Needle rod fixing device for repairing nano probe based on FIB
By designing a needle rod fixing device, the problem of the nanoprobe being difficult to fix in the FIB environment is solved, stable fixation and efficient repair are achieved, and the cost of use is reduced.
Patent Information
- Application Number
- CN202422599063.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-25
- Publication Date
- 2025-09-26
- Estimated Expiration
- 2034-10-25
AI Technical Summary
In a FIB environment, the tip of a nanoprobe is difficult to fix after being damaged, rendering the entire needle rod unusable and increasing the cost of use.
A FIB-based needle rod fixing device is designed, which includes a first clamping block and a second clamping block. The needle rod of the nanoprobe is fixed through a clamping groove, and a locking structure and a flexible buffer layer are used to ensure stability and prevent secondary damage.
The stable fixation of the nanoprobe is achieved, which facilitates the repair of the damaged needle tip through the FIB system, reduces the use cost and improves the repair efficiency.
Smart Images
Figure CN223389766U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of nanoprobe repair technology, and in particular to a needle rod fixing device for repairing nanoprobes based on FIB. Background Art
[0002] A focused ion beam (FIB) microscope primarily consists of a liquid ion source, focusing and scanning lenses, a sample transport platform, a reaction gas nozzle, and a signal detector. In addition to a single ion beam, a FIB can also be equipped with an electron beam system, creating a so-called dual-beam FIB. This combines both a scanning electron microscope (SEM) and a focused ion beam microscope in one instrument. The electron beam is used to locate the target area and observe images, while the ion beam precisely cuts the target area without damaging other sample structures. This allows for precise positioning and cutting at the nanometer level, as well as the fabrication of thin TEM specimens. The aforementioned FIB cutting function is one method used to trim probes.
[0003] Driven by the demand for high-performance computing, advanced nanoprobe processes are gradually moving into the post-Moore era. With the continuous shrinking of process nodes, nanoprobe precision has reached 5nm, and in the near future, it will enter the extreme processes of 3nm and 2nm. Furthermore, components are also evolving from planar structures to 3D FinFET and GAA processes. As these processes shrink, the traditional AFM-based nanoprobing technology, which can only measure single components, is no longer applicable. SEM-based nanoprobing is required to ensure proper operation and confirm the morphology of advanced process samples and subsequent electrical properties analysis.
[0004] In a SEM environment, low-accelerating voltage analysis enables clear and microscopic observation of the surface morphology of nanotransistors, enabling electrical measurements and precise location of failure points, thereby deducing device failure modes. The low-accelerating voltage electron beam also minimizes sample surface contamination and transistor property drift. The NP4 (Thermofisher; nProber IV System) combines the following features and advantages, offering a wider range of analytical options for advanced process products. Currently, the smallest process technology can successfully measure 5nm FinFETs. The nanoprobes used are essential components for achieving telecommunications measurements at such a tiny area.
[0005] Nanoprobes are crucial electrical measurement components for devices. They are primarily used to confirm device characteristic curves and leakage paths, increasing the success rate of defect detection and avoiding the dilemma of damaging the sample and preventing further analysis. Operating voltages as low as 100eV effectively prevent electrical drift caused by charge accumulation within the test piece. For example, a 7nm device operating at an accelerating voltage of 1KeV exhibits significant electrical behavior differences from that at lower accelerating voltages, potentially leading to misjudgments for analytical engineers. During spot-probe operation, combined with SEM observation, better contact between the probe and the target is achieved, creating a more stable environment for electrical measurement.
