Filter assembly, tail gas treatment device and boron diffusion production equipment

Abstract

The utility model relates to a filter assembly, a tail gas treatment device and boron diffusion production equipment, the filter assembly comprises a filter element and a filter cartridge, the filter element is provided with a first end and a second end along a first direction, and the filter element is provided with a plurality of filter through holes along the first direction; the filter element is positioned in the filter cartridge; the filter cartridge is provided with an air inlet and an air outlet; the air inlet is communicated with an exhaust pipe of a vacuum furnace of the boron diffusion production equipment, and the air outlet is communicated with a tail exhaust pipe of the boron diffusion production equipment; tail gas exhausted by the exhaust pipe can enter the filtering through hole through the gas inlet and the first end in sequence, and can be exhausted to the tail exhaust pipe through the second end and the gas outlet in sequence after being filtered; a plurality of water injection blind holes extending in the first direction are formed in the filter element, and openings of the water injection blind holes are formed in the second end; a first water injection port is formed in the filter cartridge and is communicated with the opening through a water pipe; and the filter element is made of a porous material. According to the technical scheme, harmful substances such as B2O3 in the tail gas can be fully and effectively removed, and the filtering efficiency is high.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cell production equipment, and in particular to filter components, tail gas treatment devices, and boron diffusion production equipment. Background Art

[0002] Boron diffusion production equipment is a core component of the current photovoltaic cell manufacturing process. It typically consists of a vacuum furnace, an exhaust gas treatment unit, and an exhaust pipe. The boron diffusion process takes place within the vacuum furnace. The exhaust gas generated by the boron diffusion process is discharged from the vacuum furnace, treated in the exhaust gas treatment unit, and then discharged into the exhaust pipe.

[0003] The exhaust gas generated by the boron diffusion process contains solid particles such as boron oxide (B2O3). In related technologies, the exhaust gas treatment devices of boron diffusion production equipment mainly use filter elements or water filtration bottles to filter out solid particles such as boron oxide (B2O3).

[0004] The solution of using a mesh filter element to physically filter solid particles such as boron oxide (B2O3) has an unsatisfactory filtering effect, which can easily lead to blockage of the tail pipe and require frequent replacement of the filter element.

[0005] A water-filtration filter bottle is used to filter solid particles such as boron oxide (B2O3). After exhaust gas is passed through the filter bottle, it bubbles through the water in the filter bottle. As the exhaust gas passes through the water, its temperature decreases, cooling it and forming B2O3 crystals. The B2O3 crystals are absorbed by the water, thus filtering out the B2O3 solid particles.

[0006] However, since the tail gas passes through the water in the filter bottle in the form of bubbles, the surface of the bubbles can come into contact with the water, but part of the tail gas is wrapped inside the bubbles. The speed of the bubbles passing through the water is very fast, and the gas wrapped inside the bubbles cannot directly come into contact with the water and is easily and quickly carried away by the bubbles, resulting in low filtration efficiency. In order to improve the filtration effect, the filtration scheme using water filtration filter bottles in the prior art usually requires the provision of multiple filter bottles that are connected in sequence, and the tail gas is filtered in sequence through multiple filter bottles to improve the filtration effect, but this in turn results in a larger volume of the tail gas treatment equipment. Moreover, the flow rate of the bubbles passing through the water is fast, which is prone to vibration, thereby causing the boron diffusion production equipment to be affected by vibration, resulting in problems such as loose parts. Utility Model Content

[0007] Based on this, it is necessary to provide a filter component, an exhaust gas treatment device, and a boron diffusion production equipment to address the above-mentioned technical problems of the exhaust gas treatment device of the boron diffusion production equipment in the prior art.

