Wafer box and supporting frame thereof

Abstract

A wafer cassette and a support frame thereof are provided, the wafer cassette includes a housing and two support frames, and each support frame includes at least one pillar, a plurality of support sheets, and at least one partition assembly. The supporting columns extend in the height direction. The supporting pieces are detachably arranged on the supporting columns in a sleeving mode and are arranged in the height direction. The separating assembly is provided with a plurality of sleeves which are detachably arranged on the supporting columns in a sleeving mode, the sleeves separate the supporting pieces so that the supporting pieces can be separated from one another, and at least one sleeve is installed on the portion, between every two adjacent supporting pieces, of the supporting column. The number of the sleeves on the supporting column between every two adjacent supporting pieces can be selectively changed. When the support frame is damaged, the whole wafer box does not need to be replaced, and meanwhile, the whole wafer box does not need to be manufactured by additionally opening a mold for mechanical arms with different precisions, so that the mold opening cost is saved, and the replacement cost is also reduced.

Description

Technical Field

[0001] The utility model relates to a support frame, in particular to a wafer box with a support frame capable of adjusting spacing and the support frame. Background Art

[0002] Substrates used in semiconductor manufacturing processes (e.g., semiconductor crystal discs, often referred to as wafers) must be kept in a high-purity environment. Therefore, wafer cassettes used to transport or store substrates must not only be collision-resistant and protect the substrates from external air contamination, but also be capable of stably loading the substrates.

[0003] In today's semiconductor industry, to accommodate multiple substrates, wafer cassettes often feature support ribs on the left and right inner walls of a housing. The support ribs are symmetrically positioned on the left and right inner walls of the housing, allowing the substrates to be layered.

[0004] However, the support ribs and the housing are often an integrally formed structure made by injection molding. If the spacing of the support ribs to be used differs from the original, a separate mold must be made to produce a wafer cassette that meets the requirements, incurring significant mold costs. Furthermore, if one of the support ribs is damaged, the entire wafer cassette must be replaced, resulting in high replacement costs. These issues increase the transportation costs of the substrates. Utility Model Content

[0005] The purpose of the present invention is to provide a support frame that can overcome at least one disadvantage of the prior art.

[0006] The support frame of the present invention comprises at least one support column, a plurality of support plates, and at least one partition assembly. The support column extends in a height direction. The support plates are removably mounted on the support column and arranged in the height direction. The partition assembly comprises a plurality of sleeves that are removably mounted on the support column, the sleeves separating the support plates so that the support plates are spaced apart from each other. At least one sleeve is mounted on the support column between every two adjacent support plates, and the number of sleeves on the support column between every two adjacent support plates can be selectively changed.

[0007] In the support frame of the present invention, each support piece includes a bearing plane and a stopping vertical surface vertically connected to the bearing plane.

[0008] The support frame of the present invention, each support plate includes a bearing plate body and two stopping ribs, the bearing plate body has two opposite bearing planes, the stopping ribs are respectively protruded from the bearing planes, and each stopping rib has a stopping vertical surface vertically connected to the corresponding bearing plane.

[0009] In the support frame of the present invention, each support piece is a single component manufactured by an integral molding method.

[0010] The support frame of the present invention includes two pillars spaced apart from each other, and two partition components. Each support plate is formed with two through holes spaced apart from each other and respectively for the pillars to pass through. The sleeve of each partition component can be detachably mounted on the corresponding pillar.

[0011] The support frame of the present invention further comprises a front holding component and a rear holding component. The front holding component can be detachably assembled to one of the pillars, and the rear holding component can be detachably assembled to the other pillar.

[0012] Another object of the present invention is to provide a wafer box that can overcome at least one disadvantage of the prior art.

[0013] The present invention is a wafer cassette suitable for loading substrates and comprises a housing and two support frames as described above. The housing comprises a bottom wall, a top wall, and two side walls spaced apart from each other and connecting the bottom wall and the top wall. The support frames are disposed between the bottom wall and the top wall and adjacent to the side walls. The two corresponding support plates of the support frames, which are of the same height in the height direction, are used to support the substrates.

[0014] The wafer box of the present invention has a front connecting piece and a rear connecting piece on each side wall, and each support frame also includes a front holding component that can be detachably assembled to one of the pillars, and a rear holding component that can be detachably assembled to another pillar. The front holding component is installed on the front connecting piece adjacent to the side wall, and the rear holding component is installed on the rear connecting piece adjacent to the side wall.

