Rigid-flexible coupling force control mechanism with adjustable force distribution sensing attitude

Abstract

The utility model relates to the technical field of force control mechanisms, in particular to a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism. In order to solve the problems that the precision is improved by eliminating friction through air floatation and the production cost is increased due to the fact that the attitude is detected through a gyroscope in the prior art, the utility model provides the following technical scheme that the rigid-flexible coupling motion platform comprises a mounting seat, a driving element and a working platform, the driving element is mounted in the mounting seat, and the moving end of the driving element is fixedly connected with the working platform; the mounting bracket is mounted on one side, far away from the mounting seat, of the working platform; a two-dimensional flexible posture adjusting mechanism is arranged at one end of the mounting bracket, and the two-dimensional flexible posture adjusting mechanism is used for adjusting force control uniformity; and a force sensing unit. According to the utility model, the problems of low force control precision and non-uniform force control in the prior art are effectively solved, the uniformity of chip lamination is ensured, and the cost is effectively reduced at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of force control mechanisms, in particular to a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism. Background Art

[0002] In order to ensure the uniformity of chip bonding, the applied force needs to be precisely controlled, and the force uniformity error is required to be less than a given accuracy. The current common technical solution is to use an air flotation system to eliminate friction, thereby improving the accuracy of the bonding process. In addition, the chip's posture is monitored in real time by a gyroscope to correct possible posture deviations, which helps to further improve the accuracy of bonding. However, these advanced technical solutions are often expensive, increasing the overall production cost. In view of this, the utility model proposes a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism. Utility Model Content

[0003] The purpose of the utility model is to propose a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism to address the problem that the existing method in the background technology improves accuracy by eliminating friction through air flotation and detects posture through gyroscopes, which is expensive and increases production costs.

[0004] The technical solution of the present utility model: a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism, comprising a rigid-flexible coupling motion platform, the rigid-flexible coupling motion platform comprising a mounting seat, a driving element and a working platform, the driving element being installed in the mounting seat, and the moving end of the driving element being fixedly connected to the working platform; a mounting bracket being installed on the side of the working platform away from the mounting seat; a two-dimensional flexible posture adjustment mechanism being provided at one end of the mounting bracket, the two-dimensional flexible posture adjustment mechanism being used to adjust the force control uniformity; a force sensing unit, the force sensing unit being installed on the side of the two-dimensional flexible posture adjustment mechanism away from the mounting bracket, for detecting force deviation; and a force control probe being provided on the side of the force sensing unit away from the two-dimensional flexible posture adjustment mechanism.

[0005] Optionally, the rigid-flexible coupling motion platform also includes at least two sets of guide rails installed on one side of the mounting seat close to the working platform, each set of the guide rails is slidably connected to at least one set of sliders, and multiple sets of the sliders are fixedly connected to a frame, and multiple sets of flexible hinges are connected between the frame and the working platform.

[0006] Optionally, the two-dimensional flexible posture adjustment mechanism includes a first adjustment plate, a second adjustment plate and a third adjustment plate arranged in sequence on one side of the mounting bracket, the first adjustment plate is fixedly connected to the mounting bracket, one side of the first adjustment plate and one side of the second adjustment plate are commonly fixedly connected with a connecting plate, one side of the second adjustment plate and one side of the third adjustment plate are also fixedly connected with a connecting plate, and the two groups of connecting plates are orthogonally arranged.

[0007] Optionally, two groups of electric length adjustment components are respectively installed on the side of the second adjustment plate away from the two groups of connecting plates, and the two groups of electric length adjustment components are orthogonally arranged. The electric length adjustment components include a first fixed plate, and a second fixed plate is arranged below the first fixed plate. The first fixed plate and the second fixed plate in one group of electric length adjustment components are respectively fixedly connected to the sides of the first adjustment plate and the second adjustment plate, and the first fixed plate and the second fixed plate in the other group of electric length adjustment components are respectively fixedly connected to the sides of the second adjustment plate and the third adjustment plate.

[0008] Optionally, a threaded rod is threadedly connected to the second fixing plate, the threaded rod is rotatably connected to the first fixing plate via a bearing, and one end of the threaded rod is fixedly connected to the first gear.

[0009] Optionally, a micro servo motor is installed on a side of the first fixing plate away from the mounting bracket, and an output end of the micro servo motor is fixedly connected to a second gear, and the second gear is meshed with the first gear.

