Drive device

Abstract

The utility model provides a driving device, and relates to the field of machinery. The driving device comprises a rotating shaft, a first to-be-lubricated part and a second to-be-lubricated part. The first to-be-lubricated part and the second to-be-lubricated part are arranged in the axial direction of the rotating shaft. The rotating shaft comprises a supply hole, a first through hole, a second through hole and an internal passage; wherein the internal passage is configured to provide a flowing channel for a medium; the supply hole is located at the first end of the rotating shaft and connects the internal passage and the outside of the rotating shaft; the first through hole is arranged close to the first end part of the rotating shaft and is communicated with the internal passage and the first to-be-lubricated part; the second through hole is arranged close to the second end part of the rotating shaft and is communicated with the internal passage and the second to-be-lubricated part; and a medium in the internal passage enters the first to-be-lubricated piece and the second to-be-lubricated piece through the first through hole and the second through hole based on rotation of the rotating shaft. Medium conveying is achieved through an inner passage of the rotating shaft, continuous lubrication is provided for a to-be-lubricated part through the inner passage of the rotating shaft, and additionally-arranged lubrication pipelines are reduced.

Description

Technical Field

[0001] The present application relates to the field of mechanical technology, and in particular to a driving device. Background Art

[0002] Traditional lubrication systems may rely on gravity or external pumping systems to distribute lubricant, which can lead to uneven lubrication, especially on vertical or inclined mechanical components. In some systems, there may be delays in the transfer of lubricant from the storage point to the components being lubricated, especially during system startup or when operating in extreme temperatures. Many traditional systems require regular inspection and maintenance, such as replacement of oil pumps and oil lines, which increases maintenance costs.

[0003] Molecular pumps operate in a high vacuum environment, where molecular flow creates directional motion of gas molecules. The motor drives the shaft system at high speed, so the upper and lower bearings require sufficient, smooth-flowing lubricant. This reduces friction, lowers power consumption, and prolongs bearing life; it also dissipates most frictional heat, cooling the bearings. However, existing technologies have limited the smooth flow of lubricant within the shaft system of molecular pumps. Utility Model Content

[0004] In view of this, the purpose of the embodiments of the present application is to provide a driving device to improve the problems existing in the prior art, such as high bearing friction coefficient, low lubrication efficiency, frequent maintenance requirements, and decreased vacuum due to medium leakage.

[0005] The driving device includes: a rotating shaft, a first part to be lubricated and a second part to be lubricated; the first part to be lubricated and the second part to be lubricated are respectively arranged along the axial direction of the rotating shaft; the rotating shaft includes: a supply hole, a first through hole, a second through hole and an internal passage; wherein, the internal passage is configured to provide a channel for the flow of a medium; the supply hole is located at the second end of the rotating shaft and connects the internal passage with the outside of the rotating shaft; the first through hole is arranged near the first end of the rotating shaft and connects the internal passage and the first part to be lubricated; the second through hole is arranged near the second end of the rotating shaft and connects the internal passage and the second part to be lubricated; wherein, based on the rotation of the rotating shaft, the medium in the internal passage enters the first part to be lubricated and the second part to be lubricated through the first through hole and the second through hole.

[0006] In the above-mentioned implementation process, the rotating shaft serves as the core of the driving device, and is provided with a supply hole, a first through hole, a second through hole, and an internal passage. These structures together constitute a channel for the flow of the medium. The first and second parts to be lubricated are respectively arranged along the axial direction of the rotating shaft, so that the bearings at both ends of the rotating shaft can be lubricated. The supply hole is located at the second end of the rotating shaft and is responsible for introducing the medium from the outside of the rotating shaft into the internal passage, providing a continuous supply of medium for the lubrication process. The first through hole and the second through hole are respectively close to the first and second ends of the rotating shaft, and they distribute the medium in the internal passage to the corresponding parts to be lubricated. The rotation of the rotating shaft provides power for the flow of the medium, and the medium is transported to the first and second parts to be lubricated through the first and second through holes, reducing the friction of the bearings.

