Gas sampling system and gas analysis equipment

Abstract

The utility model relates to a gas sampling system and gas analysis equipment, the gas sampling system comprises a gas sampling device, the gas sampling device comprises an absorption container and a gas inlet assembly, the gas inlet assembly comprises a pipe body, the first end of the pipe body is provided with a ventilation part; the first air inlet pipe and the second air inlet pipe are both communicated with the second end of the pipe body and are both located outside the absorption container; the gas outlet sleeve comprises a sleeve body and a gas outlet pipe, the sleeve body surrounds the outer side of the pipe body in the circumferential direction, the first end of the sleeve body and the outer side wall of the pipe body are arranged in a spaced mode to form a second opening, and the gas outlet pipe is used for discharging the to-be-detected gas which is not absorbed by the absorption liquid. The two gas inlet pipes of the gas sampling device of the gas sampling system disclosed by the utility model are obviously different from the gas outlet pipes in close positions, so that an operator can identify the gas inlet pipes conveniently to avoid misconnection, and the suck-back phenomenon in the sampling process is avoided.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor gas detection, and in particular to a gas sampling system and a gas analysis device. Background Art

[0002] Airborne molecular contaminants (AMC) in the semiconductor industry, such as inorganic acids and alkalis, can corrode metal and other thin films on the wafer surface, as well as factory materials and process equipment. This can lead to defects in process products, impair performance, and ultimately affect wafer yield. Therefore, routine monitoring and control of AMC in semiconductor fab environments is necessary.

[0003] In the existing technology, AMC is mainly analyzed and detected by ion chromatography (Ion Chromatography) in the laboratory. During actual use, conventional sampling devices have the problem that operators can easily connect the air inlet and outlet in reverse, which will cause backflow and damage the sampling pump. Utility Model Content

[0004] The embodiments of the present disclosure provide a gas sampling system and a gas analysis device, which can avoid back suction during the sampling process.

[0005] According to a first aspect of the present disclosure, a gas sampling system is provided, comprising a gas sampling device, the gas sampling device comprising an absorption container and an air intake assembly, the absorption container being used to contain an absorption liquid for absorbing a gas to be measured, the air intake assembly comprising:

[0006] The tube body extends along the first direction, and a vent portion is provided at a first end of the tube body, and the vent portion is located in the absorption container;

[0007] a first air inlet pipe and a second air inlet pipe, both of which are connected to the second end of the pipe body and are located outside the absorption container, and are used to allow the gas to be tested to enter; and

[0008] The air outlet sleeve includes a sleeve body and an air outlet pipe. The sleeve body is circumferentially arranged around the outside of the tube body. The first end of the sleeve body is spaced apart from the outer wall of the tube body to form a second opening. The second opening is connected to the absorption container. The second end of the sleeve body is connected to the outer wall of the tube body. The outer wall of the first end of the sleeve body is tightly fitted with the inner wall of the absorption container. The air outlet pipe is provided on the sleeve body. The air outlet pipe is connected to the second opening and is located outside the absorption container. The air outlet pipe is used to discharge the gas to be tested that is not absorbed by the absorption liquid.

[0009] In some embodiments, one end of each of the first air inlet pipe and the second air inlet pipe is connected to the pipe body, and the first air inlet pipe and the second air inlet pipe are arranged at an angle.

[0010] In some embodiments, a protrusion is provided at the first end of the tube body, the radial dimension of the protrusion is larger than the radial dimension of the tube body, and the vent includes a plurality of third openings, which are arranged along the circumference of the protrusion.

[0011] In some embodiments, the central axis of the protrusion coincides with the central axis of the tube body; and / or there are multiple protrusions, and the multiple protrusions are adjacently arranged along the first direction.

[0012] In some embodiments, the sleeve body includes a first part and a second part, the radial dimension of the second part is larger than the radial dimension of the tube body to form a second opening, the first part is connected to the end of the second part away from the second opening, the air outlet pipe is connected to the first part, and the end of the absorption container close to the second opening is provided with a connecting part, and the outer wall of the second part and the inner wall of the connecting part fit together.

