Ultrasonic scanning equipment with double-Z-axis scanning mechanism

Abstract

The utility model relates to an ultrasonic scanning device with a double-Z-axis scanning mechanism, and the device comprises a cabinet which defines a scanning chamber, and the scanning chamber is used for accommodating a scanned object; the C-SCAN scanning probe is used for carrying out C-SCAN scanning on the scanned object; the T-SCAN scanning probe is used for carrying out T-SCAN scanning on the scanned object; the first power piece is connected to the C-SCAN scanning probe through a first transmission assembly so as to drive the C-SCAN scanning probe to move up and down in the gravity direction; the second power part is connected to the T-SCAN scanning probe through a second transmission assembly so as to drive the T-SCAN scanning probe to move up and down in the gravity direction, and the second transmission assembly and the first transmission assembly are different transmission assemblies.

Description

Technical Field

[0001] The present application relates to the technical field of scanning equipment, and in particular to an ultrasonic scanning equipment with a dual Z-axis scanning mechanism. Background Art

[0002] Ultrasonic scanning equipment is widely used. It can be used to detect internal defects such as cracks, delamination, holes, foreign matter, etc. in products of various industries such as semiconductor devices, circuit boards, ceramics, resins, automotive parts, metal products, wafers, etc. without causing damage to the tested products. It has high detection accuracy and is easy to operate.

[0003] In existing technology, ultrasonic scanning equipment equipped with both a C-SCAN and a T-SCAN probe typically uses manual control to adjust the movement of the T-SCAN probe. However, with the widespread use of C-SCAN scanning, the drawbacks of manual control, such as long adjustment times and difficulty in focusing, have become increasingly apparent, impacting production efficiency and scanning quality. Summary of the Invention

[0004] In view of this, the present application proposes an ultrasonic scanning device with a dual Z-axis scanning mechanism.

[0005] The ultrasonic scanning device with a dual Z-axis scanning mechanism proposed in this application includes:

[0006] a cabinet defining a scanning chamber for receiving an object to be scanned;

[0007] A C-SCAN scanning probe, which is used to perform a C-SCAN scan on the scanned object;

[0008] A T-SCAN scanning probe, which is used to perform a T-SCAN scan on the scanned object;

[0009] A first power member is connected to the C-SCAN scanning probe via a first transmission assembly to drive the C-SCAN scanning probe to move up and down along the direction of gravity;

[0010] A second power member is connected to the T-SCAN scanning probe via a second transmission assembly to drive the T-SCAN scanning probe to move up and down along the direction of gravity, wherein the second transmission assembly and the first transmission assembly are different transmission assemblies.

[0011] In some possible implementations, the first transmission assembly includes:

[0012] a first screw rod extending vertically in the direction of gravity; the first power member being a first motor fixed to the cabinet; the first motor being connected to the first screw rod via a first nut to drive the first screw rod to move upward and downward;

[0013] a first lifting seat connected to the first screw rod so as to rise and fall along with the rise and fall of the first screw rod;

[0014] Wherein, the C-SCAN scanning probe is installed on the first lifting seat.

[0015] In some possible implementations, the first transmission assembly includes:

[0016] a first screw rod extending vertically in the direction of gravity, wherein the first power member is a first motor fixed to the cabinet, and the first motor is connected to the first screw rod to drive the first screw rod to rotate;

[0017] a first lifting seat connected to the first lead screw via a first nut so as to be lifted and lowered in response to rotation of the first lead screw;

[0018] Wherein, the C-SCAN scanning probe is installed on the first lifting seat.

[0019] In some possible implementations, the first lifting base is made of insulating material.

[0020] In some possible implementations, the second transmission assembly includes:

[0021] a second screw rod extending vertically in the direction of gravity; the second power member being a second motor fixed to the cabinet; the second motor being connected to the second screw rod via a second nut to drive the second screw rod to move upward and downward;

[0022] a second lifting seat connected to the second screw rod so as to rise and fall along with the rise and fall of the second screw rod;

[0023] Wherein, the T-SCAN scanning probe is installed on the second lifting seat.