[0015] The wafer box of the present invention, each of the front connecting parts has at least one clamping column and at least one holding block, and is formed with at least one fixing groove passing through the holding block, each of the rear connecting parts is formed with at least one recessed fixing groove, each of the front holding components has a front rod, at least one front fastener, at least one clamping part, and at least one fixing part, the clamping part is formed with a penetrating clamping hole, the fixing part has a protruding hook, each of the rear holding components has a rear rod, at least one rear fastener, and at least one clamping part.

[0016] The beneficial effect of the present invention is that the number of sleeves between each two adjacent support plates can be selectively changed, so that the operator can adjust the distance between two adjacent support plates of each support frame according to the different precision of the robotic arms, so as to facilitate the robotic arms of different precision to pick up and place the wafers. In this way, there is no need to open a mold to make the entire wafer box for robotic arms of different precision, thus saving mold opening costs. It also helps to immediately replace the damaged parts of the support frame when it is damaged, without having to replace the entire wafer box, thereby reducing replacement costs. According to the above content, the wafer box reduces the transportation cost of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional diagram of an embodiment of the wafer box of the present invention;

[0018] Figure 2 is a front view illustrating that a plurality of substrates are located in a receiving space of a housing of the embodiment and are placed on two support frames;

[0019] Figure 3 is a perspective exploded view illustrating the assembly relationship between the housing and the support frame of the embodiment;

[0020] Figure 4 is a three-dimensional view of the housing of the embodiment viewed from another perspective;

[0021] Figure 5 is a three-dimensional view of the support frame of the embodiment;

[0022] Figure 6 is an exploded perspective view of one of the support frames of the embodiment;

[0023] Figure 7 is a three-dimensional view of one of the support plates included in one of the support frames of the embodiment;

[0024] Figure 8 is a three-dimensional view of one of the supporting plates of one of the supporting frames of the embodiment viewed from another perspective;

[0025] Figure 9 The embodiment is along Figure 2 A cross-sectional view obtained by the cutting line IX-IX in FIG, illustrating that two of the supporting sheets are suitable for supporting the substrate;

[0026] Figure 10 It is a front view illustrating another implementation of the embodiment. DETAILED DESCRIPTION

[0027] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0028] See Figure 1 and Figure 2 , is an embodiment of the wafer box 100 of the present invention, suitable for loading multiple substrates 9.

[0029] For the convenience of subsequent description, the wafer box 100 of the present invention is defined as a left-right direction X, a height direction Y perpendicular to the left-right direction X, and a front-back direction Z perpendicular to the left-right direction X and the height direction Y. Figure 1 The left-right direction X is the direction indicated by the arrow as right, and the opposite direction as left. Figure 1 The height direction Y is the direction indicated by the arrow as upward, and the opposite direction is downward. Figure 1 The front-to-back direction Z is the direction indicated by the arrow as the front, and the reverse direction as the rear.

[0030] In this embodiment, the number of the substrates 9 shown in the figure is schematically shown as two but the present invention is not limited thereto.

[0031] The wafer box 100 is a front opening unified pod (FOUP) and includes a shell 1 and two support frames 2 disposed on the shell 1 .

[0032] The housing 1 includes a bottom wall 11, a top wall 12 located above and spaced apart from the bottom wall 11, two side walls 13 spaced apart from each other and connecting the bottom wall 11 and the top wall 12, and a rear wall 14 connected to the rear side of the bottom wall 11, the rear side of the top wall 12, and the rear side of the side walls 13. The bottom wall 11, the top wall 12, the side walls 13, and the rear wall 14 collectively define a receiving space 15 suitable for accommodating the substrate 9.