[0013] In some embodiments, a radial dimension of the outer wall of the first portion is greater than a radial dimension of the outer wall of the second portion to form a step portion, and an end of the connecting portion adjacent to the second opening abuts against the step portion.

[0014] In some embodiments, the gas to be measured includes semiconductor gaseous molecular contaminants.

[0015] In some embodiments, the gas sampling system further includes an ultrasonic wave generating device configured to receive the gas sampling device and generate ultrasonic waves to assist in separating the absorption container and the inlet component.

[0016] According to a second aspect of the present disclosure, a gas analysis device is provided, comprising the gas sampling system of the above embodiment.

[0017] In some embodiments, the gas analysis equipment comprises an ion chromatograph.

[0018] Based on the above technical solution, the gas sampling system of the embodiment of the present invention has a simple gas sampling device structure, and the two air inlet pipes are obviously different from the air outlet pipes in a similar position, which can be convenient for operators to identify to avoid misconnection, avoid back suction during the sampling process, and avoid damage to the sampling pump; the two air inlet pipes are interconnected, and even if the inlet and outlet pipes are connected reversely in actual operation, they still have an anti-back suction function, which can improve the reliability of the gas sampling system. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings described herein are used to provide a further understanding of the present disclosure and constitute a part of this application. The illustrative embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation of the present disclosure. In the drawings:

[0020] Figure 1 Schematic diagram of the structure of some embodiments of the gas sampling device of the gas sampling system of the present disclosure.

[0021] Figure 2 Schematic diagram of gas flow in some embodiments of the gas sampling device of the gas sampling system of the present disclosure.

[0022] Figure 3 Schematic diagrams of the structures of some embodiments of the absorption container disclosed herein.

[0023] Figure 4 Schematic diagram of the structure of some embodiments of the air intake assembly disclosed herein.

[0024] Figure 5 This is a comparison chart of the separation effects of the gas sampling device of the gas sampling system disclosed herein using manual loosening and using an ultrasonic generator to assist in separation.

[0025] Description of Reference Numerals

[0026] 1. Absorption container; 10. Crack; 101. Absorption liquid; 2. Air inlet assembly; 20. Tube body; 21. First air inlet pipe; 22. Second air inlet pipe; 23. Air outlet sleeve; 24. Air outlet pipe; 25. Protrusion; 26. Connecting portion; 201. First opening; 202. Second opening; 203. Third opening; 230. Sleeve body; 231. First part; 232. Second part; x, first direction; A. Separation by manual loosening; B. Separation assisted by an ultrasonic generator. DETAILED DESCRIPTION

[0027] The present disclosure is described in detail below. In the following paragraphs, various aspects of the embodiments are defined in more detail. Each aspect defined in this manner may be combined with any other aspect or aspects unless expressly stated not to be combinable. In particular, any feature considered to be preferred or advantageous may be combined with one or more other features considered to be preferred or advantageous.

[0028] The terms "first" and "second" appearing in this disclosure are only for the convenience of description to distinguish different components with the same name, and do not indicate a priority or primary and secondary relationship.

[0029] In the description of the present disclosure, it should be understood that the terms "inside", "outside", "up", "down", "front", "back", etc. indicating orientation or positional relationships are defined based on the tube body, absorption container or sleeve body, etc., and are only for the convenience of describing the present disclosure, and do not indicate or imply that the device referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the scope of protection of the present disclosure.

[0030] During the research process, the inventors found that the sampling device for AMC is mainly based on absorption bottles, and commonly used ones include impact absorption bottles, bubble absorption bottles, porous glass plate absorption bottles, etc. A single absorption bottle often needs to be equipped with an additional anti-backflow device. However, in actual use, conventional sampling devices have the problem that operators can easily connect the air inlet and the air outlet in reverse, which will cause backflow and damage the sampling pump.

