Cleaning device for uniform baffle machining

Abstract

The utility model discloses a cleaning device for processing a uniform baffle, which comprises a rack, a cleaning table is fixedly arranged at the upper end of the rack, and a mounting frame is fixedly arranged at the upper end of the cleaning table; the fixing frame is arranged below the transverse plate of the mounting frame, fixing seats are fixedly arranged on the two sides of the lower end of the fixing frame, a rotating disc is arranged on the sides, close to the center position of the fixing frame, of the fixing seats, four bolts are arranged on the side, close to the fixing seats, of the rotating disc, and the bolts are rotationally connected with the rotating disc; a rubber pad is fixedly arranged at the end, located on the other side of the rotating disc, of the bolt. And the motor is arranged in the fixing base, a first hydraulic telescopic device is fixedly arranged in the middle of the upper end of a transverse plate of the mounting frame, and the problems that the cleaning effect of the uniform baffle is not good enough and the cleaning mode of the uniform baffle is single are solved through the structure.

Description

Technical Field

[0001] The utility model relates to the technical field of uniformity baffles, in particular to a cleaning device for uniformity baffle processing. Background Art

[0002] A uniformity baffle is a device with a specific design and function, primarily used to improve uniformity during thin film deposition. It is widely used in thin film deposition, particularly in semiconductor manufacturing and vacuum coating processes. Its primary function is to regulate and control the distribution of the deposited material. A uniformity baffle typically consists of a support, a baffle shaft, and a baffle. The support is mounted on the inner wall of the evaporation system chamber, the baffle shaft is connected to the support, and the baffle is mounted on the shaft. During processing, the uniformity baffle surface requires cleaning.

[0003] For example, the Chinese patent "A Baffle for Evaporation Coating Uniformity" with announcement number CN205999476U includes a support, a baffle shaft installed on the support, and a baffle arranged on the baffle shaft; there are multiple supports, and the supports are respectively installed on the inner wall of the evaporation system chamber, each support is connected to one end of a baffle shaft, and the other ends of multiple baffle shafts extend to the middle of the chamber, the baffle shaft is a fixed rod, and the baffle is rotatably connected to the fixed rod, the baffle is wing-shaped, and is respectively arranged on both sides of the baffle shaft, the baffle shaft is a rotating rod, and each rotating rod is independent of each other, and is respectively provided with a driving mechanism for driving the rotating rod to rotate, and the rotating rod passes through the middle of the baffle.

[0004] Although the above-mentioned existing technology can realize the processing of uniformity baffles, in actual use, on the one hand, the cleaning effect of the uniformity baffle is not good enough. When cleaning the uniformity baffle, it is cleaned by a brush, which makes it difficult to clean the stains on the dead corners of the baffle, thereby reducing the cleaning effect of the uniformity baffle. On the other hand, the cleaning method of the uniformity baffle is relatively single. When cleaning the uniformity baffle, it is cleaned by tools such as a brush, which makes it difficult to clean other impurities on the baffle. Therefore, it does not meet the existing needs. In this regard, we propose a cleaning device for uniformity baffle processing. Utility Model Content

[0005] The purpose of the present invention is to provide a cleaning device for uniformity baffle processing, so as to solve the problems in the above background technology that the uniformity baffle cleaning effect is not good enough and the uniformity baffle cleaning method is relatively single.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: a cleaning device for uniformity baffle processing, comprising a frame, a cleaning table fixedly provided at the upper end of the frame, and a mounting frame fixedly provided at the upper end of the cleaning table; and further comprising:

[0007] A fixing frame is arranged below the horizontal plate of the mounting frame, and fixing seats are fixedly arranged on both sides of the lower end of the fixing frame, and a rotating disk is provided on the side of the fixing seat close to the center of the fixing frame, and four bolts are provided on the side of the rotating disk close to the fixing frame, and the bolts are equidistantly distributed in a ring, the bolts are rotatably connected to the rotating disk, and the other end of the bolt extends to the other side of the rotating disk, and a rubber pad is fixedly provided on the end of the bolt on the other side of the rotating disk;

[0008] The motor is arranged inside the fixed seat, and the output shaft of the motor extends to the outside of the fixed seat and is fixedly connected to the rotating disk. A first hydraulic telescopic device is fixedly arranged at the middle position of the upper end of the mounting frame cross plate, and the telescopic end of the first hydraulic telescopic device extends to the bottom of the mounting frame cross plate and is fixedly connected to the fixed frame.