[0033] See Figure 3 and Figure 4One of the side walls 13 is connected between the right side of the bottom wall 11 and the right side of the top wall 12, and the other side wall 13 is connected between the left side of the bottom wall 11 and the left side of the top wall 12. Each of the side walls 13 has an inner wall surface 131 facing the accommodating space 15, an outer wall surface 132 opposite the inner wall surface 131, a front connecting member 133 disposed on the inner wall surface 131 and away from the rear wall 14, and a rear connecting member 134 disposed on the inner wall surface 131 and adjacent to the rear wall 14. In this embodiment, all components of the housing 1 (the bottom wall 11, the top wall 12, the side walls 13, the rear wall 14, the front connecting member 133, the rear connecting member 134, etc.) are manufactured using an integral molding method (for example, by injection molding, but not limited thereto). In other embodiments, the front connecting member 133 and the rear connecting member 134 can also be respectively arranged on the inner wall surface 131 by assembly or ultrasonic welding, so some or all of the components of the shell 1 may not be made into one piece and are not limited to this embodiment.

[0034] Each of the front connecting members 133 of the side walls 13 has a plurality of forward-protruding, approximately cylindrical clamping posts 135 and a plurality of forward-protruding retaining blocks 136. Each of the front connecting members 133 is formed with a plurality of fixing slots 137 that respectively penetrate the retaining blocks 136 along the left-right direction X. In this embodiment, the number of clamping posts 135 of each of the front connecting members 133 is three, and the number of retaining blocks 136 of each of the front connecting members 133 is two. The clamping posts 135 are respectively located adjacent to the top wall 12, adjacent to the bottom wall 11, and between the top wall 12 and the bottom wall 11 and in the middle along the height direction Y. Each retaining block 136 is located between two adjacent clamping posts 135.

[0035] Each rear connecting member 134 of the side wall 13 is formed with a plurality of rearwardly recessed securing grooves 138. In this embodiment, each rear connecting member 134 has three securing grooves 138, for example. The securing grooves 138 are located adjacent to the top wall 12, adjacent to the bottom wall 11, and midway between the top wall 12 and the bottom wall 11 along the height direction Y.

[0036] See Figure 1 、 Figure 3 、 Figure 5 and Figure 6 The support frame 2 is disposed between the bottom wall 11 and the top wall 12 and adjacent to the side walls 13. Each support frame 2 includes two pillars 21, a plurality of support plates 22, two partition components 23, a front holding component 24, and a rear holding component 25.

[0037] The pillars 21 are spaced apart from each other along the front-to-back direction Z. Each pillar 21 extends axially along the height direction Y and has a lower end 211 adjacent to the bottom wall 11, an upper end 212 opposite the lower end 211 and adjacent to the top wall 12, and a long column portion 213 connecting the lower end 211 and the upper end 212. The lower end 211 and the upper end 212 of each pillar 21 are each radially recessed to form an annular buckling groove 214.

[0038] See Figure 5 、 Figure 6 、 Figure 7 and Figure 8 , the support piece 22 can be detachably mounted on the pillar 21 and arranged along the height direction Y. Each of the support pieces 22 includes a bearing piece body 221 and two stopping ribs 222. The bearing piece body 221 has two opposite bearing planes 224, and the stopping ribs 222 are respectively protruded from the bearing planes 224. Each of the stopping ribs 222 has a stopping vertical surface 225 vertically connected to the corresponding bearing plane 224, and a stopping protrusion 226. The stopping vertical surface 225 has a straight surface 227 and an arc surface 228. The straight surface 227 extends along the front-to-back direction Z. The arc surface 228 is located at the rear side of the straight surface 227. The stopping protrusion 226 is protruded from the arc surface 228. Each of the support pieces 22 is formed with two through holes 223 that are spaced apart from each other and are respectively provided for the pillars 21 to pass through.

[0039] See Figure 3 、 Figure 7 、 Figure 8 and Figure 9 , the support frame 2 has two corresponding support pieces 22 of the same height in the height direction Y for supporting the corresponding substrate 9. The carrying plane 224 is suitable for placing the corresponding substrate 9 to carry and support the substrate 9. The stopping vertical surfaces 225 of the two corresponding support pieces 22 of the same height are used to stop the left and right sides of the substrate 9 respectively when the substrate 9 is placed into the accommodating space 15 along the front-to-back direction Z, so as to prevent the substrate 9 from shaking left and right. The stopping protrusions 226 of the two corresponding support pieces 22 of the same height are used to stop the substrate 9 when the substrate 9 is placed into the accommodating space 15 along the front-to-back direction Z to limit the moving stroke of the substrate 9, so as to prevent the substrate 9 from hitting the rear wall 14.