[0008] An embodiment of the present application provides a filter assembly, the filter assembly comprising a filter element and a filter cartridge;

[0009] The filter element has a first end and a second end along a first direction, and is provided with a plurality of filter through-holes along the first direction; the filter element is located in the filter cartridge, and the filter cartridge is provided with an air inlet and an air outlet; the air inlet is used to communicate with the exhaust pipe of the vacuum furnace of the boron diffusion production equipment, and the air outlet is used to communicate with the tail exhaust pipe of the boron diffusion production equipment; the exhaust gas discharged from the exhaust pipe can sequentially enter the filter through-holes through the air inlet and the first end, and after being filtered, can be sequentially discharged to the tail exhaust pipe through the second end and the air outlet;

[0010] The filter element is provided with a plurality of water injection blind holes extending along the first direction, and the openings of the water injection blind holes are provided at the second end; the filter cartridge is provided with a first water injection port, and the first water injection port is connected to the opening through a water pipe; the filter element is made of porous material.

[0011] In one embodiment, the filter cartridge includes a cylinder and a cover, the cover is sealed with one end of the cylinder, and the air inlet and the air outlet are respectively provided on the cover;

[0012] The filter assembly also includes a shell, the filter element is located in the shell, the shell has a circumferential side surface surrounding the first direction, the circumferential side surface includes a first side surface and a second side surface connected end to end along the circumferential direction, the first side surface is sealed with the inner side wall of the cylinder, and a gas channel is formed between the second side surface and the inner side wall of the cylinder; one end of the gas channel is connected to the air inlet, and the other end of the gas channel is connected to the first end.

[0013] In one embodiment, the filter assembly further comprises a filter cover and an air guide tube, wherein the filter cover is sealed in cooperation with one end of the housing along the first direction;

[0014] The filter cover is provided with an air vent, one end of the air duct is sealedly connected to the filter cover and communicates with the air vent, the other end of the air duct is sealedly matched with the cover body, and the air outlet is communicated with the air duct.

[0015] In one embodiment, the filter cover is provided with a second water inlet, and the second water inlet is communicated with the first water inlet; the second water inlet is communicated with the opening through the water pipe.

[0016] In one embodiment, the filter assembly further comprises a liquid pipe, the input end of the liquid pipe being used to introduce cleaning liquid; a cleaning valve is provided on the liquid pipe, the output end of the liquid pipe is connected to an end of the filter cartridge close to the second end, the end of the filter cartridge close to the first end is provided with a waste pipe, and a waste valve is provided on the waste pipe.

[0017] In one embodiment, the filter assembly further comprises a gas pipe, the input end of the gas pipe is used to introduce clean gas; a vent valve is provided on the gas pipe, and the output end of the gas pipe is connected to an end of the filter cartridge close to the second end.

[0018] In one embodiment, the filter assembly further includes a cleaning tube, the output end of the cleaning tube is connected to an end of the filter cartridge close to the second end, and the output ends of the liquid tube and the gas tube are both connected to the input end of the cleaning tube.

[0019] In one embodiment, the filter assembly further includes a water supply pipe and a water injection pipe, the output end of the water injection pipe is connected to the first water injection port, and the input end of the water injection pipe and the input end of the liquid pipe are commonly connected to the output end of the water supply pipe.

[0020] An embodiment of the present application provides an exhaust gas treatment device, which includes the filter assembly described in any one of the above embodiments, and further includes:

[0021] A cooling assembly, wherein the inlet end of the cooling assembly is connected to the exhaust pipe, the cooling assembly is used to cool the exhaust gas, the outlet end of the cooling assembly is used to communicate with the air inlet, and a special gas valve is provided on the connecting pipe between the outlet end and the air inlet;

[0022] A diaphragm pump, wherein the air inlet end of the diaphragm pump is connected to the air outlet, an evacuation valve is provided on the connecting pipe between the air inlet end and the air outlet, and the air outlet end of the diaphragm pump is used to communicate with the tail exhaust pipe.

[0023] An embodiment of the present application provides a boron diffusion production equipment, including a vacuum furnace, a tail exhaust pipe, and the tail gas treatment device.