[0006] The structure of a nanoprobe consists of a needle shaft and a needle tip. The needle shaft is mainly used for fixing and connecting to the power supply, while the needle tip is mainly used for actual testing. The needle shaft is cylindrical in shape and the needle tip is flat and triangular. Due to the small size, sharp tip, high production cost, and rapid wear and tear of the nanoprobe, the tip of the nanoprobe can easily become blunt or deformed after use, making the entire needle unusable. This is especially true in actual electrical testing, where one to several needles may be used at a time depending on actual needs. This also leads to different degrees of damage to the nanoprobe after use, and replacing all of them leads to higher overall usage costs. Therefore, it is necessary to use FIB needle repair technology to repair the tips with less damage so that the nanoprobe can be reused to achieve the purpose of reducing usage costs.
[0007] However, when repairing the damaged tip of a nanoprobe, it is necessary to first place the nanoprobe on the sample moving platform of the FIB and fix the damaged tip in a designated position. However, due to the small size of the nanoprobe itself, a device is urgently needed to fix the nanoprobe without affecting the subsequent repair process. Utility Model Content
[0008] In order to fix the nanoprobe on the sample moving platform so as to facilitate the subsequent repair of the nanoprobe with less damage by using FIB needle repair technology, the present application provides a needle rod fixing device based on FIB repair of nanoprobe.
[0009] This application provides a needle rod fixing device for repairing nanoprobes based on FIB, which adopts the following technical solutions:
[0010] A needle rod fixing device based on FIB repair of nanoprobes includes a base, a first clamping block and a second clamping block arranged on the base, the first clamping block and the second clamping block are arranged opposite to each other, the first clamping block has a first half groove formed on one end facing the second clamping block, and the second clamping block has a second half groove formed on one end facing the first clamping block. The base is also provided with a locking structure for splicing the first clamping block and the second clamping block into a whole, and after the first clamping block and the second clamping block are spliced together, the first half groove and the second half groove are spliced together to form a clamping groove for clamping and embedding the needle rod.
[0011] By adopting the above technical solution, when using, the nanoprobe is first placed between the first clamping block and the second clamping block, and then the first clamping block and the second clamping block are brought closer to each other until they are spliced into a whole. After the first half groove and the second half groove are spliced together to form a snap-fit groove, the needle rod of the nanoprobe can be snapped and limited by the snap-fit groove. After that, the base can be moved as a whole to the sample moving platform and fixed, so as to facilitate the subsequent repair of the damaged part of the needle tip by the FIB system, thereby facilitating the secondary use of the nanoprobe and saving its use cost.
[0012] Preferably, the joining surfaces of the first clamping block and the second clamping block are both inclined, and the shapes of the joining surfaces of the first clamping block and the second clamping block match each other.
[0013] By adopting the above technical solution, when in use, the inclined joint surfaces of the first clamping block and the second clamping block facilitate the worker to place the nanoprobe in the first half groove or the second half groove, thereby facilitating subsequent fixation.
[0014] Preferably, a plurality of the first half grooves and the second half grooves are provided, and the plurality of the first half grooves and the second half grooves are evenly spaced along the width direction of the base.
[0015] By adopting the above technical solution, when in use, the number of nanoprobes that can be fixed on the base at one time is increased by setting up multiple first half grooves and second half grooves, so that multiple nanoprobes can be repaired at one time, which is beneficial to improving repair efficiency.
[0016] Preferably, a flexible buffer layer is provided in both the first half groove and the second half groove.
[0017] By adopting the above technical solution, during use, by providing a flexible buffer layer, secondary damage to the nanoprobe when splicing the first clamping block and the second clamping block is reduced.
[0018] Preferably, the locking structure includes a first locking bolt and a second locking bolt passed through the base, and the first locking bolt and the second locking bolt are relatively arranged at two ends of the base, one end of the first locking bolt passes through the side wall of the base and is threadedly connected to the first clamping block, and one end of the second locking bolt passes through the side wall of the base and is threadedly connected to the second clamping block.
[0019] By adopting the above technical solution, when in use, after the first clamping block and the second clamping block clamp the nanoprobe in the clamping groove, the positions of the first clamping block and the second clamping block can be fixed respectively by screwing the first locking bolt and the second locking bolt, thereby achieving the clamping fixation of the first clamping block and the second clamping block, thereby ensuring the fixation stability of the nanoprobe.
