Diamond ultrasonic dispersion cleaning equipment

Abstract

The utility model discloses ultrasonic dispersion cleaning equipment for diamonds. The ultrasonic dispersion cleaning equipment comprises a metal tank body, an ultrasonic device, a stirring device and a heating device, the metal tank body is used for containing diamond micro-powder mixed liquid, and the metal tank body is provided with a discharging port formed in the bottom and a feeding port far away from the discharging port; the ultrasonic device is arranged on the metal tank body and is used for providing ultrasonic waves for the diamond micro-powder mixed liquid in the metal tank body; the stirring device is arranged in the metal tank body and is used for dispersing a diamond micro-powder mixed solution in the metal tank body; and the heating device is used for heating the diamond micro-powder mixed liquid in the metal tank body and accelerating cleaning and dissolving of impurities in the diamond micro-powder mixed liquid. According to the technical scheme, the surface impurities of the diamond micro-powder can be cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning equipment, in particular to a diamond ultrasonic dispersion cleaning equipment. Background Art

[0002] Diamond is widely used as a primary raw material for cutting, grinding, and polishing. However, when used as a polishing fluid, such as in semiconductor technology, a more uniform powder size is often required to prevent the workpiece from being scratched by the abrasive during the grinding process.

[0003] However, the diamond powder produced by the existing technology contains impurities such as surfactants, sodium silicate, dispersants, sedimentation agents, etc. These impurities usually affect the oversize screening of diamond powder and are not conducive to the stripping of oversize powder. Utility Model Content

[0004] The utility model aims to provide a diamond ultrasonic dispersion cleaning device to clean the impurities attached to the diamond powder.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A diamond ultrasonic dispersion cleaning device comprises a metal tank, an ultrasonic device, a stirring device and a heating device;

[0007] The metal tank body is used to contain the diamond powder mixture, and the metal tank body has a discharge port at the bottom and a feed port away from the discharge port;

[0008] The ultrasonic device is provided in the metal tank body and is used to provide ultrasonic waves to the diamond powder mixed liquid in the metal tank body;

[0009] The stirring device is arranged inside the metal tank body and is used to disperse the diamond powder mixture in the metal tank body;

[0010] The heating device is used to heat the diamond micropowder mixed liquid in the metal tank body, and is used to accelerate the cleaning and dissolution of impurities in the diamond micropowder mixed liquid.

[0011] In one embodiment, an outer shell is further provided on the outside of the metal can body, and the outer shell and the outer shell of the metal can body are enclosed to form a receiving cavity;

[0012] The heating device is an oil temperature machine; the output end of the oil temperature machine used for outputting the heat-conducting medium and the input end of the return heat-conducting medium are respectively connected to the accommodating cavity, and the accommodating cavity is used to accommodate the heat-conducting medium so that the heat-conducting medium heats the diamond micropowder mixture through the metal tank body.

[0013] In one embodiment, a spray head is further included, and the spray head is arranged inside the metal tank body and close to the top of the metal tank body.

[0014] In one embodiment, the spray head has a plurality of liquid spray ports, and the plurality of liquid spray ports can clean the inner wall of the metal can body.

[0015] In one embodiment, a visual device is further included, wherein the visual device includes a transparent cover and a connecting structure, wherein the connecting structure is communicated with the interior of the metal can body, and the transparent cover can be detached from the connecting structure.

[0016] In one embodiment, the transparent cover is connected to the connecting structure in a flip-over manner, and the transparent cover is fixedly connected to the connecting structure by screws.

[0017] In one embodiment, the stirring device includes a driving motor and a stirring rod, wherein the driving motor is used to drive the stirring rod to rotate, and a stirring blade is provided at one end of the stirring rod away from the driving motor.

[0018] In one embodiment, the surface of the stirring blade has a notch.

[0019] In one embodiment, the ultrasonic device is an ultrasonic rod, which is disposed inside the metal tank and accommodates the diamond powder mixture.

[0020] In one embodiment, the ultrasonic device has an ultrasonic vibrator, which is disposed outside the metal can body and connected to the metal can body.

