Mask clamping device
By designing the stage, fixture and alignment structure of the mask clamping device, and using the positioning columns and channels, automatic alignment and clamping of the mask is achieved, solving the problem of low efficiency of existing fixtures, improving work efficiency and reducing operational errors.
Patent Information
- Application Number
- CN202422228385.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2034-09-11
AI Technical Summary
The existing clamping efficiency of the mask is low, and the staff needs to manually judge the clamping status, which increases the workload.
A mask clamping device is designed, which includes a stage, a fixture and an alignment structure. It uses positioning columns and channels to automatically align and clamp the mask, reducing the need for manual judgment.
It improves the efficiency of mask clamping, reduces manual judgment time, and reduces the risk of product scrapping due to operational errors.
Smart Images
Figure CN223369202U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of mask plates, and in particular to a mask plate clamping device. Background Art
[0002] The clamp is used to hold the mask so that the staff can move the mask more conveniently. When the clamp is holding the mask, the staff has to judge whether the mask is in the correct clamping state, which increases the staff's workload and reduces work efficiency. Utility Model Content
[0003] The main technical problem solved by the present application is to provide a mask clamping device to solve the problem of low working efficiency of existing clamps for clamping masks.
[0004] In order to solve the above technical problems, the technical solution adopted in this application is: to provide a mask clamping device, the mask clamping device includes a table, a clamp and a pair of alignment structures; the table top of the table has a placement area, and the placement area is used to place the mask; the clamp includes a clamping body, a pair of positioning columns and a pair of clamping heads; the pair of clamping heads are arranged on the clamping body; the clamping body is used to control the pair of clamping heads to clamp the mask; the positioning columns are arranged on the clamping heads, and the two ends of the positioning columns extend beyond the clamping heads; a pair of alignment structures are arranged on the table top of the table, and are respectively located outside the two sides of the placement area; the alignment structure has a first channel for the clamping head to pass through; the two side surfaces of the first channel have second channels for the two ends of the positioning columns to pass through respectively, and the second channels extend to the outer side surfaces of the alignment structure; wherein, when the pair of clamping heads clamp the mask, the ends of the positioning columns exit the second channel.
[0005] In some embodiments, the alignment structure includes two positioning blocks, which are arranged on the table surface of the table body; along the axis direction of the positioning column, there is a gap between the two positioning blocks to form a first channel.
[0006] In some embodiments, rollers are provided on both the inner top wall and the inner bottom wall of the second channel; the center lines of the rollers are parallel to the axis of the positioning column.
[0007] In some embodiments, the clamping head has a clamping groove; the clamping grooves of a pair of clamping heads are arranged opposite to each other.
[0008] In some embodiments, the clamping body is disposed on a top end of the clamping head.
[0009] In some embodiments, a limit block is further provided on the table; the limit block is provided on the table to limit the movement of the mask along the first plane; the first plane is parallel to the table.
[0010] In some embodiments, the clamping head has a through hole, and the positioning post is inserted into the through hole and has an interference fit with the through hole.
[0011] In some embodiments, there is a gap between the alignment structure and the placement area; when the pair of clamping heads clamp the mask, the clamping heads and the positioning posts are both located in the gap, so that the ends of the positioning posts exit the second channel.
[0012] In some embodiments, the clamping body includes a switch, a connecting rod, a target identifier and a pair of connecting parts; the pair of connecting parts are movably arranged on the connecting rod and are connected to a pair of clamping heads; the switch is arranged on the connecting rod and is used to control the pair of connecting parts to open or close; the target identifier is arranged on the connecting rod, which is used to detect whether the pair of clamping heads correctly clamp the mask, and the identifier is displayed when the pair of clamping heads correctly clamp the mask.
[0013] In some embodiments, the clamping body further includes an anti-accidental touch member; the anti-accidental touch member is disposed on the connecting rod and cooperates with the switch; when the anti-accidental touch member is turned on, it locks the state of the switch.
