Filter

Abstract

The utility model provides a filter, relates to the technical field of polycrystalline silicon cold hydrogenation, and is used for solving the technical problems that when a filter in the related technology is cleaned, a filter screen needs to be lifted out and brushed by a brush, the filter is easy to damage, and the lifting of the filter screen has certain danger. The filter comprises a tank body and a filtering piece, the tank body is provided with a first air inlet pipe and a first air outlet pipe, the first air inlet pipe is communicated with a containing cavity of the tank body and used for introducing water vapor into the containing cavity, and the first air outlet pipe is communicated with the containing cavity. Water vapor introduced into the containing cavity through the first air inlet pipe can liquefy the high-boiling-point substances in the filtering piece, and the liquefied water vapor can dissolve metal chloride in the filtering piece, so that the metal chloride and the high-boiling-point substances in the filtering piece can be separated from the filtering piece and enter the liquefied water vapor. The filtering piece can be cleaned without taking out the filtering piece, so that the harm to a human body caused by taking out the filtering piece is reduced or avoided, and the damage to the filtering piece caused by scrubbing is reduced or avoided.

Description

Technical Field

[0001] The present application relates to the technical field of polysilicon cold hydrogenation, and in particular to a filter. Background Art

[0002] In the polysilicon industry's cold hydrogenation process, filters are required in the pipes between the quench tower exhaust tank and the slurry processing equipment to prevent clogging. Currently, cleaning the filters requires lifting the filter screen and scrubbing it with a brush, which can easily damage the filter. Because hazardous materials are present in the quench tower exhaust tank, lifting the filter screen poses a risk. Utility Model Content

[0003] The present application provides a filter for solving the technical problem in related art that when cleaning the filter, the filter needs to be lifted out and scrubbed with a brush, which easily damages the filter and is dangerous when the filter is lifted out.

[0004] In order to achieve the above objectives, this application adopts the following technical solutions:

[0005] The present application provides a filter, comprising:

[0006] A tank body, wherein the tank body is provided with a receiving cavity;

[0007] A filter element is disposed in the accommodating cavity;

[0008] The tank body is provided with a first air inlet pipe and a first air outlet pipe, the first air inlet pipe is communicated with the accommodating cavity, the first air inlet pipe is used to introduce water vapor into the accommodating cavity, and the first air outlet pipe is communicated with the accommodating cavity.

[0009] In some embodiments of the present application, the tank body is provided with a first air inlet and a first air outlet, the first air inlet pipe is connected to the accommodating cavity through the first air inlet, and the first air outlet pipe is connected to the accommodating cavity through the first air outlet;

[0010] A line connecting the first air inlet and the first air outlet and a center line of the tank body are located in the same plane.

[0011] In some embodiments of the present application, the first air intake pipe is provided with a first air intake valve, and the first air intake valve is used to control the connection or disconnection between the first air intake pipe and the accommodating chamber;

[0012] The first air outlet pipe is provided with a first air outlet valve, and the first air outlet valve is used to control the connection or disconnection between the accommodating cavity and the first air outlet pipe.

[0013] In some embodiments of the present application, the first air outlet pipe is provided with a sampling device, and the sampling device is located between the tank body and the first air outlet valve.

[0014] In some embodiments of the present application, a second air inlet pipe and a second air outlet pipe are provided on the top of the tank body, the second air inlet pipe is connected to the accommodating cavity, and the second air inlet pipe is used to introduce nitrogen into the accommodating cavity;

[0015] The second air outlet pipe is communicated with the accommodating chamber, and the second air outlet pipe is used to discharge the nitrogen in the accommodating chamber.

[0016] In some embodiments of the present application, the second air intake pipe is provided with a second air intake valve, and the second air intake valve is used to control the connection or disconnection between the second air intake pipe and the accommodating chamber;

[0017] The second air outlet pipe is provided with a second air outlet valve, and the second air outlet valve is used to control the connection or disconnection between the second air outlet pipe and the accommodating chamber.

[0018] In some embodiments of the present application, the tank includes a main body and an end cover, and the main body and the end cover are detachably connected;

[0019] The end cover is provided with a second air inlet and a second air outlet. The second air inlet pipe is communicated with the accommodating cavity through the second air inlet, and the second air outlet pipe is communicated with the accommodating cavity through the second air outlet.

