Press fit mechanism in vacuum

Abstract

The utility model aims to disclose a press fit mechanism in vacuum, which comprises a press fit platform, a lower bottom plate is arranged below the press fit platform, a left vertical plate and a right vertical plate which are symmetrical are respectively arranged on the lower bottom plate, and the upper end of the left vertical plate and the upper end of the right vertical plate are connected through a trapezoidal threaded lead screw for transmission. A positive trapezoidal thread nut and a negative trapezoidal thread nut are symmetrically arranged on the two sides of the trapezoidal thread lead screw for transmission; a lower die quick-change plate is arranged above the pressing platform, the lower end of the regular trapezoidal tooth nut and the lower end of the reverse trapezoidal tooth nut are respectively connected with one end of a lever supporting block through a cantilever sheath, the other end of the lever supporting block is connected with a lever fixing block through a cantilever sheath, and the lever fixing block is connected with an upper die quick-change plate; in a vacuum environment, the moving direction and height between the upper mold blocks are controlled by adjusting the moving direction of the positive trapezoidal thread nut and the moving direction of the negative trapezoidal thread nut, and therefore the purpose of press fit is achieved. And by replacing different upper die quick-change plates, quick pressing of different workpieces is achieved, and the utilization rate of materials is increased.

Description

Technical Field

[0001] The utility model relates to a processing device for an electrostatic chuck, in particular to a pressing mechanism in a vacuum. Background Art

[0002] As a core component of semiconductors, electrostatic chucks can generally be divided into three layers: ceramic electrode layer, heating layer and base layer. Different layers are bonded to each other with glue.

[0003] At present, the relevant pressing mechanism of the electrostatic chuck has not been proposed in China. Considering the problems of uneven thickness of the glue layer, easy mixing of bubbles and impurities in the actual pressing process of different layers of the electrostatic chuck, the flatness of the surface of the electrostatic chuck is reduced.

[0004] In addition, using different pressing mechanisms for electrostatic chucks of different sizes often leads to new problems such as waste of raw materials.

[0005] Therefore, a pressing mechanism in vacuum is particularly needed to solve the above-mentioned existing problems. Utility Model Content

[0006] The present utility model aims to provide a vacuum lamination mechanism that addresses the shortcomings of existing technologies and solves the problems of uneven adhesive thickness, air bubbles, and impurities during the actual lamination of different layers of an electrostatic chuck, which can reduce the flatness of the chuck surface. Furthermore, using different lamination mechanisms for different chuck sizes often results in new problems such as waste of raw materials.

[0007] The technical problem solved by the present invention can be achieved by adopting the following technical solutions:

[0008] A pressing mechanism in a vacuum comprises a pressing platform, a lower base plate provided below the pressing platform, symmetrical left and right vertical plates provided on the lower base plate, the upper ends of the left and right vertical plates being linked by a transmission trapezoidal thread lead screw, symmetrical positive trapezoidal nuts and negative trapezoidal nuts provided on both sides of the transmission trapezoidal thread lead screw;

[0009] A lower die quick-change plate is provided above the pressing platform, the lower ends of the positive trapezoidal nut and the reverse trapezoidal nut are respectively connected to one end of the lever support block through a cantilever sheath, the other end of the lever support block is connected to the lever fixing block through a cantilever sheath, and the lever fixing block is connected to the upper die quick-change plate; the upper ends of the left vertical plate and the right vertical plate are respectively provided with deep groove ball bearings.

[0010] In one embodiment of the present invention, a servo electric cylinder fixing block is provided at the upper end of the left vertical plate, and the servo electric cylinder fixing block links the coupling and the servo electric cylinder.

[0011] Furthermore, the coupling is provided with a first synchronous pulley and a second synchronous pulley, and the first synchronous pulley and the second synchronous pulley are linked by a synchronous belt.

[0012] In one embodiment of the present invention, an upper mold quick-change plate is provided below the upper mold, two symmetrical equal-height blocks are provided on both sides of the upper mold quick-change plate, a MYZP independent guide column assembly is provided below the equal-height blocks, the equal-height blocks and the MYZP independent guide column assembly are arranged perpendicular to each other, the MYZP independent guide column assembly is connected to the lower base plate, and the MYZP independent guide column assembly and the lower base plate are arranged perpendicular to each other.