[0024] In the aforementioned filter assembly, exhaust gas treatment device, and boron diffusion production equipment, exhaust gas discharged from the exhaust pipe of the vacuum furnace can sequentially enter the filter through-hole through the air inlet and the first end. After being filtered through the filter through-hole, it can be sequentially discharged through the second end and the air outlet to the tailpipe. The filter through-hole can filter some solid particles. Simultaneously, water is injected into the first water inlet, and the water enters the water injection blind hole from the first water inlet through the water pipe. Under the action of water pressure, the water entering the water injection blind hole penetrates into the tiny pores on the inner wall of the water injection blind hole, and then gradually penetrates into the tiny pores of the porous material of the entire filter element, keeping the filter element moist. As the exhaust gas flows through the filter through-hole, it fully contacts the water in the tiny pores on the inner wall of the filter through-hole, so that harmful substances such as B2O3 in the exhaust gas can be absorbed by the water, for example, B2O3+H2O→H3BO3, BCl3+H2O→H3BO3+HCl. Secondly, the exhaust gas cools down and crystallizes as it flows through the filter holes. The B2O3 crystals are then captured by moisture in the tiny pores on the inner wall of the filter holes. This effectively removes harmful substances such as B2O3 from the exhaust gas.

[0025] Compared to water-filtering filter bottles in the prior art, the filter assembly of the embodiments of the present application allows exhaust gas to fully contact the pore walls of the filter holes as it passes through them (compared to the contact between bubbles and water). This large contact area between the exhaust gas and the pore walls allows the exhaust gas to fully contact the water in the tiny pores of the inner walls of the filter holes, allowing harmful substances such as B₂O₃ in the exhaust gas to be fully absorbed by the water, thereby effectively improving filtration efficiency. Therefore, the exhaust gas treatment device of the present application can reduce the number of filter components (compared to providing multiple, sequentially connected water-filtering filter bottles), thereby reducing the volume of the exhaust gas treatment device. Furthermore, the exhaust gas does not vibrate as it passes through the filter holes, thus avoiding the problem of loose parts in boron diffusion production equipment due to vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the structure of a boron diffusion production equipment according to an embodiment.

[0027] Figure 2 Schematic diagram of the structure of a filter assembly according to an embodiment.

[0028] Figure 3 for Figure 2 Schematic diagram of the filter assembly without the cover installed.

[0029] Figure 4 for Figure 2 Schematic diagram of the structure of the filter element of the filter assembly.

[0030] Figure 5 for Figure 4 Schematic diagram of the connection between the filter element and the housing.

[0031] Figure 6 for Figure 2 Top view of the filter assembly.

[0032] Figure 7 for Figure 6 AA cross-section diagram.

[0033] Figure 8 for Figure 6 BB cross-section diagram.

[0034] Description of reference numerals:

[0035] ZZ', first direction;

[0036] 10. Filter assembly; 20. Vacuum furnace; 21. Exhaust pipe; 22. Tail exhaust pipe;

[0037] 110, filter element; 110a, first end; 110b, second end; 111, filter through-hole; 112, water injection blind hole; 120, housing; 121, first side surface; 122, second side surface; 123, gas channel; 130, filter cover; 131, second water injection port; 140, air guide tube;

[0038] 200, filter cartridge; 201, air inlet; 202, air outlet; 203, first water inlet; 204, water pipe; 210, cylinder; 220, cover;

[0039] 310, liquid pipe; 311, cleaning valve; 320, waste pipe; 321, waste valve; 330, gas pipe; 331, vent valve; 340, cleaning pipe; 341, cleaning port; 350, water supply pipe; 360, water injection pipe; 361, water valve;

[0040] 400, cooling assembly; 410, special gas valve;

[0041] 500, diaphragm pump; 510, vacuum valve. DETAILED DESCRIPTION

[0042] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0043] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0045] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0046] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0047] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0048] Please combine Figure 1 and Figure 2 One embodiment of the present application provides a filter assembly 10 . The filter assembly 10 is used in an exhaust gas treatment device of a boron diffusion production equipment. The boron diffusion production equipment includes a vacuum furnace 20 and a tail exhaust pipe 22 .