[0020] In some embodiments of the present application, the tank body is provided with a first feed pipe and a first discharge pipe;

[0021] The tank body is provided with a first feed port and a first discharge port, the first feed pipe is connected to the accommodating cavity through the first feed port, and the first discharge pipe is connected to the accommodating cavity through the first discharge port;

[0022] The connecting line of the first feed port and the first discharge port and the center line of the tank body are located in the same plane.

[0023] In some embodiments of the present application, the first feed pipe is provided with a first feed valve, and the first feed valve is used to control the connection or disconnection between the first feed pipe and the accommodating chamber;

[0024] The first discharge pipe is provided with a first discharge valve, and the first discharge valve is used to control the connection or disconnection between the first discharge pipe and the accommodating chamber.

[0025] In some embodiments of the present application, the filter element has an open upper end and a closed lower end, and includes a filter element body, and a filter hole is provided on a side wall of the filter element body, and the filter hole penetrates the side wall of the filter element body;

[0026] The upper end surface of the filter body is an inclined surface, a pull ring is provided on the inclined surface, the outer diameter of the pull ring is larger than the outer diameter of the filter body, and a handle is provided on the upper end of the pull ring.

[0027] The present application provides a filter comprising a tank body and a filter element. The tank body is provided with a receiving chamber, the filter element is provided within the receiving chamber, and the tank body is provided with a first air inlet pipe and a first air outlet pipe. The first air inlet pipe is in communication with the receiving chamber, the first air inlet pipe is used to introduce water vapor into the receiving chamber, and the first air outlet pipe is in communication with the receiving chamber. The water vapor introduced into the receiving chamber via the first air inlet pipe can liquefy high-boiling substances in the filter element, and the liquefied water vapor can dissolve metal chlorides in the filter element, allowing the metal chlorides and high-boiling substances in the filter element to detach from the filter element and enter the liquefied vapor. Finally, the water vapor is discharged from the receiving chamber via the first air outlet pipe, thereby cleaning the filter element. The filter element can be cleaned without removing the filter element, reducing or avoiding the harm to the human body caused by corrosive and hazardous materials on the filter element when the filter element is removed, and reducing or avoiding damage to the filter element caused by scrubbing.

[0028] In addition to the technical problems solved by the embodiments of the present application, the technical features that constitute the technical solutions, and the beneficial effects brought about by the technical features of these technical solutions described above, other technical problems that can be solved by the filter provided by the embodiments of the present application, other technical features included in the technical solutions, and the beneficial effects brought about by these technical features will be further described in detail in the specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0030] Figure 1 A schematic diagram of the overall structure of the filter provided in an embodiment of the present application;

[0031] Figure 2 A schematic cross-sectional view of a filter according to an embodiment of the present invention;

[0032] Figure 3 A schematic structural diagram of the filter element of the filter provided in an embodiment of the present application.

[0033] Description of reference numerals:

[0034] 100-tank;

[0035] 110 - main body; 111 - accommodating chamber; 112 - first air inlet; 113 - first air outlet;

[0036] 114-first feed port; 115-first discharge port;

[0037] 116-second air inlet; 117-second air outlet;

[0038] 120-end cover;

[0039] 200-filter element;

[0040] 210-filter body; 220-pull ring; 230-handle;

[0041] 300-first air inlet pipe; 400-first air outlet pipe;

[0042] 500-first feed pipe; 600-first discharge pipe;

[0043] 700-second air inlet pipe; 800-second air outlet pipe;

[0044] 901-first air inlet valve; 902-first air outlet valve; 903-sampling device;

[0045] 904-first feed valve; 905-first discharge valve;

[0046] 906-second air inlet valve; 907-second air outlet valve. DETAILED DESCRIPTION

[0047] To make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0048] In the related art, in the cold hydrogenation section of the polysilicon industry, a filter needs to be added to the pipeline between the quenching tower exhaust tank and the slurry treatment equipment. The filter can effectively intercept impurities in the materials discharged from the quenching tower exhaust tank to prevent the pipeline from clogging. The materials discharged from the quenching tower exhaust tank include silicon tetrachloride, trichlorosilane, metal chlorides and high-boiling substances, among which metal chlorides and high-boiling substances are the main impurities. The filter is prone to clogging after being used for a period of time, which affects the material transportation and the normal operation of the quenching tower exhaust tank. Therefore, the filter needs to be cleaned regularly. When cleaning the filter currently used, the filter needs to be lifted out and brushed with a brush, which can easily damage the filter. Since the materials discharged from the quenching tower exhaust tank include silicon tetrachloride and trichlorosilane, silicon tetrachloride and trichlorosilane react with water to generate hydrogen chloride and silicon dioxide. Hydrogen chloride is corrosive and silicon tetrachloride has a pungent odor. Therefore, it is dangerous to remove the filter.