[0007] Optionally, the first end is the upper end of the rotating shaft in the vertical direction, and the second end is the lower end of the rotating shaft in the vertical direction; the highest height of the first part to be lubricated in the horizontal direction is lower than the horizontal height of the first through hole; the highest height of the second part to be lubricated in the horizontal direction is lower than the horizontal height of the second through hole.

[0008] In the above implementation process, the first end serves as the upper end of the rotating shaft in the vertical direction, and the second end serves as the lower end of the rotating shaft in the vertical direction. This definition helps to clarify the direction of medium flow. The supply hole is located at the second end, which means that the medium will enter from the lower end of the rotating shaft and flow upward to the first and second parts to be lubricated. The highest height of the first part to be lubricated is lower than the horizontal height of the first through hole, and the highest height of the second part to be lubricated is lower than the horizontal height of the second through hole. This design allows the medium to flow smoothly from the through hole to the part to be lubricated, because the part to be lubricated is at a lower position relative to the through hole, which is conducive to the flow of the medium. Since the supply hole is located at the second end of the rotating shaft, the medium will be introduced from the lower end and flow upward through the internal passage under the drive of the rotating shaft, utilizing the centrifugal force generated by the rotation of the rotating shaft to help distribute the medium to the first and second parts to be lubricated. This improves the operating efficiency and reliability of the molecular pump and extends the service life of the molecular pump.

[0009] Optionally, the driving device further includes: a supply pool; the supply pool is arranged close to the supply hole and contains the medium.

[0010] In this implementation, the supply reservoir ensures a continuous flow of medium to the shaft's supply holes, reducing the risk of lubrication interruptions due to supply interruptions and improving system reliability. The supply reservoir, acting as a medium storage unit, simplifies the process of adding and replacing medium. Maintenance personnel can add medium directly to the reservoir without the need for complex piping or additional pumping equipment. The direct connection between the supply reservoir and the supply holes reduces the risk of medium leakage during transfer, helping to maintain the system's tightness, especially when operating in high vacuum environments.

[0011] Optionally, when the driving device is in a working state, the supply hole is immersed in the medium of the supply pool; the rotating shaft is configured to introduce the medium into the internal passage through the supply hole by rotation; and during the rotation process, the medium is thrown out of the rotating shaft from the first through hole and / or the second through hole.

[0012] In the above-described implementation process, in the operating state, the supply hole is immersed in the medium of the supply pool, allowing the shaft to directly draw medium from the supply pool as it rotates. The rotation of the shaft not only drives the flow of the medium but also uses centrifugal force to swing the medium from the interior of the shaft toward the lubricated part. This utilization of rotational power improves the efficiency of medium distribution and reduces the consumption of additional energy. The medium flows through the internal passageway and is ejected through the first through hole and / or the second through hole during the rotation of the shaft, directly lubricating the first and second parts to be lubricated. Since the supply hole is immersed in the medium, bubbles generated by air entering the system can be reduced, thereby reducing cavitation and improving the continuity and stability of the medium flow.

[0013] Optionally, the rotating shaft further includes: a surrounding bevel; the surrounding bevel surrounds the outside of the rotating shaft; the surrounding bevel is arranged between the first through hole and the second through hole; the surrounding bevel is configured to guide the medium flowing therethrough toward the direction close to the second part to be lubricated.

[0014] In this implementation, the surrounding bevel surrounds the outer surface of the rotating shaft, located between the first and second through-holes. This configuration helps guide the medium from the supply hole to the lubricated part. The design of the surrounding bevel ensures that the medium is flung toward the second lubricated part as the rotating shaft rotates, ensuring that the second lubricated part is fully lubricated. By directing the medium flow in a specific direction, the surrounding bevel reduces disordered spraying and waste of the medium, improving medium utilization. It also helps reduce the time the medium spends on the rotating shaft, accelerating the flow of the medium to the lubricated part, thereby improving lubrication efficiency.

[0015] Optionally, the driving device further includes: a guide groove; the guide groove includes a recessed portion parallel to the rotating shaft; the guide groove is used to receive the medium dropped thereon and guide the medium toward the second part to be lubricated.