[0049] Recombination Figures 3 to 5 The filter assembly 10 includes a filter element 110 and a filter cartridge 200. The filter element 110 is located in the filter cartridge 200. Figures 6 to 8 , the filter element 110 has a first end 110a and a second end 110b along the first direction ZZ'. Figure 5 , the filter element 110 is provided with a filter through hole 111 extending along the first direction ZZ'. Figure 1 、 Figure 2 and Figure 7 The filter cartridge 200 is provided with an air inlet 201 and an air outlet 202. The air inlet 201 is connected to the exhaust pipe 21 of the vacuum furnace 20, and the air outlet 202 is connected to the tail exhaust pipe 22 of the boron diffusion production equipment. Exhaust gas discharged from the exhaust pipe 21 can enter the filter through-hole 111 through the air inlet 201 and the first end 110a in sequence. After being filtered, it can be discharged to the tail exhaust pipe 22 in sequence through the second end 110b and the air outlet 202 in sequence.

[0050] Combine Figure 2 、 Figure 5 and Figure 8 The filter element 110 is provided with a plurality of blind water injection holes 112 extending along the first direction ZZ'. The openings of the blind water injection holes 112 are located at the second end 110b. The filter cartridge 200 is provided with a first water injection port 203. The first water injection port 203 is connected to the openings of the blind water injection holes 112 through a water pipe 204.

[0051] The filter element 110 is made of a porous material. The porous material has tiny pores. It should be noted that the tiny pores in the porous material are inherent to the porous material itself, typically on the nanometer or micrometer scale. Therefore, they are not separate filter holes 111 and water injection blind holes 112.

[0052] It can be understood that by injecting water into the first water inlet 203, the water enters the water injection blind hole 112 from the first water inlet 203 through the water pipe 204. Since the bottom of the water injection blind hole 112 is a closed end, the water entering the water injection blind hole 112 penetrates into the tiny pores on the inner wall of the water injection blind hole 112 under the action of water pressure, and then gradually penetrates into the tiny pores of the porous material of the entire filter element 110, so that the filter element 110 remains moist.

[0053] When the above-mentioned filter assembly 10 is used in a boron diffusion production device, the exhaust gas discharged from the exhaust pipe 21 of the vacuum furnace 20 can enter the filter through hole 111 through the air inlet 201 and the first end 110a in sequence, and after being filtered through the filter through hole 111, it can be discharged to the tail pipe 22 through the second end 110b and the air outlet 202 in sequence. The filter through hole 111 can filter some solid particles. At the same time, water is injected into the first water inlet 203, and the water enters the water injection blind hole 112 from the first water inlet 203 through the water pipe 204. The water entering the water injection blind hole 112 penetrates into the tiny pores on the inner wall of the water injection blind hole 112 under the action of water pressure, and then gradually penetrates into the tiny pores of the porous material of the entire filter element 110, so that the filter element 110 remains moist. As the exhaust gas flows through filter hole 111, it comes into contact with the water in the tiny pores on the inner wall of filter hole 111. This allows harmful substances such as B2O3 in the exhaust gas to be absorbed by the water, for example, B2O3 + H2O → H3BO3, and BCl3 + H2O → H3BO3 + HCl. Furthermore, as the exhaust gas flows through filter hole 111, it cools down and crystallizes. The B2O3 crystals are captured by the water in the tiny pores on the inner wall of filter hole 111. This effectively removes harmful substances such as B2O3 from the exhaust gas.

[0054] Furthermore, in the filter assembly 10 of the embodiment of the present application, water enters the water injection blind hole 112 from the first water injection port 203 through the water pipe 204. Under the action of water pressure, the water entering the water injection blind hole 112 penetrates into the tiny pores on the inner wall of the water injection blind hole 112, and then gradually penetrates into the tiny pores of the porous material of the entire filter element 110, so that the material of the filter element 110 remains moist. However, the filter through hole 111 of the filter element 110 is not a liquid environment. Therefore, when the exhaust gas passes through the filter through hole 111, the filter through hole 111 is the gas channel through which the exhaust gas passes, and the exhaust gas passes through the filter through hole 111 in the form of airflow, rather than in the form of bubbles.