[0010] Optionally, a mounting plate is fixedly connected to a side of the third adjustment plate away from the mounting bracket, the force sensing unit is installed at the bottom of the mounting plate, and the force control probe is connected to the mounting plate through the force sensing unit.

[0011] Optionally, the force sensing unit is composed of at least three groups of one-dimensional independent sensors, or an integrated sensor composed of multiple integrated detection units.

[0012] In summary, this application includes at least one of the following beneficial technical effects:

[0013] The utility model eliminates the friction between the guide rail and the slider by setting the flexible hinge, and can achieve precise force control;

[0014] Furthermore, by setting up a force sensing unit, after detecting the force deviation, the electric length adjustment component in the two-dimensional flexible posture adjustment mechanism adjusts the posture of the flexible hinge so that the force control remains uniform;

[0015] In summary, the present invention effectively solves the problems of low force control precision and uneven force control in the prior art, ensures uniformity of chip bonding, and effectively reduces costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A structural diagram of a force distribution sensing and posture adjustable rigid-flexible coupling force control mechanism is given;

[0017] Figure 2 yes Figure 1 A magnified schematic diagram of point A in the middle;

[0018] Figure 3 yes Figure 1 Schematic diagram of the cross-section structure;

[0019] Figure 4 It is a structural diagram of the driving element.

[0020] Reference numerals:

[0021] 1. Rigid-flexible coupling motion platform; 11. Mounting seat; 12. Driving element; 13. Guide rail; 14. Slider; 15. Frame; 16. Flexible hinge; 17. Working platform;

[0022] 2. Install the bracket;

[0023] 3. Two-dimensional flexible posture adjustment mechanism; 31. First adjustment plate; 32. Second adjustment plate; 33. Third adjustment plate; 34. Electric length adjustment assembly; 35. Connecting plate; 341. First fixing plate; 342. Second fixing plate; 343. Threaded rod; 344. First gear; 345. Micro servo motor; 346. Second gear;

[0024] 4. Force sensing unit; 41. Mounting plate;

[0025] 5. Force control probe. DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention.

[0028] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0031] Example

[0032] like Figure 1-4 As shown, the present invention proposes a force distribution sensing posture adjustable rigid-flexible coupling force control mechanism, including a rigid-flexible coupling motion platform 1, the rigid-flexible coupling motion platform 1 includes a mounting seat 11, a driving element 12 and a working platform 17, the driving element 12 is installed in the mounting seat 11, and the driving element 12 can be a servo motor driving a ball screw to drive the driving element 12. Figure 3 As shown, the driving element 12 can also be driven by a linear motor. Figure 4 As shown. The moving end of the driving element 12 is fixedly connected to the working platform 17, and the driving element 12 drives the working platform 17 to move directly. The rigid-flexible coupling motion platform 1 also includes two sets of guide rails 13 installed on the side of the mounting seat 11 close to the working platform 17. Two sets of sliders 14 are slidably connected to each set of guide rails 13. Multiple sets of sliders 14 are fixedly connected to a frame 15. The frame 15 moves smoothly under the limiting action of the sliders 14 and the guide rails 13. Multiple sets of flexible hinges 16 are connected between the frame 15 and the working platform 17. The flexible hinges 16 are used to eliminate the deviation caused by the friction between the guide rails 13 and the sliders 14. The mounting bracket 2 is installed on the side of the working platform 17 away from the mounting seat 11. The mounting bracket 2 moves synchronously with the working platform 17.

[0033] Specifically, the force control mechanism includes a two-dimensional flexible posture adjustment mechanism 3 provided at one end of the mounting bracket 2, and the two-dimensional flexible posture adjustment mechanism 3 is used to adjust the uniformity of force control. The two-dimensional flexible posture adjustment mechanism 3 includes a first adjustment plate 31, a second adjustment plate 32, and a third adjustment plate 33, which are sequentially provided on one side of the mounting bracket 2. The first adjustment plate 31 is fixedly connected to the mounting bracket 2, and a connecting plate 35 is fixedly connected to one side of the first adjustment plate 31 and the second adjustment plate 32. A connecting plate 35 is also fixedly connected to one side of the second adjustment plate 32 and the third adjustment plate 33, so that the first adjustment plate 31, the second adjustment plate 32, and the third adjustment plate 33 are connected as a whole. The connecting plate 35 is an elastic body, which facilitates the adjustment of the angle between the first adjustment plate 31, the second adjustment plate 32, and the third adjustment plate 33. The connecting plate 35 can be a structure that is integrated with the first adjustment plate 31, the second adjustment plate 32, and the third adjustment plate 33, or can be connected in a combined installation form. The two groups of connecting plates 35 are orthogonally arranged to facilitate adjustment of the inclinations of the first adjustment plate 31 , the second adjustment plate 32 and the third adjustment plate 33 so as to adjust the uniformity of force control.