[0021] In one embodiment, the inner wall of the metal can body is coated with a corrosion-resistant coating; the corrosion-resistant coating is a Teflon coating.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The diamond ultrasonic dispersion cleaning device of the present utility model is primarily used to assist in breaking up soft agglomerates in diamond material. It can also dissolve some water-soluble chemical impurities in the cleaning fluid. Diamonds manufactured using existing technologies often do not require overly precise micropowder particles. To ensure a good suspension effect or reduce the surface tension between micropowder particles when used as a polishing fluid, chemical additives such as surfactants, sodium silicate, dispersants, and sedimentation agents are typically added to the diamond micropowder. However, when these micropowder particles are used in the semiconductor field, the presence of oversized particles in the existing diamond micropowder particles often leads to scratches on the polished parts. However, when oversizing diamond micropowder, electroforming screens are typically used for screening. Therefore, to prevent metal ions on the surface of the diamond micropowder from affecting the oversizing of the diamond micropowder, it is necessary to clean the surface impurities of the existing diamond micropowder. The present utility model's technical solution achieves cleaning of impurities attached to the diamond powder by providing a metal tank, an ultrasonic device, a stirring device, and a heating device. Specifically, the metal tank body is used to contain the diamond micropowder mixture, the ultrasonic device is used to provide ultrasonic cleaning for the diamond micropowder mixture in the metal tank body, the stirring device is used to disperse the diamond micropowder mixture in the metal tank body, and the heating device is used to accelerate the cleaning and dissolution of impurities in the diamond micropowder mixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] The structures, proportions, sizes, etc. depicted in the drawings of this specification are only used to match the contents disclosed in this specification so as to facilitate understanding and reading by those familiar with this technology. They are not intended to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modifications, changes in proportional relationships, or adjustments in size, without affecting the efficacy and objectives that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed in the present invention.

[0026] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;

[0027] Figure 2 This is a schematic structural diagram of an embodiment of the present utility model;

[0028] Figure 3This is a bottom view of a partial structure of an embodiment of the present utility model;

[0029] Figure 4 This is a top view of a partial structure of an embodiment of the present utility model;

[0030] Illustrations: 100, diamond ultrasonic dispersion cleaning equipment; 110, metal tank; 111, discharge port; 112, feed port; 113, outer shell; 112a, accommodating chamber;

[0031] 120. Ultrasonic device; 121. Ultrasonic rod; 122. Ultrasonic vibrator;

[0032] 130. stirring device; 131. driving motor; 132. stirring rod; 133. stirring blade; 1331. notch;

[0033] 140. Heating device; 141. Input end; 142. Output end;

[0034] 150. Sprinkler head; 151. Liquid spray port; 160. Visual device; 161. Transparent cover; 162. Connecting structure. DETAILED DESCRIPTION

[0035] In order to make the technical objectives, features, and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally located component.

[0037] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0038] An embodiment of the present utility model provides a diamond ultrasonic dispersion cleaning device 100 .

[0039] See also Figure 1 and Figure 2 In one embodiment of the present invention, the diamond ultrasonic dispersion cleaning device 100 includes a metal tank 110, an ultrasonic device 120, a stirring device 130 and a heating device 140;

[0040] The metal tank body 110 is used to contain the diamond powder mixture. The metal tank body 110 has a discharge port 111 at the bottom and a feed port 112 away from the discharge port 111.

[0041] The ultrasonic device 120 is provided in the metal tank body 110 and is used to provide ultrasonic cleaning for the diamond powder mixture in the metal tank body 110;

[0042] The stirring device 130 is disposed inside the metal can body 110 and is used to disperse the diamond powder mixture in the metal can body 110;

[0043] The heating device 140 is used to heat the diamond micropowder mixture in the metal can body 110 to accelerate the cleaning and dissolution of impurities in the diamond micropowder mixture.

[0044] It is understood that the present invention's technical solution achieves the cleaning of impurities attached to diamond powder by providing a metal tank 110, an ultrasonic device 120, a stirring device 130, and a heating device 140. Specifically, the metal tank 110 is used to contain a diamond powder mixture, the ultrasonic device 120 is used to provide ultrasonic cleaning for the diamond powder mixture within the metal tank 110, the stirring device 130 is used to disperse the diamond powder mixture within the metal tank 110, and the heating device 140 is used to accelerate the cleaning and dissolution of impurities within the diamond powder mixture.

[0045] It should also be noted that the diamond ultrasonic dispersion cleaning device 100 is mainly used to assist in opening the soft agglomeration of the diamond material, and on the other hand, it can also dissolve some water-soluble chemical impurities in the cleaning solution. The diamonds processed by the prior art often do not require too precise micropowder particles, and in order to have a good suspension effect or reduce the surface tension between the micropowder particles when the diamond is used as a polishing liquid, some chemical adjuvants such as surfactants, sodium silicate, dispersants, sedimentation agents, etc. are usually added to the diamond micropowder. However, when such micropowder particles are used in the semiconductor field, they often cause scratches on the ground parts due to the presence of oversized particles in the existing diamond micropowder particles. However, when the diamond micropowder is oversized, electroforming screen screening is usually adopted. Therefore, in order to avoid the influence of metal ions on the surface of the diamond micropowder on the oversized screening of the diamond micropowder, the surface impurities of the diamond micropowder of the prior art need to be cleaned.

