Tail gas diffusion pipe and diffusion furnace

Abstract

The utility model relates to a tail gas diffusion tube and a diffusion furnace, the tail gas diffusion tube is used in the diffusion furnace, the tail gas diffusion tube comprises a diffusion tube body, the diffusion tube body is used for being fixed in a furnace cavity of the diffusion furnace, the diffusion tube body is constructed to be of an annular structure, and the diffusion tube body is constructed to be of a hollow structure so as to form an exhaust cavity; a plurality of air inlet holes and at least one exhaust hole are formed in the circumferential direction of the diffusion pipe body at intervals, and the exhaust hole is used for being connected with an exhaust pipe; the air inlet hole and the exhaust hole both penetrate through the pipe wall of the diffusion pipe body so as to be communicated with the exhaust cavity. Through the arrangement, tail gas can be exhausted from different heights in the furnace chamber, so that the uniformity of a gas field in the furnace chamber can be improved, and the uniformity of sheet resistance of a battery piece is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces for photovoltaic cells, in particular to an exhaust gas diffusion tube and a diffusion furnace. Background Art

[0002] During the current diffusion process of photovoltaic cells, nitrogen reacts with silicon wafers within the furnace tubes under high temperature and low pressure, forming a PN junction. In current diffusion equipment, the inlet pipe is located in the middle of the furnace tail, and the exhaust pipe is inserted from the side of the furnace tail near the bottom of the furnace tube and extends all the way to the furnace mouth. During the diffusion process, nitrogen enters the furnace tube through the inlet pipe and emanates toward the furnace mouth. After reacting with the silicon wafers, the remaining gas is extracted through the exhaust port. During the exhaust process, the gas within the furnace tube is first concentrated to the bottom side of the furnace tube and then extracted through the exhaust port. This gas flow pattern can easily lead to an uneven gas field at the furnace mouth, resulting in poor square resistance uniformity after the high-temperature diffusion of the cell. Utility Model Content

[0003] Based on this, it is necessary to provide an exhaust gas diffusion tube and a diffusion furnace to address the technical problem that the exhaust gas emission method in the diffusion furnace in the existing technology leads to poor uniformity of battery square resistance.

[0004] A tail gas diffusion pipe is used in a diffusion furnace, and the tail gas diffusion pipe comprises:

[0005] A diffusion tube body, used to be fixed in the furnace cavity of the diffusion furnace, wherein the diffusion tube body is configured as an annular structure and is configured as a hollow structure to form an exhaust cavity;

[0006] A plurality of air inlet holes and at least one air outlet hole are provided at intervals along the circumference of the diffuser body, and the air outlet hole is used to connect to the air extraction pipe;

[0007] Wherein, the air inlet and the air outlet both pass through the tube wall of the diffuser body to communicate with the exhaust cavity.

[0008] This technical solution provides an exhaust gas diffuser for use in a diffusion furnace, wherein the diffuser body is fixed within the furnace cavity of the diffusion furnace and is constructed into an annular structure so that the diffuser body is disposed around the circumference of the furnace cavity. The diffuser body is configured as a hollow structure to form an exhaust cavity within the diffuser body, and multiple air inlet holes are spaced apart around the circumference of the diffuser body so that exhaust gas can enter the exhaust cavity through different air inlet holes, and then pass through the exhaust holes and out of the furnace cavity through an exhaust pipe. This configuration allows exhaust gas to be extracted from different heights within the furnace cavity, thereby improving the uniformity of the gas field within the furnace cavity and, in turn, improving the uniformity of the square resistance of the battery cells.

[0009] In one embodiment, the air inlet is configured in a bell-mouth shape, with the diameter of the end of the air inlet facing away from the exhaust cavity being larger than the diameter of the end facing the exhaust cavity. By configuring the air inlet in a bell-mouth shape and configuring the diameter of the end of the air inlet facing the furnace cavity to be larger than the diameter of the end facing the exhaust cavity, the exhaust gas is guided through the hole wall of the air inlet, thereby facilitating the exhaust gas from the air inlet into the exhaust cavity, thereby improving the exhaust gas exhaust efficiency.

[0010] In one embodiment, there is one exhaust hole, located between two adjacent air inlet holes. Providing a single exhaust hole facilitates adaptability to existing furnace structures, allowing the exhaust hole to communicate with the exhaust pipe to extract exhaust gases. Placing the exhaust hole between two adjacent air inlet holes simplifies the structure and improves exhaust efficiency.