[0031] In order to avoid the back-inhalation phenomenon during the sampling process, firstly, the present disclosure provides a gas sampling system, including a gas sampling device, such as Figures 1 to 4 As shown, the gas sampling device includes an absorption container 1 and an air intake assembly 2. The absorption container 1 is used to contain an absorption liquid 101 that absorbs the gas to be measured. The air intake assembly 2 includes:

[0032] The tube body 20 extends along the first direction x, and a vent portion is provided at a first end of the tube body 20, and the vent portion is located inside the absorption container 1;

[0033] A first air inlet pipe 21 and a second air inlet pipe 22, both of which are connected to the second end of the tube body 20 and are located outside the absorption container 1, and are used to supply the gas to be tested; and

[0034] The air outlet sleeve 23 includes a sleeve body 230 and an air outlet pipe 24. The sleeve body 230 is circumferentially arranged around the outside of the tube body 20. The first end of the sleeve body 230 is spaced apart from the outer wall of the tube body 20 to form a second opening 202. The second opening 202 is connected to the absorption container 1. The second end of the sleeve body 230 is connected to the outer wall of the tube body 20. The outer wall of the first end of the sleeve body 230 is tightly fitted with the inner wall of the absorption container 1. The air outlet pipe 24 is provided on the sleeve body 230. The air outlet pipe 24 is connected to the second opening 202 and is located outside the absorption container 1. The air outlet pipe 24 is used to discharge the gas to be tested that is not absorbed by the absorption liquid 101.

[0035] Specifically, after the absorption container 1 contains the absorption liquid, the absorption liquid submerges the vent portion, or in other words, the vent portion is located within the absorption liquid, and the gas to be measured passes through the vent portion and comes into contact with the absorption liquid. Specifically, the first air inlet pipe 21 and the second air inlet pipe 22 are both spaced apart from the absorption liquid. Specifically, the second end of the sleeve body 230 is sealably connected to the outer wall of the tube body 20. Specifically, the outlet pipe 24 is connected to the sampling pump.

[0036] Specifically, by setting up the first air inlet pipe 21 and the second air inlet pipe 22, compared with the existing technology, they can be distinguished from the air outlet pipe 24, thereby preventing the operator from connecting the air outlet pipe and the air inlet pipe in reverse during the sampling process, avoiding back suction and avoiding damage to the sampling pump.

[0037] Specifically, even if the operator still connects the wrong pipes after adopting the structure disclosed herein, for example, the outlet pipe 24 is allowed to take in air, and the sampling pump is connected to the first inlet pipe 21 to discharge air, the vacuum generated by the sampling pump will not suck in the absorption liquid, but will allow the second inlet pipe 22 to take in air and flow to the first inlet pipe 21, and the air pressure will reach balance again, thereby avoiding damage to the sampling pump.

[0038] Optionally, one or more first air inlet pipes 21 may be provided, and one or more second air inlet pipes 22 may also be provided. Optionally, the air outlet pipe 24 is perpendicular to the first direction x. Optionally, the air outlet pipe 24 is spaced apart from the first air inlet pipe 21 and the second air inlet pipe 22 along the first direction x. Optionally, the absorption container 1 extends along the first direction x. Optionally, the gas to be measured within the semiconductor factory includes an AMC, such as HF, HCl, HNO3, H2SO4, H3PO4, or NH3H2O. Optionally, after sampling, the absorption liquid 101 may be quantitatively and qualitatively analyzed using an ion chromatograph or the like.

[0039] The gas sampling system of this embodiment has a simple gas sampling device structure. The two air inlet pipes are obviously different from the air outlet pipe 24 in a similar position, which can be easily identified by the operator to avoid misconnection, avoid back suction during the sampling process, and avoid damage to the sampling pump. The two air inlet pipes are interconnected. Even if the inlet and outlet pipes are connected reversely in actual operation, they still have the anti-back suction function, which can improve the reliability of the gas sampling system.

[0040] In some embodiments, as Figures 1 to 4 As shown, one end of each of the first and second intake pipes 21, 22 is connected to the pipe body 20, and the first and second intake pipes 21, 22 are arranged at an angle. Alternatively, the first and second intake pipes 21, 22, and pipe body 20 may form a "Y" shape. Alternatively, the first and second intake pipes 21, 22 may be referred to as scissor-type intake pipes.