[0049] Since the main impurities in the materials discharged from the quench tower residual tank include metal chlorides and high-boiling substances, the metal chlorides mainly include ferric chloride, aluminum chloride and calcium chloride and are all soluble in water, and high-boiling substances are substances with high boiling points and low melting points, the temperature can be increased by introducing water vapor to liquefy the high-boiling substances; the liquefied water vapor can also dissolve the metal chlorides.

[0050] In view of this, the present application provides a filter, including a tank body and a filter element, wherein the tank body is provided with a receiving chamber, the filter element is provided in the receiving chamber, the tank body is provided with a first air inlet pipe and a first air outlet pipe, the first air inlet pipe is connected to the receiving chamber, the first air inlet pipe is used to introduce water vapor into the receiving chamber, and the first air outlet pipe is connected to the receiving chamber. The water vapor introduced into the receiving chamber through the first air inlet pipe can liquefy the high-boiling substances in the filter element, and the liquefied water vapor can dissolve the metal chloride in the filter element, so that the metal chloride and high-boiling substances in the filter element can be separated from the filter element and enter the liquefied steam, and finally discharged from the receiving chamber through the first air outlet pipe, thereby cleaning the filter element. The filter element can be cleaned without removing the filter element, reducing or avoiding the harm to the human body caused by corrosive and dangerous materials on the filter element when the filter element is removed, and can reduce or avoid damage to the filter element caused by brushing.

[0051] The contents of this application will be described in detail below with reference to the accompanying drawings so that those skilled in the art can understand the contents of this application more clearly and in detail.

[0052] See also Figure 1-Figure 2 The embodiment of the present application provides a filter, comprising a tank body 100 and a filter element 200. The tank body 100 is provided with a receiving cavity 111, and the filter element 200 is disposed in the receiving cavity 111. Specifically, the filter element 200 can be placed in the receiving cavity 111 of the tank body 100, with the bottom of the filter element 200 abutting against the inner bottom surface of the tank body 100, and the bottom plate of the tank body 100 is used to support the filter element 200. A gap is provided between the circumferential side of the inner wall of the tank body 100 and the circumferential side of the outer wall of the filter element 200, and a gap is provided between the top side of the inner wall of the tank body 100 and the top of the filter element 200.

[0053] In some embodiments of the present application, the shape of the filter element 200 is adapted to the shape of the tank body 100. For example, when the cross-section of the tank body 100 is circular, the cross-section of the filter element 200 is also circular; when the cross-section of the tank body 100 is rectangular, the cross-section of the filter element 200 is also rectangular.

[0054] In some embodiments of the present application, the tank body 100 and the filter element 200 may be made of carbon steel, such as Q235, Q345, 45# steel, 65Mn, or 40Cr.

[0055] In some embodiments of the present application, the tank body 100 is provided with a first air inlet pipe 300 and a first air outlet pipe 400. The first air inlet pipe 300 is in communication with the accommodating chamber 111. The first air inlet pipe 300 is used to introduce water vapor into the accommodating chamber 111. The first air outlet pipe 400 is in communication with the accommodating chamber 111. The water vapor introduced into the accommodating chamber 111 through the first air inlet pipe 300 can liquefy high-boiling substances in the filter element 200. The liquefied water vapor can dissolve the metal chloride in the filter element 200, so that the metal chloride and high-boiling substances in the filter element 200 can be separated from the filter element 200 and enter the liquefied vapor. Finally, the water vapor is discharged from the accommodating chamber 111 through the first air outlet pipe 400, thereby cleaning the filter element 200. The filter element 200 can be cleaned without removing the filter element 200, which reduces the filter cleaning time, reduces or avoids the harm to the human body caused by corrosive and dangerous materials on the filter element 200 when the filter element 200 is removed, protects the operator, reduces the risk of leakage of chlorosilane (including silicon tetrachloride and trichlorosilane), and at the same time reduces or avoids damage to the filter element 200 caused by brushing, thereby extending the filter replacement cycle.

