotating motor 42 disposed below the base plate 48 for drivingly connecting the tripod turntable 41, a four-legged bracket 43 longitudinally slidably connected to the base plate 48, and a lifting cylinder 44 disposed on the base plate 48 for driving the four-legged bracket 43 to slide longitudinally. The four-legged bracket 43 is located on the periphery of the tripod turntable 41 and can be selectively located above or below the tripod turntable 41.

[0039] The upper end of the four-legged bracket 43 is provided with four second legs 431, which are evenly distributed along the circumference of the tripod turntable 41. A limit block 432 is provided near the outer periphery of the upper end of the second legs 431; the wafer is positioned between the four limit blocks 432. The limit blocks 432 have an inclined surface 4321 on one end facing the tripod turntable 41. The upper end of the tripod turntable 41 is provided with three first legs 411, which are evenly distributed along the circumference.

[0040] A background plate 47 is provided at the upper end of the substrate 48; the background plate 47 is located between two adjacent limit blocks 432; the tripod turntable 41 is located above the background plate 47; a cantilever is provided at the upper end of the substrate 48; a camera 45 is provided at the upper end of the cantilever; the camera 45 is located directly above the background plate 47; two fine-tuning parts 46 are provided between the camera 45 and the cantilever; the two fine-tuning parts 46 are respectively used to adjust the longitudinal displacement of the camera 45 and the radial displacement of the camera 45 along the wafer.

[0041] The automated workstation includes a transverse plate 61 horizontally slidably connected to the outside of the second clean room 2, a transverse cylinder 67 arranged on the outside of the second clean room 2 for driving the transverse plate 61 to slide, a storage plate 62 arranged above the transverse plate 61, and a locking part arranged on the storage plate 62 for locking the wafer boat box 3.

[0042] The upper end of the transverse plate 61 is threadedly connected with three leveling screws 63 , which are evenly distributed along the circumferential direction. The upper ends of the leveling screws 63 abut against the lower end of the storage plate 62 ; the height of the leveling screws 63 can be adjusted.

[0043] A waist-shaped hole 31 is provided at the center of the lower end of the crystal boat box 3; three positioning grooves 32 are provided at the lower end of the crystal boat box 3 and are evenly distributed along the circumferential direction; the length direction of the positioning grooves 32 is provided along the radial direction of the corresponding circumference; three conical caps 621 are provided at the upper end of the storage plate 62; the conical caps 621 can be inserted into the corresponding positioning grooves 32 respectively; a lifting cylinder 64 is provided at the lower end of the storage plate 62; a rotating cylinder 65 is provided on the moving end of the lifting cylinder 64; a T-bar 66 is provided on the moving end of the rotating cylinder 65; the T-bar 66 can be selectively rotated in the waist-shaped hole 31.

[0044] Two positioning holes 33 are symmetrically provided at the lower end of the wafer boat box 3 ; two positioning posts 622 are symmetrically provided at the upper end of the storage plate 62 , and the positioning posts 622 are directly opposite to the positioning holes 33 .

[0045] The automated workstation includes a door opening portion 71 disposed within the second cleanroom 2, an unlocking portion 72 disposed at the end of the door opening portion 71 facing the adjacent wafer cassette 3, and a displacement module 73 disposed outside the second cleanroom 2. The displacement module 73 selectively drives the door opening portion 71 to slide horizontally or vertically. The unlocking portion 72 includes two rotary unlocking cylinders disposed on the door opening portion 71 and a T-shaped key disposed on the movable end of the rotary unlocking cylinder. The displacement module 73 includes a first longitudinally disposed screw module and a second screw module disposed on the first screw module. The door opening portion 71 is disposed on the second screw module.

[0046] The turnover part 5 includes a transverse module 51 horizontally slidably connected to the second clean room 2, a lifting module 52 longitudinally slidably connected to the transverse module 51, a steering module 53 rotatably connected to the lifting module 52, and a telescopic module 54 arranged on the steering module 53; an insert plate 55 is provided on the movable end of the telescopic module 54; the insert plate 55 can selectively move the wafer between the four automated workstations and the detection part 4.

