Water cooling mechanism for ion implanter

Abstract

The utility model provides a water cooling mechanism for an ion implanter, which comprises a first cooling seat body, a second cooling seat body, a switching communication pipeline and an external inlet and outlet pipeline, and is provided with a first circulating water path and a second circulating water path which are arranged around the outer sides of respective avoidance ports, so that cooling water can be fully contacted and take away heat, and the service life of the water cooling mechanism is prolonged. The first cooling seat body and the second cooling seat body are efficiently cooled, then the temperature of a key component ion source of the ion implanter is effectively controlled, the first cooling seat body and the second cooling seat body are connected through the switching communication pipeline to form a complete cooling cycle, and the service life of the ion implanter is prolonged. Meanwhile, the avoiding through openings are formed in the middles of the guide connecting rod columns to contain the guide connecting rod columns, the structure is compact, the flowing path of cooling water can be reduced, the cooling efficiency is improved, the cooling device is communicated with cold water supply equipment through an external inlet and outlet pipeline, the flow and temperature of the cooling water can be adjusted according to actual needs, and the cooling requirements under different working conditions are met.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to a water cooling mechanism for an ion implanter. Background Art

[0002] Patent document CN203983227U discloses an ion source for an ion implanter, which includes an ion generating chamber, which is surrounded by a top plate, side plates and a bottom plate. The top plate is composed of a receiving groove and a pair of slides that can move relative to each other in the receiving groove. The bottom of the receiving groove has a gap, and the top of the receiving groove has an opening to expose the gap. The slides move relative to each other to control the size of the exposed gap. The gap width for precipitating ion beams in the ion source is precisely adjustable. The ion implanter using this ion source can always maintain the stability of the precipitated ion beam, thereby meeting the stringent requirements of the ion implantation process and improving the product yield. However, the ion source used in the ion implanter is prone to local overheating at its power supply connection, affecting the operating stability of the ion source. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The purpose of the utility model is to provide a water cooling mechanism for an ion implanter to ensure the operation stability of an ion source.

[0004] The technical solution adopted by the present invention to solve its technical problems is:

[0005] A water cooling mechanism for an ion implanter, comprising:

[0006] a first cooling seat body, wherein a first circulating water path is defined within the first cooling seat body, a first avoidance opening is defined in the middle thereof, the first avoidance opening passes through both ends of the first cooling seat body, the first circulating water path extends circumferentially along the first cooling seat body, and is disposed around the outer side of the first avoidance opening, with both ends of the first circulating water path exposed to the outside of the first cooling seat body;

[0007] A second cooling seat body, wherein a second circulating water path is formed inside the second cooling seat body, a second avoidance opening is formed in the middle thereof, the second avoidance opening passes through both ends of the second cooling seat body, the second circulating water path extends along the circumference of the second cooling seat body and is arranged around the outer side of the second avoidance opening, with both ends of the second circulating water path exposed to the outside of the second cooling seat body;

[0008] A transfer communication pipe, the transfer communication pipe is located between the first cooling seat body and the second cooling seat body and is connected to the transfer end of the first circulating water circuit and the second circulating water circuit;

[0009] A pair of external inlet and outlet pipes are provided, each external inlet and outlet pipe is respectively connected to the external ends of the first circulating water circuit and the second circulating water circuit, and is connected to the cold water supply equipment. The cold water supply equipment supplies cooling water to the external inlet and outlet pipes, so that it flows along the first circulating water circuit, the transfer connecting pipe and the second circulating water circuit to cool the first cooling seat body and the second cooling seat body.

[0010] A first guide rod column is provided in the first cooling seat body, the first guide rod column passes through the first avoidance opening and is fixedly connected to the first guide rod column, and the inner end of the first guide rod column extends into the ion source of the ion implanter;

[0011] A second guide rod column is provided in the second cooling seat body. The second guide rod column passes through the second avoidance opening and is fixedly connected to the second cooling seat body. The inner end of the second guide rod column extends into the ion source of the ion implanter.

[0012] A first insulating pad is provided at the bottom of the first cooling seat, and the first connecting rod column passes through the first insulating pad, and the first insulating pad insulates the connection between the first cooling seat and the ion source;

[0013] A second insulating pad is provided at the bottom of the second cooling seat body, and the second connecting rod column passes through the second insulating pad. The second insulating pad insulates the connection between the second cooling seat body and the ion source.

[0014] An insulating pad is provided on the top of the first cooling seat. The insulating pad is provided in a group. The insulating pads are arranged in sequence along the circumference of the first cooling seat and surround the outside of the first connecting rod. The insulating pads insulate the top of the first cooling seat.

[0015] An insulating cover is provided on the second cooling seat body, and the insulating cover covers the outside of the second cooling seat body. The second connecting rod column passes through the insulating cover, and the insulating cover insulates the second cooling seat body.