[0024] In some possible implementations, the second transmission assembly includes:

[0025] a second screw rod extending vertically along the direction of gravity; the second power member being a second motor fixed to the cabinet; and the second motor being connected to the second screw rod to drive the second screw rod to rotate;

[0026] a second lifting seat connected to the second lead screw via a second nut so as to be lifted and lowered in response to rotation of the second lead screw;

[0027] Wherein, the T-SCAN scanning probe is installed on the second lifting seat.

[0028] In some possible implementations, the second screw rod is spaced apart from the first screw rod in a horizontal direction.

[0029] In some possible implementations, the second lifting base is formed into an L-shape and includes:

[0030] a vertically extending portion extending in the direction of gravity and connected to the second screw rod;

[0031] a horizontal extension portion extending horizontally from a lower end of the vertical extension portion;

[0032] The T-SCAN scanning probe is mounted on an end of the horizontal extension portion away from the vertical extension portion.

[0033] In some possible implementations, the installation position of the T-SCAN scanning probe on the horizontal extension portion is adjustable in the horizontal direction.

[0034] The system further includes a controller electrically connected to the first power member and the second power member, wherein the controller is configured to:

[0035] controlling the first power member to drive the C-SCAN scanning probe to a first target position according to the focal length of the C-SCAN scanning probe, where the first target position is a position where the focal length of the C-SCAN scanning probe is aligned with the scanned object;

[0036] According to the focal length of the T-SCAN scanning probe, the first power member is controlled to drive the T-SCAN scanning probe to rise and fall to a second target position, where the second target position is a position where the focal length of the T-SCAN scanning probe is aligned with the scanned object.

[0037] According to the ultrasonic scanning equipment provided in the present application, it adopts a dual Z-axis drive mechanism, which can automatically and accurately adjust and control the positions of the C-SCAN scanning probe and the T-SCAN scanning probe to obtain high-quality C-SCAN scanning images and T-SCAN scanning images. Through the combined application of C-SCAN scanning and T-SCAN scanning, more comprehensive defect information inside the scanned object can be obtained to make a more accurate judgment on the internal defects of the scanned object. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of the present application, and are not limitations to the present application.

[0039] Figure 1 This is a front view of an ultrasonic scanning device provided in one embodiment of the present application.

[0040] Figure 2 yes Figure 1 Schematic diagram of the internal structure of the ultrasonic scanning equipment.

[0041] Figure 3 yes Figure 1 A block diagram of the connection relationship between the controller and related components of the ultrasonic scanning equipment.

[0042] Description of reference numerals:

[0043] Dg - direction of gravity;

[0044] 1-cabinet, 1A-scanning chamber;

[0045] 2-C-SCAN scanning probe;

[0046] 3-T-SCAN scanning probe;

[0047] 4-first transmission assembly;

[0048] 5- second transmission assembly;

[0049] 6-first power member;

[0050] 7- second power member;

[0051] 8-first screw rod;

[0052] 9- first lifting seat;

[0053] 10- second screw rod;

[0054] 11-second lifting seat, 11a-vertical extension part, 11b-horizontal extension part;

[0055] 12-chamber door;

[0056] 13-Controller. DETAILED DESCRIPTION

[0057] In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application. It is understood that, in the absence of conflict, some technical means of the various embodiments described herein can be replaced or combined with each other.

[0058] In the description of this application, the terms "first," "second," etc., if used, are used solely to distinguish the objects being described and do not convey any order or technical meaning. Thus, an object defined as "first," "second," etc. may explicitly or implicitly include one or more of such objects. Furthermore, for example, the term "first element" alone does not imply the presence of a "second element," nor does the term "second element" alone imply the presence of a "first element." Furthermore, the terms "a" or "an," and the like, do not denote a limitation on quantity, but rather indicate the presence of at least one, and "plurality" means at least two.

[0059] Figures 1 to 3 The figure shows an ultrasonic scanning device with a dual Z-axis scanning mechanism (hereinafter sometimes referred to as the device) provided in an embodiment of the present application, which includes a cabinet 1, a C-SCAN scanning probe 2, and a T-SCAN scanning probe 3. It can be understood that the Z-axis corresponds to the axis in the direction of gravity Dg, and the Z direction corresponds to the direction of gravity Dg.