[0011] In one embodiment, the plurality of air inlet holes are located in the same plane and are evenly spaced along the circumference of the diffuser body. Placing the plurality of air inlet holes in the same plane ensures that all of them face the furnace tail, allowing more exhaust gas to enter the exhaust chamber through the air inlet holes, thereby ensuring exhaust efficiency. Furthermore, evenly distributing the air inlet holes along the circumference of the diffuser body improves exhaust uniformity.

[0012] In one embodiment, after the exhaust diffuser is installed in the furnace cavity, the exhaust hole is located at the bottom of the furnace cavity. This arrangement, with the exhaust hole located at the bottom of the furnace cavity, also allows the exhaust pipe to be located at the bottom of the furnace cavity. This arrangement, on the one hand, facilitates adaptation to the structure of the furnace body itself, and on the other hand, eliminates the need for additional support components by placing the exhaust pipe at the bottom of the furnace cavity, thereby simplifying the structure and reducing costs.

[0013] In one embodiment, the diffuser body is made of quartz material to ensure high temperature resistance of the diffuser body.

[0014] A diffusion furnace comprises the tail gas diffusion pipe as described above.

[0015] In one embodiment, the diffusion furnace includes a furnace body, the furnace body defining the furnace cavity, an insulation layer disposed on the inner wall of the furnace body, and the diffusion tube body having an interference fit with the insulation layer. Providing the insulation layer on the inner wall of the furnace body ensures the thermal insulation performance of the furnace cavity, thereby reducing production costs while ensuring efficient diffusion of the solar cells. The interference fit of the diffusion tube body and the insulation layer not only secures the diffusion tube body to the furnace body, but also reduces the number of components, thereby lowering production costs.

[0016] In one embodiment, the furnace body includes a furnace opening and a furnace tail along its axial direction. An exhaust port is provided at the end of the furnace tail, and the exhaust pipe is inserted from the exhaust port into the furnace cavity and communicates with the exhaust hole. Providing the exhaust port at the furnace tail facilitates the exhaust pipe to be inserted from the exhaust port, extend toward the furnace opening, and communicate with the exhaust hole.

[0017] In one embodiment, an air inlet is provided at the center of the end surface of the furnace tail, and the air inlet is connected to the gas source via a pipeline. By providing the air inlet at the center of the end surface of the furnace tail, it is connected to the gas source, allowing the gas required for diffusion to enter the furnace chamber through the air inlet, thereby participating in the diffusion reaction.

[0018] Beneficial effects of the utility model:

[0019] The utility model provides an exhaust gas diffuser for use in a diffusion furnace, wherein the diffuser body is fixed in the furnace cavity of the diffusion furnace and is constructed into an annular structure so that the diffuser body is provided around the circumference of the furnace cavity. The diffuser body is configured as a hollow structure so that an exhaust cavity is formed inside the diffuser body, and a plurality of air inlet holes are provided at intervals around the circumference of the diffuser body so that the exhaust gas can enter the exhaust cavity from different air inlet holes, and then pass through the exhaust holes and out of the furnace cavity from the exhaust pipe. This configuration allows the exhaust gas to be extracted from different heights within the furnace cavity, thereby improving the uniformity of the gas field within the furnace cavity and further improving the uniformity of the square resistance of the battery cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of an exhaust gas diffusion pipe provided in one embodiment of the present utility model installed in a diffusion furnace;

[0021] Figure 2 This is a schematic structural diagram of an exhaust gas diffuser provided in one embodiment of the present utility model.

[0022] Reference numerals:

[0023] Furnace body 100; air inlet 110; air exhaust port 120; quartz boat 200; tail gas diffuser 300; diffuser body 310; air inlet hole 320; exhaust hole 330; exhaust pipe 400. DETAILED DESCRIPTION

[0024] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0027] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0028] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0030] See Figures 1 to 2 An embodiment of the present invention provides an exhaust gas diffuser 300 for use in a diffusion furnace. The exhaust gas diffuser 300 includes a diffuser body 310. The diffuser body 310 is used to be fixed in the furnace cavity of the diffusion furnace. The diffuser body 310 is constructed as an annular structure, and the diffuser body 310 is constructed as a hollow structure to form an exhaust cavity. A plurality of air inlet holes 320 and at least one exhaust hole 330 are arranged at intervals along the circumference of the diffuser body 310. The exhaust hole 330 is used to be connected to the exhaust pipe 400. The air inlet holes 320 and the exhaust holes 330 both pass through the tube wall of the diffuser body 310 to communicate with the exhaust cavity.