[0016] A first conductive clamping block is provided above the insulating spacer. The first conductive clamping block is clamped at the outer end of the first connecting rod column and is connected to the power supply through a circuit. The first conductive clamping block supplies power to the first connecting rod column, and the insulating spacer insulates the first conductive clamping block from the first cooling base.

[0017] A second conductive clamp is provided above the insulating cover. The second conductive clamp is clamped on the outer end of the second conducting rod column and is connected to the power supply through a line. The second conductive clamp supplies power to the second conducting rod column, and the insulating cover insulates the second conductive clamp and the second cooling seat.

[0018] An insulating end cover is installed on the first conductive clamping block, and the insulating end cover covers the outside of the first conductive clamping block and can insulate the first conductive clamping block.

[0019] A first isolation sleeve is provided between the outer wall of the first guide rod column and the first avoidance opening, and a second isolation sleeve is provided between the outer wall of the second guide rod column and the second avoidance opening. The first isolation sleeve and the second isolation sleeve are respectively made of insulating thermal conductive adhesive.

[0020] The advantages of the present invention are:

[0021] The water cooling mechanism includes a first circulating water circuit and a second circulating water circuit, and is arranged around the outside of their respective avoidance ports to ensure that the cooling water can fully contact and take away heat, thereby achieving efficient cooling of the first cooling seat body and the second cooling seat body, and thus effectively controlling the temperature of the ion source, a key component of the ion implanter. The first cooling seat body and the second cooling seat body are connected by a switching communication pipe to form a complete cooling cycle. At the same time, a avoidance port is provided in the middle of each to accommodate the guide rod column. Not only is the structure compact, but it can also reduce the flow path of the cooling water and improve the cooling efficiency. It is connected to the cold water supply equipment through an external inlet and outlet pipe, and the flow and temperature of the cooling water can be adjusted according to actual needs to meet the cooling requirements under different working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is one of the structural diagrams of the water cooling mechanism for an ion implanter proposed in the present invention;

[0023] Figure 2 This is the second structural diagram of the water cooling mechanism used in the ion implanter. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the utility model for protection, but merely represents selected embodiments of the present invention. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0025] like Figure 1 、 Figure 2As shown, the water cooling mechanism for the ion implanter proposed by the present invention includes a first cooling seat body 100, a second cooling seat body 200, a transfer communication pipe 300 and an external inlet and outlet pipe 400. A first circulating water path is opened inside the first cooling seat body, a first avoidance opening is opened in the middle thereof, and the first avoidance opening passes through both ends of the first cooling seat body. The first circulating water path extends along the circumference of the first cooling seat body and is arranged around the outside of the first avoidance opening, with its two ends exposed to the outside of the first cooling seat body respectively. A second circulating water path is opened inside the second cooling seat body, a second avoidance opening is opened in the middle thereof, and the second avoidance opening passes through both ends of the second cooling seat body. The circulating water path extends along the circumference of the second cooling seat body and is arranged around the outside of the second avoidance opening, with both ends exposed to the outside of the second cooling seat body respectively. The switching communication pipe is located between the first cooling seat body and the second cooling seat body, and is connected with the switching ends of the first circulating water path and the second circulating water path. A pair of external inlet and outlet pipes are provided, and each external inlet and outlet pipe is respectively connected with the external ends of the first circulating water path and the second circulating water path, and is connected with the cold water supply equipment. The cold water supply equipment supplies cooling water to the external inlet and outlet pipes, so that it flows along the first circulating water path, the switching communication pipe and the second circulating water path, so as to cool the first cooling seat body and the second cooling seat body.

[0026] A first guide rod 500 is provided in the first cooling base. The first guide rod 500 passes through the first avoidance opening and is fixedly connected to the first guide rod. The inner end of the first guide rod 500 extends into the ion source of the ion implanter.

[0027] A second guide rod column 600 is provided in the second cooling seat body. The second guide rod column passes through the second avoidance opening and is fixedly connected to the second cooling seat body. The inner end of the second guide rod column extends into the ion source of the ion implanter.

[0028] A first insulating pad 110 is provided at the bottom of the first cooling base, and the first connecting rod column passes through the first insulating pad. The first insulating pad insulates the connection between the first cooling base and the ion source.

[0029] A second insulating pad 210 is provided at the bottom of the second cooling base body. The second connecting rod column passes through the second insulating pad. The second insulating pad insulates the connection between the second cooling base body and the ion source.

[0030] An insulating pad 120 is provided on the top of the first cooling seat. The insulating pads are provided in a group. The insulating pads are arranged sequentially along the circumference of the first cooling seat and surround the outside of the first connecting rod. The insulating pads insulate the top of the first cooling seat.