[0056] It should be noted that since the material will accelerate the rusting of the bolts of the filter, it will take a lot of time to loosen the bolts to open the tank 100 and remove the filter 200 for cleaning. This application does not require the removal of the filter 200, which can greatly reduce the cleaning time of the filter 200.

[0057] See also Figure 2 In some embodiments of the present application, the tank body 100 is provided with a first air inlet 112 and a first air outlet 113. The first air inlet pipe 300 is in communication with the accommodating chamber 111 through the first air inlet 112, and the first air outlet pipe 400 is in communication with the accommodating chamber 111 through the first air outlet 113. Specifically, the inner cavity of the first air inlet pipe 300 is in communication with the accommodating chamber 111 through the first air inlet 112, and the inner cavity of the first air outlet pipe 400 is in communication with the accommodating chamber 111 through the first air outlet 113.

[0058] In some embodiments of the present application, the line connecting the first air inlet 112 and the first air outlet 113 is located in the same plane as the centerline of the tank body 100. Specifically, the line connecting the first air inlet 112 and the first air outlet 113 passes through the centerline of the tank body 100, allowing steam to pass through the filter element 200, thereby improving steam utilization.

[0059] See also Figure 2In some embodiments of the present application, the first air inlet pipe 300 is provided with a first air inlet valve 901. The first air inlet valve 901 is used to control the connection or disconnection between the first air inlet pipe 300 and the accommodating chamber 111. Specifically, when the first air inlet valve 901 is open, the first air inlet pipe 300 is connected to the accommodating chamber 111, and steam can enter the accommodating chamber 111 through the first air inlet pipe 300. When the first air inlet valve 901 is closed, the first air inlet pipe 300 is disconnected from the accommodating chamber 111, and steam cannot enter the accommodating chamber 111 through the first air inlet pipe 300.

[0060] In some embodiments of the present application, the first air outlet pipe 400 is provided with a first air outlet valve 902, which is used to control the connection or disconnection between the accommodating chamber 111 and the first air outlet pipe 400. Specifically, when the first air outlet valve 902 is open, the accommodating chamber 111 is connected to the first air outlet pipe 400, and the material in the accommodating chamber 111 can be discharged through the first air outlet pipe 400; when the first air outlet valve 902 is closed, the accommodating chamber 111 is disconnected from the first air outlet pipe 400.

[0061] See also Figure 2 In some embodiments of the present application, the first air outlet pipe 400 is provided with a sampling device 903, which is located between the tank body 100 and the first air outlet valve 902. When the first air outlet valve 902 is closed, the sampling device 903 can be opened to remove the cleaning liquid in the tank body 100 for pH testing to determine whether further cleaning is required. If the pH value is neutral, further cleaning is not required. For example, the sampling device 903 can be a structure such as an electric valve or a manual valve.

[0062] See also Figure 2 In some embodiments of the present application, a second air inlet pipe 700 and a second air outlet pipe 800 are provided on the top of the tank body 100. The second air inlet pipe 700 is in communication with the accommodating chamber 111 and is used to introduce nitrogen into the accommodating chamber 111. In some embodiments of the present application, the second air outlet pipe 800 is in communication with the accommodating chamber 111 and is used to discharge the nitrogen in the accommodating chamber 111.

[0063] It should be noted that the second air inlet pipe 700 and the second air outlet pipe 800 are arranged at the top of the tank body 100. The nitrogen entering the accommodating cavity 111 can gradually diffuse from the top to the bottom of the tank body 100 to squeeze the material at the bottom of the tank body 100, and then squeeze the material at the bottom of the tank body 100 out of the tank body 100.

[0064] Since the materials discharged from the quenching tower residual tank include silicon tetrachloride and trichlorosilane, silicon tetrachloride and trichlorosilane react with water to generate hydrogen chloride and silicon dioxide, and release a large amount of heat, which can easily damage the filter and is also dangerous, nitrogen needs to be introduced to discharge the materials in the filter out of the containing chamber 111.