[0040] It is particularly important to note that the size and shape of each of the support pieces 22 can be changed accordingly to match the size and shape of the different substrates 9 to achieve the purpose of supporting and blocking the substrate 9. The size and shape of the support pieces 22 are not limited to this embodiment.

[0041] See Figure 6 、 Figure 7 、 Figure 8 and Figure 9 , the carrying plane 224 of each support piece 22 is located on opposite sides of the support piece body 221 along the height direction Y, and the stopping ribs 222 are respectively provided with the carrying plane 224, so that the upper and lower surfaces of each support piece 22 are suitable for carrying and stopping the corresponding substrate 9. In detail, after one of the support pieces 22 of one of the support frames 2 is rotated 180 degrees about the front-to-back direction Z as the axis, it is directly inserted into the pillar 21 of the other support frame 2, and has the same function of carrying and stopping the corresponding substrate 9. The operator who assembles the wafer box 100 and places the substrate 9 does not need to additionally divide the support pieces 22 of the support frame 2 into left and right categories and then put them on the corresponding pillars 21. Moreover, the support pieces 22 only need to be made of a set of molds so that they can be used by the support frames 2 on both sides at the same time. In this way, the effect of saving manufacturing costs and saving assembly costs can be achieved.

[0042] In this embodiment, each of the support pieces 22 is formed as a single component by an integral molding method (for example, injection molding, but not limited thereto) to save manufacturing and assembly costs.

[0043] See Figure 5 and Figure 6 The partitioning assemblies 23 are respectively mounted on the pillars 21 of the support frame 2. Each partitioning assembly 23 includes a plurality of sleeves 231 that are removably mounted on the corresponding pillar 21. The sleeves 231 separate the support plates 22, thereby spacing the support plates 22 from each other. At least one sleeve 231 is mounted on the pillars 21 between every two adjacent support plates 22. The number of sleeves 231 on the pillars 21 between every two adjacent support plates 22 can be selectively changed.

[0044] See Figure 3 、 Figure 5 and Figure 6 The sleeve 231 separates the support plates 22 from each other up and down, so that the operator can place the corresponding substrate 9 on the corresponding support plate 22 through the gap between the support plates 22 up and down.

[0045] Each support frame 2 has a front retaining assembly 24 that can be removably assembled to one of the support frames 21. In this embodiment, the front retaining assembly 24 can be removably assembled to the front support frame 21. The front retaining assembly 24 comprises a front rod 241, a plurality of front fasteners 242, a plurality of clamps 243, and a plurality of fixing members 244. In this embodiment, the number of the front fasteners 242 is two, the number of the clamps 243 is three, and the number of the fixing members 244 is two.

[0046] Specifically, the front rod 241 is in the shape of a long rod, with its length extending along the height direction Y. The front fasteners 242 are disposed at the upper and lower ends of the front rod 241, protrude rearward, and can be respectively snapped into the snap slots 214 of the corresponding pillars 21. When the front fasteners 242 of each front retaining assembly 24 are snapped into the snap slots 214 of the corresponding pillars 21, the front fasteners 242 form stoppers at the lower end 211 and the upper end 212 of the pillars 21, respectively, preventing the corresponding support plate 22 and the corresponding sleeve 231 from sliding out of the long column portion 213 from the upper end 212 or the lower end 211, thereby securing the support plate 22 and the sleeve 231.

[0047] See Figure 3 、 Figure 4 and Figure 6 , each of the front holding components 24 is installed on the front connecting member 133 adjacent to the side wall 13. In detail, the clamping member 243 of the front holding component 24 is set on the front rod 241 and protrudes to the right, and the clamping member 243 of another front holding component 24 is set on the front rod 241 and protrudes to the left. The clamping member 243 of each front holding component 24 is set between the front buckles 242 and is respectively adjacent to the top wall 12, adjacent to the bottom wall 11, and located in the middle of the front rod 241 in the height direction Y. Each of the clamping members 243 is formed with a penetrating clamping hole 245. In other embodiments, the clamping hole 245 may not be penetrating. The clamping holes 245 of the front holding components 24 are respectively inserted into the corresponding clamping columns 135 of the front connecting member 133.