[0041] The two air inlet pipes of this embodiment are arranged at an angle, which can further distinguish them from the air outlet pipe 24 located in a similar position, making it easier for operators to identify them and avoid misconnection.

[0042] The inventors found during the research that the efficiency of conventional sampling devices in collecting sample gas is low. To solve this problem, in some embodiments, Figures 1 to 4 As shown, a protrusion 25 is provided at the first end of the tube body 20 , the radial dimension of the protrusion 25 is larger than the radial dimension of the tube body 20 , and the vent portion includes a plurality of third openings 203 , which are arranged along the circumference of the protrusion 25 .

[0043] Specifically, after the absorption container 1 contains the absorption liquid, the third opening 203 is at least partially located within the absorption liquid. Specifically, the radial dimension of the protrusion 25 is larger than the radial dimension of the tube body 20, which can increase the area of ​​the third opening 203 and thereby increase the contact area between the gas sample to be measured and the absorption liquid, thereby improving sampling efficiency.

[0044] Optionally, one or more protrusions 25 may be provided, for example, multiple protrusions 25 may be provided in a gourd shape. Optionally, the vent portion may include a first opening 201, and the first opening 201 is located at the end of the protrusion 25 along the first direction x.

[0045] This embodiment provides a plurality of third openings 203 along the circumferential direction of the protrusion 25 , thereby increasing the contact area between the gas sample to be measured and the absorption liquid compared to conventional outlets, thereby improving the sampling efficiency of the gas sampling system.

[0046] In some embodiments, as Figures 1 to 4 As shown, the central axis of the protrusion 25 coincides with the central axis of the tube body 20; and / or there are multiple protrusions 25, and the multiple protrusions 25 are adjacently arranged along the first direction x.

[0047] Specifically, the central axis of the protrusion 25 extends along the first direction x, and the protrusion 25 coincides with the central axis of the tube body 20, facilitating the processing and manufacturing of the rotating structure. Specifically, multiple protrusions 25 are arranged adjacent to each other along the first direction x, and multiple third openings 203 are circumferentially defined on the protrusions 25 to further increase the contact area between the gas sample to be measured and the absorption liquid.

[0048] In this embodiment, the central axis of the protrusion 25 coincides with the central axis of the tube body 20, which can reduce the processing difficulty and cost of the air intake component; multiple protrusions 25 are adjacently arranged along the first direction x, which can further improve the sampling efficiency.

[0049] In some embodiments, as Figure 4 As shown, the sleeve body 230 includes a first part 231 and a second part 232. The radial dimension of the second part 232 is larger than the radial dimension of the tube body 20 to form a second opening 202. The first part 231 is connected to the end of the second part 232 away from the second opening 202. The air outlet pipe 24 is connected to the first part 231. The end of the absorption container 1 close to the second opening 202 is provided with a connecting part 26. The outer wall of the second part 232 and the inner wall of the connecting part 26 fit together.

[0050] Specifically, the second part 232 is used to form a second opening 202 to communicate with the absorption container 1, and the first part 231 is used to set the air outlet pipe 24. The end of the first part 231 away from the second part 232 is tightly fitted with the tube body 20, and the outer wall of the second part 232 and the inner wall of the connecting part 26 are fitted with each other to ensure the sealing of the gas flow path, avoid gas leakage, and allow the gas to be tested that is not absorbed by the absorption liquid 101 to be smoothly discharged from the air outlet pipe 24.

[0051] Optionally, the inner diameter of the connecting portion 26 is smaller than the inner diameter of the main body of the absorption container 1, further enhancing the gas tightness of the gas sampling device through the tapered opening of the absorption container 1. Optionally, the outer wall of the second portion 232 and the inner wall of the connecting portion 26 may be inclined relative to the first direction x or parallel to the first direction x. Alternatively, the connecting portion 26 may also be referred to as an interface, etc.

[0052] The sleeve body 230 of this embodiment includes a first part 231 and a second part 232. The outer wall of the second part 232 and the inner wall of the connecting part 26 fit together, which can not only improve the airtightness of the sampling device and ensure that the unabsorbed gas to be tested is smoothly discharged from the outlet pipe 24, but also provide physical support to enhance the stability of the gas sampling device.