[0020] Preferably, the locking structure includes two limit plates arranged opposite to each other on the base, pins arranged in one-to-one correspondence with the limit plates, a fixing block fixed on the pin, a limit nut threadedly connected to the pin, and a return spring sleeved on the pin, one end of the return spring abuts against the limit plate, and the other end of the return spring abuts against the fixing block, an avoidance hole is provided on the base, a first positioning groove is provided on the first clamping block, and a second positioning groove is provided on the second clamping block, one end of one group of the pins passes through the avoidance hole and is embedded in the first positioning groove, and one end of the other group of the pins passes through the avoidance hole and is embedded in the second positioning groove.
[0021] By adopting the above technical solution, when in use, through the coordinated use of the limit plate, the latch, the fixing block, the limit nut and the return spring, when the end of the latch is inserted into the first positioning groove or the second positioning groove, the second clamping block of the first clamping block can be clamped and fixed. When the nanoprobe needs to be replaced, the staff only needs to pull the latch to disengage the end of the latch from the first positioning groove or the second positioning groove, and then the first clamping block and the second clamping block can be separated, making the overall use more convenient.
[0022] Preferably, a positioning protrusion is fixed on the first clamping block, and a guide groove for embedding the positioning protrusion is provided on the second clamping block.
[0023] By adopting the above technical solution, when in use, the first clamping block and the second clamping block are positioned by the coordinated use of the positioning protrusion and the guide groove, thereby improving the convenience of aligning the first half groove and the second half groove and making it easier to fix the nanoprobe.
[0024] Preferably, the inner wall of the first half groove is provided with a fixed support block for abutting and supporting the end of the needle rod away from the needle tip, and the inner wall of the first half groove is provided with a mounting groove for embedding the fixed support block, and a plurality of mounting grooves are evenly spaced along the axial direction of the first half groove.
[0025] By adopting the above technical solution, when in use, the position of the fixed support block can be adjusted by inserting the fixed support block into the installation groove at different positions, so that the fixed support block abuts against the bottom end of the needle rod supporting the nanoprobe, thereby achieving the height adjustment of the damaged needle tip part after the nanoprobe is fixed.
[0026] In summary, this application includes at least one of the following beneficial technical effects:
[0027] 1. The coordinated use of the first and second clamps and the locking mechanism secures the nanoprobe's needle shaft. This facilitates subsequent repair of damaged needle tips using the FIB system after the base is moved and secured to the sample moving platform.
[0028] 2. By providing multiple first and second half grooves, the number of nanoprobes that can be fixed on the base at one time is increased, so that multiple nanoprobes can be repaired at one time, which is conducive to improving repair efficiency;
[0029] 3. By inserting the fixed support block into the mounting slot at different positions, the position of the fixed support block can be adjusted, so that the fixed support block abuts against the bottom end of the needle rod supporting the nanoprobe, thereby achieving the height adjustment of the damaged needle tip part after the nanoprobe is fixed. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Figure 1 This is an axonometric diagram mainly showing the overall structure in Example 1 of the present application;
[0031] Figure 2 This is an exploded view of the overall structure of Example 1 of the present application;
[0032] Figure 3 This is an exploded view mainly showing the flexible buffer layer structure in Example 1 of the present application;
[0033] Figure 4 This is an axonometric diagram mainly showing the overall structure in the second embodiment of the present application;
[0034] Figure 5 This is an axonometric diagram mainly showing the locking structure in the second embodiment of the present application;
[0035] Figure 6 This is an exploded view mainly showing the connection structure of the first card block in the second embodiment of the present application;
[0036] Figure 7 This is an exploded view of the positioning bump connection structure in the second embodiment of the present application.