[0031] An insulating cover 220 is provided on the second cooling base, and the insulating cover covers the outside of the second cooling base. The second connecting rod column passes through the insulating cover, and the insulating cover insulates the second cooling base.

[0032] A first conductive clamping block 510 is provided above the insulating spacer. The first conductive clamping block is clamped to the outer end of the first connecting rod and is connected to the power supply through a circuit. The first conductive clamping block supplies power to the first connecting rod, and the insulating spacer insulates the first conductive clamping block from the first cooling base.

[0033] A second conductive clamp 610 is provided above the insulating cover. The second conductive clamp is clamped on the outer end of the second conductive rod column and is connected to the power supply through a line. The second conductive clamp supplies power to the second conductive rod column, and the insulating cover insulates the second conductive clamp and the second cooling seat.

[0034] An insulating end cover 511 is installed on the first conductive clamping block. The insulating end cover covers the outside of the first conductive clamping block and can insulate the first conductive clamping block.

[0035] A first isolation sleeve 520 is provided between the outer wall of the first connecting rod column and the first avoidance opening, and a second isolation sleeve 620 is provided between the outer wall of the second connecting rod column and the second avoidance opening. The first isolation sleeve and the second isolation sleeve are respectively made of insulating thermal conductive adhesive.

[0036] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", and "right" indicate an orientation or positional relationship, they should be understood as being based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two elements. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

Claims

1. A water cooling mechanism for an ion implanter, characterized in that: include: a first cooling seat body, wherein a first circulating water path is defined within the first cooling seat body, a first avoidance opening is defined in the middle thereof, the first avoidance opening passes through both ends of the first cooling seat body, the first circulating water path extends circumferentially along the first cooling seat body, and is disposed around the outer side of the first avoidance opening, with both ends of the first circulating water path exposed to the outside of the first cooling seat body; A second cooling seat body, wherein a second circulating water path is formed inside the second cooling seat body, a second avoidance opening is formed in the middle thereof, the second avoidance opening passes through both ends of the second cooling seat body, the second circulating water path extends along the circumference of the second cooling seat body and is arranged around the outer side of the second avoidance opening, with both ends of the second circulating water path exposed to the outside of the second cooling seat body; A transfer communication pipe, the transfer communication pipe is located between the first cooling seat body and the second cooling seat body and is connected to the transfer end of the first circulating water circuit and the second circulating water circuit; A pair of external inlet and outlet pipes are provided, each external inlet and outlet pipe is respectively connected to the external ends of the first circulating water circuit and the second circulating water circuit, and is connected to the cold water supply equipment. The cold water supply equipment supplies cooling water to the external inlet and outlet pipes, so that it flows along the first circulating water circuit, the transfer connecting pipe and the second circulating water circuit.

2. The water cooling mechanism for an ion implanter according to claim 1, characterized in that: A first guide rod column is provided in the first cooling seat body, the first guide rod column passes through the first avoidance opening and is fixedly connected to the first guide rod column, and the inner end of the first guide rod column extends into the ion source of the ion implanter; A second guide rod column is provided in the second cooling seat body. The second guide rod column passes through the second avoidance opening and is fixedly connected to the second cooling seat body. The inner end of the second guide rod column extends into the ion source of the ion implanter.

3. The water cooling mechanism for an ion implanter according to claim 2, wherein: A first insulating pad is provided at the bottom of the first cooling seat, and the first connecting rod column passes through the first insulating pad; A second insulating pad is provided at the bottom of the second cooling seat body, and the second connecting rod column passes through the second insulating pad.

4. The water cooling mechanism for an ion implanter according to claim 2, wherein: An insulating pad is provided on the top of the first cooling seat. The insulating pad is provided in a group. The insulating pads are arranged in sequence along the circumference of the first cooling seat and surround the outer side of the first connecting rod column. An insulating cover is provided on the second cooling seat body. The insulating cover covers the outside of the second cooling seat body, and the second connecting rod column passes through the insulating cover.

5. The water cooling mechanism for an ion implanter according to claim 4, characterized in that: A first conductive clamping block is provided above the insulating spacer, the first conductive clamping block is clamped on the outer end of the first connecting rod column and is connected to the power supply through a line; A second conductive clamping block is provided above the insulating cover. The second conductive clamping block is clamped on the outer end of the second conducting rod column and is connected to the power supply through a line.

6. The water cooling mechanism for an ion implanter according to claim 5, characterized in that: An insulating end cover is installed on the first conductive clamping block, and the insulating end cover covers the outside of the first conductive clamping block.

7. The water cooling mechanism for an ion implanter according to claim 1, characterized in that: A first isolation sleeve is provided between the outer wall of the first guide rod column and the first avoidance opening, and a second isolation sleeve is provided between the outer wall of the second guide rod column and the second avoidance opening. The first isolation sleeve and the second isolation sleeve are respectively made of insulating thermal conductive adhesive.

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