[0053] In some embodiments, as Figure 4 As shown, the radial dimension of the outer wall of the first portion 231 is greater than the radial dimension of the outer wall of the second portion 232 to form a step portion, and one end of the connecting portion 26 close to the second opening 202 abuts against the step portion.

[0054] In this embodiment, the connecting portion 26 abuts against the step portion, which can facilitate assembly and disassembly by the operator, improve the airtightness of the sampling device, and provide physical support to enhance the stability of the gas sampling device.

[0055] In some embodiments, the gas to be measured includes semiconductor gaseous molecular contaminants.

[0056] Optionally, the gaseous molecular pollutants in the semiconductor factory include compounds such as HF, HCl, HNO3, H2SO4, H3PO4 or NH3 H2O.

[0057] During the research, the inventor found that after the gas sampling device is completed, the sample needs to be transferred during the sample pre-treatment process. During the separation process of the absorption container 1 and the air intake component 2, manual loosening is prone to breakage due to uneven force. Figure 5 As shown in process A, manual loosening can easily cause cracks 10 on the connecting portion 26 of the absorption container 1, resulting in damage to the gas sampling device or contamination of the sample.

[0058] To solve the above problems, in some embodiments, Figure 5 As shown in process B, the gas sampling system further includes an ultrasonic generating device, which is configured to accommodate the gas sampling device and generate ultrasonic waves to assist in separating the absorption container 1 and the air inlet assembly 2, so that the connection portion 26 of the absorption container 1 remains intact.

[0059] Specifically, after sampling is completed, the gas sampling device is separated from the anti-backflow container and the sampling pump, and the absorption container 1 and the air intake assembly 2, which are sealed at the interface, are placed in an ultrasonic generating device for ultrasonic treatment, which can quickly separate the absorption container 1 and the air intake assembly 2. For example, ultrasonic treatment is performed in an ultrasonic cleaning machine for 5 seconds. Optionally, the absorption container 1 and the air intake assembly 2 are separated after the gas sampling device completes sampling.

[0060] This embodiment uses ultrasound to assist in separating the air intake assembly 2 from the absorption container 1 in the sample pretreatment step to speed up sample transfer, thereby shortening the sample pretreatment time, reducing the risk of fragmentation of the gas sampling device, and improving the sampling stability of the gas sampling system.

[0061] In some specific embodiments, the sampling and analysis process can be performed according to the following steps:

[0062] 1. Sampling step: The air inlet assembly 2 is used to connect the external environment and the absorption liquid 101 and provide a channel for the flow of the gas to be tested; the absorption container 1 is used to contain the absorption liquid 101, and the inner side wall of the connecting portion 26 of the absorption container 1 is tightly fitted and tightened with the outer side wall of the second portion 232 of the sleeve body 230; the air outlet pipe 24 is connected to the anti-backflow container and the sampling pump through the air suction hose; during the sampling process, the sampling pump provides power, and under a negative pressure state, the gas flows into the absorption container 1 through the first air inlet pipe 21 and the second air inlet pipe 22, enters the absorption container 1, and is absorbed by the absorption liquid 101. The excess gas components are dissolved by the absorption liquid 101 and discharged through the air outlet pipe 24;

[0063] 2. Sample pretreatment step: After sampling, separate the gas sampling device from the anti-backflow container and the sampling pump, and place the gas sampling device with sealed interface in an ultrasonic cleaning machine for ultrasonic treatment for 5 seconds to separate the air inlet component 2 and the absorption container 1;

[0064] 3. Analysis steps: Use ion chromatography to conduct quantitative and qualitative analysis of the absorption liquid.

[0065] Secondly, the present disclosure provides a gas analysis device, including the gas sampling system of the above embodiment.

[0066] In some embodiments, the gas analysis equipment comprises an ion chromatograph.