[0055] Compared to water-filtering filter bottles in the prior art, the filter assembly 10 of the embodiment of the present application allows exhaust gas to fully contact the pore walls of the filter holes 111 during passage (compared to the contact between bubbles and water). This large contact area between the exhaust gas and the pore walls of the filter holes 111 allows the exhaust gas to fully contact the water in the tiny pores on the inner walls of the filter holes 111, allowing harmful substances such as B2O3 in the exhaust gas to be fully absorbed by the water, thereby effectively improving filtration efficiency. Therefore, the exhaust gas treatment device of the present application can reduce the number of filter components (compared to providing multiple water-filtering filter bottles connected in series), thereby reducing the volume of the exhaust gas treatment device. Furthermore, the exhaust gas does not generate vibration during passage through the filter holes 111, thus avoiding the problem of loose parts in boron diffusion production equipment due to vibration.

[0056] The filter assembly 10 can not only effectively remove harmful substances such as B2O3 from the exhaust gas, but also has a simple structure. In addition, the exhaust gas cools down and crystallizes during the process of flowing through the filter holes 111, thereby reducing the risk of excessive exhaust temperature damaging the diaphragm pump 500.

[0057] In one embodiment, the porous material used in the filter element 110 is a sintered metal porous material or a sintered ceramic porous material, and the porous material has a three-dimensional interconnected network of pores.

[0058] Optionally, the porous material used in the filter element 110 is a honeycomb material.

[0059] Please combine Figure 2 、 Figure 6 and Figure 7 In one embodiment, the filter cartridge 200 includes a cylinder body 210 and a cover body 220 . The cover body 220 is sealed with one end of the cylinder body 210 , and the air inlet 201 and the air outlet 202 are respectively provided on the cover body 220 .

[0060] Refer again Figure 3 and Figure 4 The filter assembly further includes a housing 120 having a cavity extending along a first direction ZZ'. The filter element 110 is located within the cavity of the housing 120. The housing 120 has circumferential side surfaces extending along the first direction ZZ'. The circumferential side surfaces include a first side surface 121 and a second side surface 122 connected end to end along the circumferential direction. The first side surface 121 is sealed against the inner side wall of the barrel 210, and a gas channel 123 is formed between the second side surface 122 and the inner side wall of the barrel 210. One end of the gas channel 123 is connected to the air inlet 201, and the other end of the gas channel 123 is connected to the first end 110a of the filter element 110.

[0061] In this embodiment, the air inlet 201 and the air outlet 202 are respectively provided on the cover 220. By forming a gas channel 123 between the second side surface 122 and the inner sidewall of the cylinder 210, the exhaust gas can be guided from the air inlet 201 into the gas channel 123, then pass through the filter through-hole 111 from the first end 110a to the second end 110b through the gas channel 123, and then be discharged from the air outlet 202. In this way, not only can the exhaust gas be filtered through the filter through-hole 111, but the air inlet 201 and the air outlet 202 can also be respectively provided on the cover 220, eliminating the need to provide the air inlet 201 or the air outlet 202 on the cylinder 210, thereby facilitating the structural design and pipeline connection of the filter cartridge 200.

[0062] Optionally, in Figure 4 、 Figure 5 In the illustrated embodiment, the first side surface 121 is a curved surface, and the second side surface 122 is a flat surface.

[0063] In other embodiments, the first side surface may also be in other shapes as long as it is sealed with the cylinder 210 .

[0064] refer to Figures 3 to 5 In one embodiment, the filter assembly further includes a filter cover 130 and an air duct 140. The filter cover 130 is sealed with one end of the housing 120 along the first direction ZZ'.

[0065] Refer again Figure 6 and Figure 7 The filter cover 130 is provided with a vent, and one end of the air duct 140 is sealedly connected to the filter cover 130 and communicates with the vent. The other end of the air duct 140 is sealed and matched with the cover body 220. The air outlet 202 is communicated with the air duct 140.