[0060] The cabinet 1 is primarily constructed of sheet metal and a metal frame. Its exterior is a roughly rectangular parallelepiped shape, with a relatively large height dimension in the direction of gravity (Dg). The cabinet 1's horizontal length and width are approximately equal. The cabinet 1 defines a scanning chamber 1A at its mid-height. This chamber 1A accommodates objects to be scanned, such as semiconductor devices, ceramics, or metal products. The cabinet 1 also has a transparent door 12 for closing and opening the scanning chamber 1A.

[0061] Both the C-SCAN scanning probe 2 and the T-SCAN scanning probe 3 can be movably configured in the scanning chamber 1A to perform C-SCAN scanning and T-SCAN scanning on the scanned object in the scanning chamber 1A, respectively. C-SCAN is the English abbreviation for ultrasonic reflection scanning mode. From a physical point of view, it is equivalent to scanning a certain cross-section of the scanned object, forming a two-dimensional image through the reflected sound waves on this cross-section. Therefore, the layer of interest can be accurately observed. It is a commonly used scanning imaging method for detecting internal defects of semiconductor devices. T-SCAN is the English abbreviation for ultrasonic transmission scanning mode. Ultrasonic transmission scanning determines the internal structure of the material based on the strength of the ultrasonic wave after penetrating the material. It has a more objective judgment on the overall internal structure of the material and the analysis of the defect location distribution. Through the combined application of C-SCAN scanning and T-SCAN scanning, more comprehensive defect information inside the scanned object can be obtained, so as to make a more accurate judgment on the internal defects of the scanned object.

[0062] The C-SCAN scanning probe 2 and the T-SCAN scanning probe 3 can at least independently (dual Z-axis) move up and down along the direction of gravity Dg within the scanning chamber 1A. Specifically, a first power member 6 is connected to the C-SCAN scanning probe 2 via a first transmission assembly 4 to drive the C-SCAN scanning probe 2 to move up and down along the direction of gravity Dg. A second power member 7 is connected to the T-SCAN scanning probe 3 via a second transmission assembly 5 to drive the T-SCAN scanning probe 3 to move up and down along the direction of gravity Dg. The second transmission assembly 5 and the first transmission assembly 4 are different transmission assemblies.

[0063] In this embodiment, the first power member 6 is a first motor, the second power member 7 is a second motor, and the first transmission assembly 4 and the second transmission assembly 5 are both high-precision screw transmission assemblies.

[0064] The first transmission assembly 4 includes a first screw 8 and a first lifting base 9. The first screw 8 extends vertically along the direction of gravity Dg. A first motor, serving as the first power element 6, is fixed to the cabinet 1. The rotor of the first motor is connected to the first screw 8 via a first nut (not shown), driving the first screw 8 up and down. The first lifting base 9 is connected to the first screw 8 to rise and fall with the first screw 8. The C-SCAN scanning probe 2 is mounted on the first lifting base 9.

[0065] Specifically, the first nut is sleeved over the first screw rod 8 and threadedly engaged with the first screw rod 8, restricting the rotation of the first screw rod 8. For example, a first linear guide groove extending in the direction of gravity Dg can be provided on the outer circumference of the first screw rod 8, and a first limiting protrusion fixed relative to the housing of the first motor and inserted into the first linear guide groove can be provided. The first limiting protrusion restricts the rotation of the first screw rod 8 but allows the first screw rod 8 to be raised or lowered. During operation, after receiving power, the rotor of the first motor rotates, and this rotational motion is transmitted to the first nut. Since the rotation of the first screw rod 8 is restricted, the rotating first nut drives the first screw rod threadedly engaged therewith to rise and fall in the direction of gravity Dg, thereby raising and lowering the first lifting base 9 connected to the first screw rod 8 and the SCAN scanning probe mounted on the first lifting base 9. This allows the SCAN scanning probe to be positioned at various heights.

[0066] Similar to the first transmission assembly 4, the second transmission assembly 5 includes a second screw rod 10 and a second lifting base 11. The second screw rod 10 extends vertically along the direction of gravity Dg. A second motor, serving as the second power element 7, is fixed to the cabinet 1. The second motor's rotor is connected to the second screw rod 10 via a second nut (not shown), driving the second screw rod 10 up and down. The second lifting base 11 is connected to the second screw rod 10 to rise and fall with the second screw rod 10. The T-SCAN scanning probe 3 is mounted on the second lifting base 11.