[0014] In this embodiment, a worker places the reticle in a placement area on a table. The clamping body allows a pair of clamping heads to pass through the first channels of a pair of alignment structures, with the ends of the positioning posts entering the second channels from the outer sides of the alignment structures. The ends of the positioning posts move within the second channels, allowing the clamping heads to move stably within the first channels. The alignment structure's second channels and the positioning posts cooperate to achieve alignment, allowing the pair of clamping heads to correctly clamp the reticle. This eliminates the need for workers to determine whether the clamped reticle is in the correct clamping state, saving time and improving work efficiency. It also prevents operational errors that could lead to product scrapping. When the pair of clamping heads clamp the reticle, the ends of the positioning posts exit the second channels, and the clamp can be used to remove the reticle from the table. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0016] Figure 1 It is a structural schematic diagram of the mask clamping device provided by this application;
[0017] Figure 2 It is a structural diagram of the platform provided by this application;
[0018] Figure 3 It is a structural schematic diagram of the alignment structure and positioning column provided by this application;
[0019] Figure 4It is a structural diagram of the positioning block provided by this application;
[0020] Figure 5 It is a structural schematic diagram of the clamping head provided by this application;
[0021] Figure 6 It is a structural schematic diagram of the clamping body provided in this application.
[0022] In the figure: 11. Support block; 12. Limit block; 13. Table; 14. Table top; 2. Alignment structure; 21. Positioning block; 22. First channel; 23. Second channel; 24. Roller; 3. Mask; 4. Clamp; 41. Positioning column; 42. Clamping head; 43. Clamping body; 431. Connecting part; 432. Switch; 433. Connecting rod; 434. Anti-accidental touch part; 435. Anti-loosening part; 44. Clamping groove. DETAILED DESCRIPTION
[0023] The following describes the embodiments of the present application in detail with reference to the accompanying drawings.
[0024] In the following description, for the purpose of explanation rather than limitation, specific details such as specific system structures, interfaces, and technologies are provided to facilitate a thorough understanding of the present application.
[0025] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by technicians in this field without making creative efforts are within the scope of protection of this application.
[0026] The terms "first," "second," and "third" in this application are used only for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of such features. In the description of this application, "multiple" means at least two, for example, two, three, etc., unless otherwise specifically defined. All directional indications in the embodiments of this application (such as up, down, left, right, front, back...) are only used to explain the relative positional relationship, movement, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications also change accordingly. In addition, the terms "including" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products, or devices.
[0027] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.
[0028] The embodiment of the present application provides a mask clamping device. Figures 1 to 6 The reticle clamping device includes a stage 13, a fixture 4, and a pair of alignment structures 2. The table 14 of the stage 13 has a placement area for placing the reticle 3. The fixture 4 includes a clamping body 43, a pair of positioning posts 41, and a pair of clamping heads 42. The pair of clamping heads 42 are disposed on the clamping body 43. The clamping body 43 is used to control the pair of clamping heads 42 to clamp the reticle 3. The positioning posts 41 are disposed on the clamping heads 42, with both ends of the positioning posts 41 extending beyond the clamping heads 42. A pair of alignment structures 2 are disposed on the table 14 of the stage 13 and are located on either side of the placement area. The alignment structures 2 have a first channel 22 for the clamping heads 42 to pass through. The two side surfaces of the first channel 22 have second channels 23 for the two ends of the positioning posts 41 to pass through, respectively. The second channels 23 extend to the outer side surfaces of the alignment structures 2. When the pair of clamping heads 42 clamp the reticle 3, the ends of the positioning posts 41 exit the second channel 23.
[0029] The placement area is a designated area on the table 14. In some examples, the placement area is coplanar with the portion of the table 14 excluding the placement area, forming a plane. The placement area can be designed based on the shape of the mask 3. For example, if the mask 3 is rectangular, the placement area can also be rectangular.
[0030] The clamp 4 can be a manual clamp 4 or an automated clamp 4 , for example, the automated clamp 4 can be a robotic arm.
[0031] A pair of clamping heads 42 are disposed on a clamping body 43. In some examples, the clamping body 43 is disposed at the top of the clamping head 42. In this way, when clamping the reticle 3, the clamping body 43 is located on top of the clamping head 42, preventing the clamping body 43 from contacting the reticle 3 and causing damage to the reticle 3. In other examples, the clamping body 43 is disposed in the middle or bottom of the clamping head 42.