[0065] See also Figure 2 In some embodiments of the present application, the second air inlet pipe 700 is provided with a second air inlet valve 906. The second air inlet valve 906 is used to control the connection or disconnection between the second air inlet pipe 700 and the accommodating chamber 111. Specifically, when the second air inlet valve 906 is open, the second air inlet pipe 700 is connected to the accommodating chamber 111, and nitrogen gas can enter the accommodating chamber 111 through the second air inlet pipe 700. When the second air inlet valve 906 is closed, the second air inlet pipe 700 is disconnected from the accommodating chamber 111, and nitrogen gas cannot enter the accommodating chamber 111 through the second air inlet pipe 700.

[0066] In some embodiments of the present application, the second gas outlet pipe 800 is provided with a second gas outlet valve 907, which is used to control the connection or disconnection between the second gas outlet pipe 800 and the accommodating chamber 111. Specifically, when the second gas outlet valve 907 is open, the accommodating chamber 111 is connected to the second gas outlet pipe 800, and the nitrogen in the accommodating chamber 111 can be discharged through the second gas outlet pipe 800. When the second gas outlet valve 907 is closed, the accommodating chamber 111 and the second gas outlet pipe 800 are disconnected.

[0067] See also Figure 1-Figure 2 In some embodiments of the present application, the tank body 100 includes a main body 110 and an end cap 120, and the main body 110 and the end cap 120 are detachably connected. Specifically, the main body 110 and the end cap 120 can be connected by bolts or screws, so that the end cap 120 can be removed from the main body 110 to access the filter element 200.

[0068] In some embodiments of the present application, the end cover 120 is provided with a second air inlet 116 and a second air outlet 117. The second air inlet pipe 700 is in communication with the accommodating chamber 111 through the second air inlet 116, and the second air outlet pipe 800 is in communication with the accommodating chamber 111 through the second air outlet 117. Specifically, the inner cavity of the second air inlet pipe 700 is in communication with the accommodating chamber 111 through the second air inlet 116, and the inner cavity of the second air outlet pipe 800 is in communication with the accommodating chamber 111 through the second air outlet 117.

[0069] See also Figure 1-Figure 2 In some embodiments of the present application, the tank body 100 is provided with a first feed pipe 500 and a first discharge pipe 600; the tank body 100 is provided with a first feed port 114 and a first discharge port 115. The first feed pipe 500 communicates with the accommodating chamber 111 through the first feed port 114, and the first discharge pipe 600 communicates with the accommodating chamber 111 through the first discharge port 115. Specifically, the inner cavity of the first feed pipe 500 communicates with the accommodating chamber 111 through the first feed port 114, and the inner cavity of the first discharge pipe 600 communicates with the accommodating chamber 111 through the first discharge port 115.

[0070] In some embodiments of the present application, the line connecting the first feed port 114 and the first discharge port 115 is located in the same plane as the centerline of the tank body 100. Specifically, the line connecting the first feed port 114 and the first discharge port 115 passes through the centerline of the tank body 100, allowing the material to pass through the filter element 200, thereby improving the filtering effect of the filter element 200.

[0071] In some embodiments of the present application, the first air inlet pipe 300 and the first air outlet pipe 400 are located below the first feed pipe 500 and the first discharge pipe 600 to facilitate the discharge of the washing liquid generated by cleaning the filter out of the tank body 100.

[0072] See also Figure 2 In some embodiments of the present application, the first feed pipe 500 is provided with a first feed valve 904, which is used to control the connection or disconnection between the first feed pipe 500 and the accommodating chamber 111. Specifically, when the first feed valve 904 is open, the first feed pipe 500 is connected to the accommodating chamber 111, and material can enter the accommodating chamber 111 through the first feed pipe 500; when the first feed valve 904 is closed, the first feed pipe 500 is disconnected from the accommodating chamber 111, and material cannot enter the accommodating chamber 111 through the first feed pipe 500.

[0073] In some embodiments of the present application, the first discharge pipe 600 is provided with a first discharge valve 905, which is used to control the connection or disconnection between the first discharge pipe 600 and the accommodating chamber 111. Specifically, when the first discharge valve 905 is open, the first discharge pipe 600 is connected to the accommodating chamber 111, and the material in the accommodating chamber 111 can be discharged through the first discharge pipe 600; when the first discharge valve 905 is closed, the first discharge pipe 600 is disconnected from the accommodating chamber 111.