[0013] In one embodiment of the present invention, a first height limiting column is provided below the upper mold block, a second height limiting column is provided vertically below the first height limiting column, the second height limiting column is connected to the lower base plate, and the second height limiting column and the lower base plate are vertically linked.

[0014] In one embodiment of the present invention, a MYKP ball independent guide column assembly is provided at each end of the upper mold block, and the MYKP ball independent guide column assembly and the upper mold block are symmetrical and vertically placed.

[0015] Compared with the prior art, the vacuum pressing mechanism of the present invention controls the movement direction and height of the upper mold blocks by adjusting the movement direction of the positive and negative trapezoidal nuts in a vacuum environment, thereby achieving the purpose of pressing and avoiding the presence of bubbles in the pressing process that affect the performance of high-precision workpieces; at the same time, different upper mold quick-change plates are used for electrostatic chucks of different sizes to achieve rapid pressing of different workpieces, improve material utilization, and achieve the purpose of the present invention.

[0016] The features of the present invention can be clearly understood by referring to the drawings and the following detailed description of preferred embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the entire pressing mechanism of the utility model;

[0018] Figure 2 This is a schematic diagram of a servo electric cylinder driving a trapezoidal threaded lead screw for transmission;

[0019] Figure 3 It is a schematic diagram of the press-fit height limit of the utility model;

[0020] Figure 4 It is a top perspective view of the pressing mechanism of the present utility model.

[0021] Numbers in the figure: 1-lower base plate; 2-pressing platform; 3-lower die quick change plate; 4-upper die quick change plate; 5-right vertical plate; 6-left vertical plate; 7-trapezoidal thread screw for transmission; 8-reverse trapezoidal thread nut; 9-positive trapezoidal thread nut; 10-lever support block; 11-cantilever sheath; 12-lever fixing block; 13-servo electric cylinder fixing block; 14-servo electric cylinder; 15-coupling; 16-first synchronous pulley; 17-second synchronous pulley; 18-synchronous belt; 19-upper die quick change plate; 20-equal height block; 21-MYZP independent guide column assembly; 22-MYKP ball independent guide column assembly; 23-height limit column; 24-second height limit column; 25-deep groove ball bearing. DETAILED DESCRIPTION

[0022] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0023] like Figures 1 to 4 As shown, the pressing mechanism of the utility model in vacuum includes a pressing platform 2, a lower base plate 1 is provided below the pressing platform 2, and symmetrical left and right vertical plates 6 and 5 are respectively provided on the lower base plate 1, the upper end of the left vertical plate 6 and the upper end of the right vertical plate 5 are connected by a trapezoidal thread screw 7 for transmission, and symmetrical positive trapezoidal nuts 9 and negative trapezoidal nuts 8 are provided on both sides of the trapezoidal thread screw 7 for transmission; a lower mold quick-change plate 3 is provided above the pressing platform 2; the lower end of the positive trapezoidal nut 9 and the lower end of the negative trapezoidal nut 8 are respectively connected to one end of the lever support block 10 through a cantilever sheath 11, and the other end of the lever support block 10 is connected to the lever fixing block 12 through the cantilever sheath 11, and the lever fixing block 12 is connected to the upper mold quick-change plate 4; a deep groove ball bearing 25 is provided at the upper end of the right vertical plate 5, and a deep groove ball bearing 25 is provided at the upper end of the left vertical plate 6.

[0024] Among them, a servo cylinder fixing block 13 is provided at the upper end of the left vertical plate 6; the servo cylinder fixing block 13 links the coupling 15 and the servo cylinder fixing block 13; the coupling 15 is provided with a first synchronous pulley 16 and a second synchronous pulley 17, and the first synchronous pulley 16 and the second synchronous pulley 17 are linked by a synchronous belt 18.

[0025] Among them, an upper mold quick-change plate 3 is arranged below the upper mold fast change plate 19, and symmetrical contour blocks 20 are provided on the left and right sides of the upper mold quick-change plate 3. A MYZP independent guide column assembly 21 is arranged below the contour block 20, and the contour block 20 is vertically arranged to the MYZP independent guide column assembly 21. The MYZP independent guide column assembly 21 is linked to the lower base plate 1, and the MYZP independent guide column assembly 21 is vertically arranged to the lower base plate 1; a first height limiting column 23 is provided below the upper mold fast 19, and a second height limiting column 24 is provided vertically below the first height limiting column 23. The second height limiting column 24 is connected to the lower base plate 1, and the second height limiting column 24 is vertically linked to the lower base plate 1; a MYKP ball independent guide column assembly 22 is provided at each end of the upper mold fast 19, and the MYKP ball independent guide column assembly 22 is symmetrical and vertically placed with the upper mold fast 19.