[0037] Figure numerals: 1. base; 11. first block; 12. second block; 13. avoidance hole; 2. first clamping block; 21. first half groove; 22. first positioning groove; 23. positioning protrusion; 24. mounting groove; 3. second clamping block; 31. second half groove; 32. second positioning groove; 33. guide groove; 4. locking structure; 41. first locking bolt; 42. second locking bolt; 43. limit plate; 44. latch; 45. fixing block; 46. limiting nut; 47. reset spring; 5. flexible buffer layer; 6. fixed support block. DETAILED DESCRIPTION
[0038] The following is combined with Figure 1 -Attached Figure 7 This application is described in further detail.
[0039] The embodiment of the present application discloses a needle rod fixing device for repairing a nanoprobe based on FIB.
[0040] Example 1:
[0041] Reference Figure 1 A needle rod fixing device based on FIB repair nanoprobe includes a horizontally placed base 1, a first clamping block 2 and a second clamping block 3 arranged on the base 1, wherein the base 1 is mainly made of metal material, such as conductive materials such as aluminum and copper. In this application, the base 1 is preferably made of copper. The base 1 is divided into a first block 11 and two second blocks 12. The first block 11 is rectangular as a whole, and the second block 12 is integrally formed on the first block 11. The two second blocks 12 are respectively located at one end of the length direction of the first block 11. The first block 11 and the second block 12 are combined to form a U-shaped block. The first clamping block 2 and the second clamping block 3 are both located between the second block 12, and in this embodiment, the thickness of the first clamping block 2 and the second clamping block 3 are the same as the height of the second block 12.
[0042] Reference Figure 1 and Figure 2 The first clamping block 2 and the second clamping block 3 are made of soft materials, such as rubber, plastic, polymer, etc. In the present application, the first clamping block 2 and the second clamping block 3 are formed by cutting a rectangular block structure of plastic material, and the splicing surfaces of the first clamping block 2 and the second clamping block 3 are inclined. A first half groove 21 is provided on the end surface of the first clamping block 2 facing the second clamping block 3, and a second half groove 31 is provided on the end surface of the second clamping block 3 facing the first clamping block 2. The first half groove 21 and the second half groove 31 are arranged opposite to each other, and when the splicing surfaces of the first clamping block 2 and the second clamping block 3 are spliced together, the first half groove 21 and the second half groove 31 can be spliced together to form a snap-fit groove, and there is an angle between the axis of the snap-fit groove and the top surface of the first block 11.
[0043] Reference Figure 2 and Figure 3, there are multiple first half grooves 21 and second half grooves 31, and the multiple first half grooves 21 are evenly spaced along the width direction of the first block 11, and the multiple second half grooves 31 are arranged one by one corresponding to the first half grooves 21. In this embodiment, the first half grooves 21 and the second half grooves 31 are arranged in six groups, and a flexible buffer layer 5 is provided in each group of the first half grooves 21 and the second half grooves 31. In this embodiment, the flexible buffer layer 5 is preferably provided as a soft plastic layer, and the flexible buffer layer 5 is fixed to the inner wall of the first half groove 21 or the second half groove 31 by bonding. After the first half groove 21 and the second half groove 31 are spliced together, the flexible buffer layer 5 in the first half groove 21 and the flexible buffer layer 5 in the second half groove 31 are spliced into a circular tubular structure.
[0044] Reference Figure 2 and Figure 3 During use, the nanoprobe to be repaired is placed in the second half groove 31, so that the needle rod of the nanoprobe is tilted. The inner wall of the second half groove 31 supports the nanoprobe, making it easy for the operator to place multiple nanoprobes one by one into the second half groove 31 at the corresponding position. After that, the first clamping block 2 can be moved so that the first half groove 21 on the first clamping block 2 is aligned with the second half groove 31 on the second clamping block 3 and spliced together, thereby achieving the snap-in fixation of the nanoprobe through the snap-in groove formed by the splicing of the first half groove 21 and the second half groove 31.