[0034] Furthermore, two sets of electric length adjustment assemblies 34 are installed on the side of the second adjustment plate 32 away from the two sets of connecting plates 35. The two sets of electric length adjustment assemblies 34 are arranged orthogonally to facilitate the adjustment of the force in four directions, so that the force control is uniform. The electric length adjustment assembly 34 includes a first fixed plate 341, and a second fixed plate 342 is arranged below the first fixed plate 341. The first fixed plate 341 and the second fixed plate 342 in one set of electric length adjustment assemblies 34 are respectively fixedly connected to the sides of the first adjustment plate 31 and the second adjustment plate 32, while the first fixed plate 341 and the second fixed plate 342 in the other set of electric length adjustment assemblies 34 are respectively fixedly connected to the sides of the second adjustment plate 32 and the third adjustment plate 33. A threaded rod 343 is threadedly connected to the second fixed plate 342. When the threaded rod 343 rotates, it drives the second fixed plate 342 to move along the length direction of the threaded rod 343. The threaded rod 343 is rotatably connected to the first fixed plate 341 via a bearing, allowing the threaded rod 343 to rotate while remaining in place. This allows the distance between the second fixed plate 342 and the first fixed plate 341 to be adjusted as the threaded rod 343 rotates, thereby adjusting the uniformity of force. A first gear 344 is fixedly connected to one end of the threaded rod 343, and when the first gear 344 rotates, the threaded rod 343 rotates synchronously. A micro-servo motor 345 is mounted on the side of the first fixed plate 341 away from the mounting bracket 2. The output end of the micro-servo motor 345 is fixedly connected to a second gear 346, which drives the second gear 346 to rotate after the micro-servo motor 345 is activated. The second gear 346 meshes with the first gear 344, and when the second gear 346 rotates, it drives the first gear 344 to rotate synchronously.

[0035] Finally, the above-mentioned force control mechanism also includes a force sensing unit 4, which is installed on the side of the two-dimensional flexible posture adjustment mechanism 3 away from the mounting bracket 2, and is used to detect force deviation. The force sensing unit 4 can be composed of four groups of one-dimensional independent sensors, or it can be an integrated sensor composed of multiple detection units, which is used to measure the magnitude and distribution uniformity of force. A force control probe 5 is provided on the side of the force sensing unit 4 away from the two-dimensional flexible posture adjustment mechanism 3, and the force control probe 5 is used to place the chip. The side of the third adjustment plate 33 away from the mounting bracket 2 is fixedly connected to the mounting plate 41, the force sensing unit 4 is installed at the bottom of the mounting plate 41, and the force control probe 5 is connected to the mounting plate 41 through the force sensing unit 4. The force sensing units 4 are respectively located under the four edges of the mounting plate 41 to sense the force, thereby facilitating adjustment so that the force remains uniform.

[0036] In this embodiment, after the drive element 12 is activated, it drives the work platform 17 to move. At the same time, the work platform 17 drives the frame 15 to move via the flexible hinge 16. The frame 15 moves smoothly under the limiting action of the guide rail 13 and the slider 14. At the same time, the frame 15 is affected by the friction between the guide rail 13 and the slider 14, and the friction between the guide rail 13 and the slider 14 on both sides may be different. The provision of the flexible hinge 16 can effectively reduce the impact of friction on the position of the work platform 17. At the same time, when the work platform 17 moves, it drives the mounting bracket 2 to move synchronously. The two-dimensional flexible posture adjustment mechanism 3 and the force sensing unit 4 drive the power control probe 5 to move, and the chip is attached to the specified position. At this time, when the force sensing unit 4 senses the difference in force, it activates the corresponding micro servo motor 345, which drives the second gear 346 to rotate. At the same time, the second gear 346 engages with the first gear 344, causing the threaded rod 343 to rotate synchronously. Because the threaded rod 343 is rotatably connected to the first fixing plate 341 and is threadedly connected to the second fixing plate 342, the distance between the first fixing plate 341 and the second fixing plate 342 can be adjusted when the threaded rod 343 rotates. Furthermore, because the two sets of electric length adjustment assemblies 34 are orthogonally arranged and used to adjust the distance between the first adjustment plate 31 and the second adjustment plate 32, and the second adjustment plate 32 and the third adjustment plate 33, respectively, the spacing between the first adjustment plate 31, the second adjustment plate 32, and the third adjustment plate 33 can be adjusted based on the force difference sensed by the force sensing unit 4. This ensures that the force sensed by the force sensing unit 4 at different positions is the same, thereby ensuring uniform and accurate force control and improving the uniformity of chip bonding.