[0032] The clamping body 43 controls the distance between the pair of clamping heads 42 to increase or decrease, so that the pair of clamping heads 42 clamp the mask 3 from both sides or release the mask 3 .
[0033] The extending direction of the positioning post 41 is perpendicular to the extending direction of the clamping head 42. In some examples, the extending direction of the positioning post 41 is horizontal, and the extending direction of the clamping head 42 is vertical. The clamping head 42 is oblong.
[0034] The positioning post 41 is disposed on the clamping head 42. In some examples, the clamping head 42 has a through hole, and the positioning post 41 is inserted into the through hole and has an interference fit with the through hole. In other examples, the positioning post 41 is fixed to the outer surface of the clamping head 42.
[0035] A pair of alignment structures 2 are located outside the placement area on either side, thereby preventing the alignment structures 2 from affecting the mask 3. A pair of alignment structures 2 are located outside the placement area on either side, meaning that one alignment structure 2 is located on one side of the placement area and the other alignment structure 2 is located on the other side of the placement area; that is, the pair of alignment structures 2 are arranged opposite each other along the first direction X.
[0036] The first channels 22 extend along the first direction X, and the first channels 22 of the pair of alignment structures 2 are oppositely arranged along the first direction X.
[0037] The two side surfaces of the first channel 22 refer to the surfaces of the first channel 22 that are perpendicular to the second direction Y. The second direction Y is perpendicular to the first direction X, and both the second direction Y and the first direction X are perpendicular to the extension direction of the clamping head 42. The second direction Y is parallel to the extension direction of the positioning post 41.
[0038] The second channel 23 is a straight channel, that is, extending along the first direction X, so that when the positioning column 41 moves in the second channel 23, the clamping head 42 also moves along the first direction X, so that the pair of clamping heads 42 can correctly clamp the mask 3.
[0039] The end of the positioning post 41 exits the second channel 23, which means that one end of the positioning post 41 exits one second channel 23, and the other end of the positioning post 41 also exits the other second channel 23. In some examples, there is a gap between the alignment structure 2 and the placement area; when the pair of clamping heads 42 clamp the mask 3, the clamping heads 42 and the positioning post 41 are both located in the gap, so that the end of the positioning post 41 exits the second channel 23. In other examples, two openings are provided on the top of the alignment structure 2, and the openings are connected to the second channel 23; when the pair of clamping heads 42 clamp the mask 3, the openings expose the end of the positioning post 41, so that the end of the positioning post 41 exits the second channel 23. In this way, the clamp 4 can be used to remove the mask 3 upward; that is, the clamp 4 clamps the mask 3 along the third direction, thereby removing the mask 3 from the table 14.
[0040] In this embodiment, a worker places the mask 3 on the placement area of the table 14. The clamping body 43 allows the pair of clamping heads 42 to pass through the first channels 22 of the pair of alignment structures 2, and the two ends of the positioning posts 41 enter the second channels 23 from the outer side of the alignment structures 2. The ends of the positioning posts 41 move within the second channels 23, allowing the clamping heads 42 to move stably within the first channels 22. The second channels 23 of the alignment structures 2 and the positioning posts 41 cooperate to achieve alignment, allowing the pair of clamping heads 42 to correctly clamp the mask 3. This eliminates the need for workers to determine whether the clamped mask 3 is in the correct clamping state, saving time and improving work efficiency. When the pair of clamping heads 42 clamp the mask 3, the ends of the positioning posts 41 exit the second channels 23, and the clamp 4 can be used to remove the mask 3 placed on the table 14.
[0041] Correctly clamping the mask 3 can be understood as holding the mask 3 perpendicular to the extension direction of the clamping head 42. For example, when the mask 3 needs to be clamped horizontally, the correct way to clamp the mask 3 is to clamp the mask 3 horizontally. For another example, when the mask 3 needs to be clamped vertically, the correct way to clamp the mask 3 is to clamp the mask 3 vertically.
[0042] In some embodiments, the alignment structure 2 includes two positioning blocks 21 disposed on the table 14 of the table 13. The two positioning blocks 21 are spaced apart along the axis of the positioning post 41 to form a first channel 22. A second channel 23 is defined on the outer surface of each positioning block 21.