[0009] Preferably, second hydraulic telescopic devices are fixedly provided on both sides of the mounting frame below the fixing seat, and a brush is fixedly provided on one side of the telescopic end of the second hydraulic telescopic device.

[0010] Preferably, a cleaning pool is provided at a middle position of the upper end of the cleaning table, and ultrasonic generators are fixedly provided on the side walls around the inside of the cleaning pool.

[0011] Preferably, water inlet pipes are fixedly provided on both sides of the upper end of the mounting frame horizontal plate, and telescopic tubes are fixedly provided on both sides of the lower end of the mounting frame horizontal plate, the upper end of the telescopic tube is connected to the water inlet pipe, and the lower end of the telescopic tube is fixedly connected to the fixing frame.

[0012] Preferably, nozzles are fixedly provided on both inner walls of the fixing frame below the horizontal plate, and the nozzles are connected to the telescopic tube.

[0013] Preferably, a liquid outlet pipe is fixedly provided at the middle position of the lower end of the cleaning table, and the liquid outlet pipe is communicated with the cleaning pool, and a valve is fixedly provided on the outside of the liquid outlet pipe.

[0014] Preferably, the cleaning table is provided with four drainage holes inside the outside of the cleaning pool, and the drainage holes are distributed in a circular shape and at equal intervals. A water tank is provided above the horizontal plate of the rack, and the water tank corresponds to the positions of the liquid outlet pipe and the drainage holes respectively.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. The utility model can comprehensively clean the uniformity baffle through the rotating disk and the motor. Before cleaning the uniformity baffle, first place the uniformity baffle between the rotating disks. At this time, rotate the bolt to make the bolt rotate and move on the rotating disk through the external thread until the rubber pad on the bolt contacts and squeezes the uniformity baffle, thereby fixing the uniformity baffle. At this time, turn on the second hydraulic telescopic device, and drive the brush to move in the horizontal direction through the second hydraulic telescopic device until the brush contacts the surface of the uniformity baffle. At this time, turn on the motor so that the output shaft of the motor drives the rotating disk to rotate. During the rotation of the rotating disk, the uniformity baffle also rotates together. At this time, the brush in contact with the surface of the uniformity baffle brushes and cleans the uniformity baffle, thereby avoiding dead corners during the cleaning process.

[0017] 2. The utility model can use a variety of methods to clean the uniformity baffle through the nozzle and the ultrasonic generator. When the uniformity baffle is cleaned, clean water is poured into the telescopic tube through the water inlet pipe, and then the clean water is sprayed out by the nozzle. The clean water sprayed at this time rinses the surface of the uniformity baffle. At the same time, the uniformity baffle is in a rotating state, thereby reducing the adhesion of impurities. When the first hydraulic telescopic device is turned on, the telescopic end of the first hydraulic telescopic device is extended while driving the fixed frame to move downward until the fixed frame and the uniformity baffle are immersed in the cleaning tank together. At this time, the ultrasonic generator is turned on, and the ultrasonic waves generated by the ultrasonic generator are used to disperse, emulsify and peel off the impurities on the surface of the uniformity baffle. By increasing the cleaning method, the cleaning effect of the uniformity baffle is further improved.

[0018] 3. The utility model can collect the waste liquid generated by cleaning through the drainage hole and the water tank. When the uniformity baffle is cleaned, the waste liquid generated flows into the water tank through the drainage hole. When the cleaning operation is completed, the valve is opened to open the liquid outlet pipe. The cleaning liquid inside the cleaning pool flows into the water tank through the liquid outlet pipe. After the cleaning liquid is discharged, the operator will centrally recycle the waste liquid in the water tank to avoid the waste liquid generated by cleaning from dripping directly onto the ground, which helps to protect the working environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a front view of the internal structure of the utility model;

[0020] Figure 2 This is a side view of the internal structure of the utility model;

[0021] Figure 3 This is a schematic diagram of the fixed structure of the utility model;

[0022] Figure 4 For the utility model Figure 1 A partial enlarged view of area A in the middle.