[0067] Specifically, the second nut is sleeved over the second screw rod 10 and screwed together with the second screw rod 10, and the rotation of the second screw rod 10 is restricted. For example, a second linear guide groove extending in the direction of gravity Dg can be provided on the outer circumference of the second screw rod 10, and a second limiting protrusion fixed relative to the housing of the second motor and inserted into the second linear guide groove can be provided. The second limiting protrusion restricts the rotation of the second screw rod 10 but allows the second screw rod 10 to be raised or lowered. During operation, after receiving power, the rotor of the second motor rotates, and this rotational motion is transmitted to the second nut. Since the rotation of the second screw rod 10 is restricted, the rotating second nut drives the second screw rod screwed together with it to rise and fall in the direction of gravity Dg, and the second lifting base 11 connected to the second screw rod 10 and the SCAN scanning probe mounted on the second lifting base 11 are lifted and lowered accordingly, thereby allowing the SCAN scanning probe to be positioned at various heights.

[0068] In some embodiments, the first nut is coaxially fixed to the rotor of the first motor, and the second nut is coaxially fixed to the rotor of the second motor.

[0069] The second screw rod 10 is spaced apart from the first screw rod 8 in the horizontal direction, thereby helping to prevent the first transmission assembly 4 and the second transmission assembly 5 from interfering with each other during use.

[0070] In other embodiments, the first transmission assembly 4 can adopt such a configuration: the first screw rod 8 extends vertically along the direction of gravity Dg, the first motor serving as the first power member 6 is fixed to the cabinet 1, and the first motor is connected to the first screw rod 8 to drive the first screw rod 8 to rotate. The first lifting seat 9 is connected to the first screw rod 8 via a first nut to rise and fall in response to the rotation of the first screw rod 8. The C-SCAN scanning probe 2 is mounted on the first lifting seat 9. That is, the first motor drives the first screw rod 8 to rotate, and the rotating first screw rod 8 drives the first lifting seat 9 and the C-SCAN scanning probe 2 mounted on the first lifting seat 9 to rise and fall. Since converting the rotational motion of the screw rod into the lifting motion of the lifting seat by a nut is a technology well known to those skilled in the art, it will not be described in detail.

[0071] Similarly, the second transmission assembly 5 can also adopt the following configuration: a second screw rod 10 extends vertically along the direction of gravity Dg. A second motor, serving as the second power member 7, is fixed to the cabinet 1 and connected to the second screw rod 10 to drive the rotation of the second screw rod 10. A second lifting base 11 is connected to the second screw rod 10 via a second nut to be raised and lowered in response to the rotation of the second screw rod 10. The T-SCAN scanning probe 3 is mounted on the second lifting base 11. In other words, the second motor drives the second screw rod 10 to rotate, and the rotating second screw rod 10 drives the second lifting base 11 and the T-SCAN scanning probe 3 mounted on the second lifting base 11 to rise and fall.

[0072] The first lifting base 9 and the second lifting base 11 are preferably made of high-strength insulating material to prevent the C-SCAN scanning probe 2 and the T-SCAN scanning probe 3 from being connected to the machine through the lifting base, thereby reducing signal interference.

[0073] The second lifting base 11 is L-shaped and includes a vertical extension 11a and a horizontal extension 11b. The vertical extension 11a extends in the direction of gravity Dg and is connected to the second screw 10. The horizontal extension 11b extends horizontally from the lower end of the vertical extension 11a. The T-SCAN probe 3 is mounted to the end of the horizontal extension 11b facing away from the vertical extension 11a. This design allows the T-SCAN probe 3 to be positioned approximately directly below the C-SCAN probe 2, enabling both T-SCAN and C-SCAN scans of the object being scanned without adjusting its position.

[0074] Furthermore, the installation position of the T-SCAN scanning probe 3 on the horizontal extension portion 11 b can be adjusted in the horizontal direction (more specifically, in the extension direction of the horizontal extension portion 11 b ).

[0075] See Figure 3 The device also includes a controller 13, which is electrically connected to the first power member 6 and the second power member 7 respectively, so as to control the operation of the first power member 6 and the second power member 7, so as to more automatically scan the scanned object.