[0048] Each fixing member 244 of the front retaining assembly 24 is disposed on the front rod 241 and between two adjacent locking members 243, corresponding to the position of the retaining block 136. Each fixing member 244 has a hook 246 that protrudes away from the center of the accommodating space 15 and along the left-right direction X. The position of each hook 246 corresponds to the corresponding fixing slot 137 of the front connecting member 133, and each hook 246 can be snapped into the corresponding fixing slot 137.

[0049] See Figure 3 、 Figure 5 and Figure 6 The rear retaining assembly 25 of each support frame 2 is detachably assembled to another support column 21 of the support frame 2. In this embodiment, the rear retaining assembly 25 is detachably assembled to the rear support column 21. The rear retaining assembly 25 comprises a rear rod 251, a plurality of rear fasteners 252, and a plurality of clamping members 253. In this embodiment, the number of rear fasteners 252 is two, and the number of clamping members 253 is three.

[0050] Specifically, the rear rod 251 is in the shape of an elongated rod, with its length extending along the height direction Y. The rear fasteners 252 are disposed at the upper and lower ends of the rear rod 251, protrude forward, and are capable of being snapped into the corresponding snap slots 214 of the pillar 21. When the rear fasteners 252 of each rear retaining assembly 25 are snapped into the corresponding snap slots 214 of the pillar 21, the rear fasteners 252 form stoppers at the lower end 211 and upper end 212 of the pillar 21, respectively, preventing the corresponding support plate 22 and the corresponding sleeve 231 from sliding out of the elongated column portion 213 from the upper end 212 or the lower end 211, thereby securing the support plate 22 and the sleeve 231.

[0051] See Figure 3 、 Figure 4 and Figure 6 Each of the rear retaining components 25 is mounted adjacent to the rear connecting member 134 of the side wall 13. Specifically, the clamping members 253 of the rear retaining components 25 are disposed on the rear rod 251 and protrude rearward. Each of the clamping members 253 of the rear retaining components 25 is located adjacent to the top wall 12, adjacent to the bottom wall 11, and in the middle of the rear rod 251 in the height direction Y. The position of each clamping member 253 of the rear retaining components 25 corresponds to the corresponding clamping slot 138 of the rear connecting member 134. Each of the clamping members 253 can be clamped into the corresponding clamping slot 138.

[0052] The following describes how each support frame 2 is detached from the housing 1 .

[0053] First, the operator moves the fixing member 244 along the left-right direction X toward the center of the accommodating space 15 to separate the hooks 246 from the corresponding fixing slots 137 of the front connecting member 133 .

[0054] Next, the operator moves the support frame 2 forward, causing the fasteners 253 to separate from the corresponding fastening slots 138 of the rear connector 134. Simultaneously, the fastening holes 245 separate from the corresponding latching posts 135 of the front connector 133, the fasteners 243 to move away from the corresponding latching posts 135 of the front connector 133, and the fixing members 244 to move away from the corresponding retaining blocks 136 of the front connector 133. The operator is then able to detach the support frame 2 from the housing 1.

[0055] The following describes how each support frame 2 is assembled to the housing 1 .

[0056] First, the operator places the fastening members 253 in the corresponding fastening grooves 138 of the rear connecting member 134 , and at the same time, the operator inserts the fastening holes 245 into the corresponding fastening columns 135 of the front connecting member 133 .

[0057] Next, the operator moves the fixing member 244 along the left-right direction X away from the accommodating space 15 to engage the hook 246 with the corresponding fixing groove 137 of the front connecting member 133 . The operator can then assemble the support frame 2 to the housing 1 .

[0058] See Figure 3 、 Figure 5 and Figure 6 The following describes how to change the number of sleeves 231 between two adjacent support plates 22 of each support frame 2.

[0059] First, the operator detaches the front fastener 242 of the front holding assembly 24 and the rear fastener 252 of the rear holding assembly 25 from the fastening slot 214 of the pillar 21 .

[0060] Next, the operator pulls one of the support pieces 22, all the support pieces 22 above the support piece 22, and all the sleeves 231 upward from the pillar 21. This step can also allow the operator to pull one of the support pieces 22, all the support pieces 22 below the support piece 22, and all the sleeves 231 downward from the pillar 21.

[0061] Next, the operator inserts the required number of sleeves 231 from the top of the pillar 21 into the pillar 21, and respectively abuts the uppermost sleeve 231 that has not been removed. This step can also be performed by the operator inserting the required number of sleeves 231 from the bottom of the pillar 21 into the pillar 21, and respectively abutting the lowermost sleeve 231 that has not been removed.