[0023] In the figure: 1. Frame; 2. Cleaning table; 3. Mounting frame; 4. First hydraulic telescopic device; 5. Water inlet pipe; 6. Fixed frame; 7. Telescopic pipe; 8. Spray nozzle; 9. Fixed seat; 10. Motor; 11. Rotating plate; 12. Second hydraulic telescopic device; 13. Brush; 14. Cleaning tank; 15. Ultrasonic generator; 16. Drain hole; 17. Liquid outlet pipe; 18. Valve; 19. Water tank; 20. Rubber pad; 21. Bolt. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0025] See also Figure 1-4 The present invention provides an embodiment of a cleaning device for uniformity baffle processing, comprising a frame 1, a cleaning table 2 fixedly provided on the upper end of the frame 1, and a mounting frame 3 fixedly provided on the upper end of the cleaning table 2; and further comprising:

[0026] A fixing frame 6 is provided below the horizontal plate of the mounting frame 3. A fixing seat 9 is fixedly provided on both sides of the lower end of the fixing frame 6. A rotating disk 11 is provided on the side of the fixing seat 9 close to the center of the fixing frame 6. Four bolts 21 are provided on the side of the rotating disk 11 close to the fixing seat 9. The bolts 21 are equidistantly distributed in a ring shape. The bolts 21 are rotatably connected to the rotating disk 11, and the other end of the bolt 21 extends to the other side of the rotating disk 11. A rubber pad 20 is fixed to one end of the bolt 21 on the other side of the rotating disk 11.

[0027] The motor 10 is arranged inside the fixed seat 9, and the output shaft of the motor 10 extends to the outside of the fixed seat 9 and is fixedly connected to the rotating disk 11. A first hydraulic telescopic device 4 is fixedly provided at the middle position of the upper end of the horizontal plate of the mounting frame 3, and the telescopic end of the first hydraulic telescopic device 4 extends to the bottom of the horizontal plate of the mounting frame 3 and is fixedly connected to the fixed frame 6.

[0028] During use, before cleaning the uniformity baffle, first place the uniformity baffle between the rotating disks 11, then turn the bolt 21 so that the bolt 21 rotates and moves on the rotating disk 11 through the external thread until the rubber pad 20 on the bolt 21 contacts and squeezes the uniformity baffle, thereby fixing the uniformity baffle. At this time, turn on the second hydraulic telescopic device 12, and drive the brush 13 to move in the horizontal direction through the second hydraulic telescopic device 12 until the brush 13 contacts the surface of the uniformity baffle. At this time, turn on the motor 10 so that the output shaft of the motor 10 drives the rotating disk 11 to rotate. During the rotation of the rotating disk 11, the uniformity baffle also rotates together. At this time, the brush 13 in contact with the surface of the uniformity baffle brushes and cleans the uniformity baffle.

[0029] See also Figure 1 A second hydraulic telescopic device 12 is fixedly provided on both sides of the mounting frame 3 below the fixed seat 9, and a brush 13 is fixedly provided on one side of the telescopic end of the second hydraulic telescopic device 12, so as to facilitate changing the position of the brush 13 through the second hydraulic telescopic device 12.

[0030] See also Figure 1 and Figure 2 A cleaning pool 14 is provided at the middle position of the upper end of the cleaning table 2. Ultrasonic generators 15 are fixedly provided on the side walls around the inside of the cleaning pool 14 to facilitate further cleaning of the uniformity baffle through the ultrasonic generator 15.

[0031] See also Figure 1 , water inlet pipes 5 are fixedly provided on both sides of the upper end of the horizontal plate of the mounting frame 3, and telescopic tubes 7 are fixedly provided on both sides of the lower end of the horizontal plate of the mounting frame 3. The upper end of the telescopic tube 7 is connected to the water inlet pipe 5, and the lower end of the telescopic tube 7 is fixedly connected to the fixed frame 6, so as to facilitate the transportation of clean water through the telescopic tube 7.

[0032] See also Figure 1 and Figure 2 The fixing frame 6 is located below the horizontal plate and has nozzles 8 fixed on both sides of the inner wall. The nozzles 8 are connected to the telescopic tube 7 to facilitate the cleaning of the surface of the uniformity baffle by the water flow generated by the nozzles.

[0033] See also Figure 1 and Figure 2 A liquid outlet pipe 17 is fixedly provided at the middle position of the lower end of the cleaning table 2, and the liquid outlet pipe 17 is connected to the cleaning tank 14. A valve 18 is fixedly provided on the outside of the liquid outlet pipe 17 to facilitate adjusting the liquid outlet pipe 17 through the valve 18.

[0034] See also Figure 1The washing table 2 is located outside the washing pool 14 and is provided with four drainage holes 16, and the drainage holes 16 are distributed in a circular and equidistant manner. A water tank 19 is provided above the horizontal plate of the frame 1, and the water tank 19 corresponds to the positions of the liquid outlet pipe 17 and the drainage holes 16, respectively, so that the waste liquid can be recovered and processed centrally through the water tank 19.