[0047] Workflow: After the turnover unit 5 takes out the wafer from the feeding station A, it places it on the four-legged bracket 43. The four-legged bracket 43 moves downward, causing the tripod 41 to lift the wafer. At the same time, the tripod 41 rotates, and the camera 45 starts working synchronously. After the tripod 41 rotates at least one circle, that is, after the inspection is completed, the four-legged bracket 43 moves upward to lift the wafer from the tripod 41. The turnover unit 5 takes the wafer off the tripod 41 again. If there are defects, the turnover unit places the wafer in the defective station C. If normal, it is placed in the buffer station D. Finally, when the buffer station D is full of 25 wafers, the turnover unit takes and places the wafers in order according to the wafer number size, and places them in the wafer boat box of the discharge station B in the order of the number.

[0048] Operators in the first clean room can re-inspect or spot-check wafers during the inspection process at any time. Similarly, they can also manually add wafers to the inspection part 4. After the inspection, the turnover part 5 moves the wafers to the corresponding automated workstation.

[0049] The above description is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by any technician in this field within the scope of the present invention are included in the patent scope of the present invention.

Claims

1. An automatic wafer cartoning machine, characterized by: It includes a first clean room, a second clean room and a detection part arranged between the first clean room and the second clean room; a manual workstation is arranged inside the first clean room; four automated workstations are arranged outside the second clean room; a turnover part is arranged inside the second clean room; the turnover part is used to turn around wafers between the four automated workstations and the detection part; wherein, the detection part includes a substrate, a tripod turntable rotatably connected to the substrate, a four-legged bracket longitudinally slidably connected to the substrate and a camera arranged on the substrate; the camera is located above the tripod turntable; the four-legged bracket is located on the outer periphery of the tripod turntable, and can be selectively located above or below the tripod turntable.

2. The cartoning machine according to claim 1, wherein: Four second legs are provided at the upper end of the four-legged bracket, and the four second legs are evenly distributed along the circumference of the tripod turntable; a limiting block is provided at the upper end of the second legs near the outer periphery; the wafer is located between the four limiting blocks; and an inclined surface is provided at one end of the limiting block facing the tripod turntable.

3. The cartoning machine according to claim 2, wherein: A background plate is provided on the upper end of the base plate; the background plate is located between two adjacent limit blocks; the tripod turntable is located above the background plate; and the camera is facing the background plate.

4. The cartoning machine according to any one of claims 1 to 3, characterized in that: A cantilever is provided at the upper end of the substrate; the camera is provided on the cantilever; two fine-tuning parts are provided between the camera and the cantilever; the two fine-tuning parts are respectively used to adjust the longitudinal displacement of the camera and the radial displacement of the camera along the wafer.

5. The cartoning machine according to any one of claims 1 to 3, characterized in that: The four automated workstations are distributed in pairs on the left and right sides of the second clean room; the four automated workstations are a feeding station, a discharging station, a defective product station, and a buffer station in the circumferential direction.

6. The cartoning machine according to any one of claims 1 to 3, characterized in that: A working area is provided at one end of the first clean room away from the second clean room; a recess for manual operation is provided in the working area near the detection part.

7. The cartoning machine according to any one of claims 1 to 3, characterized in that: The automated workstation includes a transverse plate horizontally slidably connected to the outside of the second clean room, a storage plate arranged above the transverse plate, and a locking portion arranged on the storage plate for locking the crystal boat box; wherein, three leveling screws are threadedly connected to the upper end of the transverse plate, and the three leveling screws are evenly distributed along the circumferential direction, and the upper ends of the leveling screws are against the lower end of the storage plate; the height of the leveling screws can be adjusted.

8. The cartoning machine according to claim 7, wherein: A waist-shaped hole is provided in the center of the lower end of the crystal boat box; three positioning grooves are provided at the lower end of the crystal boat box, evenly distributed in the circumferential direction; a T-shaped rod is rotatably connected to the storage plate; the T-shaped rod can be selectively located above or below the storage plate; three conical caps are provided at the upper end of the storage plate, evenly distributed in the circumferential direction.

9. The cartoning machine according to any one of claims 1 to 3, characterized in that: The automated workstation includes a door opening portion arranged in the second clean room, an unlocking portion arranged at one end of the door opening portion facing the adjacent wafer boat box, and a displacement module arranged outside the second clean room; the displacement module can selectively drive the door opening portion to slide horizontally or vertically.

10. The cartoning machine according to any one of claims 1 to 3, characterized in that: The turnover part includes a transverse module horizontally slidably connected to the second clean room, a lifting module longitudinally slidably connected to the transverse module, a steering module rotatably connected to the lifting module, and a telescopic module provided on the steering module; An inserting plate is provided on the moving end of the telescopic module; the inserting plate can selectively move the wafer between the four automated workstations and the detection part.

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