[0043] Of course, the alignment structure 2 is a positioning portion, and the positioning portion is provided with a first channel 22 and a second channel 23 .
[0044] In some embodiments, rollers 24 are provided on both the inner top and bottom walls of the second channel 23; the center lines of the rollers 24 are parallel to the axis of the positioning post 41. Thus, the rollers 24 reduce friction, facilitating the rolling of the end of the positioning post 41 within the second channel 23.
[0045] In some embodiments, the clamping heads 42 have clamping grooves 44 ; the clamping grooves 44 of a pair of clamping heads 42 are disposed opposite each other. The clamping grooves 44 of the pair of clamping heads 42 are disposed opposite each other along the first direction X. Thus, the clamping grooves 44 facilitate the clamping heads 42 to clamp the reticle 3 and prevent the reticle 3 from slipping off the pair of clamping heads 42 .
[0046] In some examples, the height of the clamping groove 44 is the same as the thickness of the mask 3 , so as to prevent the mask 3 from shaking in the clamping groove 44 .
[0047] In some embodiments, a limit block 12 is further provided on the table 14 ; the limit block 12 is provided on the table 14 to limit the movement of the mask 3 along a first plane; the first plane is parallel to the table 14 .
[0048] The limiting blocks 12 can limit the shaking of the mask 3 along the first plane. There are four limiting blocks 12, which limit the movement of the mask 3 in the front, back, left and right directions, so that the mask 3 can be taken in and out in the up and down directions.
[0049] In some examples, a support block 11 is further provided on the table 14 , and the support block 11 is disposed in a placement area of the table 14 ; the support block 11 can prevent the mask 3 from contacting the table 14 .
[0050] In some embodiments, the clamping body 43 includes a switch 432, a connecting rod 433, a target identifier and a pair of connecting members 431; the pair of connecting members 431 are movably arranged on the connecting rod 433 and are connected to the pair of clamping heads 42; the switch 432 is arranged on the connecting rod 433 and is used to control the opening or closing of the pair of connecting members 431; the target identifier is arranged on the connecting rod 433, and is used to detect whether the pair of clamping heads 42 correctly clamp the mask 3, and the identifier is displayed when the pair of clamping heads 42 correctly clamp the mask 3.
[0051] A pair of connecting members 431 are hinged on the connecting rod 433, and the connecting members 431 are fixedly connected or detachably connected to the clamping head 42; when the pair of connecting members 431 are opened, the pair of connecting members 431 move away from each other; when the pair of connecting members 431 are closed, the pair of connecting members 431 move toward each other.
[0052] The switch 432 may be an automatic switch 432 , which may be, for example, an automatic door lock structure or a vehicle door lock structure; or a manual switch 432 , which may be a clip structure, etc. The switch 432 is connected to the pair of connectors 431 , so that the switch 432 controls the pair of connectors 431 to open or close.
[0053] A target mark is provided on the connecting rod 433 to detect whether the pair of clamping heads 42 are correctly clamping the mask 3. When the pair of clamping heads 42 are correctly clamping the mask 3, a mark is displayed. In this way, the target mark can be used to determine whether the clamp 4 is correctly clamping the mask 3, allowing the operator to clamp the mask 3 more accurately.
[0054] The following uses horizontal clamping of the reticle 3 as an example to illustrate the correct clamping of the reticle 3. The target marker can be a level. When the clamp 4 clamps the reticle 3 horizontally, if the level's display is horizontal, the reticle 3 is horizontal. The target markers can also be two sensors. When the clamp 4 clamps the reticle 3 horizontally, if the distance between the two sensors is equal, the reticle 3 is horizontal. The reticle 3 is horizontal when it is parallel to the plane of the pair of connecting rods 433, that is, parallel to the first plane, or parallel to the table 14.
[0055] In some examples, the clamping body 43 further includes an anti-accidental touch member 434 ; the anti-accidental touch member 434 is disposed on the connecting rod 433 and cooperates with the switch 432 ; when the anti-accidental touch member 434 is turned on, it locks the state of the switch 432 .