[0016] In this implementation, the guide groove includes a recessed portion parallel to the rotating shaft, which receives the medium that falls from the surrounding inclined surface and guides it toward the second lubricated part. The guide groove helps the medium flow directly to the area requiring lubrication. The structured path of the guide groove reduces splashing as the medium flows toward the lubricated part, lowering the risk of contamination to the working environment and minimizing medium loss.

[0017] Optionally, the end of the guide groove close to the second part to be lubricated is provided with an arc, and the arc faces the second part to be lubricated.

[0018] In this implementation, the curvature of the guide groove ends helps smooth the flow of the medium, ensuring a smoother flow from the guide groove to the second lubricated part. This curvature reduces any rebound of the medium upon reaching the second lubricated part. This curvature guides the medium more evenly across the surface of the second lubricated part, reducing wear caused by uneven distribution of the medium. This curvature also helps reduce noise and vibration during the flow of the medium, particularly on high-speed rotating shafts.

[0019] Optionally, when the driving device is in working state, the internal passage is configured to guide the medium through the first through hole; the first through hole is configured to throw out the medium; wherein the medium flows back to the supply pool via the surrounding inclined surface to the guide groove.

[0020] In this implementation, the internal passageway is configured to guide the medium through the first through-hole. The first through-hole is designed to eject the medium, which is then spun from the shaft toward the first lubricated part using the centrifugal force generated by the shaft's rotation, achieving lubrication. The medium is then guided via the surrounding bevel to the guide groove and then back to the supply reservoir. This continuous circulation process ensures a consistent supply and reuse of the medium, minimizing waste. The design of the surrounding bevel and guide groove helps minimize splashing during the ejection process, reducing the risk of contamination to the work environment and minimizing medium loss.

[0021] Optionally, when the driving device is in an operating state, the internal passage is configured to guide the medium through the second through hole; the second through hole is configured to throw out the medium, wherein the medium flows back to the supply tank.

[0022] In this implementation, the second through-hole design utilizes the centrifugal force generated by the rotating shaft to eject the medium. This design reduces the need for additional pumping, lowers energy consumption, and improves the speed and efficiency of medium distribution. The ejected medium ultimately flows back into the supply reservoir, forming a closed-loop system. This recycling reduces medium waste and lowers long-term operating costs.

[0023] Optionally, the supply hole is a tapered hole with the tapered portion facing the second end; and the first through hole and the second through hole are straight holes.

[0024] In the above-described implementation process, the tapered design of the supply hole, particularly the tapered portion toward the second end, can increase the flow rate and flow rate during medium intake, as the tapered structure helps reduce flow resistance, thereby improving the efficiency of medium intake from the supply reservoir into the supply hole. Simultaneously, it reduces the formation of bubbles during medium intake, as the tapered structure helps the medium enter the interior of the rotating shaft more smoothly, reducing the chance of air intrusion. The first and second through holes are straight hole designs, which help the medium maintain a high speed and directness when being ejected, allowing the medium to effectively reach the lubricated parts. The straight hole design helps the medium be more evenly distributed to the lubricated parts, as the straight holes provide a more direct and uniform medium flow path. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic diagram of a driving device provided in an embodiment of the present application;

[0027] Figure 2 This is an overall schematic diagram of a driving device provided in an embodiment of the present application.

[0028] Icons: 1-first part to be lubricated; 2-second part to be lubricated; 3-rotating shaft; 4-supply hole; 5-internal passage; 6-first through hole; 7-second through hole; 8-surrounding inclined surface; 9-guide groove; 10-supply tank. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of them. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the embodiments of the present application.

[0030] See Figure 1 , Figure 1 A schematic diagram of a driving device provided in an embodiment of the present application.

[0031] The driving device includes: a rotating shaft 3, a first part to be lubricated 1 and a second part to be lubricated 2; the first part to be lubricated 1 and the second part to be lubricated 2 are respectively arranged along the axial direction of the rotating shaft 3; the rotating shaft 3 includes: a supply hole 4, a first through hole 6, a second through hole 7 and an internal passage 5; wherein the internal passage 5 is configured to provide a channel for the flow of the medium; the supply hole 4 is located at the second end of the rotating shaft 3 and connects the internal passage 5 with the outside of the rotating shaft 3; the first through hole 6 is arranged near the first end of the rotating shaft 3 and connects the internal passage 5 and the first part to be lubricated 1; the second through hole 7 is arranged near the second end of the rotating shaft 3 and connects the internal passage 5 and the second part to be lubricated 2; wherein, based on the rotation of the rotating shaft 3, the medium in the internal passage 5 enters the first part to be lubricated 1 and the second part to be lubricated 2 through the first through hole 6 and the second through hole 7.