[0046] It should also be noted that the cleaning liquid added to the metal can body 110 can be water, deionized water or acidic cleaning liquid. Generally, the surface impurities of diamond powder are some water-soluble chemical substances.

[0047] It should also be noted that the heating device 140 is used to accelerate the cleaning and dissolution of impurities in the diamond micropowder mixture, which mainly means that the heating device 140 can increase the temperature of the diamond micropowder mixture, increase the molecular movement speed and solubility in the solution, and thus accelerate the dissolution of soluble substances.

[0048] Optionally, the heating device 140 may be a water bath heater, a microwave heater, a resistance rod heater, or the like.

[0049] See also Figure 2 In a specific embodiment of the present invention, an outer shell 113 is further provided on the outside of the metal can body 110, and an accommodating cavity 112a is formed between the outside of the metal can body 110 and the outer shell 113;

[0050] The heating device 140 is an oil temperature machine; the output end 142 of the oil temperature machine for outputting the heat-conducting medium and the input end 141 for returning the heat-conducting medium are respectively connected to the accommodating cavity 112a, and the accommodating cavity 112a is used to accommodate the heat-conducting medium so that the heat-conducting medium heats the diamond micropowder mixture through the metal tank body 110.

[0051] It's understood that oil temperature controllers use thermal oil as a heat transfer medium. Specifically, thermal oil has high thermal conductivity, allowing it to quickly transfer heat to the target device, improving heating efficiency. Oil temperature controllers are also typically equipped with advanced temperature control systems, enabling precise temperature control with minimal temperature fluctuations, helping to ensure stable heating temperatures and the quality of the resulting cleaned product.

[0052] See also Figure 2 and Figure 4 In a specific embodiment of the present invention, the diamond ultrasonic dispersion cleaning device 100 further includes a spray head 150 , which is disposed inside the metal tank body 110 and close to the top of the metal tank body 110 .

[0053] Specifically, the spray head 150 has a plurality of liquid spraying ports 151 , and the plurality of liquid spraying ports 151 can clean the inner wall of the metal can body 110 .

[0054] It is understood that the spray head 150 can be provided to add cleaning liquid into the metal can body 110. When the spray head 150 has multiple liquid spraying ports 151, the spraying range of the spray head 150 becomes larger, thereby facilitating the flushing of the diamond powder attached to the inner surface of the metal can body 110.

[0055] See also Figure 1 、 Figure 2 and Figure 3 In one embodiment of the present invention, the diamond ultrasonic dispersion cleaning equipment 100 further includes a visual device 160, which includes a transparent cover 161 and a connecting structure 162. The connecting structure 162 is connected to the interior of the metal can body 110, and the transparent cover 161 can be detached from the connecting structure 162.

[0056] It is understood that the provision of the transparent cover 161 facilitates the operator to observe the internal working conditions of the metal tank 110, such as the volume of the diamond powder mixture in the metal tank 110. It is also understood that after the transparent cover 161 can be separated from the connecting structure 162, the connecting structure 162 can also form a manhole, thereby facilitating the addition of other auxiliary agents into the metal tank 110.

[0057] Specifically, if Figure 2 As shown, the transparent cover 161 and the connecting structure 162 are flipped and connected, and the transparent cover 161 and the connecting structure 162 are fixedly connected by screws.

[0058] See also Figure 1 and Figure 2 In a specific embodiment of the present invention, the stirring device 130 includes a driving motor 131 and a stirring rod 132 . The driving motor 131 is used to drive the stirring rod 132 to rotate. A stirring blade 133 is provided at one end of the stirring rod 132 away from the driving motor 131 .

[0059] It can be understood that a stirring blade 133 is provided at the end of the stirring rod 132 away from the drive motor 131, rather than arranging multiple stirring blades 133 in parallel on the entire stirring rod 132. Therefore, the above feature helps to reduce the load of the drive motor 131 and reduce the operating noise of the equipment.

[0060] It should also be noted that the diamond ultrasonic dispersion cleaning device 100 primarily utilizes the ultrasonic device 120 for cleaning, and the stirring device 130 primarily performs the function of stirring and dispersing. Therefore, the stirring blade 133 is only provided at the end of the stirring rod 132 away from the drive motor 131 to achieve the desired stirring and dispersing function.