[0045] Reference Figure 2 and Figure 3 During the process of clamping and fixing the nanoprobe, the nanoprobe is contacted through the flexible buffer layer 5, thereby reducing the possibility of secondary damage to the nanoprobe during the clamping process, while increasing the stability of the nanoprobe clamping. In addition, to prevent the nanoprobe from rotating about its own axis within the clamping groove, an anti-slip protrusion is integrally formed on the inner wall of the flexible buffer layer 5.
[0046] Reference Figure 1 and Figure 2 In order to prevent the first clamping block 2 and the second clamping block 3 from detaching from each other after being spliced into a whole, a locking structure 4 is further provided on the base 1. The locking structure 4 is composed of a first locking bolt 41 and a second locking bolt 42, wherein the first locking bolt 41 and the second locking bolt 42 are relatively arranged at both ends of the length direction of the first block 11, the first locking bolt 41 is passed through one second block 12, and the second locking bolt 42 is passed through the other second block 12.
[0047] Reference Figure 1 and Figure 2When in use, first place the nanoprobes one by one into the second half groove 31, then splice the first clamping block 2 and the second clamping block 3 to form a whole, and then place the whole on the first block 11 and between the two second blocks 12. Finally, screw the first locking bolt 41 so that its end passes through the second block 12 and is threadedly connected to the first clamping block 2, and then screw the second locking bolt 42 so that its end passes through the second block 12 and is threadedly connected to the second clamping block 3, so as to achieve locking of the first clamping block 2 and the second clamping block 3.
[0048] The implementation principle of the embodiment of the present application is as follows: when in use, the first clamping block 2 and the second clamping block 3 are placed between the two second blocks 12, and then the first clamping block 2 and the second clamping block 3 are moved to form a gap between the first clamping block 2 and the second clamping block 3. Then, the nanoprobes to be repaired can be placed one by one in the second half groove 31 at the corresponding position. Then, by moving the first clamping block 2 and the second clamping block 3, the first half groove 21 and the second half groove 31 are spliced to form a clamping groove, and the nanoprobe is clamped and fixed in the clamping groove. Then, by tightening the first locking bolt 41 and the second locking bolt 42, The relative positions of the first clamping block 2, the second clamping block 3 and the base 1 are fixed, thereby achieving fixed clamping of the nanoprobe; then the base 1 with the nanoprobe fixed is placed flat on the sample stage of the FIB, so that the needle tip of the nanoprobe is tilted upward, and then the nanoprobe repair operation can be performed. During the execution process, the repair progress is observed through the FIB. After the nanoprobe repair is completed, the FIB machine can be stopped and the base 1 can be removed, thus completing the repair of the nanoprobe, thereby achieving the reuse of the nanoprobe and reducing the cost of use.
[0049] The difference between Example 2 and Example 1 is that:
[0050] Reference Figure 4 and Figure 5 In this embodiment, a first positioning groove 22 is provided on the side wall of the first clamping block 2, and an avoidance hole 13 is provided on the second block 12. The locking structure 4 is composed of a limit plate 43, a latch 44, a fixing block 45, a limit nut 46 and a return spring 47. Among them, two limit plates 43 are provided, and the two limit plates 43 are provided in a one-to-one correspondence with the second block 12.
[0051] Reference Figure 4 and Figure 5The limiting plate 43 is Z-shaped as a whole, and one end of the limiting plate 43 is fixed to the second block 12 by a bolt. There is a gap between the other end of the limiting plate 43 and the side wall of the second block 12. The latch 44, the fixing block 45, the limiting nut 46 and the return spring 47 are arranged in a one-to-one correspondence with the limiting plate 43. The fixing block 45 is integrally formed on the latch 44, and the latch 44 is slidably inserted on the limiting plate 43. The return spring 47 is sleeved on the latch 44, and one end of the return spring 47 abuts against the limiting plate 43, and the other end of the return spring 47 abuts against the fixing block 45.