[0032] In the above implementation process, the rotating shaft 3 serves as the core of the driving device, and is provided with a supply hole 4, a first through hole 6, a second through hole 7, and an internal passage 5. These structures together constitute a channel for the flow of the medium. The first part to be lubricated 1 and the second part to be lubricated 2 are respectively arranged along the axial direction of the rotating shaft 3, so that the bearings at both ends of the rotating shaft 3 can be lubricated. The supply hole 4 is located at the second end of the rotating shaft 3 and is responsible for introducing the medium from the outside of the rotating shaft 3 into the internal passage 5, providing a continuous supply of medium for the lubrication process. The first through hole 6 and the second through hole 7 are respectively close to the first end and the second end of the rotating shaft 3, and they distribute the medium in the internal passage 5 to the corresponding parts to be lubricated. The rotation of the rotating shaft 3 provides power for the flow of the medium, and the medium is transported to the first part to be lubricated 1 and the second part to be lubricated 2 through the first through hole 6 and the second through hole 7, reducing the friction of the bearings.

[0033] In one embodiment of the present application, the rotating shaft 3 may be a main shaft or a transmission shaft, while the first and second lubricated parts 1 and 2 may be bearing seats or gear sets. Bearings include deep groove ball bearings, tapered roller bearings, and self-aligning ball bearings; gears include spur gears, helical gears, and helical gears. The lubricant may be mineral oil, synthetic oil, ester oil, silicone oil, bio-based lubricant, or other lubricating medium suitable for lubricating the first and second lubricated parts 1 and 2.

[0034] In one embodiment of the present application, the molecular pump's shaft 3 and bearings must be able to withstand the mechanical stresses of high rotational speeds and are constructed from high-strength, wear-resistant materials such as ceramic or silicon carbide. The medium can be polyalphaolefin (PAO) or perfluoropolyether (PFPE), which exhibit excellent chemical stability, low vapor pressure, and are suitable for high vacuum environments.

[0035] Optionally, the first end is the upper end of the rotating shaft 3 in the vertical direction, and the second end is the lower end of the rotating shaft 3 in the vertical direction; the highest height of the first part to be lubricated 1 in the horizontal direction is lower than the horizontal height of the first through hole 6; the highest height of the second part to be lubricated 2 in the horizontal direction is lower than the horizontal height of the second through hole 7.

[0036] In the above implementation process, the first end serves as the upper end of the rotating shaft 3 in the vertical direction, while the second end serves as the lower end of the rotating shaft 3 in the vertical direction. This definition helps to clarify the direction of medium flow. The supply hole 4 is located at the second end, which means that the medium will enter from the lower end of the rotating shaft 3 and flow upward to the first and second parts to be lubricated 2. The highest height of the first part to be lubricated 1 is lower than the horizontal height of the first through-hole 6, and the highest height of the second part to be lubricated 2 is lower than the horizontal height of the second through-hole 7. This design allows the medium to flow smoothly from the through-hole to the parts to be lubricated, because the parts to be lubricated are at a lower position relative to the through-hole, which is conducive to the flow of the medium. Since the supply hole 4 is located at the second end of the rotating shaft 3, the medium will be introduced from the lower end and flow upward through the internal passage 5 under the drive of the rotation of the rotating shaft 3, utilizing the centrifugal force generated by the rotation of the rotating shaft 3 to help distribute the medium to the first and second parts to be lubricated 2. This improves the operating efficiency and reliability of the molecular pump and extends the service life of the molecular pump.

[0037] See Figure 2 , Figure 2 This is an overall schematic diagram of a driving device provided in an embodiment of the present application.

[0038] Optionally, the driving device further includes: a supply tank 10; the supply tank 10 is arranged close to the supply hole 4 and contains a medium.