[0056] The locked state of the switch 432 means that the state of the switch 432 will not change after the switch 432 is subsequently operated, i.e., it will remain in its current state. After the clamp 4 clamps the mask 3, the anti-accidental touch member 434 can prevent the clamp 4 from accidentally touching the switch 432, which could cause the clamp 4 to loosen or misalign the mask 3.
[0057] The anti-false touch member 434 may be a latch that can hold the switch 432 against operation, thereby preventing the switch 432 from being operated. Of course, the anti-false touch member 434 may also be other prior arts.
[0058] In some examples, the clamping body 43 further includes an anti-loosening member 435 ; the anti-loosening member 435 is disposed on the connecting rod 433 and cooperates with the connecting member 431 ; the anti-loosening member 435 is used to prevent the two connecting members 431 from moving relative to the connecting rod 433 . The interaction between the anti-loosening member 435 and the anti-accidental touch member 434 allows the clamp 4 to stably clamp the mask 3 , reducing the possibility of the clamp 4 accidentally releasing the mask 3 . The anti-loosening member 435 can be a latch that plugs into the pair of connecting members 431 to temporarily connect the pair of connecting members 431, thereby preventing the pair of connecting members 431 from rotating relative to the connecting rod 433 . Of course, the anti-loosening member 435 can also be a spring, the elastic force of which prevents the pair of connecting members 431 from moving closer to each other or farther away from each other. The anti-loosening member 435 can also be a cylinder, a telescopic mechanism, etc.
[0059] The above description is only an implementation method of the present application and does not limit the scope of patent protection of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the scope of patent protection of the present application.
Claims
1. A mask clamping device, characterized in that: include: The table body has a table top having a placement area, and the placement area is used to place the mask; The clamp comprises a clamping body, a pair of positioning columns and a pair of clamping heads; A pair of the clamping heads are provided on the clamping body; the clamping body is used to control the pair of clamping heads to clamp the mask; the positioning posts are provided on the clamping heads, and both ends of the positioning posts extend beyond the clamping heads; A pair of alignment structures are provided on the table surface of the table body and are respectively located outside the two sides of the placement area; the alignment structures have a first channel for the clamping head to pass through; Two side surfaces of the first channel are provided with second channels for the two ends of the positioning column to pass through respectively, and the second channels extend to the outer side surface of the alignment structure; Wherein, when a pair of clamping heads clamp the mask, the end of the positioning column exits the second channel; The clamping head has a clamping groove; the clamping grooves of a pair of the clamping heads are arranged opposite to each other; The clamping body includes a switch, a connecting rod, a target identifier, and a pair of connecting members; the pair of connecting members are movably arranged on the connecting rod and connected to a pair of clamping heads; the switch is arranged on the connecting rod and is used to control the opening or closing of the pair of connecting members; the target identifier is arranged on the connecting rod and is used to detect whether the pair of clamping heads are correctly clamping the mask, and displays an identifier when the pair of clamping heads are correctly clamping the mask; The alignment structure includes two positioning blocks, which are arranged on the table surface of the table body; along the axial direction of the positioning column, there is a gap between the two positioning blocks to form the first channel.
2. The mask clamping device according to claim 1, wherein: Rollers are provided on both the inner top wall and the inner bottom wall of the second channel; the center lines of the rollers are parallel to the axis of the positioning column.
3. The mask clamping device according to claim 1, wherein: The clamping body is arranged on the top end of the clamping head.
4. The mask clamping device according to claim 1, wherein: A limiting block is also provided on the table; the limiting block is provided on the table to limit the mask from moving along a first plane; the first plane is parallel to the table.
5. The mask clamping device according to claim 1, wherein: The clamping head has a through hole, and the positioning column is inserted into the through hole and has an interference fit with the through hole.
6. The mask clamping device according to claim 1, wherein: There is a gap between the alignment structure and the placement area; when a pair of the clamping heads clamp the mask, the clamping heads and the positioning posts are both located in the gap, so that the ends of the positioning posts exit the second channel.
7. The mask clamping device according to claim 1, wherein: The clamping body further includes an anti-accidental touch member; the anti-accidental touch member is arranged on the connecting rod and cooperates with the switch; when the anti-accidental touch member is turned on, it locks the state of the switch.