[0052] Reference Figure 4 and Figure 5 The limiting nut 46 is arranged on the side of the limiting plate 43 away from the return spring 47, and the limiting nut 46 is threadedly connected to the end of the latch 44 away from the fixing block 45; during installation, first pass one end of the latch 44 through the avoidance hole 13 and make the fixing block 45 abut against the second block 12, then put the return spring 47 on the latch 44, and then put one end of the limiting plate 43 on the latch 44, fix the other end of the limiting plate 43 on the second block 12, and make the return spring 47 in a compressed state in the initial state, and finally screw the limiting nut 46 on the latch 44 to realize the assembly of the locking structure 4.
[0053] Reference Figure 5 and Figure 6 The side wall of the second clamping block 3 is provided with a second positioning groove 32. When in use, the staff pulls the limit nut 46 to drive the latch 44 to move. When the latch 44 moves a certain distance, the first clamping block 2 and the second clamping block 3 can be put in. After that, just loosen the limit nut 46. Under the elastic force of the return spring 47, the latch 44 moves in the opposite direction to insert into the corresponding first positioning groove 22 or the second positioning groove 32, thereby realizing the positioning of the first clamping block 2 or the second clamping block 3. At the same time, in order to facilitate the first clamping block 2 and the second clamping block 3 to be placed between the two second blocks 12, a guide bevel is also provided at the right end of the latch 44, and the guide bevel is set to face upward.
[0054] Reference Figure 6 and Figure 7 In order to facilitate the staff to align the first clamping block 2 and the second clamping block 3, a positioning protrusion 23 is integrally formed on the first clamping block 2. The positioning protrusion 23 is located on the splicing surface of the first clamping block 2, and a guide groove 33 is opened on the splicing surface of the second clamping block 3; when in use, by embedding the positioning protrusion 23 into the guide groove 33, the first clamping block 2 can be quickly aligned with the second clamping block 3 by sliding the first clamping block 2, thereby ensuring that after the first clamping block 2 and the second clamping block 3 are spliced together, the first half groove 21 and the first half groove 21 can be spliced together to form a snap-fit groove.
[0055] Reference Figure 6 and Figure 7In addition, a fixed support block 6 is provided in the first half groove 21, and a mounting groove 24 is opened on the inner wall of the first half groove 21. One end of the fixed support block 6 is plugged into the mounting groove 24, and the other end of the fixed support block 6 is in a round cake shape, and its size is adapted to the clamping groove, that is, when the fixed support block 6 is inserted into the mounting groove 24 and the first half groove 21 and the second half groove 31 are spliced together, the fixed support block 6 is located in the clamping groove; at the same time, in order to realize the position adjustment of the fixed support block 6, multiple groups of mounting grooves 24 are opened, and the multiple groups of mounting grooves 24 are evenly distributed along the axial direction of the first half groove 21.
[0056] Reference Figure 6 and Figure 7 , multiple fixed support blocks 6 are integrally formed together by connecting rods; when in use, the bottom end of the nanoprobe is supported by setting the fixed support block 6, and then the height position of the fixed support block 6 is adjusted by setting the fixed support block 6 in the installation groove 24 at different positions, so that the height of the nanoprobe placement position can be adjusted by supporting the needle rod with the fixed support block 6, and then the placement height of the nanoprobe needle tip can be adjusted. The setting of the connecting rod improves the convenience of the staff in placing the fixed support block 6.