[0031] This technical solution provides an exhaust gas diffuser 300 for use in a diffusion furnace, wherein a diffuser body 310 is fixed within the furnace cavity of the diffusion furnace and is constructed as an annular structure so that diffuser bodies 310 are arranged around the circumference of the furnace cavity. The diffuser body 310 is configured as a hollow structure to form an exhaust cavity within the diffuser body 310. A plurality of air inlet holes 320 are spaced apart around the circumference of the diffuser body 310 so that exhaust gas can enter the exhaust cavity through different air inlet holes 320, and then pass through the exhaust holes 330 and out of the furnace cavity from the exhaust pipe 400. This configuration allows exhaust gas to be extracted from different heights within the furnace cavity, thereby improving the uniformity of the gas field within the furnace cavity and, in turn, improving the uniformity of the square resistance of the battery cells.

[0032] It is understood that the shape of the diffuser body 310 is adapted to the shape of the furnace cavity of the furnace body 100. For example, if the cross-section of the furnace cavity along a direction perpendicular to the axis is square, the diffuser body 310 is also configured in the shape of a square ring. In this embodiment, the furnace cavity of the furnace body 100 is configured in a cylindrical shape, and the diffuser body 310 is configured in a circular ring shape.

[0033] like Figure 1 and Figure 2 As shown, there is no limitation on the shape of the air inlet 320. The air inlet 320 can be set as a circular straight hole; or as a stepped hole. The cross-sectional shape can be circular, square, triangular, etc.

[0034] like Figure 1 and Figure 2 As shown, in one embodiment, the air inlet 320 is configured in a bell-mouth shape, with the diameter of the end of the air inlet 320 facing away from the exhaust cavity being larger than the diameter of the end facing the exhaust cavity. By configuring the air inlet 320 in a bell-mouth shape and configuring the diameter of the end of the air inlet 110 facing the furnace cavity to be larger than the diameter of the end facing the exhaust cavity, the exhaust gas is guided through the hole wall of the air inlet 320, thereby facilitating the exhaust gas to enter the exhaust cavity from the air inlet 320, thereby improving the exhaust gas exhaust efficiency.

[0035] like Figure 1 and Figure 2 As shown, in one embodiment, there is only one exhaust hole 330, which is located between two adjacent air inlet holes 320. Providing a single exhaust hole 330 facilitates adapting to the existing furnace body 100 structure, thereby connecting the exhaust hole 330 to the exhaust pipe 400 to further extract the exhaust gas. Placing the exhaust hole 330 between two adjacent air inlet holes 320 simplifies the structure and improves the exhaust efficiency.

[0036] Of course, in other embodiments, two or three exhaust holes 330 may be provided. There is no limitation on the relative position of the exhaust holes 330 and the air inlet holes 320. When there are two or three exhaust holes 330, one exhaust hole 330 may be provided between two adjacent air inlet holes 320. Alternatively, multiple exhaust holes 330 may be provided between two adjacent air inlet holes 320.

[0037] like Figure 1 and Figure 2As shown, multiple air inlet holes 320 are located in the same plane and are evenly distributed along the circumference of the diffuser body 310. Placing the multiple air inlet holes 320 in the same plane ensures that all air inlet holes 320 face the furnace tail, allowing more exhaust gas to enter the exhaust chamber through the air inlet holes 320, thereby ensuring exhaust efficiency. Furthermore, by evenly distributing the air inlet holes 320 along the circumference of the diffuser body 310, exhaust uniformity is improved.

[0038] like Figure 1 and Figure 2 As shown, in one embodiment, after the exhaust diffuser 300 is installed in the furnace cavity, the exhaust hole 330 is located at the bottom of the furnace cavity. After the exhaust diffuser 300 is installed in the furnace cavity, the exhaust hole 330 is located at the bottom of the furnace cavity, so that the exhaust pipe 400 is also located at the bottom of the furnace cavity. This arrangement, on the one hand, is convenient for adapting to the structure of the furnace body 100 itself, and on the other hand, the exhaust pipe 400 is located at the bottom of the furnace cavity without the need for other supporting parts, thus simplifying the structure and reducing costs.

[0039] In other embodiments, there is no limitation on the position of the exhaust hole 330 in the exhaust gas diffusion pipe 300 in the furnace cavity, and the exhaust hole 330 may be located at the furnace top or in the middle of the furnace body 100 .