[0037] The above specific embodiment is only an optional embodiment of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above embodiment, those skilled in the art can make various alternative improvements and combinations to the above specific embodiment.

Claims

1. A force distribution sensing posture adjustable rigid-flexible coupling force control mechanism, characterized by: include: A rigid-flexible coupling motion platform (1), the rigid-flexible coupling motion platform (1) comprising a mounting seat (11), a driving element (12), and a working platform (17), the driving element (12) being mounted in the mounting seat (11), and a moving end of the driving element (12) being fixedly connected to the working platform (17); a mounting bracket (2) mounted on a side of the working platform (17) away from the mounting seat (11); A two-dimensional flexible posture adjustment mechanism (3) is provided at one end of the mounting bracket (2), and the two-dimensional flexible posture adjustment mechanism (3) is used to adjust the uniformity of force control; A force sensing unit (4), the force sensing unit (4) being mounted on a side of the two-dimensional flexible posture adjustment mechanism (3) away from the mounting bracket (2) and being used to detect force deviation; A force control probe (5) is arranged on a side of the force sensing unit (4) away from the two-dimensional flexible posture adjustment mechanism (3).

2. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 1, characterized in that: The rigid-flexible coupling motion platform (1) further comprises at least two groups of guide rails (13) mounted on one side of the mounting seat (11) close to the working platform (17), each group of the guide rails (13) being slidably connected to at least one group of sliders (14), multiple groups of the sliders (14) being fixedly connected to a frame (15), and multiple groups of flexible hinges (16) being connected between the frame (15) and the working platform (17).

3. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 2, characterized in that: The two-dimensional flexible posture adjustment mechanism (3) comprises a first adjustment plate (31), a second adjustment plate (32) and a third adjustment plate (33) which are sequentially arranged on one side of the mounting bracket (2), the first adjustment plate (31) is fixedly connected to the mounting bracket (2), one side of the first adjustment plate (31) and one side of the second adjustment plate (32) are fixedly connected to a connecting plate (35), one side of the second adjustment plate (32) and one side of the third adjustment plate (33) are also fixedly connected to a connecting plate (35), and the two groups of connecting plates (35) are orthogonally arranged.

4. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 3, characterized in that: Two groups of electric length adjustment components (34) are respectively installed on one side of the second adjustment plate (32) away from the two groups of connecting plates (35). The two groups of electric length adjustment components (34) are orthogonally arranged. The electric length adjustment components (34) include a first fixed plate (341). A second fixed plate (342) is arranged below the first fixed plate (341). The first fixed plate (341) and the second fixed plate (342) in one group of the electric length adjustment components (34) are respectively fixedly connected to the side surfaces of the first adjustment plate (31) and the second adjustment plate (32). The first fixed plate (341) and the second fixed plate (342) in the other group of the electric length adjustment components (34) are respectively fixedly connected to the side surfaces of the second adjustment plate (32) and the third adjustment plate (33).

5. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 4, characterized in that: A threaded rod (343) is threadedly connected to the second fixing plate (342), and the threaded rod (343) is rotatably connected to the first fixing plate (341) via a bearing. One end of the threaded rod (343) is fixedly connected to the first gear (344).

6. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 5, characterized in that: A micro servo motor (345) is installed on the side of the first fixing plate (341) away from the mounting bracket (2), and an output end of the micro servo motor (345) is fixedly connected to a second gear (346), and the second gear (346) is meshed with the first gear (344).

7. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 6, characterized in that: A mounting plate (41) is fixedly connected to a side of the third adjustment plate (33) away from the mounting bracket (2); the force sensing unit (4) is mounted on the bottom of the mounting plate (41); and the force control probe (5) is connected to the mounting plate (41) via the force sensing unit (4).

8. The force distribution sensing posture adjustable rigid-flexible coupling force control mechanism according to claim 7, characterized in that: The force sensing unit (4) may be composed of at least three groups of one-dimensional independent sensors, or may be an integrated sensor composed of multiple integrated detection units.

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