[0067] The above is a detailed introduction to a gas sampling system and gas analysis equipment provided by the present disclosure. Specific embodiments are used herein to illustrate the principles and implementation methods of the present disclosure. The description of the above embodiments is only used to help understand the method and core ideas of the present disclosure. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present disclosure, several improvements and modifications can be made to the present disclosure, and these improvements and modifications also fall within the scope of protection of the claims of the present disclosure.

Claims

1. A gas sampling system, characterized in that: The invention comprises a gas sampling device, wherein the gas sampling device comprises an absorption container (1) and an air intake assembly (2), wherein the absorption container (1) is used to contain an absorption liquid (101) for absorbing the gas to be measured, and the air intake assembly (2) comprises: A tube body (20) extends along a first direction (x), a vent portion is provided at a first end of the tube body (20), and the vent portion is located inside the absorption container (1); a first air inlet pipe (21) and a second air inlet pipe (22), wherein the first air inlet pipe (21) and the second air inlet pipe (22) are both connected to the second end of the pipe body (20) and are both located outside the absorption container (1), and the first air inlet pipe (21) and the second air inlet pipe (22) are used to allow the gas to be tested to enter; and The gas outlet sleeve (23) comprises a sleeve body (230) and a gas outlet pipe (24), wherein the sleeve body (230) surrounds the outer side of the tube body (20) in the circumferential direction, the first end of the sleeve body (230) is spaced apart from the outer side wall of the tube body (20) to form a second opening (202), the second opening (202) is connected to the absorption container (1), the second end of the sleeve body (230) is connected to the outer side wall of the tube body (20), the outer side wall of the first end of the sleeve body (230) is tightly fitted with the inner side wall of the absorption container (1), the gas outlet pipe (24) is provided on the sleeve body (230), the gas outlet pipe (24) is connected to the second opening (202) and is located outside the absorption container (1), and the gas outlet pipe (24) is used to discharge the gas to be measured that is not absorbed by the absorption liquid (101).

2. The gas sampling system according to claim 1, characterized in that One end of each of the first air intake pipe (21) and the second air intake pipe (22) is connected to the pipe body (20), and the first air intake pipe (21) and the second air intake pipe (22) are arranged at an angle.

3. The gas sampling system according to claim 1, characterized in that The first end of the tube body (20) is provided with a protrusion (25), the radial dimension of the protrusion (25) is larger than the radial dimension of the tube body (20), and the vent portion includes a plurality of third openings (203), and the plurality of third openings (203) are arranged along the circumference of the protrusion (25).

4. The gas sampling system according to claim 3, characterized in that The central axis of the protrusion (25) coincides with the central axis of the tube body (20); and / or There are a plurality of protruding portions (25), and the plurality of protruding portions (25) are adjacently arranged along the first direction (x).

5. The gas sampling system according to claim 1, characterized in that: The sleeve body (230) comprises a first part (231) and a second part (232), wherein the radial dimension of the second part (232) is larger than the radial dimension of the tube body (20) to form the second opening (202), the first part (231) is connected to an end of the second part (232) away from the second opening (202), the air outlet pipe (24) is connected to the first part (231), and a connecting portion (26) is provided at an end of the absorption container (1) close to the second opening (202), and the outer wall of the second part (232) and the inner wall of the connecting portion (26) are in contact with each other.

6. The gas sampling system according to claim 5, characterized in that: The radial dimension of the outer wall of the first part (231) is greater than the radial dimension of the outer wall of the second part (232) to form a step portion, and one end of the connecting portion (26) close to the second opening (202) abuts against the step portion.

7. The gas sampling system according to any one of claims 1 to 6, characterized in that: The gas to be measured includes semiconductor gaseous molecular pollutants.

8. The gas sampling system according to any one of claims 1 to 6, characterized in that: It also includes an ultrasonic wave generating device, which is configured to accommodate the gas sampling device and generate ultrasonic waves to assist in separating the absorption container (1) and the air intake component (2).

9. A gas analysis device, characterized in that: A gas sampling system comprising the gas sampling system according to any one of claims 1 to 8.

10. The gas analysis device according to claim 9, characterized in that Including ion chromatograph.

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