[0062] Next, the operator reverses the order in which the previously withdrawn support sheet 22 and sleeve 231 were withdrawn and inserts them back into the pillar 21. Specifically, each support sheet 22 is inserted back into the pillar 21 by inserting the through hole 223 of the support sheet 22 into the pillar 21. The reverse insertion back into the pillar 21 means that if the support sheet 22 and sleeve 231 were originally withdrawn upward, in this step the support sheet 22 will be inserted downward into the pillar 21, and the sleeve 231 will be inserted downward into the pillar 21; if the support sheet 22 and sleeve 231 were originally withdrawn downward, in this step the support sheet 22 will be inserted upward into the pillar 21, and the sleeve 231 will be inserted upward into the pillar 21.

[0063] Finally, the operator fastens the front fasteners 242 of the front holding assembly 24 into the corresponding fastening slots 214 of the pillar 21, and simultaneously fastens the rear fasteners 252 of the rear holding assembly 25 into the corresponding fastening slots 214 of the pillar 21. This completes the replacement of the number of sleeves 231 between two adjacent support plates 22 of the support frame 2.

[0064] The distance between two adjacent support plates 22 can be lengthened or shortened depending on the number of sleeves 231 disposed therebetween. Therefore, the number of sleeves 231 disposed on each support 21 and between two adjacent support plates 22 can be two, three, or four, etc., and is not limited to the above examples and should be adjusted based on actual needs. Therefore, any adjustment of the number of sleeves 231 between two adjacent support plates 22 is within the scope of the present invention.

[0065] See Figure 3 、 Figure 4 、 Figure 5 and Figure 6In particular, the front fastener 242 of each front holding component 24 and the corresponding buckle groove 214 of the pillar 21 can be partially or completely swapped in terms of their concave and convex shapes, the card hole 245 of the front holding component 24 and the corresponding card column 135 of the front connecting member 133 can be partially or completely swapped in terms of their concave and convex shapes, and the hook 246 of the front holding component 24 and the corresponding fixing groove 137 of the front connecting member 133 can be partially or completely swapped in terms of their concave and convex shapes. The shape, quantity and orientation of the front fastener 242, the clamping member 243 and the clamping hole 245, the fixing member 244 and the hook 246 of each of the front holding components 24 are not limited to the present embodiment. As long as they can respectively match the corresponding buckle groove 214 of the pillar 21, the corresponding clamping column 135 of the front connecting member 133, the holding block 136 and the shape, quantity and orientation of the fixing groove 137 to fix the pillar 21 to the shell 1, they are all within the scope of the present invention.

[0066] Similarly, the concave-convex shapes of the rear fasteners 252 of each rear holding assembly 25 and the corresponding buckle slots 214 of the pillar 21 can be partially or completely swapped, and the concave-convex shapes of the clamping members 253 of the rear holding assembly 25 and the corresponding buckle slots 138 of the rear connecting member 134 can be partially or completely swapped. The shape, number, and orientation of the rear fasteners 252 and the clamping members 253 of each rear holding assembly 25 are not limited to this embodiment. As long as they can respectively match the shape, number, and orientation of the buckle slots 214 of the pillar 21 and the corresponding buckle slots 138 of the rear connecting member 134 to secure the pillar 21 to the housing 1, they are all within the scope of the present invention.

[0067] Likewise, the shapes, numbers, and directions of the clamping columns 135 , the holding blocks 136 , the fixing slots 137 , the clamping slots 138 , and the buckling slots 214 are not limited to those of this embodiment.

[0068] In other embodiments, the long column portion 213 of each support 21 has an external thread, and each sleeve 231 has an internal thread that can be screwed onto the external thread. This can enhance the engagement force between the sleeve 231 and the support 21, thereby improving the stability of the support plate 22 in supporting the substrate 9.

[0069] See Figure 10 In other embodiments, the sleeve 231 between each two adjacent support sheets 22 is equipped with a plurality of sleeves 231 (for example, Figure 10In the example, two sleeves 231 are provided. This allows a robotic arm (not shown) of varying precision (particularly lower precision) to reach between two adjacent support plates 22 and retrieve the wafer 9, eliminating the need for a narrow spacing between the two adjacent support plates 22. Furthermore, another substrate (not shown) thicker in the height direction Y than the substrate 9 can be placed.