[0061] Optionally, in order to improve the dispersion effect, the surface of the stirring blade 133 has a notch 1331 .

[0062] See also Figure 2 、 Figure 3 and Figure 4 In a specific embodiment of the present invention, the ultrasonic device 120 is an ultrasonic rod 121, which is located inside the metal tank 110 and contains the diamond powder mixture. It is understood that in the above-described technical solution, the stirring blade 133 is positioned to avoid the ultrasonic rod 121, thereby providing space for the ultrasonic rod 121 to be accommodated within the metal tank 110. Furthermore, the placement of the ultrasonic rod 121 inside the metal tank 110 prevents the ultrasonic device 120 from occupying external space.

[0063] Optionally, see Figure 2 The ultrasonic device 120 has an ultrasonic vibrator 122, which is disposed outside the metal can body 110 and connected to the metal can body 110. It is understood that the ultrasonic vibrator 122 provides ultrasonic waves with higher power than the ultrasonic rod 121, and has a better cleaning effect.

[0064] It should also be noted that, in any of the above embodiments, the inner wall of the metal can body 110 is coated with a corrosion-resistant coating; the corrosion-resistant coating is a Teflon coating.

[0065] It is understood that the main material of the Teflon coating is polytetrafluoroethylene (PTFE). Teflon has strong chemical corrosion resistance. The surface of the Teflon coating is smooth, not easy to adhere to substances, and easy to clean and maintain.

[0066] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A diamond ultrasonic dispersion cleaning device, characterized in that: include: Metal tank, ultrasonic device, stirring device and heating device; The metal tank body is used to contain the diamond powder mixture, and the metal tank body has a discharge port at the bottom and a feed port away from the discharge port; The ultrasonic device is provided in the metal tank body and is used to provide ultrasonic waves to the diamond powder mixed liquid in the metal tank body; The stirring device is arranged inside the metal tank body and is used to disperse the diamond powder mixture in the metal tank body; The heating device is used to heat the diamond micropowder mixed liquid in the metal tank body, and is used to accelerate the cleaning and dissolution of impurities in the diamond micropowder mixed liquid.

2. The diamond ultrasonic dispersion cleaning equipment according to claim 1, characterized in that: An outer shell is further provided on the outside of the metal can body, and a receiving cavity is formed between the outside of the metal can body and the outer shell; The heating device is an oil temperature machine; the output end of the oil temperature machine used for outputting the heat-conducting medium and the input end of the return heat-conducting medium are respectively connected to the accommodating cavity, and the accommodating cavity is used to accommodate the heat-conducting medium so that the heat-conducting medium heats the diamond micropowder mixture through the metal tank body.

3. The diamond ultrasonic dispersion cleaning equipment according to claim 2, characterized in that: It also includes a spray head, which is arranged inside the metal tank body and close to the top of the metal tank body.

4. The diamond ultrasonic dispersion cleaning equipment according to claim 3, characterized in that: The spray head has a plurality of liquid spray ports, and the plurality of liquid spray ports can clean the inner wall of the metal can body.

5. The diamond ultrasonic dispersion cleaning equipment according to claim 3, characterized in that: It also includes a visual device, which includes a transparent cover and a connecting structure. The connecting structure is communicated with the interior of the metal can body, and the transparent cover can be separated from the connecting structure.

6. The diamond ultrasonic dispersion cleaning equipment according to claim 5, characterized in that: The transparent cover is connected to the connecting structure by flipping, and the transparent cover is fixedly connected to the connecting structure by screws.

7. The diamond ultrasonic dispersion cleaning equipment according to claim 1, characterized in that: The stirring device includes a driving motor and a stirring rod. The driving motor is used to drive the stirring rod to rotate. A stirring blade is provided at one end of the stirring rod away from the driving motor.

8. The diamond ultrasonic dispersion cleaning equipment according to claim 7, characterized in that: The surface of the stirring blade has notches.

9. The diamond ultrasonic dispersion cleaning equipment according to claim 1, characterized in that: The ultrasonic device is an ultrasonic rod, which is arranged inside the metal tank and accommodates the diamond powder mixture; and / or, The ultrasonic device has an ultrasonic vibration head, which is arranged outside the metal tank body and connected to the metal tank body.

10. The diamond ultrasonic dispersion cleaning equipment according to any one of claims 1 to 9, characterized in that: The inner wall of the metal tank body is coated with a corrosion-resistant coating; the corrosion-resistant coating is a Teflon coating.

Images