[0057] The implementation principle of the embodiment of the present application is as follows: when in use, first insert the fixed support block 6 into the installation groove 24 at the designated position, then place the second clamping block 3 between the two first blocks 11 and move the second clamping block 3 so that the corresponding end of the latch 44 is inserted into the second positioning groove 32, then move the first clamping block 2 to the top of the first block 11, and then insert the positioning protrusion 23 into the guide groove 33, and then move the first clamping block 2 downward. When the bottom end of the first clamping block 2 abuts against the guide bevel on the correspondingly set latch 44, it can be guided by the guide bevel. The pin slides away from the first clamping block 2. At this time, the return spring 47 is compressed until the first clamping block 2 is placed between the second block 12 and the second clamping block 3, and the first positioning groove 22 on the first clamping block 2 is aligned with the correspondingly set pin 44. Under the elastic force of the return spring 47, the pin 44 returns to its original position and is inserted into the first positioning groove 22, thereby achieving the positioning of the first clamping block 2. Thereafter, the first clamping block 2 or the second clamping block 3 can be moved to facilitate the placement of the nanoprobe into the clamping groove. The overall use is simple and convenient.
[0058] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.
Claims
1. A needle rod fixing device for repairing nanoprobes based on FIB, characterized by: The invention comprises a base (1), a first clamping block (2) and a second clamping block (3) arranged on the base (1), wherein the first clamping block (2) and the second clamping block (3) are arranged opposite to each other, a first half groove (21) is provided on one end of the first clamping block (2) facing the second clamping block (3), and a second half groove (31) is provided on one end of the second clamping block (3) facing the first clamping block (2), and a locking structure (4) for splicing the first clamping block (2) and the second clamping block (3) into a whole is also provided on the base (1), and after the first clamping block (2) and the second clamping block (3) are spliced together, the first half groove (21) and the second half groove (31) are spliced together to form a clamping groove for clamping and embedding a needle rod.
2. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 1, characterized in that: The joining surfaces of the first clamping block (2) and the second clamping block (3) are both arranged in an inclined manner, and the shapes of the joining surfaces of the first clamping block (2) and the second clamping block (3) are matched.
3. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 1, characterized in that: A plurality of the first half grooves (21) and the second half grooves (31) are provided, and the plurality of the first half grooves (21) and the second half grooves (31) are evenly spaced and arranged along the width direction of the base (1).
4. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 3, characterized in that: A flexible buffer layer (5) is provided in both the first half groove (21) and the second half groove (31).
5. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 1, characterized in that: The locking structure (4) comprises a first locking bolt (41) and a second locking bolt (42) which are passed through the base (1); the first locking bolt (41) and the second locking bolt (42) are arranged at two ends of the base (1) relative to each other; one end of the first locking bolt (41) passes through the side wall of the base (1) and is threadedly connected to the first clamping block (2); and one end of the second locking bolt (42) passes through the side wall of the base (1) and is threadedly connected to the second clamping block (3).
6. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 1, characterized in that: The locking structure (4) comprises two limiting plates (43) arranged on the base (1) in a relative manner, a latch (44) arranged in a one-to-one correspondence with the limiting plates (43), a fixing block (45) fixed on the latch (44), a limiting nut (46) threadedly connected to the latch (44), and a return spring (47) sleeved on the latch (44), one end of the return spring (47) abutting against the limiting plates (43), and the return spring The other end of (47) is in contact with the fixed block (45), the base (1) is provided with an avoidance hole (13), the first clamping block (2) is provided with a first positioning groove (22), the second clamping block (3) is provided with a second positioning groove (32), one end of one group of the latches (44) passes through the avoidance hole (13) and is embedded in the first positioning groove (22), and one end of the other group of the latches (44) passes through the avoidance hole (13) and is embedded in the second positioning groove (32).
7. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 6, characterized in that: A positioning protrusion (23) is fixed on the first clamping block (2), and a guide groove (33) for embedding the positioning protrusion (23) is provided on the second clamping block (3).
8. The needle rod fixing device for repairing nanoprobes based on FIB according to claim 1, characterized in that: The inner wall of the first half groove (21) is provided with a fixed support block (6) for abutting and supporting the end of the needle rod away from the needle tip, and the inner wall of the first half groove (21) is provided with a mounting groove (24) for embedding the fixed support block (6), and a plurality of the mounting grooves (24) are evenly spaced along the axial direction of the first half groove (21).