[0066] Because one end of air duct 140 is sealedly connected to filter cover 130, and the other end of air duct 140 is sealedly mated with cover body 220, air inlet 201 is isolated from the interior of air duct 140. Therefore, exhaust gas entering air inlet 201 is guided into gas passage 123, and then flows through gas passage 123 to first end 110a of filter element 110. Because one end of air duct 140 is sealedly connected to filter cover 130 and communicates with the vent, and air outlet 202 is communicated with air duct 140, exhaust gas, after exiting filter through-hole 111, can enter air duct 140 through the vent on filter cover 130, and then exit from air duct 140 to outlet 202. The structural design of filter element 110 of this embodiment conveniently and effectively guides exhaust gas from air inlet 201 into gas passage 123, through gas passage 123, through filter through-hole 111, and finally out of outlet 202, while maintaining a simple structure.

[0067] Please refer to Figure 4 、 Figure 6 and Figure 8 In one embodiment, the filter cover 130 is provided with a second water inlet 131, which is connected to the first water inlet 203. Specifically, the second water inlet 131 and the first water inlet 203 can be connected via a pipe. The second water inlet 131 is connected to the opening of the water injection blind hole 112 via a water pipe 204. In this way, water from the first water inlet 203 can flow to the second water inlet 131, then enter the water injection blind hole 112 through the water pipe 204, thereby facilitating the connection between the first water inlet 203 and the water injection blind hole 112.

[0068] It can be understood that there are multiple water injection blind holes 112 , and the multiple water pipes 204 corresponding to the multiple water injection blind holes 112 can be commonly connected to the second water injection port 131 .

[0069] Please refer to Figure 1 In one embodiment, the filter assembly 10 further includes a liquid pipe 310 , the input end of which is used to introduce cleaning liquid. A cleaning valve 311 is provided on the liquid pipe 310 . The output end of the liquid pipe 310 is connected to the end of the filter cartridge 200 near the second end 110b of the filter element 110 . The end of the filter cartridge 200 near the first end 110a of the filter element 110 is provided with a waste pipe 320 , which is equipped with a waste valve 321 .

[0070] By introducing cleaning liquid into the liquid pipe 310, the cleaning liquid flows through the cleaning valve 311 into the filter cartridge 200, reaches the second end 110b of the filter element 110, and then enters the filter through-hole 111 from the second end 110b of the filter element 110, thereby flushing the filter through-hole 111. After passing through the filter through-hole 111, the cleaning liquid flows out from the first end 110a of the filter element 110 and is discharged through the waste pipe 320 and waste valve 321, thereby cleaning the filter element 110. In this way, the cleaned filter element 110 can be reused, eliminating the need for frequent replacement of the filter element 110.

[0071] The cleaning valve 311 can be closed or opened to control the flow or blocking of the cleaning liquid in the liquid pipe 310. The cleaning liquid can be water. The waste valve 321 can be closed or opened to control the flow or blocking of the waste pipe 320.

[0072] Please refer to Figure 2 and Figure 7 In one embodiment, a cleaning port 341 is provided on the cover 220. The output end of the liquid pipe 310 is connected to the cleaning port 341. After the cleaning liquid flows out of the liquid pipe 310, it can enter the filter cartridge 200 through the cleaning port 341 and then enter the filter through hole 111 of the filter element 110.

[0073] Please refer to Figure 1In one embodiment, the filter assembly 10 further includes a gas pipe 330 , the input end of which is used to introduce clean gas. The clean gas may be dry compressed air. A vent valve 331 is provided on the gas pipe 330 , and the output end of the gas pipe 330 is in communication with the end of the filter cartridge 200 proximal to the second end 110 b.

[0074] Clean gas can be introduced into the gas pipe 330, whereupon it flows through the vent valve 331 into the filter cartridge 200, reaches the second end 110b of the filter element 110, and then enters the filter through-hole 111 from the second end 110b of the filter element 110, thereby cleaning the filter through-hole 111. After passing through the filter through-hole 111, the clean gas flows out from the first end 110a of the filter element 110 and is discharged through the exhaust pipe 320 and exhaust valve 321, thereby cleaning the filter element 110.