[0070] It is worth mentioning that the number of support plates 22 of the support frame 2 of the wafer box 100 can be adjusted accordingly according to the number of the substrates 9 to be carried, and the distance between each two adjacent support plates 22 can be adjusted accordingly according to the different precision of the robotic arms, and the distance between each two adjacent support plates 22 can also be adjusted accordingly according to the thickness of the substrates 9 to be carried, which can increase the flexibility of the wafer box 100 in use.

[0071] In summary, by selectively changing the number of sleeves 231 between each two adjacent support plates 22, the operator can adjust the spacing between two adjacent support plates 22 of each support frame 2 according to the different precision of the robotic arms, so as to facilitate the robotic arms of different precision to pick up and place the wafer 9. In this way, there is no need to open a mold to make the entire wafer box 100 for robotic arms of different precision, thus saving mold opening costs. It also helps to immediately replace the damaged parts of the support frame 2 when it is damaged, without having to replace the entire wafer box 100, thereby reducing replacement costs. According to the above content, the wafer box 100 reduces the transportation cost of the substrate 9, so it can indeed achieve the purpose of this utility model.

[0072] However, the above is only an embodiment of the present invention and should not be used to limit the scope of implementation of the present invention. All simple equivalent changes and modifications made according to the claims and description of the present invention are still within the scope of the present invention.

Claims

1. A support frame; characterized in that: The support frame comprises: at least one support column extending in a height direction; A plurality of support plates, detachably mounted on the pillars and arranged along the height direction; and At least one partition assembly includes a plurality of sleeves that can be detachably mounted on the pillars, the sleeves separating the support plates so that the support plates are spaced apart from each other, at least one sleeve is installed on the pillars between every two adjacent support plates, and the number of sleeves on the pillars between every two adjacent support plates can be selectively changed.

2. The support frame according to claim 1, wherein: Each of the supporting pieces includes a bearing plane and a stopping vertical surface vertically connected to the bearing plane.

3. The support frame according to claim 1, wherein: Each of the support plates includes a bearing plate body and two stopping ribs. The bearing plate body has two opposite bearing planes. The stopping ribs are respectively protruded from the bearing planes. Each of the stopping ribs has a stopping vertical surface vertically connected to the corresponding bearing plane.

4. The support frame according to claim 1, wherein: Each of the supporting pieces is a single component manufactured by an integral molding method.

5. The support frame according to any one of claims 1 to 4, characterized in that: The support frame includes two pillars spaced apart from each other, and two partition components. Each support plate is formed with two through holes spaced apart from each other and respectively for the pillars to pass through. The sleeve of each partition component can be detachably mounted on the corresponding pillar.

6. The support frame according to claim 5, characterized in that: The support frame further includes a front holding component and a rear holding component. The front holding component can be detachably assembled to one of the pillars, and the rear holding component can be detachably assembled to the other pillar.

7. A wafer cassette suitable for loading substrates; characterized in that: The wafer box comprises: The housing comprises a bottom wall, a top wall, and two side walls spaced apart from each other and connecting the bottom wall and the top wall; and According to the two support frames according to any one of claims 1 to 5, the support frames are arranged between the bottom wall and the top wall and are respectively adjacent to the side walls, and the two corresponding support plates with the same height in the height direction in the support frames are used to support the substrate.

8. The wafer cassette according to claim 7, wherein: Each side wall has a front connecting piece and a rear connecting piece, and each support frame also includes a front holding component that can be detachably assembled to one of the pillars, and a rear holding component that can be detachably assembled to the other pillar, the front holding component is installed on the front connecting piece adjacent to the side wall, and the rear holding component is installed on the rear connecting piece adjacent to the side wall.

9. The wafer cassette according to claim 8, wherein: Each of the front connecting parts has at least one clamping column and at least one holding block, and is formed with at least one fixing groove passing through the holding block. Each of the rear connecting parts is formed with at least one recessed fixing groove. Each of the front holding components has a front rod, at least one front buckle, at least one clamping part, and at least one fixing part. The clamping part is formed with a through clamping hole, and the fixing part has a protruding hook. Each of the rear holding components has a rear rod, at least one rear buckle, and at least one clamping part.

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