[0026] The working process of the pressing mechanism in vacuum of the present utility model is as follows:

[0027] According to the size of the electrostatic chuck, a suitable upper mold quick-change plate 4 is selected, and the servo electric cylinder 14 is started. The first synchronous pulley 16 drives the second synchronous pulley 17 to rotate via the synchronous belt 18, and the transmission trapezoidal thread screw 7 connected to it rotates. The positive trapezoidal nut 9 and the reverse trapezoidal nut 8 on both sides of the transmission trapezoidal thread screw 7 move in opposite directions. The upper mold quick-change plate 4 is driven up and down by the upper mold 19. The first height limiting column 23 and the second height limiting column 24 control the minimum pressing amount, thereby achieving the pressing purpose between different layers of the electrostatic chuck; in a vacuum environment, wait for the glue to be completely cured before taking it out.

[0028] The vacuum pressing mechanism of this utility model adjusts the movement direction of the positive trapezoidal nut 9 and the negative trapezoidal nut 8 in a vacuum environment to control the movement direction and height of the upper die, thereby achieving the purpose of pressing, and preventing the presence of bubbles during the pressing process from affecting the performance of high-precision workpieces. At the same time, different upper die quick-change plates are used to adjust the size of the electrostatic chuck, enabling rapid pressing of different workpieces and improving material utilization.

[0029] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for illustrative purposes. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements shall fall within the scope of the present invention as claimed, and the scope of protection claimed by the present invention shall be defined by the appended claims and their equivalents.

Claims

1. A pressing mechanism in vacuum, characterized in that: It includes a pressing platform, a lower base plate is provided below the pressing platform, and a symmetrical left vertical plate and a right vertical plate are provided on the lower base plate respectively. The upper end of the left vertical plate and the upper end of the right vertical plate are connected by a transmission trapezoidal thread screw, and symmetrical positive trapezoidal thread nuts and negative trapezoidal thread nuts are provided on both sides of the transmission trapezoidal thread screw; A lower die quick-change plate is provided above the pressing platform, the lower ends of the positive trapezoidal nut and the reverse trapezoidal nut are respectively connected to one end of the lever support block through a cantilever sheath, the other end of the lever support block is connected to the lever fixing block through a cantilever sheath, and the lever fixing block is connected to the upper die quick-change plate; the upper ends of the left vertical plate and the right vertical plate are respectively provided with deep groove ball bearings.

2. The vacuum pressing mechanism according to claim 1, wherein: A servo electric cylinder fixing block is provided at the upper end of the left vertical plate, and the servo electric cylinder fixing block links the coupling and the servo electric cylinder.

3. The vacuum pressing mechanism according to claim 2, wherein: The coupling is provided with a first synchronous pulley and a second synchronous pulley, and the first synchronous pulley and the second synchronous pulley are linked by a synchronous belt.

4. The vacuum pressing mechanism according to claim 1, wherein: An upper mold quick-change plate is provided below the upper mold quick-change plate, and two symmetrical equal-height blocks are provided on both sides of the upper mold quick-change plate. A MYZP independent guide column assembly is provided below the equal-height blocks, and the equal-height blocks and the MYZP independent guide column assembly are arranged perpendicular to each other. The MYZP independent guide column assembly is connected to the lower base plate, and the MYZP independent guide column assembly and the lower base plate are arranged perpendicular to each other.

5. The vacuum pressing mechanism according to claim 1, wherein: A first height-limiting column is provided below the upper mold block, a second height-limiting column is provided vertically below the first height-limiting column, the second height-limiting column is connected to the lower base plate, and the second height-limiting column and the lower base plate are vertically linked.

6. The vacuum pressing mechanism according to claim 1, wherein: A MYKP ball independent guide column assembly is respectively provided at both ends of the upper mold block, and the MYKP ball independent guide column assembly is symmetrically and vertically placed with the upper mold block.

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