[0075] After the cleaning liquid is used to clean the filter holes 111, the cleaning gas can be used to dry the filter holes 111. After the cleaning gas flows out of the gas pipe 330, it can enter the filter cartridge 200 through the cleaning port 341 and then enter the filter holes 111 of the filter element 110.

[0076] Please refer to Figure 1 In one embodiment, the filter assembly 10 further includes a cleaning pipe 340. The output end of the cleaning pipe 340 is connected to the end of the filter cartridge 200 near the second end 110b. The output ends of the liquid pipe 310 and the gas pipe 330 are both connected to the input end of the cleaning pipe 340. Specifically, the output end of the cleaning pipe 340 can be connected to the cleaning port 341.

[0077] Because the output ends of the liquid pipe 310 and the gas pipe 330 are both connected to the input end of the cleaning pipe 340, cleaning liquid can be simultaneously introduced into the liquid pipe 310 and cleaning gas can be simultaneously introduced into the gas pipe 330. As a result, the cleaning liquid and cleaning gas form a high-pressure water mist in the cleaning pipe 340, which can then be used to clean the filter through-holes 111. After the filter through-holes 111 are cleaned with the high-pressure water mist, the filter through-holes 111 can be dried with the cleaning gas alone.

[0078] Please refer to Figure 1 In one embodiment, the filter assembly 10 also includes a water supply pipe 350 and a water injection pipe 360, the output end of the water injection pipe 360 ​​is connected to the first water injection port 203, and the input end of the water injection pipe 360 ​​and the input end of the liquid pipe 310 are commonly connected to the output end of the water supply pipe 350.

[0079] The input end of the water supply pipe 350 is connected to a water source. Water entering the water supply pipe 350 can be used to flow to the water injection pipe 360, thereby flowing through the water injection pipe 360 ​​to the first water injection port 203. Because the input end of the water injection pipe 360 ​​and the input end of the liquid pipe 310 are both connected to the output end of the water supply pipe 350, the water supply pipe 350 can be used to supply water to the water injection pipe 360 ​​and the liquid pipe 310 respectively.

[0080] Please refer to Figure 1 The embodiment of the present application also provides an exhaust gas treatment device, comprising the filter assembly 10 of any of the above embodiments. The exhaust gas treatment device further comprises a cooling assembly 400 and a diaphragm pump 500. The inlet end of the cooling assembly 400 is connected to the exhaust pipe 21. The cooling assembly 400 is used to cool the exhaust gas. The outlet end of the cooling assembly 400 is used to connect to the air inlet 201. A special gas valve 410 is provided on the connecting pipe between the outlet end and the air inlet 201. The inlet end of the diaphragm pump 500 is connected to the air outlet 202. An evacuation valve 510 is provided on the connecting pipe between the inlet end and the air outlet 202. The outlet end of the diaphragm pump 500 is used to connect to the tail exhaust pipe 22.

[0081] Cooling assembly 400 can be a condenser bottle, etc. Cooling assembly 400 cools the exhaust gas, reducing its temperature and preventing excessive temperatures from damaging diaphragm pump 500. Cooling also crystallizes solid particles, such as boron oxide, in the exhaust gas, thereby removing them from the exhaust gas.

[0082] The diaphragm pump 500 is used to evacuate the vacuum furnace 20. During normal operation, the vacuum valve 510 and the special gas valve 410 can be opened to allow the diaphragm pump 500 to evacuate the air, accelerating the flow of exhaust gas through the filter assembly 10 and rapidly treating the exhaust gas. To clean the filter element 110, the vacuum valve 510 and the special gas valve 410 can be closed, allowing for online cleaning without removing the filter element 110.

[0083] Please refer to Figure 1 An embodiment of the present application provides a boron diffusion production equipment, including a vacuum furnace 20, a tail exhaust pipe 22, and the tail gas treatment device in the above embodiment.