[0039] In the above implementation, the provision of supply reservoir 10 allows for a continuous supply of medium to the supply hole 4 of the rotating shaft 3, reducing the risk of lubrication insufficiency due to interruptions in the medium supply and improving system reliability. Supply reservoir 10, acting as a medium storage unit, simplifies the process of adding and replacing the medium. Maintenance personnel can add medium directly to supply reservoir 10 without the need for complex piping or additional pumping equipment. The direct connection between supply reservoir 10 and supply hole 4 reduces the risk of medium leakage during transfer, helping to maintain the system's tightness, particularly when operating in a high vacuum environment.

[0040] In one embodiment of the present application, the drive device is used in a molecular pump. The molecular pump operates in a high vacuum environment, so the supply reservoir 10 must be designed to withstand the pressure difference between the external atmospheric pressure and the high vacuum inside the pump. The supply reservoir 10 needs to be made of high-strength materials, such as stainless steel or aluminum alloy, and must be sealed and welded to prevent leakage.

[0041] Optionally, the inner surface of the supply tank 10 may be subjected to special treatment, such as electropolishing, to reduce the roughness of the inner surface and reduce the generation of sludge and particles.

[0042] Optionally, when the driving device is in working state; the supply hole 4 is immersed in the medium of the supply pool 10; the rotating shaft 3 is configured to introduce the medium into the internal passage 5 through the supply hole 4 by rotation; and during the rotation process, the medium is thrown out of the rotating shaft 3 from the first through hole 6 and / or the second through hole 7.

[0043] During the above-described implementation, in the operating state, the supply hole 4 is immersed in the medium of the supply pool 10, allowing the rotating shaft 3 to directly draw medium from the supply pool 10 as it rotates. The rotation of the rotating shaft 3 not only drives the flow of the medium but also uses centrifugal force to swing the medium from the interior of the rotating shaft 3 toward the lubricated parts. This utilization of rotational power improves the efficiency of medium distribution and reduces the consumption of additional energy. The medium flows through the internal passage 5 and is ejected through the first through hole 6 and / or the second through hole 7 during the rotation of the rotating shaft 3, directly lubricating the first and second lubricated parts 1 and 2. Since the supply hole 4 is immersed in the medium, bubbles generated by air entering the system can be reduced, thereby reducing cavitation and improving the continuity and stability of the medium flow.

[0044] In one embodiment of the present application, the driving device is applied to a molecular pump, the rotation speed of which may be between 5,000 and 30,000 RPM, while the rotation speed of a turbomolecular pump is higher, reaching 100,000 RPM or above.

[0045] Optionally, the design of the supply tank 10 can be adjusted according to changes in working conditions. For example, when the medium is consumed quickly or a larger medium capacity is required, the size of the supply tank 10 can be increased to adapt to different working requirements.

[0046] Optionally, the rotating shaft 3 further includes: a surrounding bevel 8; the surrounding bevel 8 surrounds the outside of the rotating shaft 3; the surrounding bevel 8 is arranged between the first through hole 6 and the second through hole 7; the surrounding bevel 8 is configured to guide the medium flowing through it toward the direction close to the second part to be lubricated 2.

[0047] In the above implementation, the surrounding bevel 8 surrounds the outside of the rotating shaft 3, located between the first through-hole 6 and the second through-hole 7. This configuration helps guide the medium from the supply hole 4 to the lubricated part. The design of the surrounding bevel 8 causes the medium to be flung toward the second lubricated part 2 as the rotating shaft 3 rotates, ensuring that the second lubricated part 2 is fully lubricated. By directing the medium flow in a specific direction, the surrounding bevel 8 reduces disorderly spraying and waste of the medium, improving medium utilization. It also helps reduce the time the medium spends on the rotating shaft 3, accelerating the flow of the medium to the lubricated part, thereby improving lubrication efficiency.

[0048] Optionally, the design of the surrounding inclined surface 8 can be adjusted according to lubrication requirements. For example, the inclination angle and length of the inclined surface can be optimized according to the viscosity of the medium and the specific position of the lubricating component.