[0040] like Figure 1 and Figure 2 As shown, in one embodiment, the diffuser body 310 is configured to be made of quartz material to ensure the high temperature resistance of the diffuser body 310.

[0041] like Figure 1 As shown, one embodiment of the present invention further provides a diffusion furnace, comprising the exhaust gas diffusion tube 300 described above. In one embodiment, the diffusion furnace comprises a furnace body 100, which defines a furnace cavity. The inner wall of the furnace body 100 is provided with an insulation layer, and the diffusion tube body 310 is interference-fitted with the insulation layer. Providing the insulation layer on the inner wall of the furnace body 100 ensures the thermal insulation performance of the furnace cavity, thereby ensuring the diffusion effect of the battery cells while reducing production costs. By providing the diffusion tube body 310 with an interference fit in the insulation layer, the number of components can be reduced while ensuring the secure connection between the diffusion tube body 310 and the furnace body 100, thereby lowering production costs.

[0042] It is understood that a quartz boat 200 for carrying the battery cells is provided in the furnace chamber, and the quartz boat 200 is supported in the furnace chamber by a support base. The insulation layer can be made of one of the materials such as rock wool, glass wool, and foam glass.

[0043] like Figure 1As shown, in one embodiment, the furnace body 100 includes a furnace mouth and a furnace tail along its axial direction, and an exhaust port 120 is provided at the end of the furnace tail. The exhaust pipe 400 is inserted into the furnace cavity from the exhaust port 120 and communicates with the exhaust hole 330. By providing the exhaust port 120 at the furnace tail, it is convenient for the exhaust pipe 400 to be inserted from the exhaust port 120, extend toward the furnace mouth, and communicate with the exhaust hole 330. An air inlet 110 is provided at the center of the end face of the furnace tail, and the air inlet 110 is connected to the gas source through a pipeline. By providing the air inlet 110 at the center of the end face of the furnace tail, it is convenient to communicate with the gas source, so that the gas required for diffusion can enter the furnace cavity from the air inlet 110, thereby participating in the diffusion reaction.

[0044] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. A tail gas diffusion pipe for use in a diffusion furnace, characterized in that: The tail gas diffusion pipe comprises: A diffusion tube body, used to be fixed in the furnace cavity of the diffusion furnace, wherein the diffusion tube body is configured as an annular structure and is configured as a hollow structure to form an exhaust cavity; A plurality of air inlet holes and at least one air outlet hole are provided at intervals along the circumference of the diffuser body, and the air outlet hole is used to connect to the air extraction pipe; Wherein, the air inlet and the air outlet both pass through the tube wall of the diffuser body to communicate with the exhaust cavity.

2. The exhaust diffuser according to claim 1, characterized in that: The air inlet is configured in a bell-mouth shape, and a diameter of an end of the air inlet facing away from the exhaust cavity is larger than a diameter of an end of the air inlet facing the exhaust cavity.

3. The exhaust diffuser according to claim 1, characterized in that: The number of the exhaust hole is one, and one exhaust hole is arranged between two adjacent air inlet holes.

4. The exhaust diffuser according to claim 1, characterized in that: The plurality of air inlet holes are located in the same plane and are evenly arranged along the circumference of the diffuser body.

5. The exhaust gas diffuser according to claim 1, characterized in that: After the tail gas diffusion pipe is installed in the furnace cavity, the exhaust hole is located at the bottom of the furnace cavity.

6. The exhaust diffuser according to claim 1, characterized in that: The diffusion tube body is configured to be made of quartz material.

7. A diffusion furnace, characterized in that: The diffusion furnace comprises the tail gas diffusion pipe according to any one of claims 1 to 6.

8. The diffusion furnace according to claim 7, characterized in that The diffusion furnace comprises a furnace body, the furnace cavity is configured on the furnace body, a heat-insulating layer is provided on the inner wall of the furnace body, and the diffusion tube body is interference-fitted with the heat-insulating layer.

9. The diffusion furnace according to claim 8, characterized in that The furnace body includes a furnace mouth and a furnace tail along its axial direction. An exhaust port is provided at the end of the furnace tail. The exhaust pipe is inserted into the furnace cavity from the exhaust port and communicated with the exhaust hole.

10. The diffusion furnace according to claim 9, characterized in that An air inlet is provided at the center of the end surface of the furnace tail, and the air inlet is connected to the air source through a pipeline.

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