[0074] See also Figure 3 In some embodiments of the present application, the filter element 200 is open at the top and closed at the bottom. The filter element 200 includes a filter body 210. The sidewall of the filter body 210 is provided with filter holes that penetrate the sidewall of the filter body 210. Impurities such as metal chlorides and high-boiling substances filtered by the filter are stored in the filter element 200.

[0075] It should be noted that the material discharged from the quenching tower residual tank enters the accommodating cavity 111 of the tank body 100 through the first feed pipe 500, the filter element 200 filters impurities such as metal chlorides and high boiling points in the material, and other liquid substances are discharged from the accommodating cavity 111 through the first discharge pipe 600.

[0076] In some embodiments of the present application, the upper end surface of the filter element 200 body is an inclined surface, which is convenient for dumping impurities in the filter element 200; a pull ring 220 is provided on the inclined surface, and the outer diameter of the pull ring 220 is larger than the outer diameter of the filter element body 210, which is convenient for installing a handle 230 on the pull ring 220; two handles 230 can be symmetrically provided on the upper end of the pull ring 220, which is convenient for lifting the filter element 200 from the tank body 100.

[0077] During normal operation of the filter, first air inlet valve 901, first air outlet valve 902, sampling device 903, second air inlet valve 906, and second air outlet valve 907 are closed, first feed valve 904 and first discharge valve 905 are open, first feed pipe 500 of the filter is connected to the quench tower residual tank, and first discharge pipe 600 of the filter is connected to the slurry processing equipment. The material discharged from the quench tower residual tank is filtered by the filter and then passed into the slurry processing equipment for subsequent processing.

[0078] After the filter has been used for a period of time, a large amount of metal chlorides and high-boiling substances are filtered out of the filter element 200. The filter element 200 needs to be cleaned to reduce or avoid clogging of the filter element 200. The cleaning process of the filter element 200 is as follows:

[0079] Close the first feed valve 904 to stop feeding; open the second air inlet valve 906 to introduce nitrogen into the tank body 100 to discharge the remaining material in the tank body 100 through the first discharge pipe 600 (do not completely empty it);

[0080] Close the first discharge valve 905, continue to introduce nitrogen into the tank body 100 to hold the pressure, then open the first discharge valve 905 to discharge the remaining material in the tank body 100. After holding the pressure and discharging the material several times, close the second air inlet valve 906 and the first discharge valve 905. The number of times of holding the pressure can be determined according to the situation, and can be 5, 6, 7 or 8 times, so that the remaining material in the tank body 100 is basically emptied.

[0081] Open the first air inlet valve 901 and allow water vapor to flow into the tank body 100 for a period of time. The water vapor liquefies the high-boiling substances in the filter element 200, and the liquefied water vapor dissolves the metal chlorides in the filter element 200.

[0082] Close the first air inlet valve 901, open the second air inlet valve 906 and the first air outlet valve 902, introduce nitrogen into the tank body 100, and discharge the cleaning liquid and steam in the tank body 100 through the first air outlet valve 902; repeat this step until the pH value of the cleaning liquid is detected to be neutral;

[0083] Close the first air outlet valve 902, continue to introduce nitrogen into the tank body 100 to hold the pressure, then open the first air outlet valve 902 to discharge the liquid inside the tank body 100. After multiple times of holding the pressure and discharging the liquid, close the second air inlet valve 906 to complete the cleaning of the filter.

[0084] It should be noted that references in this specification to "one embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not necessarily every embodiment includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0085] Generally speaking, terms should be understood, at least in part, based on the context in which they are used. For example, as used herein, the term "one or more" can be used to describe any feature, structure, or characteristic in the singular sense, or can be used to describe a combination of features, structures, or characteristics in the plural sense, depending at least in part on the context. Similarly, terms such as "a," "an," or "the" can also be understood to convey either singular or plural usage, depending at least in part on the context.