[0049] Optionally, the driving device further includes: a guide groove 9; the guide groove 9 includes a recessed portion parallel to the rotating shaft 3; the guide groove 9 is used to receive the medium falling thereon and guide the medium toward the second part to be lubricated 2.

[0050] In the above implementation, guide groove 9 includes a recessed portion parallel to rotating shaft 3, which is used to receive the medium falling from surrounding inclined surface 8 and guide the medium toward the second part to be lubricated 2. Guide groove 9 helps the medium flow directly to the area requiring lubrication. The structured path of guide groove 9 reduces splashing of the medium as it flows toward the part to be lubricated, lowering the risk of contamination to the working environment and minimizing medium loss.

[0051] Optionally, the end of the guide groove 9 close to the second part to be lubricated 2 is provided with an arc, and the arc faces the second part to be lubricated 2 .

[0052] In this implementation, the curvature of the guide groove 9 helps smooth the flow of the medium, allowing it to flow more smoothly from the guide groove 9 to the second lubricated part 2. This curvature reduces any rebound of the medium upon reaching the second lubricated part 2. This curvature guides the medium more evenly across the surface of the second lubricated part 2, reducing wear caused by uneven distribution of the medium. This curvature also helps reduce noise and vibration during the flow of the medium, particularly on the high-speed rotating shaft 3.

[0053] Optionally, when the drive device is in working state, the internal passage 5 is configured to guide the medium through the first through hole 6; the first through hole 6 is configured to throw out the medium; wherein the medium flows back to the supply tank 10 via the surrounding inclined surface 8 to the guide groove 9.

[0054] In the above implementation, internal passage 5 is configured to guide the medium through first through-hole 6. The design of first through-hole 6 allows the medium to be ejected. The centrifugal force generated by the rotation of shaft 3 is then used to fling the medium from the inside of shaft 3 toward first lubricated part 1, achieving lubrication. The medium is then guided via surrounding bevel 8 to guide groove 9, and then back to supply reservoir 10. This continuous circulation process ensures a continuous supply and reuse of the medium, reducing waste. The design of surrounding bevel 8 and guide groove 9 helps minimize splashing during the ejection process, lowering the risk of contamination to the working environment and minimizing medium loss.

[0055] Optionally, when the drive device is in an operating state, the internal passage 5 is configured to guide the medium through the second through hole 7 ; the second through hole 7 is configured to throw out the medium, wherein the medium flows back to the supply tank 10 .

[0056] In the above implementation, the design of second through-hole 7 utilizes the centrifugal force generated by the rotation of shaft 3 to eject the medium. This design reduces the need for additional pumping, lowers energy consumption, and improves the speed and efficiency of medium distribution. The ejected medium ultimately flows back into supply tank 10, forming a closed-loop system. This recycling reduces medium waste and lowers long-term operating costs.

[0057] Optionally, the supply hole 4 is a tapered hole with the tapered portion facing the second end; and the first through hole 6 and the second through hole 7 are straight holes.

[0058] In the above-mentioned implementation process, the tapered design of the supply hole 4, especially the tapered portion toward the second end, can increase the flow rate and flow rate when the medium is sucked in, because the tapered structure helps to reduce flow resistance, thereby improving the efficiency of sucking the medium from the supply tank 10 into the supply hole 4. At the same time, it reduces the formation of bubbles during the medium suction process, because the tapered structure helps the medium enter the interior of the rotating shaft 3 more smoothly, reducing the chance of air mixing. The first through hole 6 and the second through hole 7 are straight hole designs, which help the medium maintain a high speed and directness when being thrown out, so that the medium can effectively reach the part to be lubricated. The straight hole design helps the medium to be more evenly distributed on the part to be lubricated, because the straight hole can provide a more direct and uniform medium flow path.