[0076] Specifically, the controller 13 is configured to:

[0077] According to the focal length of the C-SCAN scanning probe 2, controlling the first power member 6 to drive the C-SCAN scanning probe 2 to rise or fall to a first target position via the first transmission assembly 4, wherein the first target position is a position where the focal length of the C-SCAN scanning probe 2 is aligned with the scanned object; and

[0078] According to the focal length of the T-SCAN scanning probe 3, the second power member 7 is controlled to drive the T-SCAN scanning probe 3 to rise and fall to the second target position via the second transmission assembly 5. The second target position is the position where the focal length of the T-SCAN scanning probe 3 is aligned with the scanned object.

Claims

1. An ultrasonic scanning device with a dual Z-axis scanning mechanism, characterized in that: include: a cabinet defining a scanning chamber for receiving an object to be scanned; A C-SCAN scanning probe, which is used to perform a C-SCAN scan on the scanned object; A T-SCAN scanning probe, which is used to perform a T-SCAN scan on the scanned object; A first power member is connected to the C-SCAN scanning probe via a first transmission assembly to drive the C-SCAN scanning probe to move up and down along the direction of gravity; A second power member is connected to the T-SCAN scanning probe via a second transmission assembly to drive the T-SCAN scanning probe to move up and down along the direction of gravity, wherein the second transmission assembly and the first transmission assembly are different transmission assemblies.

2. The device according to claim 1, characterized in that The first transmission assembly includes: a first screw rod extending vertically in the direction of gravity; the first power member being a first motor fixed to the cabinet; the first motor being connected to the first screw rod via a first nut to drive the first screw rod to move upward and downward; a first lifting seat connected to the first screw rod so as to rise and fall along with the rise and fall of the first screw rod; Wherein, the C-SCAN scanning probe is installed on the first lifting seat.

3. The device according to claim 1, characterized in that The first transmission assembly includes: a first screw rod extending vertically in the direction of gravity, wherein the first power member is a first motor fixed to the cabinet, and the first motor is connected to the first screw rod to drive the first screw rod to rotate; a first lifting seat connected to the first lead screw via a first nut so as to be lifted and lowered in response to rotation of the first lead screw; Wherein, the C-SCAN scanning probe is installed on the first lifting seat.

4. The device according to claim 2 or 3, characterized in that The first lifting seat is made of insulating material.

5. The device according to claim 2 or 3, characterized in that The second transmission assembly includes: a second screw rod extending vertically in the direction of gravity; the second power member being a second motor fixed to the cabinet; the second motor being connected to the second screw rod via a second nut to drive the second screw rod to move upward and downward; a second lifting seat connected to the second screw rod so as to rise and fall along with the rise and fall of the second screw rod; Wherein, the T-SCAN scanning probe is installed on the second lifting seat.

6. The device according to claim 2 or 3, characterized in that The second transmission assembly includes: a second screw rod extending vertically along the direction of gravity; the second power member being a second motor fixed to the cabinet; and the second motor being connected to the second screw rod to drive the second screw rod to rotate; a second lifting seat connected to the second lead screw via a second nut so as to be lifted and lowered in response to rotation of the second lead screw; Wherein, the T-SCAN scanning probe is installed on the second lifting seat.

7. The device according to claim 5 or 6, characterized in that The second screw rod is spaced apart from the first screw rod in a horizontal direction.

8. The device according to claim 5 or 6, characterized in that The second lifting base is formed in an L shape and includes: a vertically extending portion extending in the direction of gravity and connected to the second screw rod; a horizontal extension portion extending horizontally from a lower end of the vertical extension portion; The T-SCAN scanning probe is mounted on an end of the horizontal extension portion away from the vertical extension portion.

9. The device according to claim 8, characterized in that The installation position of the T-SCAN scanning probe on the horizontal extension portion can be adjusted in the horizontal direction.

10. The device according to claim 5 or 6, characterized in that The system further includes a controller electrically connected to the first power member and the second power member, wherein the controller is configured to: controlling the first power member to drive the C-SCAN scanning probe to a first target position according to the focal length of the C-SCAN scanning probe, where the first target position is a position where the focal length of the C-SCAN scanning probe is aligned with the scanned object; According to the focal length of the T-SCAN scanning probe, the first power member is controlled to drive the T-SCAN scanning probe to rise and fall to a second target position, where the second target position is a position where the focal length of the T-SCAN scanning probe is aligned with the scanned object.

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