[0086] It should be readily understood that “on,” “above,” and “over” in this application should be interpreted in the broadest manner, such that “on” means not only “directly on something,” but also includes “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0087] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one element or feature to other elements or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90° or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A filter, characterized in that: include: A tank body (100), wherein the tank body (100) is provided with a receiving cavity (111); A filter element (200), the filter element (200) being disposed in the accommodating cavity (111); The tank body (100) is provided with a first air inlet pipe (300) and a first air outlet pipe (400); the first air inlet pipe (300) is in communication with the accommodating chamber (111); the first air inlet pipe (300) is used to introduce water vapor into the accommodating chamber (111); and the first air outlet pipe (400) is in communication with the accommodating chamber (111).

2. The filter according to claim 1, characterized in that The tank body (100) is provided with a first air inlet (112) and a first air outlet (113); the first air inlet pipe (300) is communicated with the accommodating cavity (111) through the first air inlet (112); and the first air outlet pipe (400) is communicated with the accommodating cavity (111) through the first air outlet (113); A line connecting the first air inlet (112) and the first air outlet (113) and a center line of the tank body (100) are located in the same plane.

3. The filter according to claim 1, characterized in that The first air intake pipe (300) is provided with a first air intake valve (901), and the first air intake valve (901) is used to control the connection or disconnection between the first air intake pipe (300) and the accommodating chamber (111); The first air outlet pipe (400) is provided with a first air outlet valve (902), and the first air outlet valve (902) is used to control the connection or disconnection between the accommodating cavity (111) and the first air outlet pipe (400).

4. The filter according to claim 3, characterized in that The first air outlet pipe (400) is provided with a sampling device (903), and the sampling device (903) is located between the tank body (100) and the first air outlet valve (902).

5. The filter according to claim 1, characterized in that A second air inlet pipe (700) and a second air outlet pipe (800) are provided on the top of the tank body (100), wherein the second air inlet pipe (700) is in communication with the accommodating cavity (111), and the second air inlet pipe (700) is used to introduce nitrogen into the accommodating cavity (111); The second air outlet pipe (800) is in communication with the accommodating chamber (111), and the second air outlet pipe (800) is used to discharge nitrogen in the accommodating chamber (111).

6. The filter according to claim 5, characterized in that The second air intake pipe (700) is provided with a second air intake valve (906), and the second air intake valve (906) is used to control the connection or disconnection between the second air intake pipe (700) and the accommodating chamber (111); The second air outlet pipe (800) is provided with a second air outlet valve (907), and the second air outlet valve (907) is used to control the connection or disconnection between the second air outlet pipe (800) and the accommodating chamber (111).

7. The filter according to claim 5, characterized in that The tank body (100) comprises a main body (110) and an end cover (120), wherein the main body (110) and the end cover (120) are detachably connected; The end cover (120) is provided with a second air inlet (116) and a second air outlet (117); the second air inlet pipe (700) is communicated with the accommodating cavity (111) through the second air inlet (116); and the second air outlet pipe (800) is communicated with the accommodating cavity (111) through the second air outlet (117).

8. The filter according to claim 1, characterized in that The tank body (100) is provided with a first feeding pipe (500) and a first discharging pipe (600); The tank body (100) is provided with a first feed port (114) and a first discharge port (115); the first feed pipe (500) is communicated with the accommodating cavity (111) through the first feed port (114); and the first discharge pipe (600) is communicated with the accommodating cavity (111) through the first discharge port (115); A line connecting the first feed port (114) and the first discharge port (115) and a center line of the tank body (100) are located in the same plane.

9. The filter according to claim 8, characterized in that The first feed pipe (500) is provided with a first feed valve (904), and the first feed valve (904) is used to control the connection or disconnection between the first feed pipe (500) and the accommodating chamber (111); The first discharge pipe (600) is provided with a first discharge valve (905), and the first discharge valve (905) is used to control the connection or disconnection between the first discharge pipe (600) and the accommodating chamber (111).

10. The filter according to claim 1, characterized in that The filter element (200) has an open upper end and a closed lower end, and comprises a filter element body (210). The side wall of the filter element body (210) is provided with a filter hole, and the filter hole penetrates the side wall of the filter element body (210); The upper end surface of the filter element (200) body is an inclined surface, a pull ring (220) is provided on the inclined surface, the outer diameter of the pull ring (220) is larger than the outer diameter of the filter element body (210), and a handle (230) is provided on the upper end of the pull ring (220).

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