[0059] In summary, using the rotational force of the shaft to drive the flow of the medium can more efficiently deliver lubricant to the components requiring lubrication, improving lubrication efficiency. Its simplified design and built-in medium flow mechanism reduce the need for external components, thereby reducing maintenance costs. The shaft's rotation responds quickly, rapidly delivering the medium to the lubricated components and reducing response time. The integrated shaft design reduces the need for external piping and components, simplifying the entire system. The shaft's rotational force provides stable lubrication over a wider temperature range. The efficient operation and long life of molecular pumps rely on the high-speed rotation of their rotors and the extremely low friction coefficient of their bearing systems. The drive device in this solution uses the rotational force of the shaft to achieve medium flow and distribution, effectively reducing bearing friction and thus improving the efficiency of the molecular pump. Furthermore, the device controls the flow of the medium, providing the necessary lubrication to the molecular pump bearings, ensuring efficient pump operation. Because molecular pumps operate in a high vacuum environment, any external maintenance could disrupt the vacuum. Therefore, the self-lubricating properties of this solution reduce the need for bearing maintenance and the risk of vacuum disruption during maintenance. In addition, the drive device of this solution reduces medium waste and leakage, avoids vacuum drop, and thus maintains the high performance of the molecular pump. In summary, the drive device of this solution provides a lubrication solution for the molecular pump that is efficient, reliable, and adaptable to high vacuum environments.

[0060] The foregoing is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined or explained in subsequent figures.

[0061] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, the elements defined by the phrase "comprising..." do not exclude the presence of other identical elements in the process, method, article, or device comprising the elements.

Claims

1. A driving device, characterized in that: The driving device includes: a rotating shaft, a first part to be lubricated and a second part to be lubricated; The first part to be lubricated and the second part to be lubricated are respectively arranged along the axial direction of the rotating shaft; The rotating shaft includes: a supply hole, a first through hole, a second through hole, and an internal passage; wherein the internal passage is configured to provide a channel for the medium to flow; The supply hole is located at the second end of the rotating shaft and connects the internal passage and the exterior of the rotating shaft; The first through hole is provided near the first end of the rotating shaft and is connected to the internal passage and the first part to be lubricated; the second through hole is provided near the second end of the rotating shaft and is connected to the internal passage and the second part to be lubricated; Wherein, the medium in the internal passage enters the first part to be lubricated and the second part to be lubricated through the first through hole and the second through hole based on the rotation of the rotating shaft.

2. The driving device according to claim 1, characterized in that in, The first end portion is the upper end of the rotating shaft in the vertical direction, and the second end portion is the lower end of the rotating shaft in the vertical direction; The highest height of the first part to be lubricated in the horizontal direction is lower than the horizontal height of the first through hole; the highest height of the second part to be lubricated in the horizontal direction is lower than the horizontal height of the second through hole.

3. The driving device according to claim 1, characterized in that The driving device further includes a supply pool, which is arranged close to the supply hole and contains the medium.

4. The driving device according to claim 3, characterized in that When the driving device is in working state, the supply hole is immersed in the medium of the supply pool; The rotating shaft is configured to introduce the medium into the internal passage through the supply hole by rotating; and to throw the medium out of the rotating shaft from the first through hole and / or the second through hole during the rotation process.

5. The driving device according to claim 1, characterized in that The rotating shaft further comprises: a surrounding inclined surface; The surrounding inclined surface surrounds the outer side of the rotating shaft; the surrounding inclined surface is arranged between the first through hole and the second through hole; the surrounding inclined surface is configured to guide the medium flowing through it toward the direction close to the second part to be lubricated.

6. The driving device according to claim 5, characterized in that The driving device further includes: a guide groove; the guide groove includes a recessed portion parallel to the rotating shaft; the guide groove is used to receive the medium dropped thereon and guide the medium toward the second part to be lubricated.

7. The driving device according to claim 6, characterized in that The end of the guide groove close to the second part to be lubricated is provided with an arc, and the arc faces the second part to be lubricated.

8. The driving device according to claim 7, characterized in that When the driving device is in an operating state, the internal passage is configured to guide the medium through the first through hole; The first through hole is configured to throw out the medium; wherein the medium flows through the surrounding inclined surface to the guide groove and then flows back to the supply tank.

9. The driving device according to claim 8, characterized in that When the driving device is in an operating state, the internal passage is configured to guide the medium through the second through hole; The second through hole is configured to throw out the medium, wherein the medium flows back to the supply tank.

10. The driving device according to claim 1, characterized in that The supply hole is a tapered hole with a tapered portion facing the second end; the first through hole and the second through hole are straight holes.

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