[0035] Working principle: When the uniformity baffle is being cleaned, clean water is poured into the telescopic tube 7 through the water inlet pipe 5, and then the clean water is sprayed out by the nozzle 8. At this time, the clean water sprayed out rinses the surface of the uniformity baffle. At the same time, the uniformity baffle is in a rotating state, thereby reducing the adhesion of impurities. Then the first hydraulic telescopic device 4 is turned on, and the telescopic end of the first hydraulic telescopic device 4 is extended while driving the fixed frame 6 to move downward until the fixed frame 6 and the uniformity baffle are immersed in the cleaning tank 14 together. At this time, the ultrasonic generator 15 is turned on, and the ultrasonic waves generated by the ultrasonic generator 15 disperse, emulsify and peel off the impurities on the surface of the uniformity baffle. When the uniformity baffle is being cleaned, the waste liquid generated flows into the water tank 19 through the drain hole 16. When the cleaning operation is completed, the valve 18 is opened to open the liquid outlet pipe 17. The cleaning liquid inside the cleaning tank 14 flows into the water tank 19 through the liquid outlet pipe 17. After the cleaning liquid is discharged, the operator will centrally recycle the waste liquid in the water tank 19.

[0036] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A cleaning device for uniformity baffle processing, comprising a frame (1), a cleaning table (2) fixedly provided at the upper end of the frame (1), and a mounting frame (3) fixedly provided at the upper end of the cleaning table (2); Its characteristics are: Also includes: A fixing frame (6) is arranged below the horizontal plate of the mounting frame (3), and fixing seats (9) are fixedly arranged on both sides of the lower end of the fixing frame (6), and a rotating disk (11) is arranged on one side of the fixing seat (9) close to the center of the fixing frame (6). Four bolts (21) are arranged on one side of the rotating disk (11) close to the fixing seat (9), and the bolts (21) are equidistantly distributed in a circular shape. The bolts (21) are rotatably connected to the rotating disk (11), and the other end of the bolt (21) extends to the other side of the rotating disk (11), and a rubber pad (20) is fixedly arranged on one end of the bolt (21) located on the other side of the rotating disk (11); A motor (10) is arranged inside the fixing seat (9), and the output shaft of the motor (10) extends to the outside of the fixing seat (9) and is fixedly connected to the rotating disk (11). A first hydraulic telescopic device (4) is fixedly arranged at a middle position on the upper end of the horizontal plate of the mounting frame (3), and the telescopic end of the first hydraulic telescopic device (4) extends to the bottom of the horizontal plate of the mounting frame (3) and is fixedly connected to the fixing frame (6).

2. The cleaning device for uniform baffle processing according to claim 1, characterized in that: The mounting frame (3) is fixedly provided with a second hydraulic telescopic device (12) on both sides below the fixed seat (9), and a brush (13) is fixedly provided on one side of the telescopic end of the second hydraulic telescopic device (12).

3. The cleaning device for uniform baffle processing according to claim 2, characterized in that: A cleaning pool (14) is provided at the middle position of the upper end of the cleaning platform (2), and ultrasonic generators (15) are fixedly provided on the side walls around the inside of the cleaning pool (14).

4. The cleaning device for uniform baffle processing according to claim 3, characterized in that: Water inlet pipes (5) are fixedly provided on both sides of the upper end of the transverse plate of the mounting frame (3), and telescopic pipes (7) are fixedly provided on both sides of the lower end of the transverse plate of the mounting frame (3), the upper end of the telescopic pipe (7) is communicated with the water inlet pipe (5), and the lower end of the telescopic pipe (7) is fixedly connected to the fixing frame (6).

5. The cleaning device for uniform baffle processing according to claim 4, characterized in that: The fixing frame (6) is located below the horizontal plate and has nozzles (8) fixedly provided on both inner walls of the fixing frame (6), and the nozzles (8) are connected to the telescopic tube (7).

6. The cleaning device for uniform baffle processing according to claim 5, characterized in that: A liquid outlet pipe (17) is fixedly provided at the middle position of the lower end of the cleaning table (2), and the liquid outlet pipe (17) is communicated with the cleaning pool (14). A valve (18) is fixedly provided on the outside of the liquid outlet pipe (17).

7. The cleaning device for uniform baffle processing according to claim 6, characterized in that: The cleaning table (2) is provided with four drainage holes (16) located outside the cleaning pool (14), and the drainage holes (16) are distributed in a circular shape and at equal intervals. A water tank (19) is provided above the horizontal plate of the frame (1), and the water tank (19) corresponds to the positions of the liquid outlet pipe (17) and the drainage holes (16) respectively.

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