[0084] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A filter assembly, characterized in that: The filter assembly includes a filter element and a filter cartridge; The filter element has a first end and a second end along a first direction, and is provided with a plurality of filter through-holes along the first direction; the filter element is located in the filter cartridge, and the filter cartridge is provided with an air inlet and an air outlet; the air inlet is used to communicate with the exhaust pipe of the vacuum furnace of the boron diffusion production equipment, and the air outlet is used to communicate with the tail exhaust pipe of the boron diffusion production equipment; the exhaust gas discharged from the exhaust pipe can sequentially enter the filter through-holes through the air inlet and the first end, and after being filtered, can be sequentially discharged to the tail exhaust pipe through the second end and the air outlet; The filter element is provided with a plurality of water injection blind holes extending along the first direction, and the openings of the water injection blind holes are provided at the second end; the filter cartridge is provided with a first water injection port, and the first water injection port is connected to the opening through a water pipe; the filter element is made of porous material.

2. The filter assembly according to claim 1, characterized in that The filter cartridge includes a cylinder and a cover, the cover is sealed with one end of the cylinder, and the air inlet and the air outlet are respectively provided on the cover; The filter assembly also includes a shell, the filter element is located in the shell, the shell has a circumferential side surface surrounding the first direction, the circumferential side surface includes a first side surface and a second side surface connected end to end along the circumferential direction, the first side surface is sealed with the inner side wall of the cylinder, and a gas channel is formed between the second side surface and the inner side wall of the cylinder; one end of the gas channel is connected to the air inlet, and the other end of the gas channel is connected to the first end.

3. The filter assembly according to claim 2, characterized in that The filter assembly further comprises a filter cover and an air guide tube, wherein the filter cover is sealed in cooperation with one end of the housing along the first direction; The filter cover is provided with an air vent, one end of the air duct is sealedly connected to the filter cover and communicates with the air vent, the other end of the air duct is sealedly matched with the cover body, and the air outlet is communicated with the air duct.

4. The filter assembly according to claim 3, characterized in that The filter cover is provided with a second water injection port, which is communicated with the first water injection port; the second water injection port is communicated with the opening through the water pipe.

5. The filter assembly according to claim 1, characterized in that It also includes a liquid pipe, the input end of which is used to introduce cleaning liquid; a cleaning valve is provided on the liquid pipe, the output end of the liquid pipe is connected to the end of the filter cartridge close to the second end, the end of the filter cartridge close to the first end is provided with a waste pipe, and the waste pipe is provided with a waste valve.

6. The filter assembly according to claim 5, characterized in that It also includes a gas pipe, the input end of which is used to introduce clean gas; a vent valve is provided on the gas pipe, and the output end of the gas pipe is connected to an end of the filter cartridge close to the second end.

7. The filter assembly according to claim 6, characterized in that It also includes a cleaning pipe, the output end of the cleaning pipe is connected to the end of the filter cartridge close to the second end, and the output ends of the liquid pipe and the gas pipe are both connected to the input end of the cleaning pipe.

8. The filter assembly according to claim 5, characterized in that It also includes a water supply pipe and a water injection pipe, the output end of the water injection pipe is connected to the first water injection port, and the input end of the water injection pipe and the input end of the liquid pipe are commonly connected to the output end of the water supply pipe.

9. An exhaust gas treatment device, characterized in that: The exhaust gas treatment device comprises the filter assembly according to any one of claims 1 to 8, and further comprises: A cooling assembly, wherein the inlet end of the cooling assembly is connected to the exhaust pipe, the cooling assembly is used to cool the exhaust gas, the outlet end of the cooling assembly is used to communicate with the air inlet, and a special gas valve is provided on the connecting pipe between the outlet end and the air inlet; A diaphragm pump, wherein the air inlet end of the diaphragm pump is connected to the air outlet, an evacuation valve is provided on the connecting pipe between the air inlet end and the air outlet, and the air outlet end of the diaphragm pump is used to communicate with the tail exhaust pipe.

10. A boron diffusion production equipment, characterized in that, It comprises a vacuum furnace, a tail exhaust pipe, and the tail gas treatment device according to claim 9.

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